期刊文献+
共找到30篇文章
< 1 2 >
每页显示 20 50 100
Phase-Based Optical Flow Method with Optimized Parameter Settings for Enhancing Displacement Measurement Adaptability
1
作者 Zhaoxin Peng Menglian Liu +2 位作者 Zhiliang Wang Wei Liu Xian Wang 《Open Journal of Applied Sciences》 2024年第5期1165-1184,共20页
To enhance the applicability and measurement accuracy of phase-based optical flow method using complex steerable pyramids in structural displacement measurement engineering applications, an improved method of optimizi... To enhance the applicability and measurement accuracy of phase-based optical flow method using complex steerable pyramids in structural displacement measurement engineering applications, an improved method of optimizing parameter settings is proposed. The optimized parameters include the best measurement points of the Region of Interest (ROI) and the levels of pyramid filters. Additionally, to address the issue of updating reference frames in practical applications due to the difficulty in estimating the maximum effective measurement value, a mechanism for dynamically updating reference frames is introduced. Experimental results demonstrate that compared to representative image gradient-based displacement measurement methods, the proposed method exhibits higher measurement accuracy in engineering applications. This provides reliable data support for structural damage identification research based on vibration signals and is expected to broaden the engineering application prospects for structural health monitoring. 展开更多
关键词 displacement measurement Phase-Based Optical Flow Optimized Parameter Setting
下载PDF
Review of Electronic Speckle Pattern Interferometry(ESPI) for Three Dimensional Displacement Measurement 被引量:22
2
作者 YANG Lianxiang XIE Xin +2 位作者 ZHU Lianqing WU Sijin WANG Yonghong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2014年第1期1-13,共13页
Three dimensional(3D) displacements, which can be translated further into 3D strain, are key parameters tor design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorit... Three dimensional(3D) displacements, which can be translated further into 3D strain, are key parameters tor design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorithms, several different 3D electronic speckle pattern interferometry(ESPl) systems for displacement and strain measurements have been achieved and commercialized. This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement. After an overview of the fundamentals of ESP! theory, temporal phase-shift, and spatial phase-shift techniques, 3D deformation measurements by the temporal phase-shift ESPI system, which is suited well for static measurement, and by the spatial phase-shift ESPI system, which is particularly useful for dynamic measurement, are discussed. For each method, the basic theory, a brief derivation and different optical layouts are presented. The state of art application, potential and limitation of the ESPI systems are shown and demonstrated. 展开更多
关键词 electronic speckle pattern interferometry(ESPI) three dimensional displacement and strain measurement static loading dynamic loading phase-shift technology
下载PDF
Vertical Displacement Measurement in a Slow-Moving Sinkhole Using BOTDA
3
作者 Pascual SEVILLANO Javier PRECIADO-GARBAYO +4 位作者 Jorge SEVIL Francisco GUTIERREZ Juan JMARTiNEZ Sonia MARTiN-LOPEZ Miguel GONZALEZ-HERRAEZ 《Photonic Sensors》 SCIE EI CSCD 2024年第1期23-39,共17页
The effectiveness of monitoring and early-warning systems for ground deformation phenomena,such as sinkholes,depends on their ability to accurately resolve the ongoing ground displacement and detect the subtle deforma... The effectiveness of monitoring and early-warning systems for ground deformation phenomena,such as sinkholes,depends on their ability to accurately resolve the ongoing ground displacement and detect the subtle deformation preceding catastrophic failures.Sagging sinkholes with a slow subsidence rate and diffuse edges pose a significant challenge for subsidence monitoring due to the low deformation rates and limited lateral strain gradients.In this work,we satisfactorily illustrate the practicality of the Brillouin optical time domain analysis(BOTDA)to measure the spatial-temporal patterns of the vertical displacement in such challenging slow-moving sagging sinkholes.To assess the performance of the approach,we compare the strain recorded by the distributed optical fiber sensor with the vertical displacement measured by high-precision leveling.The results show a good spatial correlation with the ability to identify the maximum subsidence point.There is also a good temporal correlation with the detection of an acceleration phase in the subsidence associated with a flood event. 展开更多
关键词 Distributed fiber optic sensing(DFOS) vertical displacement measurement slow subsidence rate sinkhole hazard early-warning system
原文传递
Improved calibration method for displacement transformation coefficient in optical and visual measurements
4
作者 Haopeng Li Zurong Qiu 《Nanotechnology and Precision Engineering》 CAS CSCD 2023年第1期12-25,共14页
Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement trans... Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement transformation coefficient(DTC)of an LVDMM changes with the coordinates in the camera image coordinate system during the displacement measuring process,and these changes affect the displacement measurement accuracy of LVDMMs in the full field of view(FFOV).To give LVDMMs higher accuracy in the FFOV and make them adaptable to widely varying measurement demands,a new calibration method is proposed to improve the displacement measurement accuracy of LVDMMs in the FFOV.First,an image coordinate system,a pixel measurement coordinate system,and a displacement measurement coordinate system are established on the laser receiving screen of the LVDMM.In addition,marker spots in the FFOV are selected,and the DTCs at the marker spots are obtained from calibration experiments.Also,a fitting method based on locally weighted scatterplot smoothing(LOWESS)is selected,and with this fitting method the distribution functions of the DTCs in the FFOV are obtained based on the DTCs at the marker spots.Finally,the calibrated distribution functions of the DTCs are applied to the LVDMM,and experiments conducted to verify the displacement measurement accuracies are reported.The results show that the FFOV measurement accuracies for horizontal and vertical displacements are better than±15μm and±19μm,respectively,and that for oblique displacement is better than±24μm.Compared with the traditional calibration method,the displacement measurement error in the FFOV is now 90%smaller.This research on an improved calibration method has certain significance for improving the measurement accuracy of LVDMMs in the FFOV,and it provides a new method and idea for other vision-based fields in which camera parameters must be calibrated. 展开更多
关键词 displacement transformation coefficient(DTC) Laser and vision-based displacement measuring module(LVDMM) displacement measurement Locally weighted scatterplot smoothing(LOWESS) Calibration method
下载PDF
Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer
5
作者 王菊 蔡滋恒 +2 位作者 于晋龙 罗浩 马闯 《Chinese Optics Letters》 SCIE EI CAS CSCD 2023年第10期30-35,共6页
In this Letter,we propose a simple structure of an orthogonal type double Michelson interferometer.The orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional ... In this Letter,we propose a simple structure of an orthogonal type double Michelson interferometer.The orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional interferometers to determine the displacement direction.The displacement measurement principle and signal processing method of the orthogonal double interferometer are studied.Unlike the arctangent algorithm,the displacement analysis uses the arc cosine algorithm,avoiding any pole limit in the distance analysis process.The minimum step size of the final experimental displacement system is 5 nm,which exhibits good repeatability,and the average error is less than 0.12 nm. 展开更多
关键词 orthogonal detection nanoscale displacement measurement laser interferometer
原文传递
A new method for angular displacement measurement 被引量:3
6
作者 张彩妮 王向朝 《Chinese Optics Letters》 SCIE EI CAS CSCD 2003年第8期459-461,共3页
We describe a new method for angular displacement measurements that is based on a Fabry-Perot interferometer. A measurement accuracy of 10-8 rad is obtained by use of the sinusoidal phase modulating interferometry. An... We describe a new method for angular displacement measurements that is based on a Fabry-Perot interferometer. A measurement accuracy of 10-8 rad is obtained by use of the sinusoidal phase modulating interferometry. Another Fabry-Perot interferometer is used to obtain the key initial angle of incidence. 展开更多
关键词 for in on by A new method for angular displacement measurement of
原文传递
A planar capacitive sensor for 2D long-range displacement measurement 被引量:2
7
作者 Jian-ping YU Wen WANG +2 位作者 Ke-qing LU De-qing MEI Zi-chen CHEN 《Journal of Zhejiang University-Science C(Computers and Electronics)》 SCIE EI 2013年第4期252-257,共6页
A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the chang... A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate.By accumulating the number of quarters in each direction and the specific position in the final quarter,the large-scale measurement is fulfilled.Displacements in Xand Y-direction can be measured independently and simultaneously.Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity.Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm.An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed.The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors. 展开更多
关键词 Planar capacitive sensor (PCS) displacement measurement 2D large-scale measurement
原文传递
Sinusoidal Phase-Modulating Fabry-Perot Interferometer for Angular Displacement Measurement 被引量:1
8
作者 Caini Zhang, Xiangzhao Wang Shanghai Institute of Optics and Fine Mechanics, CAS, P. R. China, Tel: 86-21-59911191, Fax: 86-21-59532831 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期821-822,共2页
In this paper, a sinusoidal phase-modulating Fabry-Perot interferometer is proposed to measure angular displacement. The usefulness of the interferometer is demonstrated by simulations and experiments.
