A New Synthetical Model of High-Power Pulsed Laser Ablation

We develop a new synthetical model of high-power pulsed laser ablation,which considers the dynamicabsorptance,vaporization,and plasma shielding.And the corresponding heat conduction equations with the initial andboundary conditions are given.The numerical solutions are obtained under the reasonable technical parameter condi-tions by taking YBa_2Cu_3O_7 target for example.The space-dependence and time-dependence of temperature in targetat a certain laser fluence are presented,then,the transmitted intensity through plasma plume,space-dependence oftemperature and ablation rate for different laser fluences are significantly analyzed.As a result,the satisfactorily goodagreement between our numerical results and experimental results indicates that the influences of the dynamic absorp-tance,vaporization,and plasma shielding cannot be neglected.Taking all the three mechanisms above simultaneouslyinto account for the first time,we cause the present model to be more practical.

An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system

In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping(the frequency is between 0 Hz and the natural frequency).In this paper,an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system(DSASAVIS)is proposed.This system has a significant anti-resonance characteristic;that is,the vibration amplitude can drop to nearly zero at a particular frequency,which is called the anti-resonance frequency.The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic.Experimental results show that the closed-loop transmissibility is less than−15 dB from 0 Hz to the initial anti-resonance frequency.Furthermore,it is less than−30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller.With the proposed controller,the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5%for the impulse disturbance applied to the platform base.Simultaneously,the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances,and a good vibration isolation performance is achieved.This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment,especially at frequency sweeping in the semiconductor manufacturing industry.