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Understanding the spatial interaction of ultrasounds based on three-dimensional dual-frequency ultrasonic field numerical simulation
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作者 Zhao-yang Yin Qi-chi Le +3 位作者 Yan-chao Jiang Da-zhi Zhao Qi-yu Liao Qi Zou 《China Foundry》 SCIE EI CAS CSCD 2024年第1期29-43,共15页
A transient 3D model was established to investigate the effect of spatial interaction of ultrasounds on the dual-frequency ultrasonic field in magnesium alloy melt.The effects of insertion depth and tip shape of the u... A transient 3D model was established to investigate the effect of spatial interaction of ultrasounds on the dual-frequency ultrasonic field in magnesium alloy melt.The effects of insertion depth and tip shape of the ultrasonic rods,input pressures and their ratio on the acoustic field distribution were discussed in detail.Additionally,the spacing,angle,and insertion depth of two ultrasonic rods significantly affect the interaction between distinct ultrasounds.As a result,various acoustic pressure distributions and cavitation regions are obtained.The spherical rods mitigate the longitudinal and transversal attenuation of acoustic pressure and expand the cavitation volume by 53.7%and 31.7%,respectively,compared to the plate and conical rods.Increasing the input pressure will enlarge the cavitation region but has no effect on the acoustic pressure distribution pattern.The acoustic pressure ratio significantly affects the pressure distribution and the cavitation region,and the best cavitation effect is obtained at the ratio of 2:1(P15:P20). 展开更多
关键词 dual-frequency ultrasonic numerical model acoustic pressure spatial interaction magnesium alloy
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A Low-Voltage,Low-Power CMOS High Dynamic Range dB-Linear VGA for Super Heterodyne Receivers 被引量:3
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作者 董桥 耿莉 邵志标 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第11期1690-1695,共6页
This paper presents a low-voltage low-power variable gain amplifier,which is applied in the automatic gain control loop of a super heterodyne receiver. Six stages are cascaded to provide an 81dB digitally controlled g... This paper presents a low-voltage low-power variable gain amplifier,which is applied in the automatic gain control loop of a super heterodyne receiver. Six stages are cascaded to provide an 81dB digitally controlled gain range in a 3dB step. The gain step error is less than 0.5dB. It operates at an intermediate frequency of 300kHz, and the power consumption is 1.35mW from a 1.8V supply. The prototype chip is implemented in a TSMC's 0.18μm 1P6M CMOS process and occupies approximately 0.24mm^2 . It is very suitable for portable wire- less communication systems. The measurement results agree well with the system requirements. 展开更多
关键词 variable gain amplifier low voltage low power super heterodyne receiver CMOS RF integratedcircuits
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A method of measuring micro-impulse with torsion pendulum based on multi-beam laser heterodyne 被引量:2
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作者 Li Yan-Chao Wang Chun-Hui 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第2期229-234,共6页
In this paper, we propose a novel method of multi-beam laser heterodyne measurement for micro-impulse. The measurement of the micro-impulse, which is converted into the measurement of the small tuning angle of the tor... In this paper, we propose a novel method of multi-beam laser heterodyne measurement for micro-impulse. The measurement of the micro-impulse, which is converted into the measurement of the small tuning angle of the torsion pendulum, is realized by considering the interaction between pulse laser and working medium. Based on Doppler effect and heterodyne technology, the information regarding the small tuning angle is loaded to the frequency difference of the multi-beam laser heterodyne signal by the frequency modulation of the oscillating mirror, thereby obtaining many values of the small tuning angle after the multi-beam laser heterodyne signal demodulation simultaneously. Processing these values by weighted-average, the small tuning angle can be obtained accurately and the value of the micro-impulse can eventually be calculated. Using Polyvinylchlorid+2%C as a working medium, this novel method is used to simulate the value of the micro-impulse by MATLAB which is generated by considering the interaction between the pulse laser and the working medium, the obtained result shows that the relative error of this method is just 0.5%. 展开更多
关键词 laser heterodyne Doppler effect Fourier analysis
