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Fabrication of SiC nanowire thin-film transistors using dielectrophoresis
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作者 戴振清 张丽英 +5 位作者 陈长鑫 钱炳建 徐东 陈海燕 魏良明 张亚非 《Journal of Semiconductors》 EI CAS CSCD 2012年第11期37-42,共6页
The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity,... The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity, isopropanol(IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2μm^(-1),4μm^(-1),6μm^(-1),which corresponds to SiC NW concentrations of 0.1μg/μL,0.3μg/μL and 0.5μg/μL,respectively.Thin-film transistors are fabricated based on the aligned SiC NWs of 6μm^(-1).The mobility of a typical device is estimated to be 13.4cm^2/(V·s). 展开更多
关键词 dielectrophoresis sic nanowires thin-film transistors
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