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Understanding the spatial interaction of ultrasounds based on three-dimensional dual-frequency ultrasonic field numerical simulation
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作者 Zhao-yang Yin Qi-chi Le +3 位作者 Yan-chao Jiang Da-zhi Zhao Qi-yu Liao Qi Zou 《China Foundry》 SCIE EI CAS CSCD 2024年第1期29-43,共15页
A transient 3D model was established to investigate the effect of spatial interaction of ultrasounds on the dual-frequency ultrasonic field in magnesium alloy melt.The effects of insertion depth and tip shape of the u... A transient 3D model was established to investigate the effect of spatial interaction of ultrasounds on the dual-frequency ultrasonic field in magnesium alloy melt.The effects of insertion depth and tip shape of the ultrasonic rods,input pressures and their ratio on the acoustic field distribution were discussed in detail.Additionally,the spacing,angle,and insertion depth of two ultrasonic rods significantly affect the interaction between distinct ultrasounds.As a result,various acoustic pressure distributions and cavitation regions are obtained.The spherical rods mitigate the longitudinal and transversal attenuation of acoustic pressure and expand the cavitation volume by 53.7%and 31.7%,respectively,compared to the plate and conical rods.Increasing the input pressure will enlarge the cavitation region but has no effect on the acoustic pressure distribution pattern.The acoustic pressure ratio significantly affects the pressure distribution and the cavitation region,and the best cavitation effect is obtained at the ratio of 2:1(P15:P20). 展开更多
关键词 dual-frequency ultrasonic numerical model acoustic pressure spatial interaction magnesium alloy
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基于TiDE-PatchTST模型的柑橘冷藏效率时序预测模型优化
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作者 杨信廷 郭向阳 +2 位作者 韩佳伟 刘彤 杨霖 《农业机械学报》 EI CAS CSCD 北大核心 2024年第7期396-404,共9页
柑橘低温贮藏过程中果实温度波动是引发果品品质安全风险与增加制冷能耗的关键因素,同时果品品质与制冷能耗也是评判柑橘冷藏效率的重要评价指标,实现两者动态预测可为科学预知与精准优化柑橘冷藏效率提供可靠支持。本文提出一种基于Pat... 柑橘低温贮藏过程中果实温度波动是引发果品品质安全风险与增加制冷能耗的关键因素,同时果品品质与制冷能耗也是评判柑橘冷藏效率的重要评价指标,实现两者动态预测可为科学预知与精准优化柑橘冷藏效率提供可靠支持。本文提出一种基于PatchTST的柑橘冷藏效率时序预测模型。首先,基于自注意力机制和独立预测方法(Channel independent,CI)构建基础PatchTST模型;其次,通过融合基础PatchTST模型与TiDE模型中的协变量特征提取模块,实现对多元时序数据集中全部序列的特征提取,并有效改进模型预测精度;最后,基于皮尔森相关性分析方法定量分析冷库制冷参数与能耗、柑橘温度的相关性,确定TiDE-PatchTST模型输入参数,并基于5000组实验数据实现多种模型训练与测试,对比验证TiDE-PatchTST模型的准确性与优越性。结果表明,基于TiDE-PatchTST模型的冷库能耗预测值与实验值平均绝对误差(MAE)和均方根误差(RMSE)分别为3.645 W·h和10.421 W·h,柑橘温度预测值与实验值的MAE和RMSE分别为0.034℃和0.042℃,相比Transformer模型,能耗预测的MAE和RMSE最高分别下降41.43%和39.27%,柑橘温度预测的MAE和RMSE最高分别下降46.03%和28.81%。本研究可为柑橘冷藏过程温度波动与能耗动态感知与优化调控等提供可靠方法支持与参考。 展开更多
关键词 柑橘 冷藏效率 时序预测模型优化 PatchTST tide
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Eutrophication of Jiangsu Coastal Water and Its Role in the Formation of Green Tide
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作者 XIAO Mingyan SONG Weina +2 位作者 ZHANG Haibo SHI Xiaoyong SU Rongguo 《Journal of Ocean University of China》 CAS CSCD 2024年第1期109-118,共10页
Since 2007,the large-scale green tide caused by Ulva prolifera(U.prolifera)have occurred as a recurrent phenomenon in the southern Yellow Sea of China.Field surveys and satellite remote sensing showed that the small s... Since 2007,the large-scale green tide caused by Ulva prolifera(U.prolifera)have occurred as a recurrent phenomenon in the southern Yellow Sea of China.Field surveys and satellite remote sensing showed that the small scattered patches of green tide algae were first observed along the Porphyra agriculture area of the Subei Shoal in late April.In this study,we attempted to identify the role of eutrophication in the origin of the green tide in the Subei Shoal and its adjacent area.Subei Shoal and its adjacent area are characterized by rich nutrients,especially NO_(3)^(-)-N,NH_(4)^(+)-N,PO_(4)^(3-)-P,and other bioavailable components(such as urea-N and amino acids).In the spring of 2017,the average concentrations of NO_(3)^(-)-N were 19.01±11.01μmolL^(-1),accounting for 86.68%of the dis-solved inorganic nitrogen(DIN).In addition,the average concentration of NH4^(+)-N was 2.51±1.60μmolL^(-1).PO_(4)^(3-)-P had an average concentration of 0.14±0.13μmolL-1.The average concentrations of urea-N and total hydrolyzed amino acids(THAA)were 1.73±1.36μmolL^(-1)and 1.33±0.80μmolL^(-1),respectively.Rich nutritive substances play a key role in the rapid production of U.prolifera and make the Jiangsu coastal water an incubator for green tide. 展开更多
