Status of research on non-conventional technology assisted single-point diamond turning

With the increasing use of difficult-to-machine materials in aerospace applications,machining requirements are becoming ever more rigorous.However,traditional single-point diamond turning(SPDT)can cause surface damage and tool wear.Thus,it is difficult for SPDT to meet the processing requirements,and it has significant limitations.Research indicates that supplementing SPDT with unconventional techniques can,importantly,solve problems due to the high cutting forces and poor surface quality for difficult-to-machine materials.This paper first introduces SPDT and reviews research into unconventional techniques for use with SPDT.The machining mechanism is discussed,and the main advantages and disadvantages of various methods are investigated.Second,hybrid SPDT is briefly described,which encompasses ultrasonic-vibration magnetic-field SPDT,ultrasonic-vibration laser SPDT,and ultrasonic-vibration cold-plasma SPDT.Compared with the traditional SPDT method,hybrid SPDT produces a better optical surface quality.The current status of research into unconventional techniques to supplement SPDT is then summarized.Finally,future development trends and the application prospects of unconventional assisted SPDT are discussed.

The brazing of diamond

Diamond grits held in metal matrix(sintered or electroplated) are retained primary by mechanical locking.Because of this weak attachment,the pullouts of diamond from matrix are inevitable during the cutting process.Moreover,the working grits have low protrusion heights,so the cutting speed of the tool is limited. Furthermore,the rubbing of metal matrix and the work object can cause thermal damages of diamond and other materials,and power increase for the operation. Diamond can be firmly held in a metal matrix by brazing.Because of the presence of strong chemical bonding,diamond grits can protrude twice as high without being knocked off from the matrix.As a result,the cutting speed of the tool may be doubled. When the braze melts,the carbide formers will migrate toward diamond to form carbide at the interface. This reaction may be excessive as to degrade diamond significantly.In this case,a coating on diamond may be needed to moderate the reaction. When diamond is brazed on the surface of a substrate,the melt tends to pull the grits closer together that may thicken the braze layer locally.The clustering of grits can reduce the cutting effectiveness of the diamond tool.A diamond grid design is necessary to maintain the uniform thickness of the braze layer.Moreover,the controlled melting of braze alloy can form a gentle slope around each diamond grit.Such a massive support can allow aggressive cutting of the diamond tool with a low power consumption.

Enhancement of surface wettability via micro-and nanostructures by single point diamond turning

Studies on surface wettability have received tremendous interest due to their potential applications in research and industrial processes. One of the strategies to tune surface wettability is modifying surface topography at micro-and nanoscales. In this research, periodic micro-and nanostructures were patterned on several polymer surfaces by ultra-precision single point diamond turning to investigate the relationships between surface topographies at the micro-and nanoscales and their surface wettability. This research revealed that single-point diamond turning could be used to enhance the wettability of a variety of polymers, including polyvinyl chloride(PVC), polyethylene 1000(PE1000), polypropylene copolymer(PP) and polytetrafluoroethylene(PFTE), which cannot be processed by conventional semiconductor-based manufacturing processes. Materials exhibiting common wettability properties(θ≈ 90°) changed to exhibit "superhydrophobic" behavior(θ > 150°). Compared with the size of the structures, the aspect ratio of the void space between micro-and nanostructures has a strong impact on surface wettability.

The organic diamond disk(ODD)for dressing polishing pads of chemical mechanical planarization

Diamond pad conditioners can determine the efficiency of CMP processes and the quality of polished wafers.The polishing rate of a wafer is dependent on the amplitude(height) of pad asperities.The polishing uniformity is controlled by the frequency(density) of such asperities.Current diamond pad conditioners cannot dress the pad to produce microns sized asperities at high density.This is because the tips of diamond grits cannot be leveled to the same height so the grooved pad top is uneven with excessive asperities that may ruin the wafer and under sized asperities that is easily glazed. New designs of diamond pad conditioners have markedly improved the leveling of diamond tips.Organic diamond disks(ODD) are manufactured by reverse casting of polymers.Due to the uniform spacing of diamond grits and their controlled tip heights,none of the diamond grits will be overly stressed.Moreover,all diamond grits are sharing the dressing work.Consequently,the number of working grits of ODD is significantly higher than conventional designs.Moreover,because no diamond will cut pad unecessarily,the pad life is greatly lengthened.Furthermore,due to the uniform distribution of pad asperities,the slurry will be held efficiently so the run off is avoided.As a result,the slurry usage is reduced.ODD is therefore a significant savor of CMP consumables for semiconductor manufacture.