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Degradation of 4-Chlorophenol Solution by Synergetic Effect of Dual-frequency Ultrasound with Fenton Reagent 被引量:8
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作者 赵德明 徐新华 +1 位作者 雷乐成 汪大翚 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2005年第2期204-210,共7页
4-Chlorophenol (4-CP) solution was treated by dual-frequency ultrasound inconjunction with Fenton reagent, and obvious improvement in the 4-CP degradation rate was observedin this advanced oxidation process. Experimen... 4-Chlorophenol (4-CP) solution was treated by dual-frequency ultrasound inconjunction with Fenton reagent, and obvious improvement in the 4-CP degradation rate was observedin this advanced oxidation process. Experimental results showed that ultrasonic intensity,saturating gas and pH value affected greatly the 4-CP removal rate. Among four different saturatinggases (Ar, O_2, air and N_2), 4-CP degradation with Ar-saturated solution was the best. However, inthe view of practical wastewater treatment, using oxygen as the saturating gas would be moreeconomical. The addition of Fenton reagent followed the first-order kinetics and increased the 4-CPdegradation rate. The 4-CP removal rate increased by around 126% within 15 min treatment. Thesynergetic effect of dual-frequency ultrasound with Fenton reagent on 4-CP degradation was obviouslyobserved. 展开更多
关键词 dual-frequency ultrasound with Fenton reagent advanced oxidation process synergetic effect
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An improved arctangent algorithm based on phase-locked loop for heterodyne detection system 被引量:1
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作者 Chun-Hui Yan Ting-Feng Wang +2 位作者 Yuan-Yang Li Tao Lv Shi-Song Wu 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第3期141-148,共8页
We present an ameliorated arctangent algorithm based on phase-locked loop for digital Doppler signal processing,utilized within the heterodyne detection system. We define the error gain factor given by the approximati... We present an ameliorated arctangent algorithm based on phase-locked loop for digital Doppler signal processing,utilized within the heterodyne detection system. We define the error gain factor given by the approximation of Taylor expansion by means of a comparison of the measured values and true values. Exact expressions are derived for the amplitude error of two in-phase & quadrature signals and the frequency error of the acousto-optic modulator. Numerical simulation results and experimental results make it clear that the dynamic instability of the intermediate frequency signals leads to cumulative errors, which will spiral upward. An improved arctangent algorithm for the heterodyne detection is proposed to eliminate the cumulative errors and harmonic components. Depending on the narrow-band filter, our experiments were performed to realize the detectable displacement of 20 nm at a detection distance of 20 m. The aim of this paper is the demonstration of the optimized arctangent algorithm as a powerful approach to the demodulation algorithm, which will advance the signal-to-noise ratio and measurement accuracy of the heterodyne detection system. 展开更多
关键词 heterodyne detection LASER applications arctangent ALGORITHM phase-locked LOOP
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Design and preliminary test of a 105/140 GHz dual-frequency MW-level gyrotron 被引量:3
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作者 Linlin HU Dimin SUN +11 位作者 Qili HUANG Tingting ZHUO Guowu MA Yi JIANG Shenggang GONG Zaojin ZENG Zixing GUO Chaohai DU Fanhong LI Hongbin CHEN Fanbao MENG Hongge MA 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第3期162-169,共8页
A dual-frequency(105/140 GHz)MW-level continuous-wave gyrotron was developed for fusion application at Institute of Applied Electronics,China Academy of Engineering Physics.This gyrotron employs a cylindrical cavity w... A dual-frequency(105/140 GHz)MW-level continuous-wave gyrotron was developed for fusion application at Institute of Applied Electronics,China Academy of Engineering Physics.This gyrotron employs a cylindrical cavity working in the TE18,7 mode at 105 GHz and the TE24,9 mode at 140 GHz.A triode magnetron injection gun and a built-in quasi-optical mode converter were designed to operate at these two frequencies.For the proof-test phase,the gyrotron was equipped with a single-disk boron nitride window to achieve radio frequency output with a power of~500 k W for a short-pulse duration.In the preliminary short-pulse proof-test in the first quarter of2021,the dual-frequency gyrotron achieved output powers of 300 k W at 105 GHz and 540 k W at140 GHz,respectively,under 5 Hz 1 ms continuous pulse-burst operations.Power upgrade and pulse-width extension were hampered by the limitation of the high-voltage power supply and output window.This gyrotron design was preliminarily validated. 展开更多
