This study is focused on the application of an effective fabrication method combining electrolytic in-process dressing(ELID) grinding and magnetic assisted polishing(MAP) to nano-precision mirror surface grinding on t...This study is focused on the application of an effective fabrication method combining electrolytic in-process dressing(ELID) grinding and magnetic assisted polishing(MAP) to nano-precision mirror surface grinding on the optics glass-ceramic named Zerodure that is commonly used in precision optics components. The results show the variation of surface roughness after MAP processes utilizing Fe+CeO2, Fe+CeO2+diamond paste and Fe+diamond paste are applied to ELID ground surfaces. The MAP surface roughnesses for ELID ground surface roughnesses(Ra) of 52.1, 39.8 and 51.1 nm using #1200 grinding wheel are improved to 6.1, 4.6 and 1.9 nm, respectively. The surface roughness of MAP process using Fe+CeO2+diamond paste is superior to that using other processes. Moreover, it takes less than 10 min to conduct the MAP processes. The combined method suggested effectively reduces the working time to get the required surface qualities.展开更多
ELID(E lectrolytic In-process D ressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,主要用于硬脆材料超精密磨削过程中金属基结合剂超硬微细磨粒砂轮的在线修整。本文以金刚石微粉砂轮在线电解修整(ELID...ELID(E lectrolytic In-process D ressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,主要用于硬脆材料超精密磨削过程中金属基结合剂超硬微细磨粒砂轮的在线修整。本文以金刚石微粉砂轮在线电解修整(ELID)磨削氮化硅陶瓷为例,着重研究了磨具特性对硬脆材料超精密磨削过程的影响。研究表明,磨具组织沿砂轮圆周的不均匀性将会导致砂轮表面钝化膜状态的不一致,这将直接影响砂轮局部参与切削的磨粒数量,影响单个磨料的实际磨削厚度。这首先将对工件表面的磨削质量,特别是对表面粗糙度产生直接影响,同时也非常不利于实现材料的高效去除。展开更多
The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at gene...The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at generating very ＂smoothed＂ surfaces and reducing the subsurface damage. However, when grinding spectrosil 2000 and BK7 glass assisted with ELID technology, a deeply comparative study on material removal mechanism and the wheel wear behaviors have not been given yet. In this paper, the micro/nano indentation technique is initially applied for investigating the mechanical properties of optical glasses, whose results are then refereed to evaluate the machinability. In single grit diamond scratching on glasses, the scratching traces display four kinds of scratch characteristics according to different material removal modes. In normal grinding experiments, the result shows BK7 glass has a better machinability than that of spectrosil 2000, corresponding to what the micro/nano indentation vent revealed. Under the same grinding depth parameters, the smaller amplitude of acoustic emission （AE） raw signals, grinding force and grinding force ratio correspond to a better surface quality. While for these two kinds of glasses, with the increasing of grinding depth, the variation trends of the surface roughness, the force ratio, and the AE raw signals are contrary, which should be attributed to different material removal modes. Moreover, the SEM micrographs of used wheels surface indicate that diamond grains on the wheel surface after grinding BK7 glass are worn more severely than that of spectrosil 2000. The proposed research analyzes what happened in the grinding process with different material removal patterns, which can provide a basis for producing high-quality optical glasses and comprehensively evaluate the surface and subsurface integrity of optical glasses.展开更多
基金Project supported by Research Program of Yonam Institute of Digital Technology,Korea
文摘This study is focused on the application of an effective fabrication method combining electrolytic in-process dressing(ELID) grinding and magnetic assisted polishing(MAP) to nano-precision mirror surface grinding on the optics glass-ceramic named Zerodure that is commonly used in precision optics components. The results show the variation of surface roughness after MAP processes utilizing Fe+CeO2, Fe+CeO2+diamond paste and Fe+diamond paste are applied to ELID ground surfaces. The MAP surface roughnesses for ELID ground surface roughnesses(Ra) of 52.1, 39.8 and 51.1 nm using #1200 grinding wheel are improved to 6.1, 4.6 and 1.9 nm, respectively. The surface roughness of MAP process using Fe+CeO2+diamond paste is superior to that using other processes. Moreover, it takes less than 10 min to conduct the MAP processes. The combined method suggested effectively reduces the working time to get the required surface qualities.
文摘ELID(E lectrolytic In-process D ressing)磨削技术是在电化学加工、电解磨削原理基础上发展起来的一项磨削新技术,主要用于硬脆材料超精密磨削过程中金属基结合剂超硬微细磨粒砂轮的在线修整。本文以金刚石微粉砂轮在线电解修整(ELID)磨削氮化硅陶瓷为例,着重研究了磨具特性对硬脆材料超精密磨削过程的影响。研究表明,磨具组织沿砂轮圆周的不均匀性将会导致砂轮表面钝化膜状态的不一致,这将直接影响砂轮局部参与切削的磨粒数量,影响单个磨料的实际磨削厚度。这首先将对工件表面的磨削质量,特别是对表面粗糙度产生直接影响,同时也非常不利于实现材料的高效去除。
基金supported by National Key Science and Technology Projects of China (Grant No. 2009ZX04001-101, Grant No. 2009ZX01001-151)New Century Excellent Talents in University of China (Grant No. NCET-07-0246)Pre-Research Project of General Armament Department of China (Grant No. 9140A18070209HT0138)
文摘The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at generating very ＂smoothed＂ surfaces and reducing the subsurface damage. However, when grinding spectrosil 2000 and BK7 glass assisted with ELID technology, a deeply comparative study on material removal mechanism and the wheel wear behaviors have not been given yet. In this paper, the micro/nano indentation technique is initially applied for investigating the mechanical properties of optical glasses, whose results are then refereed to evaluate the machinability. In single grit diamond scratching on glasses, the scratching traces display four kinds of scratch characteristics according to different material removal modes. In normal grinding experiments, the result shows BK7 glass has a better machinability than that of spectrosil 2000, corresponding to what the micro/nano indentation vent revealed. Under the same grinding depth parameters, the smaller amplitude of acoustic emission （AE） raw signals, grinding force and grinding force ratio correspond to a better surface quality. While for these two kinds of glasses, with the increasing of grinding depth, the variation trends of the surface roughness, the force ratio, and the AE raw signals are contrary, which should be attributed to different material removal modes. Moreover, the SEM micrographs of used wheels surface indicate that diamond grains on the wheel surface after grinding BK7 glass are worn more severely than that of spectrosil 2000. The proposed research analyzes what happened in the grinding process with different material removal patterns, which can provide a basis for producing high-quality optical glasses and comprehensively evaluate the surface and subsurface integrity of optical glasses.
