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Characterization and Application of Diamond-like Carbon Films
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作者 侯清润 高炬 +1 位作者 杨晔 迟宁 《Rare Metals》 SCIE EI CAS CSCD 1998年第3期48-53,共6页
Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscop... Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied. 展开更多
关键词 diamond like carbon films TEM AFM porous silicon PHOTOLUMINESCENCE
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Irradiation Effect of γ Rays on Diamond-Like Carbon Films
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作者 刘贵昂 王天民 《Journal of Modern Transportation》 2001年第1期75-80,共6页
Diamond like carbon films, prepared by RF glow discharge on glass substrates, were irradiated by γ rays. The as deposited and irradiated films were characterized by Raman spectroscopy, electrical resistivity, a... Diamond like carbon films, prepared by RF glow discharge on glass substrates, were irradiated by γ rays. The as deposited and irradiated films were characterized by Raman spectroscopy, electrical resistivity, and infrared transmittance. It is shown that the irradiation of the γ rays can lead to the breaking of SP 3 C H and SP 2 C H bonds, slight increasing of SP 3 C C bonds, and induced hydrogen recombination with H 2 molecules, subsequently diffusing to the surface of the films. When the γ rays irradiation dose reached 10×10 4 Gy, the numbers of SP 3 C H bonds was decreased by about 50%, the resistivity of irradiated DLC films was increased, and the diamond like character of the films became more obvious. The structure of DLC films was modified when irradiated by γ rays. The irradiation mechanisms are briefly discussed. 展开更多
关键词 RAY IRRADIATION diamond like carbon films SP 3 C H SP 2 C H and SP 3 C C bonds structure and property
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Diamond Like Carbon Film Deposited on Porous Silicon as Passivation Coating
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作者 QU Jian-hua XIA Yi-ben +3 位作者 WANG Lin-jun MO Yao-wu TANG Ding-yuan (College of Material Science and Engineering, Shanghai University, Shanghai 201800, CHN National lab. of Infrared Physics, Chinese Academy of Sciences, Shanghai 200083, CHN) 《Semiconductor Photonics and Technology》 CAS 2000年第2期100-104,共5页
By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The s... By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The surface microstructure and photoelectric properties of both porous silicon and DLC coated PS have been analyzed by using AFM, FTIR and PL spectrotrieters. The results show the DLC film with dense and homogenous nanometer grains can be deposited on the PS used as passivation coating as it can terminate oxide reaction on the surface of the PS. Furthermore, certain ratio of hydrogen existed in the DLC film can be improved to form hydride species on the DLC/PS interface as the centers of the luminescence so that the DLC coating is of benefit not only to the passivation of the PS but also to the improvement of its luminescent intensity. 展开更多
关键词 diamond like carbon film Passivation coating Porous silicon PHOTOLUMINESCENCE
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Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr,Zr) Co-doped Diamond-like Carbon Films 被引量:2
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作者 Zhiyun Han,Hongkai Li,Guoqiang Lin and Chuang Dong Key Laboratory for Material Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116085,China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2010年第11期967-972,共6页
In this paper,Me (Me=Cr,Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating.The effect of nitrogen flow rates on the microst... In this paper,Me (Me=Cr,Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating.The effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS),Raman spectra,grazing incident X-ray diffraction (GIXRD),high resolution transmission electron microscopy (HRTEM) and nano-indentation.Raman,GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix,which are vital for the mechanical properties of the films.The nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films,and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films. 展开更多
关键词 diamond like carbon films DOPING Nitrogen flow rate Arc ion plating
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Effect of nitrogen pressure on optical properties and microstructure of diamond-like carbon films grown by pulsed laser deposition 被引量:2
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作者 丁旭丽 李清山 孔祥和 《Optoelectronics Letters》 EI 2009年第2期117-119,共3页
The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying ... The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there a... 展开更多
关键词 Atomic force microscopy diamond films diamond like carbon films GRAPHITE Hydrogen Laser ablation MICROSTRUCTURE NITROGEN Optical properties Pressure effects Pulsed laser deposition Raman spectroscopy Surface morphology
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Experimental Research of DLC Film Deposited by Filtered Vacuum Arc Evaporation
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作者 朱纪军 左敦稳 +1 位作者 王珉 喇培清 《Journal of Southeast University(English Edition)》 EI CAS 1999年第1期39-43,共5页
Diamond like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a gra... Diamond like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a graphite cathode in this home built system with a toridal macroparticles filter. Ion current convected by the plasma beam was measured with a negatively biased probe. It was shown that the magnetic field of the coils located on the plasma duct has a strong influence on ion current. Scanning electron microscope (SEM), atomic force microscope (AFM) and Raman spectrum are used to study the DLC films. Tribological behaviors of the deposited film are also studied. 展开更多
关键词 diamond like carbon thin film filtered vacuum arc deposition atomic force microscope
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Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD 被引量:2
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作者 马国佳 刘喜亮 +2 位作者 张华芳 武洪臣 彭丽平 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第4期1105-1110,共6页
Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition an... Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa~ while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N. 展开更多
关键词 NANOCOMPOSITE TiC/a-C:H diamond like carbon film PSII
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