PROPAGATION OF SURFACE ACOUSTIC WAVES IN PRESTRESSED ANISOTROPIC LAYERED PIEZOELECTRIC STRUCTURES

The propagation of surface acoustic waves in layered piezoelectric structureswith initial stresses is investigated. The phase velocity equations are obtained for electricallyfree and shorted cases, respectively. Effects of the initial stresses on the phase velocity and theelectromechanical coupling coefficient for the fundamental mode of the layered piezoelectricstructures are discussed. Numerical results for the c-axis oriented film of LiNbO_3 on a sapphiresubstrate are given. It is found that the fractional change in phase velocity is a linear functionwith the initial stresses, and the electromechanical coupling factor increases with an increase ofthe absolute values of the compressive initial stresses. The results are useful for the design ofsurface acoustic wave devices.

Surface Acoustic Wave Humidity Sensors Based on(1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates

ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.

A novel type of transverse surface wave propagating in a layered structure consisting of a piezoelectric layer attached to an elastic half-space

The existence and propagation of transverse surface waves in piezoelectric coupled solids is investigated, in which perfect bonding between a metal/dielectric substrate and a piezoelectric layer of finite-thickness is assumed. Dis- persion equations relating phase velocity to material con- stants for the existence of various modes are obtained in a simple mathematical form for a piezoelectric material of class 6mm. It is discovered and proved by numerical examples in this paper that a novel Bleustein-Gulyaev （B-G） type of transverse surface wave can exist in such piezoelectric cou- pled solid media when the bulk-shear-wave velocity in the substrate is less than that in the piezoelectric layer but greater than the corresponding B-G wave velocity in the same pie- zoelectric material with an electroded surface. Such a wave does not exist in such layered structures in the absence of pie- zoelectricity. The mode shapes for displacement and electric potential in the piezoelectric layer are obtained and discussed theoretically. The study extends the regime of transverse sur- face waves and may lead to potential applications to surface acoustic wave devices.

Interaction of a Surface Acoustic Wave with a Two-dimensional Electron Gas

When a surface acoustic wave （SAW） propagates on the surface of a GaAs semiconductor, coupling between electrons in the two-dimensional electron gas beneath the interface and the elastic host crystal through piezoelectric interaction will attenuate the SAW. The coupling coemcient is ~alculated for the SAW propagating along an arbitrary direction. It is found that the coupling strength is strongly dependent on the propagating direction. When the SAW propagates along the [011] direction, the coupling becomes quite weak.

Science Letters:New solutions of shear waves in piezoelectric cubic crystals

Acoustic wave propagation in piezoelectric crystals of classes 43m and 23 is studied. The crystals Tl3VS4 and Tl3TaSe4 （43m） of the Chalcogenide family and the crystal Bi12TiO20 （23） possess strong piezoelectric effect. Because the surface Bleustein-Gulyaev waves cannot exist in piezoelectric cubic crystals, it was concluded that new solutions for shear-horizontal surface acoustic waves （SH-SAWs） are found in the monocrystals using different electrical boundary conditions such as electrically ＂short＂ and ＂open＂ free-surfaces for the unique [ 101 ] direction of wave propagation. For the crystal Tl3TaSe4 with coefficient of electromechanical coupling （CEMC） Ke^2=e^2/（C×g）-1/3, the phase velocity Vph for the new SH-SAWs can be calculated with the following formula： Vph=（Vα＋Vt）/2, where Vt is the speed of bulk SH-wave, Vt=Vt4（1＋Ke^2）^1/2, Vα=αKVt4, αK=2[Ke（1＋Ke^2）^1/2-Ke^2]^1/2, and Vt4=（C44/p）^1/2. It was found that the CEMC K2 evaluation for Tl3TaSe4 gave the value of K^2=2（Vf-Vm）/Vf-0.047 （-4.7%）, where Vf-848 m/s and Vm-828 m/s are the new-SAW velocities for the free and metallized surfaces, respectively. This high value of KZ（Tl3TaSe4） is significantly greater than K2（Tl3VS4）-3% and about five times that of K2（Bi12YiO20）.