关键词 GYROTRON MEGAWATT plasma heating fusion application dual-frequency
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Dependence of interferogram phase on incident wavenumber and phase stability of Doppler asymmetric spatial heterodyne spectroscopy 被引量:6
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作者 Ya-Fei Zhang Yu-Tao Feng +3 位作者 Di Fu Peng-Chong Wang Jian Sun Qing-Lan Bai 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第10期255-260,共6页
Instrument drifts introduce additional phase errors into atmospheric wind measurement of Doppler asymmetric spatial heterodyne spectroscopy (DASH). Aiming at the phase sensitivity of DASH to instrument drifts, in this... Instrument drifts introduce additional phase errors into atmospheric wind measurement of Doppler asymmetric spatial heterodyne spectroscopy (DASH). Aiming at the phase sensitivity of DASH to instrument drifts, in this paper we calculate the optical path difference (OPD) and present an accurate formula of DASH interferogram. By controlling variables in computational ray-tracing simulations and laboratory experiments, it is indicated that initial phase is directly determined by incident wavenumber, OPD offset and field of view (FOV). Accordingly, it is indicated that retrieved phase of DASH is sensitive to slight structural change caused by instrument drift, which provides the proof of necessary-to-track and -correct phase errors from instrument drifts. 展开更多
关键词 atmospheric wind measurement Doppler asymmetric spatial heterodyne spectroscopy optical path difference interference phase
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Spatial heterodyne spectroscopy for space-based measurements of atmospheric CO_2 被引量:1
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作者 叶函函 王先华 +3 位作者 李志伟 韦秋叶 施海亮 熊伟 《Journal of Beijing Institute of Technology》 EI CAS 2015年第4期540-545,共6页
To reduce the error from measurement and retrieval process, a new technology of spatial heterodyne spectroscopy is proposed. The principle of this technology and the instrument spatial het- erodyne spectrometer (SHS... To reduce the error from measurement and retrieval process, a new technology of spatial heterodyne spectroscopy is proposed. The principle of this technology and the instrument spatial het- erodyne spectrometer (SHS) are introduced. The first application of this technology will be for CO2 measurements from space on a high spectral observation satellite. The outstanding measurement principle and the priority of combination of retrieval algorithm and three channels ( O2 A-band, CO2 1.58 μm and 2.06 μm bands) are theoretically analyzed and numerically simulated. Experiments u- sing SHS prototype with low spectral resolution of 0. 4 cm -1are carried out for preliminary valida- tion. The measurements show clear CO2 absorption lines and follow the expected signature with the- ory spectrum, and the retrievals agreed well with GOSAT CO2 products, except a small bias of about 4 × 10 ^-6. The results show that the ability of spatial heterodyne spectroscopy for CO2 detecting is ob- vious, and SHS is a competent sensor. 展开更多
关键词 spatial heterodyne spectrometer atmospheric CO2 retrieval algorithm ERROR
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A Novel Scheme for Hundred-Hertz Linewidth Measurements with the Self-Heterodyne Method 被引量:2
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作者 PENG Yu 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第8期91-94,共4页
We propose a novel scheme to accurately determine the hundred-hertz linewidth using the delayed self-heterodyne method,in which the delay time is far less than the coherence time of the laser.This exceeds the former u... We propose a novel scheme to accurately determine the hundred-hertz linewidth using the delayed self-heterodyne method,in which the delay time is far less than the coherence time of the laser.This exceeds the former understanding of the delayed self-heterodyne technique,which requires a prohibitively long fiber.The self-heterodyne autocorrelation function and power spectrum are evaluated,and by numerical analysis we ensure that-3 dB of the power spectrum is applied to the self-heterodyne linewidth measurements.For a laser linewidth of less than 100 Hz,the linewidth can be measured directly by a 10 km fiber,and in a more general case,the linewidth can be deduced from-20 dB or-40 dB of the fitting Lorentzian curve. 展开更多
关键词 heterodyne AUTOCORRELATION FIBER
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Analytical Expressions of Dual-Frequency Plasma Diagnostic Theory 被引量:3
