A novel depletion-mode NJFET compatible high-voltage BiCMOS process is proposed and experimentally demonstrated with a four-branch 12-bit DAC（digital-to-analog converter）.With this process,an NJFET with a pinch-off ...A novel depletion-mode NJFET compatible high-voltage BiCMOS process is proposed and experimentally demonstrated with a four-branch 12-bit DAC（digital-to-analog converter）.With this process,an NJFET with a pinch-off voltage ofabout-1.5 V and a breakdown voltage of about 16 V,an NLDDMOS（N-type lightly-dosed-drain in MOS） with a turn-on voltage of about 1.0 V and a breakdown voltage of about 35 V,and a Zener diode with a reverse voltage of about 5.6 V were obtained.Measurement results showed that the converter had a reference temperature coefficient of less than±25 ppm/℃,a differential coefficient error of less than±0.3 LSB,and a linear error of less than±0.5 LSB.The depletion-mode NJFET and its compatible process can also be widely used for high-voltage ADCs or DACs.展开更多
This paper presents the development of lateral depletion-mode n-channel 4 H-SiC junction field-effect transistors(LJFETs)using double-mesa process toward high-temperature integrated circuit(IC)applications.At room tem...This paper presents the development of lateral depletion-mode n-channel 4 H-SiC junction field-effect transistors(LJFETs)using double-mesa process toward high-temperature integrated circuit(IC)applications.At room temperature,the fabricated LJFETs show a drain-to-source saturation current of 23.03μA/μm,which corresponds to a current density of 7678 A/cm^(2).The gate-to-source parasitic resistance of 17.56 kΩ·μm is reduced to contribute only 13.49%of the on-resistance of 130.15 kΩ·μm,which helps to improve the transconductance up to 8.61μS/μm.High temperature characteristics of LJFETs were performed from room temperature to 400℃.At temperatures up to 400℃in air,it is observed that the fabricated LJFETs still show normally-on operating characteristics.The drain-to-source saturation current,transconductance and intrinsic gain at 400℃are 7.47μA/μm,2.35μS/μm and 41.35,respectively.These results show significant improvement over state-of-the-art and make them attractive for high-temperature IC applications.展开更多
文摘A novel depletion-mode NJFET compatible high-voltage BiCMOS process is proposed and experimentally demonstrated with a four-branch 12-bit DAC（digital-to-analog converter）.With this process,an NJFET with a pinch-off voltage ofabout-1.5 V and a breakdown voltage of about 16 V,an NLDDMOS（N-type lightly-dosed-drain in MOS） with a turn-on voltage of about 1.0 V and a breakdown voltage of about 35 V,and a Zener diode with a reverse voltage of about 5.6 V were obtained.Measurement results showed that the converter had a reference temperature coefficient of less than±25 ppm/℃,a differential coefficient error of less than±0.3 LSB,and a linear error of less than±0.5 LSB.The depletion-mode NJFET and its compatible process can also be widely used for high-voltage ADCs or DACs.
基金Project supported by the Key Research and Development Program of Shaanxi Province,China(Grant No.2020ZDLGY03-07)the National Science Foundation of China(Grant Nos.61774117 and 61774119)+4 种基金the Science Challenge Project(Grant No.TZ2018003)the National Key R&D Program of China(Grant No.2017YFB0102302)the Shaanxi Science&Technology Nova Program,China(Grant No.2019KJXX-029)the Key-Area Research and Development Program of Guang Dong Province,China(Grant No.2020B010170001)the Fundamental Research Funds for the Central Universities,China(Grant No.5012-20106205935)。
文摘This paper presents the development of lateral depletion-mode n-channel 4 H-SiC junction field-effect transistors(LJFETs)using double-mesa process toward high-temperature integrated circuit(IC)applications.At room temperature,the fabricated LJFETs show a drain-to-source saturation current of 23.03μA/μm,which corresponds to a current density of 7678 A/cm^(2).The gate-to-source parasitic resistance of 17.56 kΩ·μm is reduced to contribute only 13.49%of the on-resistance of 130.15 kΩ·μm,which helps to improve the transconductance up to 8.61μS/μm.High temperature characteristics of LJFETs were performed from room temperature to 400℃.At temperatures up to 400℃in air,it is observed that the fabricated LJFETs still show normally-on operating characteristics.The drain-to-source saturation current,transconductance and intrinsic gain at 400℃are 7.47μA/μm,2.35μS/μm and 41.35,respectively.These results show significant improvement over state-of-the-art and make them attractive for high-temperature IC applications.
