Electrochemical micromachining of micro-dimple arrays on cylindrical inner surfaces using a dry-film photoresist

The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.

Electrochemical micromachining of microgroove arrays on phosphor bronze surface for improving the tribological performance

A high friction coefficient and a low wear rate of contacted surfaces are essential elements to friction pairs between the stator and the rotor in ultrasonic motors. It has been shown that surface textures have a significant effect on improving the tribological performance of friction pairs.In this paper, microgroove arrays are introduced to the stator surface for improving the tribological performance of friction pairs between the stator and the rotor in ultrasonic motors. Microgrooves were fabricated on a phosphor bronze surface by through-mask electrochemical micromachining（TMEMM）. Parameters, namely, the electrolyte inlet pressure, applied voltage, pulse duty cycle,and frequency, were varied to investigate their influences on the dimensions and morphology of the microgrooves. Results showed that the width and depth of the microgrooves were strongly affected by the applied voltage and frequency, while the morphology of the microgrooves was dependent on the electrolyte inlet pressure and the pulse duty cycle. Compared with a smooth surface, the friction coefficient increased from 0.245 to 0.334 and less abrasion was obtained when a surface was textured with microgrooves of which the width and depth were 185.6 and 57.6 lm,respectively. Microgroove arrays might play an important role in enhancing the performance of ultrasonic motors.

Analysis of the current density characteristics in through-mask electrochemical micromachining(TMEMM) for fabrication of micro-hole arrays on invar alloy film

Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.

3D multiphysic simulations of energy field and material process in radial ultrasonic rolling electrochemical micromachining

The radial ultrasonic rolling electrochemical micromachining(RUR-EMM)combined rolling electrochemical micromachining(R-EMM)and ultrasonic vibration was studied in this paper.The fundamental understanding of the machining process especially the interaction between multiphysics in the interelectrode gap(IEG)was investigated and discussed by the finite element method.The multiphysics coupling model including flow field model,Joule heating model,material dissolution model and vibration model was built.3D multiphysics simulation based on micro dimples process in RUR-EMM and R-EMM was proposed.Simulation results showed that the electrolyte flowed into and out IEG periodically,gas bubbles were easy to squeeze out and the gas void fraction deceased about 16%to 54%,the maximum current density increased by 1.36 times in RUR-EMM than in R-EMM in one vibration period of time.And application of the ultrasonic vibration increased the electrolyte temperature about 1.3–4.4%in IEG.Verification experiments of the micro dimple process denoted better corrosion consistency of array dimples in RUR-EMM,there was no island at the micro dimple bottom which always formed in R-EMM,and an aggregated deviation of less than 8.7%for the micro dimple depth and 4%for the material removal amount between theory and experiment was obtained.

Investigation on surface structuring generated by electrochemical micromachining

Surface geometrical features and their function- ality depend on the manufacturing process which is employed for fabrication of surface structures. Maskless electrochemical micromachining （EMM） is used to generate various surface structures for diminishing and controlling friction and wear to increase the lifetime, reliability, and efficiency of mechanical systems. This paper presents a method for the generation of structured surfaces on stainless steel （SS-304） surfaces by using maskless EMM. The micropatterned tool is composed of 800 μm diameter circular holes in a 5 × 5 matrix form. The indigenously developed EMM set up consists of an EMM cell, electrical power supply system, and a controlled vertical cross-flow electrolyte circulation arrangement to control the influence of process parameters during the generation of the micro features of structured surfaces. The single structured cathode tool is used for the mass production of structured surfaces with a short fabrication time in the industrial context by avoiding the use of an individual masking process for each workpiece. The process has been characterized in terms of the effects of predominant process parameters such as machining voltage, electrolyte concentration, duty ratio, pulsed frequency, and machining time on the machined surface characteristics such as current efficiency, machining accuracy, and depth of the circular pattern on the stainless steel surfaces. A mathematical model is also developed to determine the theoretical depth of the dimple pattern and correlate the theoretical depths with actual depths as obtained by experimentation. Moreover, an effort has been made to study the structuringcharacteristics on the basis of micrographs obtained duringthe EMM.