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作者 程立 时家明 许波 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第1期37-39,共3页
Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothe... Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothesis, analytical forms of the electron density and the electron-neutral collision frequency are derived from the equations of the transmission attenuation of microwaves at two near frequencies. This method gives an effective and easy approach to diagnose the unmagnetized plasma. 展开更多
关键词 PLASMA diagnosis dual-frequency ATTENUATION electron density electron-neutral collision frequency
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Optical feedback characteristics in a dual-frequency laser during laser cavity tuning 被引量:2
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作者 刘刚 张书练 +1 位作者 李岩 朱钧 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第10期1984-1989,共6页
The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back;... The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back; (ii) only ⊥-light is fed back; (iii) both lights are fed back. A compact displacement sensor is designed using the experimental result that there is a nearly 90 degrees phase delay between the two lights' cosine optical feedback signals when both lights are fed back into the laser cavity. The priority order that the two lights' intensity curves appear can be used for direction discrimination. The resolution of the displacement sensor is at least 79 rim, and the sensor can discriminate the target's moving direction easily. 展开更多
关键词 dual-frequency laser optical feedback SELF-MIXING displacement sensor
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Numerical investigation of multi-beam laser heterodyne measurement with ultra-precision for linear expansion coefficient of metal based on oscillating mirror modulation 被引量:1
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作者 李彦超 王春晖 +5 位作者 曲杨 高龙 丛海芳 杨彦玲 高洁 王遨游 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第1期398-404,共7页
This paper proposes a novel method of multi-beam laser heterodyne measurement for metal linear expansion coefficient. Based on the Doppler effect and heterodyne technology, the information is loaded of length variatio... This paper proposes a novel method of multi-beam laser heterodyne measurement for metal linear expansion coefficient. Based on the Doppler effect and heterodyne technology, the information is loaded of length variation to the frequency difference of the multi-beam laser heterodyne signal by the frequency modulation of the oscillating mirror, this method can obtain many values of length variation caused by temperature variation after the multi-beam laser heterodyne signal demodulation simultaneously. Processing these values by weighted-average, it can obtain length variation accurately, and eventually obtain the value of linear expansion coefficient of metal by the calculation. This novel method is used to simulate measurement for linear expansion coefficient of metal rod under different temperatures by MATLAB, the obtained result shows that the relative measurement error of this method is just 0.4%. 展开更多
关键词 linear expansion coefficient multi-beam laser heterodyne laser Doppler technique contactless measurement
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DEFORMATION MEASUREMENT USING DUAL-FREQUENCY PROJECTION GRATING PHASE-SHIFT PROFILOMETRY 被引量:2
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作者 Yanming Chen Yuming He Eryi Hu Hongmao Zhu 《Acta Mechanica Solida Sinica》 SCIE EI 2008年第2期110-115,共6页
2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to ... 2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to solve such an issue. In the measurement, two properchosen frequency gratings are utilized to synthesize an equivalent wavelength grating which ensures the computed phase in a principal phase range. Thus, the error caused by the phase unwrapping process with the conventional phase reconstruct algorithm can be eliminated. Finally, experimental result of a specimen with large plastic deformation is given to prove that the proposed method is effective to handle the phase discontinuity. 展开更多
关键词 dual-frequency phase-shift profilometry projection grating phase unwrapping DEFORMATION
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Robust and high-speed rotation control in optical tweezers by using polarization synthesis based on heterodyne interference 被引量:5
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作者 Wei Liu Dashan Dong +2 位作者 Hong Yang Qihuang Gong Kebin Shi 《Opto-Electronic Advances》 2020年第8期23-29,共7页
