Structure and Performance of TiC-containing Diamond-like Carbon Nanocomposite Coatings Deposited by Rectangular Cathodic Arc Ion-plating

TiC-containing diamond-like carbon （TiC-DLC） nanocomposite coatings were deposited by a rectangular cathodic arc ion-plating system using C2H2 as reacting gas. Raman spectroscopy and transmission electron microscopy analysis show that with increasing flow rate of C2H2, the structure of nanocomposite coatings changes from TiC nanograin-containing to graphite nanograin-containing DLC. The harness measurements show that the hardness decreases from 28 GPa to 18 GPa with increasing C2H2 flow rate. The scratch test show that a high critical load （〉40 N） was obtained and exhibited a good adhesion between the coating and the substrate. Wear experiment shows that the friction coefficient of TiC-DLC nanocomposite coatings decreases with increasing C2H2. A low friction coefficient of 0.07 was obtained at 480 sccm C2H2.

Corrosion performance and tribological behavior of diamond-like carbon based coating applied on Ni−Al−bronze alloy

The effect of diamond-like carbon(DLC)coating(fabricated by cathodic arc deposition)on mechanical properties,tribological behavior and corrosion performance of the Ni−Al−bronze(NAB)alloy was investigated.Nano-hardness and pin-on-plate test showed that DLC coating had a greater hardness compared with NAB alloy.Besides,the decrease in friction coefficient from 0.2 for NAB substrate to 0.13 for the DLC-coated sample was observed.Potentiodynamic polarization and EIS results showed that the corrosion current density decreased from 2.5μA/cm2 for bare NAB alloy to 0.14μA/cm2 for DLC-coated sample in 3.5 wt.%NaCl solution.Moreover,the charge transfer resistance at the substrate−electrolyte interface increased from 3.3 kΩ·cm2 for NAB alloy to 120.8 kΩ·cm2 for DLC-coated alloy,which indicated an increase in corrosion resistance due to the DLC coating.

Effect of N-ion implantation and diamond-like carbon coating on fretting wear behaviors of Ti6Al7Nb in artificial saliva

The tribology behaviors of Ti6Al7Nb,its alloy with N-ion implantation,and its alloy with diamond-like carbon(DLC)coating were investigated in artificial saliva.Fretting wear tests of untreated,N-ion implanted and DLC coated Ti6Al7Nb alloys plate against a Si3N4ball were carried out on a reciprocating sliding fretting wear test rig.Based on the analysis of X-ray diffraction,Raman spectroscopy,3-D profiler,SEM morphologies and frictional kinetics behavior analysis,the damage behavior of surface modification layer was discussed in detail.The results indicated that the fretting wear behavior of Ti6Al7Nb alloy with N-ion implantation was increased with the dose increase of the implanted nitrogen ions.Moreover,the DLC-coated Ti6Al7Nb alloy with low ion implantation could improve the fretting wear behavior greatly.In addition,the Ti6Al7Nb with DLC coating had better ncorrosion resistance due to the special compact structure.All results suggested that the Ti6Al7Nb with DLC coating had better wear resistance than that with N-ion implantation in artificial saliva.

Studies of diamond-like carbon (DLC) films deposited on stainless steel substrate with Si/SiC intermediate layers

In this work, diamond-like carbon （DLC） films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition （MW-ECRPECVD） techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy （AFM）. With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio ID/IG increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp^3-bond carbon density reducing, resulted in the peak values of hardness （H） and elastic modulus （E）. Silicon addition promoted the formation of sp^3 bonding and reduced the hardness. The incorporated Si atoms substituted sp^2- bond carbon atoms in ring structures, which promoted the formation of sp^3-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.

Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique

Diamond-like carbon （DLC） films was deposited successfully on stainless steel sub- strates with Si/SiC intermediate layers by combining plasma enhanced unbalanced magnetron sputtering physical vapor deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapor deposition （MW-ECR PECVD） techniques. The effect of sil- icon dopant on the structure, morphology, nanomechanical properties and electrochemical be- havior of DLC films were investigated by Raman spectroscopy, nano-indentation, atomic force microscopy （AFM） and potentiodynamic method and electrochemical impedance spectroscopy （EIS）. It showed that the incorporated silicon atoms substituted sp2-bonded carbon atoms in the ring structures, promoting the formation of sp3-bonds. The structural transition from C-C to C-Si bonds resulted in the relaxation of the residual stress, leading to the decrease in films hardness. The DLC films with Si/SiC intermediate layers led to significant improvement in the corrosion resistance of the stainless steel substrate due to effective isolation and good chemical inertness of the DLC films.

Development of Diamond-like Carbon Fibre Wheel

A unique diamond-like carbon (DLC) grinding wheel was developed, in which the DLC fibres were made by rolling Al sheets coated with DLC films and aligned no rmally to the grinding wheel surface by laminating Al sheets together with DLC fibres. In this paper, the formation process of DLC fibres and the fabrication process of a DLC fibre wheel were investigated. Many grinding experiments were also carried out on a precision NC plane milling machine using a newly developed DLC wheel. Grinding of specimens of silicon wafers, optical glasses, quartz, granites and hardened die steel SKD11 demonstrated the capabilities of nanometer surface finish. A smooth surface with a roughness value of Ra2.5 nm (Ry26 nm) was achieved.

Electrochemical Corrosion Behavior of the DLC Coated and Uncoated NiTi Alloys

A dense and well-adhered diamond-like carbon （DLC） coating was prepared on the nickel-titanium （NiTi） alloys by plasma immersion ion implantation and deposition （PIIID）. Potentiodynamic polarization tests indicated the corrosion resistance of the NiTi alloys was markedly improved by the DLC coating. The Ni ions release of the NiTi alloys was effectively blocked by the DLC coating.

Synergistic tribological effect between polyisobutylene succinimide-modified molybdenum oxide nanoparticle and zinc dialkyldithiophosphate for reducing friction and wear of diamond-like carbon coating under boundary lubrication

Organic molybdenum lubricant additive like molybdenum dialkyl dithiocarbamate(MoDTC)can cause wear acceleration of diamond-like carbon(DLC)coating coupled with steel under boundary lubrication,which hinders its industrial application.Therefore,polyisobutylene succinimide(PIBS),an organo molybdenum amide,was adopted to modify molybdenum oxide affording molybdenum polyisobutylene succinimidemolybdenum oxide nanoparticles(MPIBS-MONPs)with potential to prevent the wear acceleration of DLC coating.The thermal stability of MPIBS-MONPs was evaluated by thermogravimetric analysis.Their tribological properties as the additives in di-isooctyl sebacate(DIOS)were evaluated with MoDTC as a control;and their tribomechanism was investigated in relation to their tribochemical reactions and synergistic tribological effect with zinc dialkyldithiophosphate(ZDDP)as well as worn surface characterizations.Findings indicate that MPIBS-MONPs/ZDDP added in DIOS can significantly reduce the friction and wear of DLC coating,being much superior to MoDTC.This is because MPIBS-MONPs and ZDDP jointly take part in tribochemical reactions to form a composite tribofilm that can increase the wear resistance of DLC coating.Namely,the molybdenum amide on MPIBS-MONPs surface can react with ZDDP to form MoS2 film with excellent friction-reducing ability;and MPIBS-MONPs can release molybdenum oxide nanoparticle to form deposited lubrication layer on worn surfaces.The as-formed composite tribofilm consisting of molybdenum oxide nanocrystal,amorphous polyphosphate,and molybdenum disulfide as well as a small amount of Mo2C accounts for the increase in the wear resistance of DLC coating under boundary lubrication.