关键词 green tide NUTRIENTS ALGAE Ulva prolifera EUTROPHICATION Subei Shoal
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Monitoring absolute vertical land motions and absolute sea-level changes from GPS and tide gauges data over French Polynesia
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作者 Xianjie Li Jean-Pierre Barriot +2 位作者 Bernard Ducarme Marania Hopuare Yidong Lou 《Geodesy and Geodynamics》 EI CSCD 2024年第1期13-26,共14页
In this study,we estimate the absolute vertical land motions at three tidal stations with collocated Global Navigation Satellite System(GNSS)receivers over French Polynesia during the period 2007-2020,and obtain,as an... In this study,we estimate the absolute vertical land motions at three tidal stations with collocated Global Navigation Satellite System(GNSS)receivers over French Polynesia during the period 2007-2020,and obtain,as ancillary results,estimates of the absolute changes in sea level at the same locations.To verify our processing approach to determining vertical motion,we first modeled vertical motion at the International GNSS Service(IGS)THTI station located in the capital island of Tahiti and compared our estimate with previous independent determinations,with a good agreement.We obtained the following estimates for the vertical land motions at the tide gauges:Tubuai island,Austral Archipelago-0.92±0.17 mm/yr,Vairao village,Tahiti Iti:-0.49±0.39 mm/yr,Rikitea,Gambier Archipelago-0.43±0.17 mm/yr.The absolute variations of the sea level are:Tubuai island,Austral Archipelago 5.25±0.60 mm/yr,Vairao village,Tahiti Iti:3.62±0.52 mm/yr,Rikitea,Gambier Archipelago 1.52±0.23 mm/yr.We discuss these absolute values in light of the values obtained from altimetric measurements and other means in French Polynesia. 展开更多
关键词 GPS tide gauges Sea level changes Vertical land motion
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Analysis on the causes of massive stranding of Yellow Sea green tide on Lianyungang and Rizhao coasts in 2022
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作者 Lingjuan WU Juan HUANG +9 位作者 Yi DING Guiyan LIU Shuai HUANG Song GAO Chao YUAN Jiangling XU Ping WU Rui HUANG Ruobing WEN Jie MEI 《Journal of Oceanology and Limnology》 SCIE CAS CSCD 2024年第3期816-830,共15页
In 2022,Yellow Sea green tide caused by Ulva prolifera reached a historic minimum and the coastal areas of Shandong Peninsula were less affected.However,the largest amount of seaweed biomass has been washed ashore on ... In 2022,Yellow Sea green tide caused by Ulva prolifera reached a historic minimum and the coastal areas of Shandong Peninsula were less affected.However,the largest amount of seaweed biomass has been washed ashore on Lianyungang and Rizhao coasts since 2015.We studied the development pattern of Yellow Sea green tide in 2022,and analyzed the key environmental factors on the growth and drifting,then discussed the possible reasons that resulted in the massive stranding of green tide biomass in Lianyungang and Rizhao.Results show under the combined influence of the east to southeast winds and currents with shoreward anomalies,green tide drifted to the coastal waters between Shandong and Jiangsu provinces and the distribution areas located westward compared with previous years(2008–2021).Floating U.prolifera rafts from the coastal waters of Binhai and Sheyang drifted continuously into the coastal waters of Lianyungang and Rizhao,providing important supplements for Yellow Sea green tide.Because green tide in 2022 distributed close to the coastal waters,the abundant nutrients might support their continuous high growth rate.In addition,the amount of rainfall around Shandong Peninsula from late June to early July were significantly higher than in previous years,which might promote the development of green tide to some extent. 展开更多
关键词 Yellow Sea green tide stranding biomass development pattern environmental factor
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Genome-wide SNP markers provided insights into the reproductive strategy and genetic diversity of the green tide causative species Ulva prolifera in China