The rotation control of particles in optical tweezers is often subject to the spin or orbit angular momentum induced optical torque,which is susceptible to the mechanical and morphological properties of individual par... The rotation control of particles in optical tweezers is often subject to the spin or orbit angular momentum induced optical torque,which is susceptible to the mechanical and morphological properties of individual particle.Here we report on a robust and high-speed rotation control in optical tweezers by using a novel linear polarization synthesis based on optical heterodyne interference between two circularly polarized lights with opposite handedness.The synthesized linear polarization can be rotated in a hopping-free scheme at arbitrary speed determined electronically by the heterodyne frequency between two laser fields.The experimental demonstration of a trapped vaterite particle in water shows that the precisely controlled rotation frequency of 300 Hz can be achieved.The proposed method will find promising applications in optically driven micro-gears,fluidic pumps and rotational micro-rheology. 展开更多
关键词 polarization modulation optical heterodyne optical tweezers optical rotation
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EXPERIMENTAL STUDY ON SOIL MOISTURE USING DUAL-FREQUENCY MICROWAVE RADIOMETER 被引量:2
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作者 GUAN Zhi ZHAO Kai SONG Dong-sheng 《Chinese Geographical Science》 SCIE CSCD 2006年第1期83-86,共4页
An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical r... An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical regression model of retrieving soil moisture in L-band and C-band was developed. The soil moisture in a rainfall event was retrieved using the experiential regression model, which is consistent well with the field sampling value. The results show that when soil moisture is lower than 75%, the brightness temperature is linear with soil moisture. However, when soil moisture is higher than 75%, the brightness temperature is not linear with soil moisture, so it is difficult for microwave radiometer to measure the changes of soil moisture. The experiment verifies the effectiveness and feasibility of microwave remote sensing soil moisture. Although this method for linear regression based on the data measured with the radiometer is simple, and has strong adaptability, generally it has only local application value, and lacks universal applicability for different areas and different conditions. 展开更多
关键词 soil moisture dual-frequency microwave radiometer brightness temperature
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Computation of satellite clock-ephemeris augmentation parameters for dual-frequency multi-constellation satellite-based augmentation system 被引量:3
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作者 CHEN Jie HUANG Zhigang LI Rui 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2018年第6期1111-1123,共13页
Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a sate... Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a satellite at low elevation is so loose that the service availability is decreased near the boundary of the service area. Therefore, the computation of satellite clockephemeris(SCE) augmentation parameters needs improvement.We propose a method introducing SCE prediction to eliminate most of the SCE error resulting from global navigation satellite system GNSS broadcast message. Compared with the signal-inspace(SIS) after applying augmentation parameters broadcast by the wide area augmentation system(WAAS), SIS accuracy after applying augmentation parameters computed by the proposed algorithm is improved and SIS integrity is ensured. With global positioning system(GPS) only, the availability of category-I(CAT-I)with a vertical alert level of 15 m in continental United States is about 90%, while the availability in the other part of the WAAS service area is markedly improved. With measurements made by the stations from the crustal movement observation network of China,users in some part of China can obtain CAT-I(vertical alert limit is 15 m) service with GPS and global navigation satellite system(GLONASS). 展开更多
关键词 dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) orbit determination integrity
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The Performance of Dual-Frequency Polarimetric Scatterometer in Sea Surface Wind Retrieval 被引量:1
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作者 LIU Shubo WEI Enbo +2 位作者 JIN Xu LV Ailing DANG Hongxing 《Journal of Ocean University of China》 SCIE CAS CSCD 2019年第5期1051-1060,共10页
