In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit ...In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit is applied to improve the power transfer efficiency at high RF power,and the effect of the parallel resonance on the electron energy distribution function(EEDF)is investigated in a 60 MHz CCP.The CCP consists of a power feed line,the electrodes,and plasma.The reactance of the CCP is positive at 60 MHz and acts like an inductive load.A vacuum variable capacitor(VVC)is connected in parallel with the inductive load,and then the parallel resonance between the VVC and the inductive load can be achieved.As the capacitance of the VVC approaches the parallel resonance condition,the equivalent resistance of the parallel circuit is considerably larger than that without the VVC,and the current flowing through the matching network is greatly reduced.Therefore,the power transfer efficiency of the discharge is improved from 76%,70%,and 68%to 81%,77%,and 76%at RF powers of 100 W,150 W,and 200 W,respectively.At parallel resonance conditions,the electron heating in bulk plasma is enhanced,which cannot be achieved without the VVC even at the higher RF powers.This enhancement of electron heating results in the evolution of the shape of the EEDF from a biMaxwellian distribution to a distribution with the smaller temperature difference between high-energy electrons and low-energy electrons.Due to the parallel resonance effect,the electron density increases by approximately 4%,18%,and 21%at RF powers of 100 W,150 W,and 200 W,respectively.展开更多
A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） indu...A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） inductively coupled Ar plasmas（ICPs）.The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase（i.e.,θ = 0） and a minimum value at the opposite phase（i.e.,θ = π）.Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.展开更多
A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure the driving frequency, the ...A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure the driving frequency, the radius and length of the inductively coupled plasma equipment, the amplitude of the radio-frequency coil current, and the number of turns of rf coils. The spatial profiles of the rf electric field and power density have also been calculated under the same parameters. Numerical results show that the electron energy distribution functions are significantly modified and the spatial profiles of the rf electric field and rf power density are also demonstrated.展开更多
Using an one-dimensional slab model, we have studied the electron energy distribution, the anomalous skin effect, and power absorption in the solenoidal-inductively-coupled argon discharge under low pressures (≤ 1.33...Using an one-dimensional slab model, we have studied the electron energy distribution, the anomalous skin effect, and power absorption in the solenoidal-inductively-coupled argon discharge under low pressures (≤ 1.33 Pa). The electron energy distribution function and rf electromagnetic field in the plasma are determined self-consistently by the linearized Bolztmann equation incorporating with the Maxwell equations. The numerical results show that, at low pressures, the electron energy distribution function exhibits a non-Maxwellian distribution with a long high-energy tail. The anomalous skin effect is greatly enhanced under low pressures and the negative power absorption is also obtained.展开更多
The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition ...The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition and pressure on electron density,the effective electron temperature and the electron energy probability functions(EEPFs)at different spatial positions are present.In driver region,with the introduction of a small amount of Ar at 0.3 Pa,there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature.Additionally,the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision.However,this phenomenon resulting from the changes in gas composition vanishes at 5 Pa due to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge.The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa,as do the patterns of electron density variation between these two regions for differing Ar fractions.At 5 Pa,as the discharge transitions from H_(2)to Ar,the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region.This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge.In order to validate the experimental results,we use the COMSOL simulation software to calculate electrical parameters under the same conditions.The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results.展开更多
This paper presents a reconstruction model of three-dimensional temperature distribution in furnace based on radiative energy images captured by charge-coupled device （CCD） cameras within the visible wavelength rang...This paper presents a reconstruction model of three-dimensional temperature distribution in furnace based on radiative energy images captured by charge-coupled device （CCD） cameras within the visible wavelength range. Numerical simulation case was used in this study and a zigzag eccentric temperature distribution was assumed to verify the model. Least square QR-factorization （LSQR） method was introduced to deal with reconstruction equation. It is found that the reconstructed temperature distributions in low-temperature areas had some fluctuations and high-temperature areas were reconstructed well. The whole reconstruction relative error was mainly due to errors in low-temperature areas and the relative error for highest-temperature reconstruction was quite small.展开更多
基金supported by the National Research Foundation of Korea(Nos.NRF-2019M1A7A1A03087579 and NRF-2021R1I1A1A01050312)the Ministry of Trade,Industry&Energy(Nos.20011226 and 20009415)。
文摘In general,as the radio frequency(RF)power increases in a capacitively coupled plasma(CCP),the power transfer efficiency decreases because the resistance of the CCP decreases.In this work,a parallel resonance circuit is applied to improve the power transfer efficiency at high RF power,and the effect of the parallel resonance on the electron energy distribution function(EEDF)is investigated in a 60 MHz CCP.The CCP consists of a power feed line,the electrodes,and plasma.The reactance of the CCP is positive at 60 MHz and acts like an inductive load.A vacuum variable capacitor(VVC)is connected in parallel with the inductive load,and then the parallel resonance between the VVC and the inductive load can be achieved.As the capacitance of the VVC approaches the parallel resonance condition,the equivalent resistance of the parallel circuit is considerably larger than that without the VVC,and the current flowing through the matching network is greatly reduced.Therefore,the power transfer efficiency of the discharge is improved from 76%,70%,and 68%to 81%,77%,and 76%at RF powers of 100 W,150 W,and 200 W,respectively.At parallel resonance conditions,the electron heating in bulk plasma is enhanced,which cannot be achieved without the VVC even at the higher RF powers.This enhancement of electron heating results in the evolution of the shape of the EEDF from a biMaxwellian distribution to a distribution with the smaller temperature difference between high-energy electrons and low-energy electrons.Due to the parallel resonance effect,the electron density increases by approximately 4%,18%,and 21%at RF powers of 100 W,150 W,and 200 W,respectively.