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作者 Song SUN Weiwei MA +2 位作者 Nan WANG Song FENG Yan SUN 《Journal of Oceanology and Limnology》 SCIE CAS CSCD 2024年第2期533-543,共11页
Ulva prolifera is the causative species of the annually occurring large-scale green tides in China since 2007.Its specific biological features on reproductivity strategies,as well as intra-species genetic diversity,ar... Ulva prolifera is the causative species of the annually occurring large-scale green tides in China since 2007.Its specific biological features on reproductivity strategies,as well as intra-species genetic diversity,are still largely unknown,especially at the genome level,despite their importance in understanding the formation and outbreak of massive green tides.In the present study,the restriction site-associated DNA genotyping approach(2b-RAD)was adopted to identify the genome-wide single-nucleotide polymorphisms(SNPs)of 54 individual thalli including samples collected from Subei Shoal in 2019 and Qingdao coast from 2019 to 2021.SNPs genotype results revealed that most of the thalli in 2019 and 2020 were haploid gametophytes,while only half of the thalli were gametophytes in 2021,indicating flexibility in the reproductive strategies for the formation of the green tides among different years and the dominance of asexual and vegetative reproductive mode for the floating period.Besides,population analysis was conducted,and it revealed a very low genetic diversity among samples from Subei Shoal and the Qingdao coast in the same year and a higher divergence among samples in different years.The results showed the efficiency of 2b-RAD in the exploration of SNPs in U.prolifera and provided the first genome-wide scale evidence for the origin of the large-scale green tides on the Qingdao coast.This study improved our understanding of the reproductive strategy and genetic diversity of the green tide causative species and will help further reveal the biological causes of the green tide in China. 展开更多
关键词 green tide Ulva prolifera 2b-RAD single-nucleotide polymorphism(SNP) reproductive strategy genetic diversity
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Estimation and verification of green tide biomass based on UAV remote sensing
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作者 Xiaopeng JIANG Zhiqiang GAO Zhicheng WANG 《Journal of Oceanology and Limnology》 SCIE CAS CSCD 2024年第4期1216-1226,共11页
Since 2007,the Yellow Sea green tide has broken out every summer,causing great harm to the environment and society.Although satellite remote sensing(RS)has been used in biomass research,there are several shortcomings,... Since 2007,the Yellow Sea green tide has broken out every summer,causing great harm to the environment and society.Although satellite remote sensing(RS)has been used in biomass research,there are several shortcomings,such as mixed pixels,atmospheric interference,and difficult field validation.The biomass of green tide has been lacking a high-precision estimation method.In this study,high-resolution unmanned aerial vehicle(UAV)RS was used to quantitatively map the biomass of green tides.By utilizing experimental data from previous studies,a robust relationship was established to link biomass to the red-green-blue floating algae index(RGB-FAI).Then,the lab-based model for green tide biomass from visible images taken by the UAV camera was developed and validated by field measurements.Re sults show that the accurate and cost-effective method is able to estimate the green tide biomass and its changes in given local waters of the near and far seas.The study provided an effective complement to the traditional satellite RS,as well as high-precision quantitative techniques for decision-making in disaster management. 展开更多
关键词 green tide biomass estimation quantitative technique Yellow Sea unmanned aerial vehicle(UAV) remote sensing(RS)
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Degradation of 4-Chlorophenol Solution by Synergetic Effect of Dual-frequency Ultrasound with Fenton Reagent 被引量:8
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作者 赵德明 徐新华 +1 位作者 雷乐成 汪大翚 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2005年第2期204-210,共7页