The friction of diamond-like carbon coatings in a water environment

Diamond-like carbon(DLC)coatings are known to provide beneficial mechanical and tribological properties in harsh environments.Their combination of high wear resistance and low friction has led to their extensive use in any number of industries.The tribological performance of a DLC coating is varied however,and the frictional response is known to be strongly dependent on the surrounding environment,as well as the material composition and bonding structure of the DLC coating.This paper presents an up-to-date review on the friction of DLC coatings in a water environment,with a special focus on transfer layer formation and tribochemistry.

MoS_(2)对树脂基器件耐磨层改性的研究

为了延长树脂基器件耐磨层的寿命,研制了Ti-DLC-MoS_(2)复合膜层,以磁控溅射的方式对树脂基材料依次镀膜,并考察了不同镀膜工艺的效果。结果表明:与表面镀Ti-DLC混合膜层相比,Ti-DLC-MoS_(2)复合膜层的耐磨性提高了30%;与无膜层的树脂材料相比,Ti-DLC-MoS_(2)复合膜层的耐磨性提高了54%。腔内压力3.00 Pa,功率密度0.30 W/cm^(2)镀Ti膜;腔内压力0.65 Pa,功率密度4.00 W/cm^(2)镀DLC膜;腔内压力3.00 Pa,功率密度7.00 W/cm^(2)镀MoS_(2)膜的工艺条件下,复合膜层的摩擦系数最低,为0.0776。Ti-DLC-MoS_(2)复合膜层显著提高了树脂基器件的耐磨性能,能大幅延长树脂基器件的使用寿命。

Tribological performance of hydrogenated diamond-like carbon coating deposited on superelastic 60NiTi alloy for aviation selflubricating spherical plain bearings

It is imperative to develop a novel matching of metallic substrate and self-lubricating coating for aircraft spherical plain bearing in a wide range of service conditions.As a new type of superelastic material,60NiTi alloy meets the performance requirements of aerospace bearing materials,but exhibits poor tribological performance,especially under the conditions of dry sliding friction.A Hydrogenated Diamond-Like Carbon(H-DLC)coating was deposited on the 60NiTi alloy to improve its tribological performance.The microstructure and mechanical behavior of the 60NiTi alloy and its H-DLC coating were explored.Results show that improvement of friction and wear performance of the H-DLC coating deposited on the 60NiTi substrate is mainly achieved by graphitization at the friction interface and the transfer film produced on the counterpart ball.The increased friction load leads to intensification of graphitization at the friction interface and formation of continuous and compact transfer film on the surface of the counterpart ball.

DLC表面涂覆在模具中的应用

简要介绍了DLC(类金刚石)涂层技术的发展、基本原理及工艺流程。重点介绍DLC涂层在半导体封装模具特别是引脚成形模具中的应用,以了解DLC涂层卓越的性能和其在模具领域中的使用价值。在模具成形零件上涂覆一层DLC涂层,可以有效提高产品的品质、减少维护时间、降低产品的生产成本。

Microstructure and Mechanical Property of Magnetron Sputtering Deposited DLC Film

A diamond-like carbon（DLC） film was deposited on YT14 substrate using magnetron sputtering（MS）. The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron microscopy（SEM）, atomic force microscopy（AFM）, and X-ray photoelectron spectroscopy（XPS）, respectively, and its mechanical property and bonding strength were measured using a nanoindentation and scratch tester, respectively. The results show that the C-enriched DLC film exhibits a denser microstructure and smoother surface with lower surface roughness of 21.8 nm. The ratio of C sp2 at 284.4 e V that corresponds to the diamond（111） and the C sp3 at 285.3 e V that corresponds to the diamond（220） plane for the as-received film is 0.36： 0.64, showing that the C sp3 has the high content. The hardness and Young＇s modulus of DLC film by nanoindentation are 8.534 41 and 142.158 1 GPa, respectively, and the corresponding bonding strength is 74.55 N by scratch test.

