Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly ...Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly that circumvents the diffraction limit of conventional photolithography.Recently,the International Roadmap for Devices and Systems listed DSA as one of the advanced lithography techniques for the fabrication of 3-5 nm technology node devices.DSA can be combined with other lithography techniques,such as extreme ultra violet(EUV)and 193 nm immersion(193i),to further enhance the patterning resolution and the device density.So far,DSA has demonstrated its superior ability for the fabrication of nanoscale devices,such as fin field effect transistor and bit pattern media,offering a variety of configurations for high-density integration and low-cost manufacturing.Over 1 T in-2 device density can be achieved either by direct templating or coupled with nanoimprinting to improve the throughput.The development of high x block copolymer further enhances the patterning resolution of DSA.In addition to its superiority in high-resolution patterning,the implementation ofDSA on a 300 mm pivot line fully demonstrates its potential for large-scale,high-throughput,and cost-effective manufacturing in industrial environment.展开更多
We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field t...We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field theory and derive,in a non-parametric setting,the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape.The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized.The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical interconnect accesses(VIA).展开更多
A novel hydrogen peroxide biosensor has been fabricated based on covalently linked horseradish peroxidase (HRP) onto L- glutathione self-assembled monolayers (SAMs). The SAMs-based electrode was characterized by e...A novel hydrogen peroxide biosensor has been fabricated based on covalently linked horseradish peroxidase (HRP) onto L- glutathione self-assembled monolayers (SAMs). The SAMs-based electrode was characterized by electrochemical methods, and direct electrochemistry of HRP can be achieved with formal potential of-0.242 V (vs. saturated Ag/AgCl) in pH 7 phosphate buffer solution (PBS), the redox peak current is linear to scan rate and rate constant can be calculated to be 0.042 s^-1. The HRP-SAMs- based biosensors show its better electrocatalysis to hydrogen peroxide in the concentration range of 1 × 10^-6 mol/L to 1.2 × 10^-3 mol/L with a detection limit of 4 × 10^-7 mol/L. The apparent Michealis-Menten constant is 3.12 mmol/L. The biosensor can effectively eliminate the interferences of dopamine, ascorbic acid, uric acid, catechol and p-acetaminophen.展开更多
Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to...Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to expand innovative applications.Here,we develop a track-guided self-transportation system mediated by sequential wettability transition accompanied with capillary transportation.Alkaline fuel is loaded into polydimethylsiloxane(PDMS)cuboid to trigger the wettability transition of distributed superhydrophobic tracks laid in shallow water.After the wettability transition,the induced capillary force can propel the repetitive track-to-track transportation of PDMS.Importantly,the spacing between adjacent tracks is rationally designed based on multiple factors including threshold of wettability transition,diffusion kinetics and capillary interaction.Furthermore,the track-guided transportation system is applied to realize directed self-assembly of multiple PDMS building blocks for designated configuration,which increases the complexity and intelligence of self-assembly systems.展开更多
Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/ch...Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/chiral assembly and 3D printing technology,providing precise spatial control over chiral nano/microstructures of rod-shaped colloidal nanoparticles in intricate geometries.We designed reactive chiral inks based on cellulose nanocrystal(CNC)suspensions and acrylamide monomers,enabling the chiral assembly at nano/microscale,beyond the resolution seen in printed materials.We employed a range of complementary techniques including Orthogonal Superposition rheometry and in situ rheo-optic measurements under steady shear rate conditions.These techniques help us to understand the nature of the nonlinear flow behavior of the chiral inks,and directly probe the flow-induced microstructural dynamics and phase transitions at constant shear rates,as well as their post-flow relaxation.Furthermore,we analyzed the photo-curing process to identify key parameters affecting gelation kinetics and structural integrity of the printed object within the supporting bath.These insights into the interplay between the chiral inks self-assembly dynamics,3D printing flow kinematics and photopolymerization kinetics provide a roadmap to direct the out-of-equilibrium arrangement of CNC particles in the 3D printed filaments,ranging from uniform nematic to 3D concentric chiral structures with controlled pitch length,as well as random orientation of chiral domains.Our biomimetic approach can pave the way for the creation of materials with superior mechanical properties or programable photonic responses that arise from 3D nano/microstructure and can be translated into larger scale 3D printed designs.展开更多
