The technique of glow discharges in radio frequency configuration was applied to ignite hollow cathode vacuum arc discharge. The effect of discharge parameters on the building up of hollow cathode arc discharge was in...The technique of glow discharges in radio frequency configuration was applied to ignite hollow cathode vacuum arc discharge. The effect of discharge parameters on the building up of hollow cathode arc discharge was investigated. The emission spectrum during the vacuum arc ignition process was measured to disclose the discharge dynamics. There exists a threshold radio frequency power (300 W), beyond which hollow cathode is in T mode discharge status while radio frequency discharge changes into the arc discharge. With the increase of the radio frequency power, the plasma temperature and electronic density increase, and the discharge mode transits more rapidly. The ignition time of hollow cathode vacuum arc discharge is less than 4 s with a radio frequency power of 700 W.展开更多
The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitude...The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.展开更多
In a 2.45 GHz electron cyclotron resonance(ECR)ion thruster powered with rod antenna under a cross magnetic field,abnormal behaviours such as sudden drop of ion beam current(Ib)and larger increasing-rate of Ibin the h...In a 2.45 GHz electron cyclotron resonance(ECR)ion thruster powered with rod antenna under a cross magnetic field,abnormal behaviours such as sudden drop of ion beam current(Ib)and larger increasing-rate of Ibin the high microwave power(Pw)discharges at high gas flow rates were observed.A differential method was proposed to reveal the changes in the radial profiles of gray values extracted from the end-view discharge images.The increasing-rate of Ibwith respect to Pwwas used to evaluate efficiencies of ion production and transport.Analyses indicate that discharges are dominantly sustained by ordinary wave via electron heating in the electron plasma resonance layer that can shift along the rod-antenna,and extraordinary wave can only ignite a discharge in the ECR layer in the low gas flow rate regime.In terms of the confinement region defined by the magnetic field lines intercepting with the screen grid,the confinement region of the optimized 2.45 GHz cross magnetic field takes the shape of hourglass,enabling the high increasing-rate of Ib with respect to Pw in high power discharges at high gas flow rates.Correlated with the accompanied bright boundary layer appearing in the differentiated image,the sudden drop of Ib in the low gas flow rate regime is attributed to the discharge ignited by the enhanced extraordinary wave in the ECR layer neighbouring the narrowest confinement region,where the produced ions can promptly enter the loss region.展开更多
基金National Natural Science Foundation of China,Youth Foundation of Heilongjiang Institute of Technology (2012QJ13).
文摘The technique of glow discharges in radio frequency configuration was applied to ignite hollow cathode vacuum arc discharge. The effect of discharge parameters on the building up of hollow cathode arc discharge was investigated. The emission spectrum during the vacuum arc ignition process was measured to disclose the discharge dynamics. There exists a threshold radio frequency power (300 W), beyond which hollow cathode is in T mode discharge status while radio frequency discharge changes into the arc discharge. With the increase of the radio frequency power, the plasma temperature and electronic density increase, and the discharge mode transits more rapidly. The ignition time of hollow cathode vacuum arc discharge is less than 4 s with a radio frequency power of 700 W.
基金financially supported by National Natural Science Foundation of China(NSFC)(Nos.12275043 and 11935005)the Fundamental Research Funds for the Central Universities(No.DUT21TD104)China Scholarship Council(No.202106060085)。
文摘The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.
基金supported by National Natural Science Foundation of China(No.11975070)Open Funds for Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics(No.zwk1609)。
文摘In a 2.45 GHz electron cyclotron resonance(ECR)ion thruster powered with rod antenna under a cross magnetic field,abnormal behaviours such as sudden drop of ion beam current(Ib)and larger increasing-rate of Ibin the high microwave power(Pw)discharges at high gas flow rates were observed.A differential method was proposed to reveal the changes in the radial profiles of gray values extracted from the end-view discharge images.The increasing-rate of Ibwith respect to Pwwas used to evaluate efficiencies of ion production and transport.Analyses indicate that discharges are dominantly sustained by ordinary wave via electron heating in the electron plasma resonance layer that can shift along the rod-antenna,and extraordinary wave can only ignite a discharge in the ECR layer in the low gas flow rate regime.In terms of the confinement region defined by the magnetic field lines intercepting with the screen grid,the confinement region of the optimized 2.45 GHz cross magnetic field takes the shape of hourglass,enabling the high increasing-rate of Ib with respect to Pw in high power discharges at high gas flow rates.Correlated with the accompanied bright boundary layer appearing in the differentiated image,the sudden drop of Ib in the low gas flow rate regime is attributed to the discharge ignited by the enhanced extraordinary wave in the ECR layer neighbouring the narrowest confinement region,where the produced ions can promptly enter the loss region.