关键词 for IS in In Sinusoidal Phase-Modulating Fabry-Perot Interferometer for Angular displacement measurement of that HIGH
原文传递
A modified moire interferometer for three-dimensional displacement measurement 被引量:3
9
作者 王卫宁 孙建海 《Chinese Optics Letters》 SCIE EI CAS CSCD 2004年第7期396-398,共3页
This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement... This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown. 展开更多
关键词 A modified moire interferometer for three-dimensional displacement measurement
原文传递
Ultra-high speed holographic shape and displacement measurements in the hearing sciences
10
作者 Haimi Tang Pavel Psota +2 位作者 John J.Rosowski Cosme Furlong Jeffrey Tao Cheng 《Light(Advanced Manufacturing)》 2022年第2期1-14,共14页
The auditory system of mammals enables the perception of sound from our surrounding world.Containing some of the smallest bones in the body,the ear transduces complex acoustic signals with high-temporal sensitivity to... The auditory system of mammals enables the perception of sound from our surrounding world.Containing some of the smallest bones in the body,the ear transduces complex acoustic signals with high-temporal sensitivity to complex mechanical vibrations with magnitudes as small as tens of picometers.Measurements of the shape and acoustically induced motions of different components of the ear are essential if we are to expand our understanding of hearing mechanisms,and also provide quantitative information for the development of numerical ear models that can be used to improve hearing protection,clinical diagnosis,and repair of damaged or diseased ears.We are developing digital holographic methods and instrumentation using an ultra-high speed camera to measure shape and acoustically-induced motions in the middle ear.Specifically we study the eardrum,the first structure of the middle ear which initializes the acoustic-mechanical transduction of sound for hearing.Our measurement system is capable of performing holographic measurement at rates up to 2.1 M frames per second.Two shape measurement modalities had previously been implemented into our holographic systems:(1)a multi-wavelength method with a wavelength tunable laser;and(2)a multi-angle illumination method with a single wavelength laser.In this paper,we present a third method using a miniaturized fringe projection system with a microelectromechanical system(MEMS)mirror.Further,we optimize the processing of large data sets of holographic displacement measurements using a vectorized Pearson's correlation algorithm.We validate and compare the shape and displacement measurements of our methodologies using a National Institute of Standards and Technology(NIST)traceable gauge and sound-activated latex membranes and human eardrums. 展开更多
关键词 Ultra-high speed digital holography Microelectromechanical systems(MEMS) Miniaturized Fringe Projection Middle-ear mechanics Shape and displacement measurements.
原文传递
Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer
11
作者 Ming Zhang Chang Ni +3 位作者 Yu Zhu Leijie Wang Chuxiong Hu Jinchun Hu 《Chinese Optics Letters》 SCIE EI CAS CSCD 2017年第10期56-60,共5页
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinus... A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method. 展开更多
关键词 Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer
原文传递
Sampling Moiré method for full-field deformation measurement: A brief review 被引量:2
12
作者 Qinghua Wang Shien Ri 《Theoretical & Applied Mechanics Letters》 CSCD 2022年第1期42-48,共7页
The sampling Moiré(SM) method is one of the vision-based non-contact deformation measurement methods, which is a powerful tool for structural health monitoring and elucidation of damage mechanisms of materials. I... The sampling Moiré(SM) method is one of the vision-based non-contact deformation measurement methods, which is a powerful tool for structural health monitoring and elucidation of damage mechanisms of materials. In this review, the basic principle of the SM method for measuring the twodimensional displacement and strain distributions is introduced. When the grid is not a standard orthogonal grating and cracks exist on the specimen surface, the measurement methods are also stated. Two of the most typical application examples are described in detail. One is the dynamic deflection measurement of a large-scale concrete bridge, and the other is the residual thermal strain measurement of small-scale flip chip packages. Several further development points of this method are pointed out. The SM method is expected to be used for deformation measurement of various structures and materials for residual stress evaluation, crack location prediction, and crack growth evaluation on broad scales. 展开更多
关键词 displacement measurement Strain distribution BRIDGE Flip chip package
下载PDF
3D Microdisplacement Monitoring of Large Aircraft Assembly with Automated In Situ Calibration 被引量:1
13
作者 Zhenyuan Jia Bing Liang +2 位作者 Wei Liu Kun Liu Jianwei Ma 《Engineering》 SCIE EI CAS 2022年第12期105-116,共12页