Advancements in micro/nanofabrication have enabled the realization of practical micro/nanoscale photonic devices such as absorbers,solar cells,metalenses,and metaholograms.Although the performance of these photonic de...Advancements in micro/nanofabrication have enabled the realization of practical micro/nanoscale photonic devices such as absorbers,solar cells,metalenses,and metaholograms.Although the performance of these photonic devices has been improved by enhancing the design flexibility of structural materials through advanced fabrication methods,achieving large-area and high-throughput fabrication of tiny structural materials remains a challenge.In this aspect,various technologies have been investigated for realizing the mass production of practical devices consisting of micro/nanostructural materials.This review describes the recent advancements in soft lithography,colloidal self-assembly,and block copolymer self-assembly,which are promising methods suitable for commercialization of photonic applications.In addition,we introduce low-cost and large-scale techniques realizing micro/nano devices with specific examples such as display technology and sensors.The inferences presented in this review are expected to function as a guide for promising methods of accelerating the mass production of various sub-wavelength-scale photonic devices.展开更多
Some precision electronics such as signal transmitters need to not only emit effective signal but also be protected from the external electromagnetic(EM)waves.Thus,directional electromagnetic interference(EMI)shieldin...Some precision electronics such as signal transmitters need to not only emit effective signal but also be protected from the external electromagnetic(EM)waves.Thus,directional electromagnetic interference(EMI)shielding materials(i.e.,when the EM wave is incident from different sides of the sample,the EMI shielding effectiveness(SE)is rather different)are strongly required;unfortunately,no comprehensive literature report is available on this research field.Herein,Nicoated melamine foams(Ni@MF)were obtained by a facile electroless plating process,and multiwalled carbon nanotube(CNT)papers were prepared via a simple vacuum-assisted self-assembly approach.Then,step-wise asymmetric poly(butylene adipate-co-terephthalate)(PBAT)composites consisting of loose Ni@MF layer and compact CNT layer were successfully fabricated via a facile solution encapsulation approach.The step-wise asymmetric structures and electrical conductivity endow the Ni@MF/CNT/PBAT composites with unprecedented directional EMI shielding performances.When the EM wave is incident from Ni@MF layer or CNT layer,Ni@MF-5/CNT-75/PBAT exhibits the total EMI SE(SET)of 38.3 and 29.5 dB,respectively,which illustrates theΔSET of 8.8 dB.This work opens a new research window for directional EMI shielding composites with step-wise asymmetric structures,which has promising applications in portable electronics and next-generation communication technologies.展开更多
Technology roadmaps have been a part of the semiconductor industry for many years.The first roadmap was Moore’s law,which started as an empirical observation that competitive forces then turned into a prediction that...Technology roadmaps have been a part of the semiconductor industry for many years.The first roadmap was Moore’s law,which started as an empirical observation that competitive forces then turned into a prediction that became an industry roadmap.Then the ITRS roadmap was developed and for many years was used by leading edge semiconductor producers to drive new technology they needed.Now there is the IRDS roadmap,which projects semiconductor end user requirements and develops a technology roadmap based on those requirements.The 2017 IRDS roadmap was just released.To prepare the roadmap,we received input from experts around the world.The roadmap predicts that the requirements of high performance logic will drive the development of different device structures in logic chips.Memory technology will also advance but is more focused on cost than high performance logic is.Because of this,there may be a split in the patterning roadmaps for different types of devices.Logic will adopt EUV and its extensions,while flash memory will consider nanoimprint.Directed self-assembly and direct write e-beam are also being developed.DSA has the potential to improve CD uniformity and lower costs.Direct write e-beam promises to make personalization of chips more feasible.DRAM memory will trail logic in critical dimensions and will adopt EUV when it becomes cost effective.The lithography community will both have to make EUV work and overcome the challenges of randomness in CDs and resist performance,while memory will try to make nanoimprint a reliable and low defect method of patterning.Long term,logic is expected to start focusing on 3D architectures in the late 2020’s.This will put a tremendous stress on the yield of patterning processes and on reducing the number of process steps that are required.It will also put more focus on hole type patterns,which will become one of the key patterning challenges in the future.展开更多
