Cyanide-free silver electroplating was conducted in thiosulfate baths containing AgNO3 and AgBr major salts, respectively. The effects of major salt content and current density on surface quality, deposition rate and ...Cyanide-free silver electroplating was conducted in thiosulfate baths containing AgNO3 and AgBr major salts, respectively. The effects of major salt content and current density on surface quality, deposition rate and microhardness of Ag coatings were investigated. The optimized electroplating parameters were established. The adhesion strength of Ag coating on Cu substrate was evaluated and the grain size of Ag coating was measured under optimized electroplating parameters. The optimized AgNO3 content is 40 g/L with current density of 0.25 A/dm2. The deposited bright, smooth, and well adhered Ag coating had nanocrystalline grains with mean size of 35 nm. The optimized AgBr content was 30 g/L with current density of 0.20 A/dm2. The resultant Ag coating had nanocrystalline grains with mean size of 55 nm. Compared with the bath containing AgBr main salt, the bath containing AgNO3 main salt had a wider current density range, and corresponding Ag coating had a higher microhardness and a smaller grain size.展开更多
Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of X-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in ...Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of X-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplating protocol that reliably filled trenches for such structures.展开更多
基金Project (50771042) supported by the National Natural Science Foundation of ChinaProjects (1041005100052009HASTIT023) supported by the Program for Science and Technology Innovation Talents of Henan Province,China
文摘Cyanide-free silver electroplating was conducted in thiosulfate baths containing AgNO3 and AgBr major salts, respectively. The effects of major salt content and current density on surface quality, deposition rate and microhardness of Ag coatings were investigated. The optimized electroplating parameters were established. The adhesion strength of Ag coating on Cu substrate was evaluated and the grain size of Ag coating was measured under optimized electroplating parameters. The optimized AgNO3 content is 40 g/L with current density of 0.25 A/dm2. The deposited bright, smooth, and well adhered Ag coating had nanocrystalline grains with mean size of 35 nm. The optimized AgBr content was 30 g/L with current density of 0.20 A/dm2. The resultant Ag coating had nanocrystalline grains with mean size of 55 nm. Compared with the bath containing AgBr main salt, the bath containing AgNO3 main salt had a wider current density range, and corresponding Ag coating had a higher microhardness and a smaller grain size.
文摘Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of X-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplating protocol that reliably filled trenches for such structures.
