The synchrotron X-ray double-crystal topography was employed to investigate the structure of Si/SiGe/Si deposited on SIMOX SOI. Rocking curves with three diffraction peaks were acquired before and after 180° rota...The synchrotron X-ray double-crystal topography was employed to investigate the structure of Si/SiGe/Si deposited on SIMOX SOI. Rocking curves with three diffraction peaks were acquired before and after 180° rotation of samples. Double-crystal topographs taken at the full width at half maximum (FWHM) of the three peaks differ from each other. Many defects appear in the Si layers that are likely related to the tilt between SOI and epitaxial layers.展开更多
Spectral and structural characteristics of distributed Bragg reflector (DBR) in vertical-cavity surface-emitting lasers were studied with photoluminescence and double-crystal X-ray diffraction measurement.The expected...Spectral and structural characteristics of distributed Bragg reflector (DBR) in vertical-cavity surface-emitting lasers were studied with photoluminescence and double-crystal X-ray diffraction measurement.The expected high quality epitaxial DBR structure was verified.In the X-ray double-crystal rocking curves of DBR the zeroth-order peak,the first and second order satellite peaks were measured.Splitting of diffraction peak appeared in the rocking curves was analyzed.The effects of introduced deep energy levels on the structural perfection and optical properties were discussed.展开更多
文摘The synchrotron X-ray double-crystal topography was employed to investigate the structure of Si/SiGe/Si deposited on SIMOX SOI. Rocking curves with three diffraction peaks were acquired before and after 180° rotation of samples. Double-crystal topographs taken at the full width at half maximum (FWHM) of the three peaks differ from each other. Many defects appear in the Si layers that are likely related to the tilt between SOI and epitaxial layers.
文摘Spectral and structural characteristics of distributed Bragg reflector (DBR) in vertical-cavity surface-emitting lasers were studied with photoluminescence and double-crystal X-ray diffraction measurement.The expected high quality epitaxial DBR structure was verified.In the X-ray double-crystal rocking curves of DBR the zeroth-order peak,the first and second order satellite peaks were measured.Splitting of diffraction peak appeared in the rocking curves was analyzed.The effects of introduced deep energy levels on the structural perfection and optical properties were discussed.