A Fast Tool Servo System for Fabrication of Micro-structured Surfaces on A Diamond Turning Machine

A fast tool servo (FTS) system is developed for the fabrication of non-rotationally symmetric micro-structured surfaces using single-point diamond turning machines.The constructed FTS employs a piezoelectric tube actuator (PZT) to actuate the diamond tool and a capacitive probe as the feedback sensor.To compensate the inherent nonlinear hysteresis behavior of the piezoelectric actuator,Proportional Integral (PI) feedback control is implemented.Besides,a feed-forward control based on a simple feed-forward predictor has been added to achieve better tracking performance.Experimental results indicate that error motions in the performance of the system caused by hysteresis can be reduced greatly and the micro-structured surface is successfully fabricated by implementing the FTS.

Analysis and Prediction of Effect of Turning Marks Diffraction on Image Quality of Optical System

Single-point diamond turning (SPDT) is widely used in the machining of infrared materials and metal-based mirrors. Diamond tips can scratch material, replicate the shape of the tip, and create annular turning marks on optical surfaces, which can have unpredictable adverse effects on imaging. In order to predict the effect of turning marks diffraction on the degradation of imaging quality, a model of the influence of SPDT processing parameters on the reduction of system imaging MTF under the influence of ideal grating turning marks diffraction was established. The results show that the depth of the turning mark will lead to the decline of MTF, especially the low frequency information. Finally, a method is proposed to reduce the effect of turning marks diffraction through changing the processing parameters. .

金刚石滚轮对树脂 CBN 砂轮的修形特性研究

研究了金刚石滚轮的修形原理，并根据使用扫描电子显微镜观察ＣＢＮ砂轮在修形、修整及磨削过程中表面磨粒的状态，分析了不同修形条件对砂轮磨粒切刃的影响。

旋转金刚石修整工具修整超硬磨料砂轮的研究

本文对比研究了金刚石修整笔和旋转金刚石修整工具,在修整超硬磨料砂轮时修整力、工具磨损、修整效率等参数的变化规律,结果表明:超硬磨料砂轮的修整中,旋转金刚石修整工具修整力、修磨效率和磨损等几乎不随修整次数增加发生变化,其原因是修整工作是由整个圆周上金刚石分担,旋转型金刚石修整工具在修整过程中,具有挤压砂轮的作用,使被修整的金刚石砂轮表面具有较好锋利度。结果表明:在优化的修整工艺条件下,旋转金刚石工具可以实现对超硬磨料砂轮的精密修整。

基于气中放电辅助修整金刚石砂轮的试验研究

提出了一种新型的基于气中放电辅助金刚石砂轮在线修整法,它把气中火花放电修整法和金刚石笔机械修整法有机结合在一起,能实现光学曲线磨床上金刚石砂轮的高效、高精度、低成本和不得使用任何冷却液的在线修整。采用自制的试验装置在MK9025数控光学曲线磨床上对1A1／T2 200×6×32×4 MBD6 120／140 M75型号的砂轮进行了在线修整试验,得出了一些影响金刚笔磨损率的主要因素:火花放电时热源的能量分布状况、金刚石笔修整时的修整深度、进给量以及电源电压。相同工况下机械修整法和气中放电辅助修整法中金刚石笔的磨损率对比试验结果表明:气中放电辅助修整和机械修整有着不同的材料去除机理,它比一般机械修整更有利于提高金刚石砂轮的修整效率和降低金刚石笔的磨损量。磨削YG8硬质合金工件的试验表明,采用气中放电辅助法修整的金刚石砂轮和新的金刚石砂轮有着相近的磨削能力。

组合式金刚石修整器修整应用研究

金刚石修整器是半导体制程中修整CMP抛光垫不可缺少的工具,半导体集成电路堆叠越来越密集,特征线宽越缩越小,新制程技术已迈入了7纳米制程,传统的金刚石修整器已不足以应付新工艺技术的需求。组合式金刚石修整器搭配特殊的钎焊技术及组合调整方法,有效地为CMP制程提供了解决方案,透过大的不锈钢基座,搭配具有通孔的小研磨盘,可灵活运用于各阶段的化学机械抛光制程,以达到提升CMP整体制程效能,符合更小线宽的制程技术需求。

CVD金刚石在机械加工领域的研究进展

结合近几年的研究,综述了CVD金刚石在修整工具、打标机、焊接刀具以及涂层刀具等方面的研究进展,并提出了目前所存在的不足,对未来的发展方向提出了展望。

齿轮式金刚石修形滚轮在珩齿加工中的应用

分析了齿轮式金刚石修形滚轮对珩磨轮的修形机理。用自制金刚石修形滚轮在内、外啮合珩齿机上进行了修形及珩齿加工试验 。

金刚石工具磨损形式的观察与分析

本文对金刚石工具的磨损进行了研究。扫描电镜观测表明，金刚石工具磨损包括轻微磨损和严重磨损两大类。轻微磨损包括金刚石的犁沟磨损、剥层磨损和点蚀磨损等形式；严重磨损包括金刚石碎裂磨损、胎体与金刚石界面挤出与离隙和整体脱粒等形式。分析了各种磨损形式产生的原因和机理，指出金刚石工具的出刃高度ｈ随轻微磨损而减小，却随严重磨损而增大。金刚石的严重磨损虽然可以提高磨削效率，但却影响工具的使用寿命。