Highly intricate surface architectures derived from patterned polymer microstructures have received increasing concern in recent years. Directional photo-manipulation (DPM) of azopolymers is one of the effective str...Highly intricate surface architectures derived from patterned polymer microstructures have received increasing concern in recent years. Directional photo-manipulation (DPM) of azopolymers is one of the effective strategies to tune the patterned polymer microstructures through directional mass migration (DMM) upon polarized light illumination. In this feature article, we emphasize the latest advances of DPM on azopatterns created by self-assembly. The mechanism of DMM, the photo-manipulation performance, and functions of manipulated patterns are introduced in sequence. As presented, DPM can manipulate the as-prepared microstructures feasibly by taking the advantages of non-contacting and nondestructive characters. Moreover, the challenges and opportunities of DPM strategy are discussed in conclusion.展开更多
Photonic crystal(PC)patterns with tunable and changeable nonvolatile structural colors printed from a single ink are of great interest for optical products but have rarely been reported because most inks can only outp...Photonic crystal(PC)patterns with tunable and changeable nonvolatile structural colors printed from a single ink are of great interest for optical products but have rarely been reported because most inks can only output one respective structural color.Herein,we propose a facile yet effective kinetically controlled self-assembly strategy to address this challenge.An ink formulation containing supramolecular block copolymers(SBCPs)is developed.SBCP patterns were printed by direct-ink-writing followed by solvent annealing to generate different structural colors by simply controlling the annealing time.The self-assembly kinetic regime suggests that different colors result from various kinetically trapped metastable states.In turn,the variation in structural color enables“visualization”of the self-assembly dynamics.Furthermore,we demonstrate that these kinetically trapped structures exhibit different responsive color-change behaviors.In addition,this kinetic control strategy can be synergistic with thermodynamic control to extend the color range.This study provides a facile yet effective solution for well-designed PC patterns with tunable,responsive,and unfading colors printed from the simplest single-nozzle printer with a single colorless ink,presenting great potential in broad applications,including information storage,encryption,and anti-fake.展开更多
作为当前集成电路制造的主流技术,光学光刻在趋近其分辨力极限的同时,面临着越来越大的挑战,即便在波前工程和分辨力增强技术的帮助下,光学光刻的分辨力也难以满足快速发展的半导体产业的技术需求。接近式 X 射线光刻技术(XRL)、散射角...作为当前集成电路制造的主流技术,光学光刻在趋近其分辨力极限的同时,面临着越来越大的挑战,即便在波前工程和分辨力增强技术的帮助下,光学光刻的分辨力也难以满足快速发展的半导体产业的技术需求。接近式 X 射线光刻技术(XRL)、散射角限制电子束投影光刻技术(SCALPEL)、电子束直写光刻技术(EBDW)、极紫外线即软 X 射线投影光刻技术(EUVL)、离子投影光刻技术(IPL)等下一代光刻技术(NGL)将会在特征线宽为 100—70 nm 的技术节点介入集成电路制造的主流技术中。从目前 NGL 技术发展的趋势和市场需求的多元化来看,竞争的结果很可能是各种 NGL 技术并存。当特征尺寸进入纳米尺度(≤100 nm)以后,最终只有那些原子级的成像技术才能成为胜者。展开更多
文摘Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly that circumvents the diffraction limit of conventional photolithography.Recently,the International Roadmap for Devices and Systems listed DSA as one of the advanced lithography techniques for the fabrication of 3-5 nm technology node devices.DSA can be combined with other lithography techniques,such as extreme ultra violet(EUV)and 193 nm immersion(193i),to further enhance the patterning resolution and the device density.So far,DSA has demonstrated its superior ability for the fabrication of nanoscale devices,such as fin field effect transistor and bit pattern media,offering a variety of configurations for high-density integration and low-cost manufacturing.Over 1 T in-2 device density can be achieved either by direct templating or coupled with nanoimprinting to improve the throughput.The development of high x block copolymer further enhances the patterning resolution of DSA.In addition to its superiority in high-resolution patterning,the implementation ofDSA on a 300 mm pivot line fully demonstrates its potential for large-scale,high-throughput,and cost-effective manufacturing in industrial environment.
文摘We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field theory and derive,in a non-parametric setting,the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape.The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized.The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical interconnect accesses(VIA).
文摘A novel hydrogen peroxide biosensor has been fabricated based on covalently linked horseradish peroxidase (HRP) onto L- glutathione self-assembled monolayers (SAMs). The SAMs-based electrode was characterized by electrochemical methods, and direct electrochemistry of HRP can be achieved with formal potential of-0.242 V (vs. saturated Ag/AgCl) in pH 7 phosphate buffer solution (PBS), the redox peak current is linear to scan rate and rate constant can be calculated to be 0.042 s^-1. The HRP-SAMs- based biosensors show its better electrocatalysis to hydrogen peroxide in the concentration range of 1 × 10^-6 mol/L to 1.2 × 10^-3 mol/L with a detection limit of 4 × 10^-7 mol/L. The apparent Michealis-Menten constant is 3.12 mmol/L. The biosensor can effectively eliminate the interferences of dopamine, ascorbic acid, uric acid, catechol and p-acetaminophen.
