On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system...On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 μm and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.展开更多
A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrum...A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrument, consists of different types of intelligent virtualinstrument (IVI) through individual components together as building blocks and can be displayeddirectly on the computer screen. This is a new concept of measuring instrument, and also animportant breakthrough after virtual instrument (VI). Virtual control makes instrument resourcesobtain further exploitation. It brings about a fundamental change to the design and manufacturingmode. The instrument therefore, can not only be produced directly inside a PC, but the product isinvolved in the 'green product' system. So far, all the present digital instruments will grow to bereplaced by intelligent control with green characteristics.展开更多
A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating v...A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating voltage. Meanwhile two approaches were presented to improve the measurement accuracy of coating thickness. One of them aims at eliminating the random interferences by moving average filtering; while the other manages to calculate the quantity of electricity consumed accurately with rectangular integration. With these two approaches, the coating thickness can be measured in real time with higher accuracy than the voltage-frequency conversion method. During the process of plating all the technological parameters are displayed visually on the front panel of the Ⅵ. Once brush current or current density overruns the limited values, or when the coating thickness reaches the objective value, the virtual will alarm. With this Ⅵ, the solution consumption can be decreased and the operating efficiency is improved.展开更多
Distributed real time surveillance control system is used especially in distributed computer measure and control system, mostly inwidely dispersed measure points without human surveillance. This paper describes theory...Distributed real time surveillance control system is used especially in distributed computer measure and control system, mostly inwidely dispersed measure points without human surveillance. This paper describes theory、construction、control strategy, stabilityanalysis of distributed real time supervisory control and data acquisition system, implements distributed measure signals collectionand design of supervisory control system. The realization of virtual instrument based on VC＋＋ can accomplish measurementsignals acquisition, storage, display and analysis, also the result of surveillance control system is provided, and shows thefunctional powerful agility of virtual instrument based on VC＋＋.展开更多
基金Supported by National Natural Science Foundation of China (No.50505031)Tianjin Municipal Science and Technology Commission(No.043185911)Programfor NewCentury Excellent Talents in University
文摘On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 μm and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.
基金This project is supported by National Natural Science Foundation of China(No.50135050).
文摘A new concept called intelligent virtual control (IVC), which can be drivenby measuring functions, is put forward. This small 'intelligent measurement instrument unit (IMIU)',carrying with functions of instrument, consists of different types of intelligent virtualinstrument (IVI) through individual components together as building blocks and can be displayeddirectly on the computer screen. This is a new concept of measuring instrument, and also animportant breakthrough after virtual instrument (VI). Virtual control makes instrument resourcesobtain further exploitation. It brings about a fundamental change to the design and manufacturingmode. The instrument therefore, can not only be produced directly inside a PC, but the product isinvolved in the 'green product' system. So far, all the present digital instruments will grow to bereplaced by intelligent control with green characteristics.
基金Project (50235030) supported by the National Natural Science Foundation of China
文摘A virtual instrument(Ⅵ) was developed to monitor the technological parameters in the process of brush plating, including coating thickness, brush-plating current, current density, deposition rate, and brush plating voltage. Meanwhile two approaches were presented to improve the measurement accuracy of coating thickness. One of them aims at eliminating the random interferences by moving average filtering; while the other manages to calculate the quantity of electricity consumed accurately with rectangular integration. With these two approaches, the coating thickness can be measured in real time with higher accuracy than the voltage-frequency conversion method. During the process of plating all the technological parameters are displayed visually on the front panel of the Ⅵ. Once brush current or current density overruns the limited values, or when the coating thickness reaches the objective value, the virtual will alarm. With this Ⅵ, the solution consumption can be decreased and the operating efficiency is improved.
文摘Distributed real time surveillance control system is used especially in distributed computer measure and control system, mostly inwidely dispersed measure points without human surveillance. This paper describes theory、construction、control strategy, stabilityanalysis of distributed real time supervisory control and data acquisition system, implements distributed measure signals collectionand design of supervisory control system. The realization of virtual instrument based on VC＋＋ can accomplish measurementsignals acquisition, storage, display and analysis, also the result of surveillance control system is provided, and shows thefunctional powerful agility of virtual instrument based on VC＋＋.
基金The Ministry of Science and Technology of the People's Republic of China,Within the Framework of the Project the CNC Products innovation demonstration(No.2012BAF13B06)