Breath monitoring,sleep disorder detection,and tracking using thin-film acoustic waves and open-source electronics

Apnoea,a major sleep disorder,affects many adults and causes several issues,such as fatigue,high blood pressure,liver conditions,increased risk of type II diabetes,and heart problems.Therefore,advanced monitoring and diagnosing tools of apnoea disorders are needed to facilitate better treatment,with advantages such as accuracy,comfort of use,cost effectiveness,and embedded computation capabilities to recognise,store,process,and transmit time series data.In this work we present an adaptation of our apnoea-Pi open-source surface acoustic wave(SAW)platform(Apnoea-Pi)to monitor and recognise apnoea in patients.The platform is based on a thin-film SAW device using bimorph ZnO and Al structures,including those fabricated as Al foils or plates,to achieve breath tracking based on humidity and temperature changes.We applied open-source electronics and provided embedded computing characteristics for signal processing,data recognition,storage,and transmission of breath signals.We show that the thin-film SAW device out-performed standard and off-the-shelf capacitive electronic sensors in terms of their response and accuracy for human breath-tracking purposes.This in combination with embedded electronics makes a suitable platform for human breath monitoring and sleep disorder recognition.

Adaptive Lagrange finite element methods for high precision vibrations and piezoelectric acoustic wave computations in SMT structures and plates with nano interfaces

This paper discusses the validity of (adaptive) Lagrange generalized plain finite element method (FEM) and plate element method for accurate analysis of acoustic waves in multi-layered piezoelectric structures with tiny interfaces between metal electrodes and surface mounted piezoelectric substrates. We have come to conclusion that the quantitative relationships between the acoustic and electric fields in a piezoelectric structure can be accurately determined through the proposed finite element methods. The higher-order Lagrange FEM proposed for dynamic piezoelectric computation is proved to be very accurate (prescribed relative error 0.02% - 0.04% ) and a great improvement in convergence accuracy over the higher order Mindlin plate element method for piezoelectric structural analysis due to the assumptions and corrections in the plate theories.The converged lagrange finite element methods are compared with the plate element methods and the computedresults are in good agreement with available exact and experimental data. The adaptive Lagrange finite elementmethods and a new FEA computer program developed for macro- and micro-scale analyses are reviewed, and recently extended with great potential to high-precision nano-scale analysis in this paper and the similarities between piezoelectric and seismic wave propagations in layered structures and plates are stressed.

面内传播方向对SAW滤波器性能的影响研究

为了满足窄带声表面波滤波器对品质因数Q值和带外抑制日益增长的需求,提出了一种窄带滤波器设计方法。在基于新型POI结构谐振器的基础上,通过旋转谐振器达到改变波传播角度的目的,并利用二维全模型得到准确的实验数据,与原结构谐振器分别代入滤波器设计中进行比较。实验结果表明,该方法在一定程度上能够有效地增加带外抑制,对过渡带抑制能力有2~4 dB的提升,且具有设计简便,占用空间小等优点。

基于氧化锌薄膜声表面波器件的细胞富集方法

针对常见的铌酸锂等压电单晶在高温易碎裂且不能弯曲等问题,提出了一种区别于传统压电单晶富集细胞的方法。通过磁控溅射技术在硅衬底上制备了厚度为3.83μm的氧化锌薄膜,并用扫描电子显微镜与X射线衍射表征了薄膜性能,在薄膜表面制备了频率为195 MHz的叉指换能器,插入损耗为-33.8 dB,且仿真分析了该器件的声场。结果表明,表面波声束集中在换能器声孔径处,液滴位于声束边缘。实验结果表明,该器件能够驱动液滴产生3.9×10^(-3)m/s流速的涡旋,并在20 s内富集了悬浮于液滴中的微球和人体淋巴细胞,将液滴中细胞的浓度提升55倍。

新型波浪加权式高性能声表面波滤波器设计

射频滤波器是移动通信中信号传输频率选择、噪声滤除干扰的不可或缺的关键器件。压电薄膜多层衬底结构的声表面波滤波器因具有高矩形度、低损耗等优点在近年来被广泛应用,但其谐振器固有的横向模式会极大影响滤波器性能。为此提出了一种新型的波浪加权式叉指设计的声表面波谐振器,该谐振器通过使用正弦函数作为交叠长度加权包络曲线,能够在不恶化谐振器性能的前提下有效抑制谐振器中的横向模式。将波浪加权式叉指设计的谐振器按照梯形拓扑结构级联,设计并制备了一款尺寸为1.1 mm×0.9 mm×0.55 mm的高性能滤波器。该滤波器中心频率为2.593 GHz,相对带宽为8.8%,插入损耗为0.52 dB。实物测试结果与仿真基本一致。