基金supported by the National Natural Science Foundation of China(Nos.52122315,21972008)Beijing Nova Program(No.Z201100006820021).
文摘Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to expand innovative applications.Here,we develop a track-guided self-transportation system mediated by sequential wettability transition accompanied with capillary transportation.Alkaline fuel is loaded into polydimethylsiloxane(PDMS)cuboid to trigger the wettability transition of distributed superhydrophobic tracks laid in shallow water.After the wettability transition,the induced capillary force can propel the repetitive track-to-track transportation of PDMS.Importantly,the spacing between adjacent tracks is rationally designed based on multiple factors including threshold of wettability transition,diffusion kinetics and capillary interaction.Furthermore,the track-guided transportation system is applied to realize directed self-assembly of multiple PDMS building blocks for designated configuration,which increases the complexity and intelligence of self-assembly systems.
基金the support from the University of South Carolina
文摘Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/chiral assembly and 3D printing technology,providing precise spatial control over chiral nano/microstructures of rod-shaped colloidal nanoparticles in intricate geometries.We designed reactive chiral inks based on cellulose nanocrystal(CNC)suspensions and acrylamide monomers,enabling the chiral assembly at nano/microscale,beyond the resolution seen in printed materials.We employed a range of complementary techniques including Orthogonal Superposition rheometry and in situ rheo-optic measurements under steady shear rate conditions.These techniques help us to understand the nature of the nonlinear flow behavior of the chiral inks,and directly probe the flow-induced microstructural dynamics and phase transitions at constant shear rates,as well as their post-flow relaxation.Furthermore,we analyzed the photo-curing process to identify key parameters affecting gelation kinetics and structural integrity of the printed object within the supporting bath.These insights into the interplay between the chiral inks self-assembly dynamics,3D printing flow kinematics and photopolymerization kinetics provide a roadmap to direct the out-of-equilibrium arrangement of CNC particles in the 3D printed filaments,ranging from uniform nematic to 3D concentric chiral structures with controlled pitch length,as well as random orientation of chiral domains.Our biomimetic approach can pave the way for the creation of materials with superior mechanical properties or programable photonic responses that arise from 3D nano/microstructure and can be translated into larger scale 3D printed designs.
基金supported by the POSCOPOSTECH-RIST Convergence Research Center program funded by POSCO,and the National Research Foundation (NRF)grant (NRF-2022M3C1A3081312)Y.Y.and D.K.O.acknowledge Hyundai Motor Chung Mong-Koo fellowships.Y.Y.acknowledges the NRF fellowship (NRF-2021R1A6A3A13038935)funded by the Ministry of Education,Republic of Korea.H.K.and N.J.acknowledge POSTECHIAN fellowships.
文摘Advancements in micro/nanofabrication have enabled the realization of practical micro/nanoscale photonic devices such as absorbers,solar cells,metalenses,and metaholograms.Although the performance of these photonic devices has been improved by enhancing the design flexibility of structural materials through advanced fabrication methods,achieving large-area and high-throughput fabrication of tiny structural materials remains a challenge.In this aspect,various technologies have been investigated for realizing the mass production of practical devices consisting of micro/nanostructural materials.This review describes the recent advancements in soft lithography,colloidal self-assembly,and block copolymer self-assembly,which are promising methods suitable for commercialization of photonic applications.In addition,we introduce low-cost and large-scale techniques realizing micro/nano devices with specific examples such as display technology and sensors.The inferences presented in this review are expected to function as a guide for promising methods of accelerating the mass production of various sub-wavelength-scale photonic devices.
基金Science and Technology Plan Project of Guizhou Province(No.[2019]1084 and[2018]5781)National Natural Science Foundation of China(No.51963003)+3 种基金The Youth Science and Technology Talent Growth Project of Guizhou Province Education Department(No.[2018]106)Outstanding Youth Program of Guizhou Province(No.20170439178)The Key project of Fundamental research in Guizhou province[2020]1Z044Scientific Research Project of Introduced Talents of Guizhou University(No.(2017)07)are acknowledged for the financial support.