基金Project supported by the Important National Science and Technology Specific Project,China(Grant No.2011ZX02403-001)the National Natural Science Foundation of China(Grand No.11675039)the Fundamental Research Funds for the Central Universities,China(Grand No.DUT16LK06)
文摘A retarding field energy analyzer（RFEA） is used to measure the time-averaged ion energy distributions（IEDs） on the substrate in both continuous wave（CW） and synchronous pulse modulated radio-frequency（RF） inductively coupled Ar plasmas（ICPs）.The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase（i.e.,θ = 0） and a minimum value at the opposite phase（i.e.,θ = π）.Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.
基金the National Science Foundation of China(Nos.10376003,10572035)
文摘A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure the driving frequency, the radius and length of the inductively coupled plasma equipment, the amplitude of the radio-frequency coil current, and the number of turns of rf coils. The spatial profiles of the rf electric field and power density have also been calculated under the same parameters. Numerical results show that the electron energy distribution functions are significantly modified and the spatial profiles of the rf electric field and rf power density are also demonstrated.
文摘Using an one-dimensional slab model, we have studied the electron energy distribution, the anomalous skin effect, and power absorption in the solenoidal-inductively-coupled argon discharge under low pressures (≤ 1.33 Pa). The electron energy distribution function and rf electromagnetic field in the plasma are determined self-consistently by the linearized Bolztmann equation incorporating with the Maxwell equations. The numerical results show that, at low pressures, the electron energy distribution function exhibits a non-Maxwellian distribution with a long high-energy tail. The anomalous skin effect is greatly enhanced under low pressures and the negative power absorption is also obtained.
基金supported by the National Natural Science Foundation of China(Grant Nos.11935005 and 12075049)the National Key Research and Development Program of China(Grant No.2017YFE0300106).
文摘The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition and pressure on electron density,the effective electron temperature and the electron energy probability functions(EEPFs)at different spatial positions are present.In driver region,with the introduction of a small amount of Ar at 0.3 Pa,there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature.Additionally,the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision.However,this phenomenon resulting from the changes in gas composition vanishes at 5 Pa due to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge.The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa,as do the patterns of electron density variation between these two regions for differing Ar fractions.At 5 Pa,as the discharge transitions from H_(2)to Ar,the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region.This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge.In order to validate the experimental results,we use the COMSOL simulation software to calculate electrical parameters under the same conditions.The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results.
基金Project supported by the State Key Program of National Natural Science Foundation of China (Grant No 60534030)Program for Changjiang Scholars and Innovative Research Team in University (Grant No IRT0434)
文摘This paper presents a reconstruction model of three-dimensional temperature distribution in furnace based on radiative energy images captured by charge-coupled device （CCD） cameras within the visible wavelength range. Numerical simulation case was used in this study and a zigzag eccentric temperature distribution was assumed to verify the model. Least square QR-factorization （LSQR） method was introduced to deal with reconstruction equation. It is found that the reconstructed temperature distributions in low-temperature areas had some fluctuations and high-temperature areas were reconstructed well. The whole reconstruction relative error was mainly due to errors in low-temperature areas and the relative error for highest-temperature reconstruction was quite small.