石英单晶微机械陀螺仪研究进展

对Z切、ST切、AT切三种切割方式的石英单晶微机械陀螺仪的基本工作原理进行了阐述,梳理了不同类型陀螺仪的发展历程,重点介绍了三种石英单晶微机械陀螺仪的设计结构、性能特点及其应用场景,并从灵敏度、动态范围、稳定性、抗冲击性及工作频率等方面对三种类型石英微机械陀螺仪各自的性能优势与面临的技术挑战进行了评述,总结了当前国内外在石英单晶微机械陀螺仪研究领域的主要进展和创新点。最后,针对不同切割方式的石英单晶微机械陀螺仪的结构及工作特点,分析了其各自的优点与不足,进行了总结和对比,讨论了石英微机械陀螺仪的未来发展方向。

Peculiarities of surface acoustic waves,propagation in structures with functionally graded piezoelectric materials,coating from different ceramics on the basis of PZT

A model of a piezoelectric structure with an inhomogeneous coating is considered.The structure is a homogeneous half-space made of PZT-5H ferroelectric ceramics with a functionally graded coating.The properties of coating vary continuously in thickness from parameters of one material to parameters of another material in a continuously nonmonotonic or piecewise-continuous manner.As coating materials,various combinations of ceramics of different stiffness based on PZT are considered.Using the example of the problem of the propagation of sh-waves in a piezoelectric structure,we studied the influence of the ratio of the physical parameters of the coating materials,the localization region,and the size of the transition zone of one material to another on the propagation features of surface acoustic waves(SAWs)and the structure of the wave field.

Finite difference time domain analysis of two-dimensional surface acoustic wave piezoelectric phononic crystals at radio frequency

The finite-difference time-domain （FDTD） method is proposed for analyzing the surface acoustic wave （SAW） propagation in two-dimensional （2D） piezoelectric phononic crystals （PCs） at radio frequency （RF）, and also experiments are established to demonstrate its analysis result of the PCs＇ band gaps. The FDTD method takes the piezoelectric effect of PCs into account, in which periodic boundary conditions are used to decrease memory/time consumption and the perfectly matched layer boundary conditions are adopted as the SAW absorbers to attenuate artificial reflections. Two SAW delay lines are established with/without piezoelectric PCs located between interdigital transducers. By removing several echoes with window gating function in time domain, delay lines transmission function is achieved. The PCs＇ transmission functions and band gaps are obtained by comparing them in these two delay lines. When Aluminum/128°YX-LiNbO3 is adopted as scatter and substrate material, the PCs＇ band gap is calculated by this FDTD method and COMSOL respectively. Results show that computational results of FDTD agree well with experimental results and are better than that of COMSOL.

用PLD法制备声表面波器件用ZnO薄膜

采用脉冲激光淀积 (PLD)法在单晶Si(10 0 )衬底上淀积了ZnO薄膜。XRD、TEM和AFM分析表明 ,淀积的ZnO薄膜具有良好的c轴取向性和表面平整度。通过改变淀积气氛或在纯氧中高温退火 ,ZnO薄膜的电阻率提高到 10 7Ω·cm。这些结果表明 ,用PLD法淀积的ZnO薄膜能够满足声表面波(SAW )器件的需要。

基于ZnO压电薄膜的柔性声表面波器件

提出并制备了基于聚酰亚胺柔性衬底的声表面波(SAW)器件。在柔性聚酰亚胺衬底上低温反应磁控溅射沉积了ZnO压电薄膜;采用X射线衍射仪,扫描电子显微镜,原子力显微镜等设备对ZnO薄膜进行了检测,结果表明:ZnO薄膜晶粒呈柱状生长并且(002)择优取向,膜粗糙度小于9nm,适合制作压电器件。在柔性衬底上制备了基于ZnO压电薄膜的SAW器件,该器件表现出良好的谐振性能。采用矢量网络分析仪检测器件的传输曲线,实验结果与仿真结果具有很好的一致性。随着波长减小,谐振频率和相速度增加,当ZnO厚度为4μm,波长为8μm时,器件的谐振频率为268MHz,相速度为2 144m/s,机电耦合系数为1.1%;当ZnO厚度增加时,此叠层结构的声表面器件的叠层声速也增加。

