Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscop...Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied.展开更多
Diamond like carbon films, prepared by RF glow discharge on glass substrates, were irradiated by γ rays. The as deposited and irradiated films were characterized by Raman spectroscopy, electrical resistivity, a...Diamond like carbon films, prepared by RF glow discharge on glass substrates, were irradiated by γ rays. The as deposited and irradiated films were characterized by Raman spectroscopy, electrical resistivity, and infrared transmittance. It is shown that the irradiation of the γ rays can lead to the breaking of SP 3 C H and SP 2 C H bonds, slight increasing of SP 3 C C bonds, and induced hydrogen recombination with H 2 molecules, subsequently diffusing to the surface of the films. When the γ rays irradiation dose reached 10×10 4 Gy, the numbers of SP 3 C H bonds was decreased by about 50%, the resistivity of irradiated DLC films was increased, and the diamond like character of the films became more obvious. The structure of DLC films was modified when irradiated by γ rays. The irradiation mechanisms are briefly discussed.展开更多
By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The s...By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The surface microstructure and photoelectric properties of both porous silicon and DLC coated PS have been analyzed by using AFM, FTIR and PL spectrotrieters. The results show the DLC film with dense and homogenous nanometer grains can be deposited on the PS used as passivation coating as it can terminate oxide reaction on the surface of the PS. Furthermore, certain ratio of hydrogen existed in the DLC film can be improved to form hydride species on the DLC/PS interface as the centers of the luminescence so that the DLC coating is of benefit not only to the passivation of the PS but also to the improvement of its luminescent intensity.展开更多
In this paper,Me (Me=Cr,Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating.The effect of nitrogen flow rates on the microst...In this paper,Me (Me=Cr,Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating.The effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS),Raman spectra,grazing incident X-ray diffraction (GIXRD),high resolution transmission electron microscopy (HRTEM) and nano-indentation.Raman,GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix,which are vital for the mechanical properties of the films.The nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films,and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.展开更多
The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying ...The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there a...展开更多
Diamond like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a gra...Diamond like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a graphite cathode in this home built system with a toridal macroparticles filter. Ion current convected by the plasma beam was measured with a negatively biased probe. It was shown that the magnetic field of the coils located on the plasma duct has a strong influence on ion current. Scanning electron microscope (SEM), atomic force microscope (AFM) and Raman spectrum are used to study the DLC films. Tribological behaviors of the deposited film are also studied.展开更多
Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition an...Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa~ while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N.展开更多
文摘Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied.
文摘Diamond like carbon films, prepared by RF glow discharge on glass substrates, were irradiated by γ rays. The as deposited and irradiated films were characterized by Raman spectroscopy, electrical resistivity, and infrared transmittance. It is shown that the irradiation of the γ rays can lead to the breaking of SP 3 C H and SP 2 C H bonds, slight increasing of SP 3 C C bonds, and induced hydrogen recombination with H 2 molecules, subsequently diffusing to the surface of the films. When the γ rays irradiation dose reached 10×10 4 Gy, the numbers of SP 3 C H bonds was decreased by about 50%, the resistivity of irradiated DLC films was increased, and the diamond like character of the films became more obvious. The structure of DLC films was modified when irradiated by γ rays. The irradiation mechanisms are briefly discussed.
文摘By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The surface microstructure and photoelectric properties of both porous silicon and DLC coated PS have been analyzed by using AFM, FTIR and PL spectrotrieters. The results show the DLC film with dense and homogenous nanometer grains can be deposited on the PS used as passivation coating as it can terminate oxide reaction on the surface of the PS. Furthermore, certain ratio of hydrogen existed in the DLC film can be improved to form hydride species on the DLC/PS interface as the centers of the luminescence so that the DLC coating is of benefit not only to the passivation of the PS but also to the improvement of its luminescent intensity.
基金supported by the National High Technical Research and Development Program of China (Grant No. 2006AA03Z521)
文摘In this paper,Me (Me=Cr,Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating.The effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS),Raman spectra,grazing incident X-ray diffraction (GIXRD),high resolution transmission electron microscopy (HRTEM) and nano-indentation.Raman,GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix,which are vital for the mechanical properties of the films.The nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films,and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.
基金supported by the Natural Science Foundationof Shandong Province (Grant No. Y2002A09).
文摘The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there a...
文摘Diamond like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a graphite cathode in this home built system with a toridal macroparticles filter. Ion current convected by the plasma beam was measured with a negatively biased probe. It was shown that the magnetic field of the coils located on the plasma duct has a strong influence on ion current. Scanning electron microscope (SEM), atomic force microscope (AFM) and Raman spectrum are used to study the DLC films. Tribological behaviors of the deposited film are also studied.
文摘Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa~ while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N.