Three-dimensional(3D)microdisplacement monitoring plays a crucial role in the assembly of large aircraft.This paper presents a broadly applicable high-precision online 3D microdisplacement monitoring method and system... Three-dimensional(3D)microdisplacement monitoring plays a crucial role in the assembly of large aircraft.This paper presents a broadly applicable high-precision online 3D microdisplacement monitoring method and system based on proximity sensors as well as a corresponding in situ calibration method,which can be applied under various extreme working conditions encountered in the aircraft assembly process,such as compact and obstructed spaces.A 3D monitoring model is first established to achieve 3D microdisplacement monitoring based only on the one-dimensional distances measured by proximity sensors,which concerns the extrinsic sensor parameters,such as the probe base point(PBP)and the unit displacement vector(UDV).Then,a calibration method is employed to obtain these extrinsic parameters with high precision by combining spatial transformation principles and weighted optimization.Finally,calibration and monitoring experiments performed for a tailplane assembly process are reported.The calibration precision for the PBP is better than±10 lm in the X and Y directions and±2 lm in the Z direction,and the calibration precision for the UDV is better than 0.07°.Moreover,the accuracy of the 3D microdisplacement monitoring system can reach±15 lm.In general,this paper provides new insights into the modeling and calibration of 3D microdisplacement monitoring based on proximity sensors and a precise,efficient,and low-cost technical means for performing related measurements in compact spaces during the aircraft assembly process. 展开更多
关键词 Aircraft manufacture ASSEMBLY CALIBRATION Condition monitoring displacement measurement
下载PDF
Study and application of monitoring plane displacement of a similarity model based on time-series images 被引量:5
14
作者 Xu Jiankun Wang Enyuan +1 位作者 Li Zhonghui Wang Chao 《Mining Science and Technology》 EI CAS 2011年第4期501-505,共5页
In order to compensate for the deficiency of present methods of monitoring plane displacement in similarity model tests,such as inadequate real-time monitoring and more manual intervention,an effective monitoring meth... In order to compensate for the deficiency of present methods of monitoring plane displacement in similarity model tests,such as inadequate real-time monitoring and more manual intervention,an effective monitoring method was proposed in this study,and the major steps of the monitoring method include:firstly,time-series images of the similarity model in the test were obtained by a camera,and secondly,measuring points marked as artificial targets were automatically tracked and recognized from time-series images.Finally,the real-time plane displacement field was calculated by the fixed magnification between objects and images under the specific conditions.And then the application device of the method was designed and tested.At the same time,a sub-pixel location method and a distortion error model were used to improve the measuring accuracy.The results indicate that this method may record the entire test,especially the detailed non-uniform deformation and sudden deformation.Compared with traditional methods this method has a number of advantages,such as greater measurement accuracy and reliability,less manual intervention,higher automation,strong practical properties,much more measurement information and so on. 展开更多
关键词 Plane displacement monitoring Similarity model test Time-series images displacement measurement
下载PDF
The Measurement and Control of Diameter in Large-Scale Part Processing
15
作者 ZHANG Guo-yu, XU Xi-ping, FU Xiu-hua, YANG Lin, LI Cheng -zhi (The Development Center of Science and Technology, Changchun University of Science and Technology, Changchun 130022, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期144-145,共2页
Based on laser-scanned measuring technology, a met ho d of on-line dynamic non-contact measurement and feedback control of processin g dimension, i.e. the double edges laser-scanned large diameter on-line dynami c mea... Based on laser-scanned measuring technology, a met ho d of on-line dynamic non-contact measurement and feedback control of processin g dimension, i.e. the double edges laser-scanned large diameter on-line dynami c measurement and control system is presented, which can be used to measure diam eter in large-scale machine part processing. In this paper, the working princip le, overall structure and microcomputer real-time control and data processing s ystem of the system are discussed in detail, the method of double edges scanned large diameter dimension measurement and control is theoretically analyzed, its possibility has been verified by experiments of lathing large diameters machine parts by a vertical lathe. The system adopts the measuring scheme of double edge s laser-scanned combined with grating displacement measurement. The two edges c haracteristic information of the measured diameter is given by the double edges laser-scanned measuring system, the non-contact measurement of large diameter dimension is realized to combine with the grating displacement measuring systems . The main controller gives out feedback control signal by means of measured res ults, and controls advance and retreat of lathe tool by the servo-control syste m of a vertical lathe to realize on-line dynamic non-contact measurement and c ontrol in processing. 展开更多
关键词 double edges laser-scanned on-line dynamic mea surement DIAMETER grating displacement measurement feedback control
下载PDF
New Optical Triangulation and Digital Image Processing in Measurement
16
作者 ZHOU Jian ZHAO Hong +2 位作者 CHEN Wenyi TIAN Feng TAN Yushan(Xi’an Jiaotong University,Xi’an 710049 CHN) 《Semiconductor Photonics and Technology》 CAS 1996年第2期103-107,共5页
In this paper,a new direct optical triangulation(DOT) for measuring theout-of-plane displacement is given.In order to state its principle,DOT is used to measure a micro-displacement of a rigid body,and at the same tim... In this paper,a new direct optical triangulation(DOT) for measuring theout-of-plane displacement is given.In order to state its principle,DOT is used to measure a micro-displacement of a rigid body,and at the same time,the method of digital image processing is also given. 展开更多