柔性声表面波器件的波模式分析

用反应磁控溅射法在柔性聚酰亚胺衬底上沉积了ZnO压电薄膜,并制备了基于ZnO压电薄膜的柔性声表面波(SAW)器件。制备的柔性SAW器件显示了良好的谐振性能,而且展现出两个波模式:模式0和模式1。当波长为32μm,ZnO厚度为4μm时,SAW器件的模式0和模式1的谐振频率分别为34.4MHz和158.5MHz,对应声速为1 100.8m/s和5 072m/s。模式0为已知的瑞利波,模式1为新的高频模式。沉积了不同厚度的ZnO薄膜制备柔性SAW器件,进一步分析了薄膜厚度对SAW器件和模式1的影响。分析认为该高频模式不是传统硬质衬底上SAW器件产生的Sezawa波,而是S_0兰姆波,并且是有衬底情况下的S_0兰姆波。文中还采用Comsol仿真分析了新的高频模式1的粒子振动位移,结果和S_0兰姆波粒子振动位移一致,从而验证了其为广义兰姆波的正确性。

二维声表面波压电声子晶体在射频段的时域有限差分法

对二维声表面波压电声子晶体在射频段的带隙特性,进行了时域有限差分法（FDTD）理论推导和计算,并提出实验方法对比验证。FDTD计算模型考虑了压电效应,引入周期边界条件以节省计算空间和时间,采用完全匹配层以解决声表面波在截断边界处的虚拟反射问题。实验上分别设计有/无二维压电声子晶体的两种宽频带延迟线结构,测量两种延迟线的传输系数取差值,得到了二维压电声子晶体的带隙;其中通过时域加窗函数保留一次传输信号,进行干扰信号的去除。以铝/128°YX-LiNbO3二维压电声子晶体为例,该FDTD方法、商业有限元软件COMSOL、实验方法均得到了100~500 MHz射频段内的多个带隙,三种带隙对比证明了FDTD计算带隙与实验测量带隙一致,比COMSOL计算的计算带隙精度更高。

表面声波传感器及其应用

本文简要介绍多种表面声波传感器的结构、特点、应用及其研究进展概况。表面声波传感器依其波型分类,主要包括瑞利波、水平切变声板波、乐甫波和兰姆波传感器;其应用领域根据作用特点大致可分为物理传感器和化学、生物传感器,前者较易实现,后者特异性强,需要针对具体情况作更细致研究。由于表面声波的传播速度和相位对周围环境的参量变化极为敏感,因此有关传感器具有很高的灵敏度和广泛的应用领域。

声表面波应变传感器的温度补偿方法研究

针对声表面波（SAW）应变传感器在测量应变过程中易受温度干扰的问题,提出了一种温度补偿法。在原有SAW应变片的基础上增加补偿片,用于补偿温度变化引起的附加应变值。实验结果表明,在-20-100℃范围内,未经补偿的应变传感器由温度引起的附加应变量最高为600με,补偿后附加应变量最高为43με,温度干扰得到抑制,验证了该温度补偿法的可行性。

声表面波标签的设计、制作和测试

与IC标签相比,声表面波标签有其独特的优势。在仿真研究的基础上,对声表面波标签进行了设计、制作和测试。标签设计主要体现在压电基片材料选择、叉指换能器设计、反射栅设计3个方面;实际制作了6组结构各不相同的标签并进行了封装;通过网络分析仪对设计制作的标签进行了测试,包括特征频率测试、反射栅编码测试、叉指换能器激发效率测试3个部分。测试结果表明,标签特征频率与设计要求一致;通过对回波脉冲幅值的判别可实现对标签编码的识别;叉指换能器对数增多和孔径增大都会增加其激发效率。