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Diamond-Like Carbon Depositing on the Surface of Polylactide Membrane for Prevention of Adhesion Formation During Tendon Repair
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作者 Yao Xiao Zaijin Tao +8 位作者 Yufeng Ju Xiaolu Huang Xinshu Zhang Xiaonan Liu Pavel A.Volotovski Chao Huang Hongqi Chen Yaozhong Zhang Shen Liu 《Nano-Micro Letters》 SCIE EI CAS CSCD 2024年第9期478-499,共22页
Post-traumatic peritendinous adhesion presents a significant challenge in clinical medicine.This study proposes the use of diamond-like carbon(DLC)deposited on polylactic acid(PLA)membranes as a biophysical mechanism ... Post-traumatic peritendinous adhesion presents a significant challenge in clinical medicine.This study proposes the use of diamond-like carbon(DLC)deposited on polylactic acid(PLA)membranes as a biophysical mechanism for anti-adhesion barrier to encase ruptured tendons in tendon-injured rats.The results indicate that PLA/DLC composite membrane exhibits more efficient anti-adhesion effect than PLA membrane,with histological score decreasing from 3.12±0.27 to 2.20±0.22 and anti-adhesion effectiveness increasing from 21.61%to 44.72%.Mechanistically,the abundant C=O bond functional groups on the surface of DLC can reduce reactive oxygen species level effectively;thus,the phosphorylation of NF-κB and M1 polarization of macrophages are inhibited.Consequently,excessive inflammatory response augmented by M1 macrophage-originated cytokines including interleukin-6(IL-6),interleukin-1β(IL-1β),and tumor necrosis factor-α(TNF-α)is largely reduced.For biocompatibility evaluation,PLA/DLC membrane is slowly absorbed within tissue and displays prolonged barrier effects compared to traditional PLA membranes.Further studies show the DLC depositing decelerates the release of degradation product lactic acid and its induction of macrophage M2 polarization by interfering esterase and PLA ester bonds,which further delays the fibrosis process.It was found that the PLA/DLC membrane possess an efficient biophysical mechanism for treatment of peritendinous adhesion. 展开更多
关键词 diamond-like carbon Reactive oxygen species scavenging Foreign body reaction BIODEGRADATION ANTIOXIDANT Peritendinous adhesion
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Preparation of Diamond-like Carbon Films on the Surface of Ti Alloy by Electro-deposition 被引量:3
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作者 Fenglei SHEN Hongwei WANG Dijiang WEN School of Materials Engineering,Suzhou University,Suzhou 215021,China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第3期367-368,共2页
In this paper, diamond-like carbon (DLC) films were deposited on Ti alloy by electro-deposition. DLC films were brown andcomposed of the compact grains whose diameter was about 400 nm. Examined by XPS, the main compos... In this paper, diamond-like carbon (DLC) films were deposited on Ti alloy by electro-deposition. DLC films were brown andcomposed of the compact grains whose diameter was about 400 nm. Examined by XPS, the main composition of the filmswas carbon. In the Raman spectrum, there were a broad peak at 1350 cm^(-1) and a broad peak at 1600 cm^(-1), which indicatedthat the films were DLC films. 展开更多
关键词 diamond-like carbon film ELECTRO-DEPOSITION Ti alloy SURFACE
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Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ECR Plasma Enhanced DC Magnetron Sputtering 被引量:2
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作者 汝丽丽 黄建军 +1 位作者 高亮 齐冰 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期551-555,共5页
Electron cyclotron resonance (ECR) plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon (H-DLC) films. For different microwave powers, both argon and hy... Electron cyclotron resonance (ECR) plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon (H-DLC) films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas. 展开更多
关键词 hydrogenated diamond-like carbon films ECR plasma magnetron sputtering microwave power
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Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films 被引量:1
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作者 Huayu ZHANG Liang-xue LIU +2 位作者 Yulei WANG Hongtao MA Fanxin LIU 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期491-494,共4页
Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectr... Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young's modulus from 193.03 GPa down to 144.52 GPa. 展开更多
关键词 Nitrogen doped diamond-like carbon films ECR-CVD STRUCTURE Mechanical performance
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Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering 被引量:1
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作者 ZHANG Yi-chen SUN Shao-ni +2 位作者 ZHOU Yi MA Sheng-ge BA De-chun 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2006年第B12期119-125,共7页
Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the... Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the Hall discharging current and the argon/nitrogen ratio on the DLC film's performance were studied. The experimental results show that the film's surface roughness, the hardness and the Young's modulus increase firstly and then decrease with the bias voltage incrementally increases. Also when the substrate temperature rises, the surface roughness of the film varies slightly, but its hardness and Young's modulus firstly increase followed by a sharp decrease when the temperature surpassing 120 ℃. With the Hall discharging current incrementally rising, the hardness and Young's modulus of the film decrease and the surface roughness of the film on 316L stainless steel firstly decreased and then remains constant. 展开更多
关键词 fluid machinery and engineering diamond-like carbon films middle frequency unbalanced magnetron sputtering hall ion source
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Tribological Characteristic of Diamond-like Carbon Films Investigated by Lateral Force Microscope 被引量:2
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作者 丁建宁 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2004年第B10期27-29,共3页
Tribological characteristic of different thick diamond-like carbon (DLC) films was studied. A geometrical method was applied to calibrate the cantilever spring constant and to calculate the normal and lateral forces, ... Tribological characteristic of different thick diamond-like carbon (DLC) films was studied. A geometrical method was applied to calibrate the cantilever spring constant and to calculate the normal and lateral forces, respectively. Experimental results show that the lateral force under different applied loads is proportional to the normal force for the DLC films with the thickness of 153.4nm and 64.9nm. However, for the thickness of 4.48nm and 2.78nm DLC films, lateral force is nonlinear to normal force, which is opposed to the Amonton's law.The single asperity regime and the DMT model were put forward to predict the possible nanotribological mechanism between the probe and DLC film. 展开更多
关键词 DLC film LFM FRICTION CALIBRATION force constant
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Studies of diamond-like carbon (DLC) films deposited on stainless steel substrate with Si/SiC intermediate layers 被引量:3
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作者 王静 刘贵昌 +2 位作者 王立达 邓新绿 徐军 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第8期3108-3114,共7页
In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwa... In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition (MW-ECRPECVD) techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy (AFM). With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio ID/IG increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp^3-bond carbon density reducing, resulted in the peak values of hardness (H) and elastic modulus (E). Silicon addition promoted the formation of sp^3 bonding and reduced the hardness. The incorporated Si atoms substituted sp^2- bond carbon atoms in ring structures, which promoted the formation of sp^3-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power. 展开更多
关键词 diamond-like carbon (DLC) stainless steel substrate intermediate layers
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Tribological properties of diamond-like carbon films deposited bv pulsed laser arc deposition 被引量:2
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作者 张振宇 路新春 雒建斌 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第12期3790-3797,共8页
A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thickness... A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm. 展开更多
关键词 pulsed laser arc deposition diamond-like carbon tribological property physical property
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Structures of Diamond-Like Carbon Films 被引量:1
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作者 刘东平 陈宝祥 刘艳红 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第3期285-291,共7页
The structures of diamond-like carbon (DLC) films, including a-C:H, a-C, ta-C:H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C:H... The structures of diamond-like carbon (DLC) films, including a-C:H, a-C, ta-C:H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C:H and a-C films tends to form olefinic and aromatic groups while sp^3 C in ta-C:H and ta-C films tends to form single or multiple sixfold groups. The hydrogen atoms in hydrogenated DLC films contribute to stabilizing the carbon skeletal networks. The film structures are well related to their properties such as optical gaps, density and hardness. The results also indicate that the high density and the extreme hardness of ta-C films are attributed to the forming of large sp^3 C bonded sixfold groups. 展开更多
关键词 diamond-like carbon STRUCTURE PROPERTIES
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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 被引量:1