文摘Some precision electronics such as signal transmitters need to not only emit effective signal but also be protected from the external electromagnetic(EM)waves.Thus,directional electromagnetic interference(EMI)shielding materials(i.e.,when the EM wave is incident from different sides of the sample,the EMI shielding effectiveness(SE)is rather different)are strongly required;unfortunately,no comprehensive literature report is available on this research field.Herein,Nicoated melamine foams(Ni@MF)were obtained by a facile electroless plating process,and multiwalled carbon nanotube(CNT)papers were prepared via a simple vacuum-assisted self-assembly approach.Then,step-wise asymmetric poly(butylene adipate-co-terephthalate)(PBAT)composites consisting of loose Ni@MF layer and compact CNT layer were successfully fabricated via a facile solution encapsulation approach.The step-wise asymmetric structures and electrical conductivity endow the Ni@MF/CNT/PBAT composites with unprecedented directional EMI shielding performances.When the EM wave is incident from Ni@MF layer or CNT layer,Ni@MF-5/CNT-75/PBAT exhibits the total EMI SE(SET)of 38.3 and 29.5 dB,respectively,which illustrates theΔSET of 8.8 dB.This work opens a new research window for directional EMI shielding composites with step-wise asymmetric structures,which has promising applications in portable electronics and next-generation communication technologies.
文摘Technology roadmaps have been a part of the semiconductor industry for many years.The first roadmap was Moore’s law,which started as an empirical observation that competitive forces then turned into a prediction that became an industry roadmap.Then the ITRS roadmap was developed and for many years was used by leading edge semiconductor producers to drive new technology they needed.Now there is the IRDS roadmap,which projects semiconductor end user requirements and develops a technology roadmap based on those requirements.The 2017 IRDS roadmap was just released.To prepare the roadmap,we received input from experts around the world.The roadmap predicts that the requirements of high performance logic will drive the development of different device structures in logic chips.Memory technology will also advance but is more focused on cost than high performance logic is.Because of this,there may be a split in the patterning roadmaps for different types of devices.Logic will adopt EUV and its extensions,while flash memory will consider nanoimprint.Directed self-assembly and direct write e-beam are also being developed.DSA has the potential to improve CD uniformity and lower costs.Direct write e-beam promises to make personalization of chips more feasible.DRAM memory will trail logic in critical dimensions and will adopt EUV when it becomes cost effective.The lithography community will both have to make EUV work and overcome the challenges of randomness in CDs and resist performance,while memory will try to make nanoimprint a reliable and low defect method of patterning.Long term,logic is expected to start focusing on 3D architectures in the late 2020’s.This will put a tremendous stress on the yield of patterning processes and on reducing the number of process steps that are required.It will also put more focus on hole type patterns,which will become one of the key patterning challenges in the future.
基金financially supported by the National Natural Science Foundation of China(Nos.51622301 and 51573046)Projects of Shanghai Municipality(Nos.14SG29 and 17JC400700)Fundamental Research Funds for the Central Universities(No.222201718002)
文摘Highly intricate surface architectures derived from patterned polymer microstructures have received increasing concern in recent years. Directional photo-manipulation (DPM) of azopolymers is one of the effective strategies to tune the patterned polymer microstructures through directional mass migration (DMM) upon polarized light illumination. In this feature article, we emphasize the latest advances of DPM on azopatterns created by self-assembly. The mechanism of DMM, the photo-manipulation performance, and functions of manipulated patterns are introduced in sequence. As presented, DPM can manipulate the as-prepared microstructures feasibly by taking the advantages of non-contacting and nondestructive characters. Moreover, the challenges and opportunities of DPM strategy are discussed in conclusion.
基金the National Natural Science Foundation of China(grant nos.52003094 and 51933005)the Fundamental Research Funds for the Central Universities(grant no.2020kfyXJJS011).
文摘Photonic crystal(PC)patterns with tunable and changeable nonvolatile structural colors printed from a single ink are of great interest for optical products but have rarely been reported because most inks can only output one respective structural color.Herein,we propose a facile yet effective kinetically controlled self-assembly strategy to address this challenge.An ink formulation containing supramolecular block copolymers(SBCPs)is developed.SBCP patterns were printed by direct-ink-writing followed by solvent annealing to generate different structural colors by simply controlling the annealing time.The self-assembly kinetic regime suggests that different colors result from various kinetically trapped metastable states.In turn,the variation in structural color enables“visualization”of the self-assembly dynamics.Furthermore,we demonstrate that these kinetically trapped structures exhibit different responsive color-change behaviors.In addition,this kinetic control strategy can be synergistic with thermodynamic control to extend the color range.This study provides a facile yet effective solution for well-designed PC patterns with tunable,responsive,and unfading colors printed from the simplest single-nozzle printer with a single colorless ink,presenting great potential in broad applications,including information storage,encryption,and anti-fake.