Deposition and Thermal Stability of DLC/Si-N Composite Films Synthesized Using a Sputtering-PBII Hybrid System

Diamond-like carbon (DLC) is a metastable amorphous material that exhibits unique properties. However, there are many limitations regarding the use of this material due to factors such as its tribological characteristics at high temperature and limited thermal stability. In this study, the thermal stability and tribological properties of DLC/silicon-nitrogen (DLC/Si-N) composite films were investigated and compared to those of pure DLC films. All the films were synthesized using a combination of radio frequency (RF) magnetron sputtering and plasma-based ion implantation (PBII) (a so-called sputtering-PBII hybrid system) which is newly developed by us. A high purity silicon nitride (99.9%) disk was used as the target, applying an RF power in the range of 500 - 700 W and a negative pulsed bias voltage of 5 kV to the substrate. An Ar-CH4 mixture was used as the reactive gas. The CH4 partial pressure was varied between 0 and 0.15 Pa, while the total gas pressure and total gas flow were fixed at 0.30 Pa and 30 sccm, respectively. The structures of the resulting films were characterized using Raman spectroscopy, while the thermal stabilities were assessed using thermogravimetric-differential thermal analysis (TG-DTA) and friction coefficients were obtained via ball-on-disk friction tests. The results indicate that the DLC/Si-N composite films produced in this work exhibit improved thermal stability relative to that of pure DLC owing to the presence of thermally stable atomic-scale Si-N compound in the carbon main flame networks. A DLC/Si-N film containing approximately 11 at.%Si and 18.5 at.%N shows good thermal stability in air over 800°C up to 1100°C, together with excellent tribological performance at 500°C in air. Overall, the data demonstrate that DLC/Si-N composite films offer improved thermal stability and superior tribological performance at high temperatures.

Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride

Composite SiNx/DLC films were deposited on Si substrate by RF magnetron sputtering of silicon nitride (Si3N4) target simultaneously with filtered cathode arc (FCA) of graphite. The RF power was fixed at 100 W whereas the arc currents of FCA were 20, 40, 60 and 80 A. The effects of arc current on the structure, surface roughness, density and mechanical properties of SiNx/DLC films were investigated. The results show that the arc current in the studied range has effect on the structure, surface roughness, density and mechanical properties of composite SiNx/DLC films. The composite SiNx/DLC films show the sp3 content between 53.5% and 66.7%, density between 2.54 and2.98 g/cm3, stress between 1.7 and 2.2 GPa, and hardness between 35 and 51 GPa. Furthermore, it was found that the density, stress and hardness correlate linearly with the sp3 content for composite SiNx/DLC films.

Effect of temperature and mating pair on tribological properties of DLC and GLC coatings under high pressure lubricated by MoDTC and ZDDP

Diamond-like carbon(DLC)and graphite-like carbon(GLC)coatings have good prospects for improving the surface properties of engine parts.However,further understanding is needed on the effect of working conditions on tribological behaviors.In this study,GLC and two types of DLC coatings were deposited on GCr15 substrate for investigation.The friction and wear properties of self-mated and steel-mated pairs were evaluated.Two temperatures(25 and 90℃),three lubrication conditions(base oil,molybdenum dithiocarbamate(MoDTC)-containing oil,MoDTC+zinc dialkyldithiophosphate(ZDDP)-containing oil),and high Hertz contact stress(2.41 GPa)were applied in the experiments.The results showed that high temperature promoted the effect of ZDDP on steel-mated pairs,but increased wear under base oil lubrication.The increased wear for steel-mated pairs lubricated by MoDTC-containing oil was due to abrasive wear probably caused by MoO_(3) andβ-FeMoO_(4).It was also found that in most cases,the tribological properties of self-mated pairs were better than those of steel-mated pairs.