The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wi... The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wind field,a potential extension of dual-frequency(C-band and Ku-band)polarimetric measurements is investigated for both low and very high wind speeds,from 5 to 45 m s^-1.Based on the geophysical model functions of C-band and Ku-band,the simulation results show that the polarimetric measurements of Ku-band can improve the wind vector retrieval over the entire scatterometer swath,especially in nadir area,with the wind direction root-mean-square error(RMSE)less than 12?in the wind speed range of 5–25 m s^-1.Furthermore,the results also show that C-band cross-polarization plays a very important role in improving the wind speed retrieval,with the wind speed retrieval accuracy better than 2 m s^-1 for all wind conditions(0–45 m s^-1).For extreme winds,the C-band HH backscatter coefficients modeled by CMOD5.N(H)and the ocean co-polarization ratio model at large incidence are used to retrieve sea surface wind vector.This result reveals that there is a big decrease of wind direction retrieval RMSE for extreme wind fields,and the retrieved result of C-band HH polarization is nearly the same as that of C-band VV polarization for low-to-high wind speed(5–25 m s^-1).Thus,to improve the wind retrieval for all wind conditions,the dual-frequency polarimetric scatterometer with C-band and Ku-band horizontal polarization in inner beam,and C-band horizontal and Ku-band vertical polarization in outer beam,can be used to measure ocean winds.This study will contribute to the wind retrieval with merged satellites data and the future spaceborne scatterometer. 展开更多
关键词 dual-frequency polarimetric SCATTEROMETER WIND VECTOR RETRIEVAL
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Difference-frequency ultrasound generation from microbubbles under dual-frequency excitation 被引量:1
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作者 马青玉 邱媛媛 +2 位作者 黄蓓 章东 龚秀芬 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期437-442,共6页
The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast a... The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast agents infusion, the harmonic components scattered from the microbubbles, including DF, can be generated due to the nonlinear vibration. A theoretical study on the DF generation from microbubbles under the dual-frequency excitation is proposed in formula based on the solution of the RPNNP equation. The optimisation of the DF generation is discussed associated with the applied acoustic pressure, frequency, and the microbubble size. Experiments are performed to validate the theoretical predictions by using a dual-frequency signal to excite microbubbles. Both the numerical and experimental results demonstrate that the optimised DF ultrasound can be achieved as the difference frequency is close to the resonance frequency of the microbubble and improve the contrast-to-tissue ratio in imaging. 展开更多
关键词 difference-frequency MICROBUBBLE dual-frequency excitation parametric effect
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Effect of Low-frequency Power on F, CF_2 Relative Density and F/CF_2 Ratio in Fluorocarbon Dual-Frequency Plasmas 被引量:1
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作者 黄宏伟 叶超 +3 位作者 徐轶君 袁圆 施国峰 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期566-570,共5页
Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical e... Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical emission spectroscopy. High F, CF2 relative density and high F/CF2 ratio were obtained in a CHF3 plasma. But for C2F6 and C4Fs plasmas, the F, CF2 relative density and F/CF2 ratio all decreased significantly due to the difference in both reactive paths and reactive energy. The increase of LF power caused simultaneous increase of F and CF2 radical relative densities in C4Fs and CHF3 plasmas, but led to increase of F with the decrease in CF2 relative densities in C2F6 plasma due to the increase of lower energy electrons and the decrease of higher energy electrons in electron energy distribution function (EEDF). 展开更多
关键词 fluorocarbon plasma dual-frequency discharge low-k films etching
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Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas 被引量:1
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作者 陆文琪 蒋相站 +6 位作者 刘永新 杨烁 张权治 李小松 徐勇 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期511-515,共5页
The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,a... The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency(LF) power.It was shown that superposition of the lower frequency to the higher frequency(HF) power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported. 展开更多
关键词 dual-frequency capacitive plasma double probe plasma diagnosis
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