采用超硬砂轮修整机修整金刚石砂轮的试验研究

在采用自主研发的具有在线检测技术的超硬砂轮修整机修整各种成型金刚石砂轮时,存在着修整尺寸和形状精度不高、达不到刀具成型磨削要求以及工具砂轮耗损量大等问题。通过对工具砂轮往返运动速度、进给量、耗损量及被修砂轮精度关系的试验研究,结合最佳转速比对金刚石砂轮进行修整,优化设计参数后有效解决了上述问题,效率提高30%。

金刚石滚轮成形砂轮修整器的结构设计

针对加工轴类工件时,常会遇到尺寸精度要求高、表面粗糙度值小的各种圆弧的难加工问题,提出采用成形磨削法进行圆弧的加工,并针对圆弧加工用的成形砂轮,设计出金刚石滚轮成形砂轮修整器。

Optimization of the Dressing Parameters in Cylindrical Grinding Based on a Generalized Utility Function

The existing studies, concerning the dressing process, focus on the major influence of the dressing conditions on the grinding response variables. However, the choice of the dressing conditions is often made, based on the experience of the qualified staff or using data from reference books. The optimal dressing parameters, which are only valid for the particular methods and dressing and grinding conditions, are also used. The paper presents a methodology for optimization of the dressing parameters in cylindrical grinding. The generalized utility function has been chosen as an optimization parameter. It is a complex indicator determining the economic, dynamic and manufacturing characteristics of the grinding process. The developed methodology is implemented for the dressing of aluminium oxide grinding wheels by using experimental diamond roller dressers with different grit sizes made of medium- and high-strength synthetic diamonds type AC32 and AC80. To solve the optimization problem, a model of the generalized utility function is created which reflects the complex impact of dressing parameters. The model is built based on the results from the conducted complex study and modeling of the grinding wheel lifetime, cutting ability, production rate and cutting forces during grinding. They are closely related to the dressing conditions （dressing speed ratio, radial in-feed of the diamond roller dresser and dress-out time）, the diamond roller dresser grit size/grinding wheel grit size ratio, the type of synthetic diamonds and the direction of dressing. Some dressing parameters are determined for which the generalized utility fimction has a maximum and which guarantee an optimum combination of the following： the lifetime and cutting ability of the abrasive wheels, the tangential cutting force magnitude and the production rate of the grinding process. The results obtained prove the possibility of control and optimization of grinding by selecting particular dressing parameters.

基于SMO-SVM的单点金刚笔钝化监测

针对单点金刚笔在砂轮修整过程中易于钝化且难以检测的问题,使用支持向量机建立智能模型。为了得到建立模型所需的样本库,使用小波包分析等方法在线提取修整时声发射信号中的特征信息,并引入钝化平台直径定义钝化临界值。模型本身选用基于串行优化算法的支持向量分类机,使用交叉验证法搭配遗传算法以达到优化模型参数的目的。实验结果表明,该模型在分类精度和计算时间上均优于一般的智能模型,可以有效地监测金刚笔的钝化。

磨床砂轮修整器的改进

根据数控磨床在线修整砂轮的原理,介绍了一种改进的砂轮修整器,具有结构简单、使用方便,显著提高了修整砂轮的效率。

单点金刚石修整笔的现状分析及发展趋势

针对单点金刚石修整笔的应用现状,阐述了单点金刚石修整笔修整基本原理,重点介绍了单点金刚石修整笔种类、制造精度以及先进制造对高档修整笔的需求。最后,对单点金刚石修整笔的未来发展方向进行了展望。

A Simulated Investigation of Ductile Response of GaAs in Single-Point Diamond Turning and Experimental Validation

In this paper,molecular dynamic(MD)simulation was adopted to study the ductile response of single-crystal GaAs during single-point diamond turning(SPDT).The variations of cutting temperature,coordination number,and cutting forces were revealed through MD simulations.SPDT experiment was also carried out to qualitatively validate MD simulation model from the aspects of normal cutting force.The simulation results show that the fundamental reason for ductile response of GaAs during SPDT is phase transition from a perfect zinc blende structure(GaAs-I)to a rock-salt structure(GaAs-II)under high pressure.Finally,a strong anisotropic machinability of GaAs was also found through MD simulations.