4-Chlorophenol (4-CP) solution was treated by dual-frequency ultrasound inconjunction with Fenton reagent, and obvious improvement in the 4-CP degradation rate was observedin this advanced oxidation process. Experimen... 4-Chlorophenol (4-CP) solution was treated by dual-frequency ultrasound inconjunction with Fenton reagent, and obvious improvement in the 4-CP degradation rate was observedin this advanced oxidation process. Experimental results showed that ultrasonic intensity,saturating gas and pH value affected greatly the 4-CP removal rate. Among four different saturatinggases (Ar, O_2, air and N_2), 4-CP degradation with Ar-saturated solution was the best. However, inthe view of practical wastewater treatment, using oxygen as the saturating gas would be moreeconomical. The addition of Fenton reagent followed the first-order kinetics and increased the 4-CPdegradation rate. The 4-CP removal rate increased by around 126% within 15 min treatment. Thesynergetic effect of dual-frequency ultrasound with Fenton reagent on 4-CP degradation was obviouslyobserved. 展开更多
关键词 dual-frequency ultrasound with Fenton reagent advanced oxidation process synergetic effect
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Design and preliminary test of a 105/140 GHz dual-frequency MW-level gyrotron 被引量:3
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作者 Linlin HU Dimin SUN +11 位作者 Qili HUANG Tingting ZHUO Guowu MA Yi JIANG Shenggang GONG Zaojin ZENG Zixing GUO Chaohai DU Fanhong LI Hongbin CHEN Fanbao MENG Hongge MA 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第3期162-169,共8页
A dual-frequency(105/140 GHz)MW-level continuous-wave gyrotron was developed for fusion application at Institute of Applied Electronics,China Academy of Engineering Physics.This gyrotron employs a cylindrical cavity w... A dual-frequency(105/140 GHz)MW-level continuous-wave gyrotron was developed for fusion application at Institute of Applied Electronics,China Academy of Engineering Physics.This gyrotron employs a cylindrical cavity working in the TE18,7 mode at 105 GHz and the TE24,9 mode at 140 GHz.A triode magnetron injection gun and a built-in quasi-optical mode converter were designed to operate at these two frequencies.For the proof-test phase,the gyrotron was equipped with a single-disk boron nitride window to achieve radio frequency output with a power of~500 k W for a short-pulse duration.In the preliminary short-pulse proof-test in the first quarter of2021,the dual-frequency gyrotron achieved output powers of 300 k W at 105 GHz and 540 k W at140 GHz,respectively,under 5 Hz 1 ms continuous pulse-burst operations.Power upgrade and pulse-width extension were hampered by the limitation of the high-voltage power supply and output window.This gyrotron design was preliminarily validated. 展开更多
关键词 GYROTRON MEGAWATT plasma heating fusion application dual-frequency
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Analytical Expressions of Dual-Frequency Plasma Diagnostic Theory 被引量:3
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作者 程立 时家明 许波 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第1期37-39,共3页
Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothe... Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothesis, analytical forms of the electron density and the electron-neutral collision frequency are derived from the equations of the transmission attenuation of microwaves at two near frequencies. This method gives an effective and easy approach to diagnose the unmagnetized plasma. 展开更多
关键词 PLASMA diagnosis dual-frequency ATTENUATION electron density electron-neutral collision frequency
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Optical feedback characteristics in a dual-frequency laser during laser cavity tuning 被引量:2
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作者 刘刚 张书练 +1 位作者 李岩 朱钧 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第10期1984-1989,共6页
The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back;... The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back; (ii) only ⊥-light is fed back; (iii) both lights are fed back. A compact displacement sensor is designed using the experimental result that there is a nearly 90 degrees phase delay between the two lights' cosine optical feedback signals when both lights are fed back into the laser cavity. The priority order that the two lights' intensity curves appear can be used for direction discrimination. The resolution of the displacement sensor is at least 79 rim, and the sensor can discriminate the target's moving direction easily. 展开更多