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作者 张林 马国佳 +2 位作者 林国强 马贺 韩克昌 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期616-621,共6页
In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions... In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron mi- croscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively. 展开更多
关键词 arc ion plating Ti-C-N film nitrogen flow rate microstructure
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Effect of characteristics of plasma plume on the diamond-like film deposition
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作者 姚东升 刘晶儒 +2 位作者 俞昌旋 王丽戈 詹如娟 《Science China Mathematics》 SCIE 2000年第10期1088-1092,共5页
Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the ave... Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied. 展开更多
关键词 FS PULSED laser KINETIC energy and FLUX of IONS diamond-like film
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STUDY OF RAY IRRADIATION ON DIAMOND-LIKE CARBON FILMS
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作者 G.A. Liu T.M. Wang E.Q 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2002年第1期26-32,共7页
Diamond-like carbon (DLC) films have been deposited on glass substrates usingradio-frequency (rf) plasma deposition method. Gamma -ray, ultraviolet (UV) ray were used toirradiate the DLC films. Raman spectroscopy and ... Diamond-like carbon (DLC) films have been deposited on glass substrates usingradio-frequency (rf) plasma deposition method. Gamma -ray, ultraviolet (UV) ray were used toirradiate the DLC films. Raman spectroscopy and infrared (IR) spectroscopy were use to characterizethe changing characteristics of SP^3 C-H bond and hydrogen content in the films due to theirradiations. The results show that, the damage degrees induced by the UV ray on the SP^3 C-H bondsare much stronger than that by the gamma -ray. When the irradiation dose of gamma -ray reaches 1 OX10^4 Gy, the SP^3 C-H bond reduces about 50 percent in number. The square electrical resistance ofthe films is reduced due to the irradiation of UV ray and this is caused by severe oxidation of thefilms. By using the results on optical gap of the films and the fully constrained network theory,the hydrogen content in the as-deposited films is estimated to be l0-25at. percent. 展开更多
关键词 diamond-like carbon film gamma -ray irradiation ultraviolet rayirradiation SP^3 C-H bond infrared transmittance
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Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition 被引量:1
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作者 孙鹏 胡明 +4 位作者 张锋 季一勤 刘华松 刘丹丹 冷健 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第6期581-585,共5页
Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prep... Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spec- troscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases. 展开更多
关键词 DLC thin film ion-beam sputtering deposition chemical bondings infrared optical and mechani-cal properties
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Surface properties of diamond-like carbon films prepared by CVD and PVD methods
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作者 刘东平 刘艳红 陈宝祥 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第3期575-579,共5页
Diamond-like carbon (DLC) films have been deposited using three different techniques: (a) electron cyclotron resonance——plasma source ion implantation, (b) low-pressure dielectric barrier discharge, (c) fil... Diamond-like carbon (DLC) films have been deposited using three different techniques: (a) electron cyclotron resonance——plasma source ion implantation, (b) low-pressure dielectric barrier discharge, (c) filtered——pulsed cathodic arc discharge, The surface and mechanical properties of these films are compared using atomic force microscopebased tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp^3 hybridized carbon while the soft surface layers of tetrahedral amorphous carbon (ta-C) films have graphite-like structure, The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp^3 hybridized carbon enriched surface layers, The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma. 展开更多
关键词 diamond-like carbon film film deposition atomic force microscope
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A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition
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作者 赖秀琼 陈俊芳 +4 位作者 符斯列 李炜 张茂平 史磊 杨春林 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第4期444-447,共4页
In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emis... In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy (OES) of CH4 and H2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope (AFM), X-ray diffraction instrument (XRD), Raman spectroscope and profiler. 展开更多
关键词 plasma density Langmuir probe OES diamond-like carbon thin films
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Structural characteristics of surface-functionalized nitrogen-doped diamond-like carbon films and effective adjustment to cell attachment