Effects of platinum content on tribological properties of platinum/nitrogen doped diamond-like carbon thin films deposited via magnetron sputtering

Platinum(Pt)and nitrogen(N)were co-incorporated in diamond-like carbon(DLC)thin films using a magnetron sputtering system to form PtN-DLC thin films for tribological applications.The Pt content in the PtN-DLC films prepared on Si substrates was controlled by varying RF power applied to a Pt target at a fixed N2 flow rate.The tribological properties of the PtN-DLC films were investigated with respect to the Pt content in the films.The uncoated Si substrate surface tested against a steel ball of 6 mm in diameter had significant abrasive and fatigue wear,while no significant wear was found on the N-DLC coated sample surface,indicating that the N-DLC film effectively prevented its underlying Si substrate from wear.However,the incorporation of Pt in the N-DLC films reduced the wear resistance of the films by degrading sp3-bonded cross-linking structures of the films so that significant wear tracks were found on the surfaces of the PtN-DLC films.Therefore,the increased radio frequency(RF)power applied to the Pt target decreased the wear resistance of the PtN-DLC films as a result of the increased Pt content.

Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere

Tribological properties of non-hydrogenated diamond-like carbon (DLC) films were investigated under humid (RH=80%) and dry (RH=5%) air. These films were deposited by pulsed laser deposition (PLD) at different substrate temperatures. Tribological properties of DLC fabricated by PLD is not sensitive to the relative humidity of testing environment. Because of the unique growth mechanism of DLC pre- pared by PLD, DLC is of "soft-hard" double layers, having a very low friction coefficient and wear rate under humid atmosphere. The minimum coefficient and wear rate of film under humid circumstance are 0.045 and 5.94×10?10 mm3N-1m-1, respectively, just a little bit more than those under dry condition. The root means square roughness of film is less than 1 nm. The sp3 content of film grown at room tem- perature (RT) is 72%, and the sp3 content decreases with temperature. Raman spectrum shows that the micro-structure is amorphous network. The largest hardness and elastic modulus of film are 51 GPa and 350 GPa, respectively and they reduce with increase of deposition temperature too. Water contact angles on surface are more than 90° which indicates that films fabricated by PLD are hydrophobic with low surface energy.

Effects of annealing treatment on tribological behavior of tungsten-doped diamond-like carbon film under lubrication(Part 2):Tribological behavior under MoDTC lubrication

Molybdenum dialkyldithiocarbamate(MoDTC)is widely used as a friction modifier in engine lubricating oil.Under MoDTC lubrication,the friction and wear behaviors of tungsten-doped diamond-like carbon(W-DLC)films annealed at 100-400℃were discussed and evaluated using scanning electron microscopy(SEM),atomic force microscopy(AFM),and Raman spectroscopy.Under(polymerized alpha olefin)PAO+MoDTC lubrication,the coefficient of friction of all samples decreased,but the wear rates of the W-DLC films annealed at 300℃increased significantly.By interacting with zinc dialkyldithiophosphate(ZDDP),the wear rates of W-DLC films annealed at different temperatures declined significantly owing to the formation of dense phosphate tribofilms on the worn surfaces.

类金刚石纤维砂轮的开发及其磨削特性

为了获得高精度加工表面,最近磨具市场上有一种Al2O3纤维砂轮问世。该砂轮克服了磨粒砂轮中磨粒易于脱落的缺点,但其硬度仍受到一定限制。近十年来,由于类金刚石薄膜具有接近金刚石的硬度、高耐磨性和很低的摩擦系数等优良的机械、物理、化学和光电特性,因而被广泛地应用于精密零部件和涂附刃具的制造。如果能将类金刚石薄膜形成类金刚石纤维,然后将其代替Al2O3纤维作为磨料,就可以满足纤维砂轮的硬度要求。因此,1999年以来,日本山口胜美教授和中国魏源迁教授成功地将类金刚石纤维植入基体并与树脂结合剂结合,开发了一种类金刚石纤维砂轮。该砂轮中的类金刚石纤维按同一方向排列且与砂轮磨削面相垂直,纤维的端部可用作为切削刃。为了考察这种新型砂轮的磨削特性,本文作者对难加工材料如模具钢SKD11及硬脆材料如硅片、光学玻璃、石英和大理石进行了大量的磨削试验。试验结果表明能获得纳米级加工表面,例如被磨硅片和模具钢的表面粗糙度分别为Ra2nm(Ry15nm)和Ra2nm(Ry23nm)。