关键词 dual-frequency laser optical feedback SELF-MIXING displacement sensor
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DEFORMATION MEASUREMENT USING DUAL-FREQUENCY PROJECTION GRATING PHASE-SHIFT PROFILOMETRY 被引量:2
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作者 Yanming Chen Yuming He Eryi Hu Hongmao Zhu 《Acta Mechanica Solida Sinica》 SCIE EI 2008年第2期110-115,共6页
2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to ... 2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to solve such an issue. In the measurement, two properchosen frequency gratings are utilized to synthesize an equivalent wavelength grating which ensures the computed phase in a principal phase range. Thus, the error caused by the phase unwrapping process with the conventional phase reconstruct algorithm can be eliminated. Finally, experimental result of a specimen with large plastic deformation is given to prove that the proposed method is effective to handle the phase discontinuity. 展开更多
关键词 dual-frequency phase-shift profilometry projection grating phase unwrapping DEFORMATION
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EXPERIMENTAL STUDY ON SOIL MOISTURE USING DUAL-FREQUENCY MICROWAVE RADIOMETER 被引量:2
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作者 GUAN Zhi ZHAO Kai SONG Dong-sheng 《Chinese Geographical Science》 SCIE CSCD 2006年第1期83-86,共4页
An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical r... An experiment of measuring soil moisture was carried out by using dual-frequency microwave radiometer designed by the authors. The measured data were analyzed by using statistical regression method and the empirical regression model of retrieving soil moisture in L-band and C-band was developed. The soil moisture in a rainfall event was retrieved using the experiential regression model, which is consistent well with the field sampling value. The results show that when soil moisture is lower than 75%, the brightness temperature is linear with soil moisture. However, when soil moisture is higher than 75%, the brightness temperature is not linear with soil moisture, so it is difficult for microwave radiometer to measure the changes of soil moisture. The experiment verifies the effectiveness and feasibility of microwave remote sensing soil moisture. Although this method for linear regression based on the data measured with the radiometer is simple, and has strong adaptability, generally it has only local application value, and lacks universal applicability for different areas and different conditions. 展开更多
关键词 soil moisture dual-frequency microwave radiometer brightness temperature
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Computation of satellite clock-ephemeris augmentation parameters for dual-frequency multi-constellation satellite-based augmentation system 被引量:3
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作者 CHEN Jie HUANG Zhigang LI Rui 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2018年第6期1111-1123,共13页
Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a sate... Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a satellite at low elevation is so loose that the service availability is decreased near the boundary of the service area. Therefore, the computation of satellite clockephemeris(SCE) augmentation parameters needs improvement.We propose a method introducing SCE prediction to eliminate most of the SCE error resulting from global navigation satellite system GNSS broadcast message. Compared with the signal-inspace(SIS) after applying augmentation parameters broadcast by the wide area augmentation system(WAAS), SIS accuracy after applying augmentation parameters computed by the proposed algorithm is improved and SIS integrity is ensured. With global positioning system(GPS) only, the availability of category-I(CAT-I)with a vertical alert level of 15 m in continental United States is about 90%, while the availability in the other part of the WAAS service area is markedly improved. With measurements made by the stations from the crustal movement observation network of China,users in some part of China can obtain CAT-I(vertical alert limit is 15 m) service with GPS and global navigation satellite system(GLONASS). 展开更多
