Optical wafer defect inspection at the 10 nm technology node and beyond

The growing demand for electronic devices, smart devices, and the Internet of Things constitutes the primary driving force for marching down the path of decreased critical dimension and increased circuit intricacy of integrated circuits. However, as sub-10 nm high-volume manufacturing is becoming the mainstream, there is greater awareness that defects introduced by original equipment manufacturer components impact yield and manufacturing costs. The identification, positioning, and classification of these defects, including random particles and systematic defects, are becoming more and more challenging at the 10 nm node and beyond.Very recently, the combination of conventional optical defect inspection with emerging techniques such as nanophotonics, optical vortices, computational imaging, quantitative phase imaging, and deep learning is giving the field a new possibility. Hence, it is extremely necessary to make a thorough review for disclosing new perspectives and exciting trends, on the foundation of former great reviews in the field of defect inspection methods. In this article, we give a comprehensive review of the emerging topics in the past decade with a focus on three specific areas:(a) the defect detectability evaluation,(b) the diverse optical inspection systems,and(c) the post-processing algorithms. We hope, this work can be of importance to both new entrants in the field and people who are seeking to use it in interdisciplinary work.

Defect inspection technologies for additive manufacturing

Additive manufacturing(AM) technology is considered one of the most promising manufacturing technologies in the aerospace and defense industries. However, AM components are known to have various internal defects, such as powder agglomeration, balling, porosity,internal cracks and thermal/internal stress, which can significantly affect the quality, mechanical properties and safety of final parts. Therefore, defect inspection methods are important for reducing manufactured defects and improving the surface quality and mechanical properties of AM components. This paper describes defect inspection technologies and their applications in AM processes. The architecture of defects in AM processes is reviewed. Traditional defect detection technology and the surface defect detection methods based on deep learning are summarized, and future aspects are suggested.

Rail fastener defect inspection method for multi railways based on machine vision

Purpose–This research aims to improve the performance of rail fastener defect inspection method for multi railways,to effectively ensure the safety of railway operation.Design/methodology/approach–Firstly,a fastener region location method based on online learning strategy was proposed,which can locate fastener regions according to the prior knowledge of track image and template matching method.Online learning strategy is used to update the template library dynamically,so that the method not only can locate fastener regions in the track images of multi railways,but also can automatically collect and annotate fastener samples.Secondly,a fastener defect recognition method based on deep convolutional neural network was proposed.The structure of recognition network was designed according to the smaller size and the relatively single content of the fastener region.The data augmentation method based on the sample random sorting strategy is adopted to reduce the impact of the imbalance of sample size on recognition performance.Findings–Test verification of the proposed method is conducted based on the rail fastener datasets of multi railways.Specifically,fastener location module has achieved an average detection rate of 99.36%,and fastener defect recognition module has achieved an average precision of 96.82%.Originality/value–The proposed method can accurately locate fastener regions and identify fastener defect in the track images of different railways,which has high reliability and strong adaptability to multi railways.

The Development of a Smart Mobile App for Building Façade Defects Inspections

The manual visual inspections of façade building defects are posing a high and increasing cost for building asset managers,particularly when inspections delay projects or require asset outages,visits to decommissioned sites or work within hazardous environments.This paper reports on the development,testing and delivery of a working mobile app prototype to facilitate the inspections and documentation of building facade condition monitoring.The work presented builds upon the development of an online platform for remote building inspection based on the integration of methodologies and tools,including VR(virtual reality),and digital photogrammetry to collect real-time data that support automated decision making.The mobile app:(i)allows the user to import 3D models and 2D building plans;(ii)provides the means of first-person exploration of models via a VR headset;and(iii)captures,records and catalogues images of façade defect types,and the date and time.An inspection case study was used to demonstrate and evaluate the mobile app prototype.The Building Inspector app allows building professionals to manage inspections and to track past and ongoing monitoring of the condition of building façades.

Visual inspection of aircraft skin:Automated pixel-level defect detection by instance segmentation

Skin defect inspection is one of the most significant tasks in the conventional process of aircraft inspection.This paper proposes a vision-based method of pixel-level defect detection,which is based on the Mask Scoring R-CNN.First,an attention mechanism and a feature fusion module are introduced,to improve feature representation.Second,a new classifier head—consisting of four convolutional layers and a fully connected layer—is proposed,to reduce the influence of information around the area of the defect.Third,to evaluate the proposed method,a dataset of aircraft skin defects was constructed,containing 276 images with a resolution of 960×720 pixels.Experimental results show that the proposed classifier head improves the detection and segmentation accuracy,for aircraft skin defect inspection,more effectively than the attention mechanism and feature fusion module.Compared with the Mask R-CNN and Mask Scoring R-CNN,the proposed method increased the segmentation precision by approximately 21%and 19.59%,respectively.These results demonstrate that the proposed method performs favorably against the other two methods of pixellevel aircraft skin defect detection.