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作者 刘爱萍 刘敏 +2 位作者 郁建灿 钱国栋 唐为华 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第5期473-478,共6页
Nitrogen-doped diamond-like carbon (DLC:N) films prepared by the filtered cathodic vacuum arc technology are functionalized with various chemical molecules including dopamine (DA), 3-Aminobenzeneboronic acid (A... Nitrogen-doped diamond-like carbon (DLC:N) films prepared by the filtered cathodic vacuum arc technology are functionalized with various chemical molecules including dopamine (DA), 3-Aminobenzeneboronic acid (APBA), and adenosine triphosphate (ATP), and the impacts of surface functionalities on the surface morphologies, compositions, microstructures, and cell compatibility of the DLC:N films are systematically investigated. We demonstrate that the surface groups of DLC:N have a significant effect on the surface and structural properties of the film. The activity of PC12 cells depends on the particular type of surface functional groups of DLC:N films regardless of surface roughness and wettability. Our research offers a novel way for designing functionalized carbon films as tailorable substrates for biosensors and biomedical engineering applications. 展开更多
关键词 surface functionalization nitrogen-doped diamond-like carbon film MICROSTRUCTURE
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ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS
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作者 项金钟 郑志豪 +3 位作者 廖常庚 熊京 汪永强 张仿清 《Nuclear Science and Techniques》 SCIE CAS CSCD 1992年第1期25-29,共5页
Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2×1016 Ar/cm2 . IR spectra and optical g... Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2×1016 Ar/cm2 . IR spectra and optical gap Eopt were measured. It was found that the sp2 and sp3 components decreased due to the loss of hydrogen during implantation, and the ratio of components sp bonds to sp bonds increased with the ion dose. And the optical gap Eopt decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and unbonded) contents in the films were measured with the nuclear resonant reaction 1H(19 F, x 7) 16O. It is shown that hydrogen plays an important role in affecting some properties of DLC fims. 展开更多
关键词 ION IMPLANTATION diamond-like film
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Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation
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作者 殷冀平 王庆 +3 位作者 吴鑫龙 程春玉 巴德纯 蔺增 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第2期79-86,共8页
Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbo... Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications. 展开更多
关键词 magnetic field enhanced radio frequency ion source Si-incorporation diamond-like carbon film MICROSTRUCTURE HYDROPHOBICITY protective film
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Characterization and Application of Diamond-like Carbon Films
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作者 侯清润 高炬 +1 位作者 杨晔 迟宁 《Rare Metals》 SCIE EI CAS CSCD 1998年第3期48-53,共6页
Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscop... Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied. 展开更多
关键词 Diamond like carbon films TEM AFM porous silicon PHOTOLUMINESCENCE
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Effects of nitrogen content on structure and electrical properties of nitrogen-doped fluorinated diamond-like carbon films
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作者 肖剑荣 李新海 王志兴 《中国有色金属学会会刊:英文版》 EI CSCD 2009年第6期1551-1555,共5页
Nitrogen-doped fluorinated diamond-like carbon(FN-DLC)films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)under different deposited conditions ... Nitrogen-doped fluorinated diamond-like carbon(FN-DLC)films were prepared on single crystal silicon substrate by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)under different deposited conditions with CF4,CH4 and nitrogen as source gases.The influence of nitrogen content on the structure and electrical properties of the films was studied.The films were investigated in terms of surface morphology,microstructure,chemical composition and electrical properties.Atomic force microscopy(AFM)results revealed that the surface morphology of the films became smooth due to doping nitrogen.Fourier transform infrared absorption spectrometry(FTIR)results showed that amouts of C=N and C≡N bonds increased gradually with increasing nitrogen partial pressure r(r=p(N2)/p(N2+CF4+CH4)).Gaussian fit results of C 1s and N 1s in X-ray photoelectron spectra (XPS)showed that the incorporation of nitrogen presented mainly in the forms ofβ-C3N4 and a-CNx(x=1,2,3)in the films.The current-voltage(I-V)measurement results showed that the electrical conductivity of the films increased with increasing nitrogen content. 展开更多
关键词 氟化类金刚石薄膜 氮掺杂 射频等离子体增强化学气相沉积 电学特性 结构 氮素 原子力显微镜 红外吸收光谱
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