关键词 dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) orbit determination integrity
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The Performance of Dual-Frequency Polarimetric Scatterometer in Sea Surface Wind Retrieval 被引量:1
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作者 LIU Shubo WEI Enbo +2 位作者 JIN Xu LV Ailing DANG Hongxing 《Journal of Ocean University of China》 SCIE CAS CSCD 2019年第5期1051-1060,共10页
The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wi... The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wind field,a potential extension of dual-frequency(C-band and Ku-band)polarimetric measurements is investigated for both low and very high wind speeds,from 5 to 45 m s^-1.Based on the geophysical model functions of C-band and Ku-band,the simulation results show that the polarimetric measurements of Ku-band can improve the wind vector retrieval over the entire scatterometer swath,especially in nadir area,with the wind direction root-mean-square error(RMSE)less than 12?in the wind speed range of 5–25 m s^-1.Furthermore,the results also show that C-band cross-polarization plays a very important role in improving the wind speed retrieval,with the wind speed retrieval accuracy better than 2 m s^-1 for all wind conditions(0–45 m s^-1).For extreme winds,the C-band HH backscatter coefficients modeled by CMOD5.N(H)and the ocean co-polarization ratio model at large incidence are used to retrieve sea surface wind vector.This result reveals that there is a big decrease of wind direction retrieval RMSE for extreme wind fields,and the retrieved result of C-band HH polarization is nearly the same as that of C-band VV polarization for low-to-high wind speed(5–25 m s^-1).Thus,to improve the wind retrieval for all wind conditions,the dual-frequency polarimetric scatterometer with C-band and Ku-band horizontal polarization in inner beam,and C-band horizontal and Ku-band vertical polarization in outer beam,can be used to measure ocean winds.This study will contribute to the wind retrieval with merged satellites data and the future spaceborne scatterometer. 展开更多
关键词 dual-frequency polarimetric SCATTEROMETER WIND VECTOR RETRIEVAL
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Difference-frequency ultrasound generation from microbubbles under dual-frequency excitation 被引量:1
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作者 马青玉 邱媛媛 +2 位作者 黄蓓 章东 龚秀芬 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期437-442,共6页
The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast a... The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast agents infusion, the harmonic components scattered from the microbubbles, including DF, can be generated due to the nonlinear vibration. A theoretical study on the DF generation from microbubbles under the dual-frequency excitation is proposed in formula based on the solution of the RPNNP equation. The optimisation of the DF generation is discussed associated with the applied acoustic pressure, frequency, and the microbubble size. Experiments are performed to validate the theoretical predictions by using a dual-frequency signal to excite microbubbles. Both the numerical and experimental results demonstrate that the optimised DF ultrasound can be achieved as the difference frequency is close to the resonance frequency of the microbubble and improve the contrast-to-tissue ratio in imaging. 展开更多
关键词 difference-frequency MICROBUBBLE dual-frequency excitation parametric effect
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Effect of Low-frequency Power on F, CF_2 Relative Density and F/CF_2 Ratio in Fluorocarbon Dual-Frequency Plasmas 被引量:1
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作者 黄宏伟 叶超 +3 位作者 徐轶君 袁圆 施国峰 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期566-570,共5页
Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical e... Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical emission spectroscopy. High F, CF2 relative density and high F/CF2 ratio were obtained in a CHF3 plasma. But for C2F6 and C4Fs plasmas, the F, CF2 relative density and F/CF2 ratio all decreased significantly due to the difference in both reactive paths and reactive energy. The increase of LF power caused simultaneous increase of F and CF2 radical relative densities in C4Fs and CHF3 plasmas, but led to increase of F with the decrease in CF2 relative densities in C2F6 plasma due to the increase of lower energy electrons and the decrease of higher energy electrons in electron energy distribution function (EEDF). 展开更多
关键词 fluorocarbon plasma dual-frequency discharge low-k films etching
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Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas 被引量:1
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作者 陆文琪 蒋相站 +6 位作者 刘永新 杨烁 张权治 李小松 徐勇 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期511-515,共5页
The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,a... The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency(LF) power.It was shown that superposition of the lower frequency to the higher frequency(HF) power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported. 展开更多
关键词 dual-frequency capacitive plasma double probe plasma diagnosis
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Investigation of Capacitively Coupled Argon Plasma Driven by Dual-Frequency with Different Frequency Configurations 被引量:1
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作者 虞一青 辛煜 +1 位作者 陆文琪 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第5期571-574,共4页
Low pressure argon dual-frequency (DF) capacitively coupled plasma (CCP) is generated by using different frequency configurations, such as 13.56/2, 27/2, 41/2, and 60/2 MHz. Characteristics of the plasma are inves... Low pressure argon dual-frequency (DF) capacitively coupled plasma (CCP) is generated by using different frequency configurations, such as 13.56/2, 27/2, 41/2, and 60/2 MHz. Characteristics of the plasma are investigated by using a floating double electrical probe and optical emission spectroscopy (OES). It is shown that in the DF-CCPs, the electron temperature Te decreases with the increase in exciting frequency, while the onset of 2 MHz induces a sudden increase in Te and the electron density increases basically with the increase in low frequency (LF) power. The intensity of 750.4 nm emission line increases with the LF power in the case of 13.56/2 MHz, while different tendencies of line intensity with the LF power appear for other configurations. The reason for this is also discussed. 展开更多
关键词 dual-frequency capacitively coupled plasma double probe optical emission spectroscopy
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Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency Capacitively Coupled Plasma Source 被引量:1
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作者 杨磊 辛煜 +2 位作者 徐海鹏 虞一青 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第1期53-58,共6页
Diamond-like carbon (DLC) films were prepared with CH4-Ar using a capacitively coupled plasma enhanced chemical vapor deposition (CCP-CVD) method driven by dual-frequency of 41 MHz and 13.56 MHz in combination. Du... Diamond-like carbon (DLC) films were prepared with CH4-Ar using a capacitively coupled plasma enhanced chemical vapor deposition (CCP-CVD) method driven by dual-frequency of 41 MHz and 13.56 MHz in combination. Due to a coupling via bulk plasma, the self-bias voltage depended not only on the radiofrequency (RF) power of the corresponding electrode but also on another RF power of the counter electrode. The influence of the discharge parameters on the deposition rate, optical and Raman properties of the deposited films was investigated. The optical band decreased basically with the increase in the input power of both the low frequency and high frequency. Raman measurements show that the deposited films have a maximal sp3 content with an applied negative self-bias voltage of -150 V, while high frequency power causes a continuous increase in the sp3 content. The measurement of atomic force microscope (AFM) shows that the surface of the deposited films under ion-bombardment becomes smoother than those with non-intended self-bias voltage. 展开更多
关键词 dual-frequency capacitively coupled discharge DLC Raman spectroscopy
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