关键词 Optical Triangulation displacement measurement SENSOR Digital Image Processing
下载PDF
Application of Digital Image Correlation and Geodetic Displacement Measuring Methods to Monitor Water Dam Behavior under Dynamic Load
17
作者 Janina Zaczek-Peplinska Maria Elzbieta Kowalska +1 位作者 Krzysztof Malowany MarcinMalesa 《Journal of Civil Engineering and Architecture》 2015年第12期1496-1505,共10页
This paper presents experiment results of the measurement conducted at the Roznew Dam power plant. For a course of starting and operating of turbo-plants, downstream face of the dam was monitored in relation to its ev... This paper presents experiment results of the measurement conducted at the Roznew Dam power plant. For a course of starting and operating of turbo-plants, downstream face of the dam was monitored in relation to its eventual displacements on direction parallel to the construction axis. For the purpose of the experiment, geodetic measurement techniques and 2D DIC (digital image correlation) method (utilizing photographs of the object recorded with digital camera) were compared with regard to credibility, efficiency and accuracy. The vertical and horizontal displacements were monitored by tachometers measurements. The deformations in x-axis and y-axis on the wall surface was monitored by 2D DIC. It has been noticed that 2D DIC method is a surface method, continuous--not discreet. It allows for continuous observations of surface deformations, which is not possible in case of tachemetric measurements. Despite many advantages, the 2D DIC method lacks unambiguous evaluation of precision and relevance of designated displacements, which is rather significant for possibilities of utilization in technical control of large engineered objects. It should be also marked that the tachometric method is more reliable but is more laborious. Research of this type might comprise additional element for the assessment of the influence of dynamic loads, such as activating turbine water flow, onto the overall condition of the surveyed structure. 展开更多
关键词 Hydrotechnical structure structure dynamic load engineering object displacement geodetic displacement measurements.digital image correlation.
下载PDF
Large excavations and their effect on displacement of land boundaries 被引量:1
18
作者 Jan Nemcik Naj Aziz 《International Journal of Mining Science and Technology》 SCIE EI 2012年第5期633-637,共5页
A study to estimate land surface movement caused by large surface excavations in sedimentary strata is presented.In stratified or jointed strata the stress relief driven movement adjacent to large excavations can be s... A study to estimate land surface movement caused by large surface excavations in sedimentary strata is presented.In stratified or jointed strata the stress relief driven movement adjacent to large excavations can be significantly larger than expected.High lateral stresses measured in Australia and other places around the world indicate that the ratio of horizontal to vertical stress has been particularly high at shallow depths.The in situ strata is in compression and during excavation,stress is relieved towards the opening causing strata movement.Large excavations such as,open cut mines or highway cuttings,can initiate an extensive horizontal slide of surface layers towards the excavation.These ground movements can be damaging to surface structures such as water storage dams and large buildings.Based on stress measurements at shallow depths in Australian coal mines the study presented here calculates and models the extent of potential ground movement along the bedding surface adjacent to large excavations and provides a new prediction tool of land movement at the excavation boundary that can benefit the geotechnical practitioners in the mining industry. 展开更多
关键词 Stress measurements High lateral stress Lateral stress relief Lateral displacement of bedded strata Stability of large excavations
下载PDF
New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes
19
作者 Yonghong Wang Xiao Zhang +3 位作者 Qihan Zhao Yanfeng Yao Peizheng Yan Biao Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期259-264,共6页
We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with t... We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach–Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach–Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates. 展开更多
关键词 digital speckle pattern interferometry digital shearography simultaneous measurement of displacement and two orthogonal slopes
下载PDF
Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface
20
作者 张植宇 匡程辉 +2 位作者 臧昊峰 鲁拥华 王沛 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第2期109-113,共5页
The compact,sensitive,and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging.The metasurface offers a promising solution to develop h... The compact,sensitive,and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging.The metasurface offers a promising solution to develop high-precision displacement metrology.In this work,we proposed and experimentally demonstrated a two-dimensional displacement(XZ)measurement device by a dielectric metasurface.Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence.We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12μm along the z-axis can be resolved with a 900μm×900μm metasurface.Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor. 展开更多
关键词 metasurface transversal and longitudinal displacement measurement
原文传递
上一页 1 2 下一页 到第
使用帮助 返回顶部