Anomalous ion heat transport is analyzed in the T-10 tokamak plasma heated with electron cyclotron resonance heating(ECRH) in second-harmonic extra-ordinary mode. Predictive modeling with empirical scaling for Ohmical...Anomalous ion heat transport is analyzed in the T-10 tokamak plasma heated with electron cyclotron resonance heating(ECRH) in second-harmonic extra-ordinary mode. Predictive modeling with empirical scaling for Ohmical heat conductivity shows that in ECRH plasmas the calculated ion temperature could be overestimated, so an increase of anomalous ion heat transport is required. To study this effect two scans are presented: over the EC resonance position and over the ECRH power. The EC resonance position varies from the high-field side to the low-field side by variation of the toroidal magnetic field. The scan over the heating power is presented with on-axis and mixed ECRH regimes. Discharges with high anomalous ion heat transport are obtained in all considered regimes. In these discharges the power balance ion heat conductivity exceeds the neoclassical level by up to 10 times. The high ion heat transport regimes are distinguished by three parameters: the ratio Te/Ti, the normalized electron density gradient R/■, and the ion–ion collisionality νii~*. The combination of high Te/Ti, high νii~*, and R/■=6-10 results in values of normalized anomalous ion heat fluxes up to 10 times higher than in the low transport scenario.展开更多
Stabilization of tearing modes and neoclassical tearing modes is of great importance for tokamak operation.Electron cyclotron waves(ECWs)have been extensively used to stabilize the tearing modes with the virtue of hig...Stabilization of tearing modes and neoclassical tearing modes is of great importance for tokamak operation.Electron cyclotron waves(ECWs)have been extensively used to stabilize the tearing modes with the virtue of highly localized power deposition.Complete suppression of the m/n=2/1 tearing mode(TM)by electron cyclotron resonance heating(ECRH)has been achieved successfully on the J-TEXT tokamak.The effects of ECW deposition location and power amplitude on the 2/1 TM suppression have been investigated.It is found that the suppression is more effective when the ECW power is deposited closer to the rational surface.As the ECW power increases to approximately 230 k W,the 2/1 TM can be completely suppressed.The island rotation frequency is increased when the island width is reduced.The experimental results show that the local heating inside the magnetic island and the resulting temperature perturbation increase at the O-point of the island play dominant roles in TM suppression.As the ECW power increases,the 2/1 island is suppressed to smaller island width,and the flow shear also plays a stabilizing effect on small magnetic islands.With the stabilizing contribution of heating and flow shear,the 2/1 TM can be completely suppressed.展开更多
This paper describes the experimental analysis and preliminary investigation of the predictability of pitch angle scattering(PAS) events through the electron cyclotron emission(ECE)radiometer signals at the ADITYA-Upg...This paper describes the experimental analysis and preliminary investigation of the predictability of pitch angle scattering(PAS) events through the electron cyclotron emission(ECE)radiometer signals at the ADITYA-Upgrade(ADITYA-U) tokamak. For low-density discharges at ADITYA-U, a sudden abnormal rise is observed in the ECE signature while other plasma parameters are unchanged. Investigations are done to understand this abrupt rise that is expected to occur due to PAS. The rise time is as fast as 100 μs with a single step and/or multiple step rise in ECE radiometer measurements. This event is known to limit the on-axis energy of runaway electrons. Being a repetitive event, the conditions of its repetitive occurrence can be investigated, thereby exploring the possibility of it being triggered and surveyed as an alternate runaway electron mitigation plan. Functional parameterization of such events with other discharge parameters is obtained and the possibility to trigger these events is discussed.PREDICT code is used to investigate the possible interpretations for the PAS occurrence through modeling and supporting the ECE observations. The trigger values so obtained experimentally are set as input criteria for PAS occurrence. Preliminary modeling investigations provide reliable consistency with the findings.展开更多
During the current flat-top phase of electron cyclotron resonance heating discharges in the HL-2A Tokamak, the behaviour of runaway electrons has been studied by means of hard x-ray detectors and neutron diagnostics. ...During the current flat-top phase of electron cyclotron resonance heating discharges in the HL-2A Tokamak, the behaviour of runaway electrons has been studied by means of hard x-ray detectors and neutron diagnostics. During electron cyclotron resonance heating, it can be found that both hard x-ray radiation intensity and neutron emission flux fall rapidly to a very low level, which suggests that runaway electrons have been suppressed by electron cyclotron resonance heating. From the set of discharges studied in the present experiments, it has also been observed that the efficiency of runaway suppression by electron cyclotron resonance heating was apparently affected by two factors: electroh cyclotron resonance heating power and duration. These results have been analysed by using a test particle model. The decrease of the toroidal electric field due to electron cyclotron resonance heating results in a rapid fall in the runaway electron energy that may lead to a suppression of runaway electrons. During electron cyclotron resonance heating with different powers and durations, the runaway electrons will experience different slowing down processes. These different decay processes are the major cause for influencing the efficiency of runaway suppression. This result is related to the safe operation of the Tokamak and may bring an effective control of runaway electrons.展开更多
A fully superconducting electron cyclotron resonance (ECR) ion source (SECRAL ID is currently being built in the Institute of Modern Physics, Chinese Academy of Sciences. Its key components are three superconductin...A fully superconducting electron cyclotron resonance (ECR) ion source (SECRAL ID is currently being built in the Institute of Modern Physics, Chinese Academy of Sciences. Its key components are three superconducting solenoids (Nb-Ti/Cu) and six superconducting sextupoles (Nb-Ti/Cu). Different from the conventional supercon- ducting ECR magnetic structure, the SEC17AL Ⅱ includes three superconducting solenoid coils' that are located inside the superconducting sextupoles. The SECRAL Ⅱ can significantly reduce the interaction forces between the sextupole and the solenoids, and the magnets can also be more compact in size. For this multi-component SECRAL Ⅱ generating its self field of -8 T and being often exposed to the high self field, the mechanical analysis has become the main issue to keep their stress at 〈200 MPa on coils. The analytical and experimental results in mechanics are presented in the SECRAL Ⅱ structure. To improve the accuracy and efficiency of analysis, according to the composite rule of micromechanics, the equivalent uniform windings are used to simulate the epoxy-impregnated Nb-Ti/Cu coils. In addition, using low temperature strain gauges and a wireless fast strain acquisition system, a fundamental experiment on the based on our analysis, the stresses and deformations optimized. strains developments of a sextupole is reported. Finally, for its assembly of each SECRAL Ⅱ coil will be further展开更多
Theoretical calculation and experimental results for a polarizer with sinusoidal grooves used in the electron cyclotron resonance heating (ECRH) system of the HL-2A tokamak are presented. The calculation is based on...Theoretical calculation and experimental results for a polarizer with sinusoidal grooves used in the electron cyclotron resonance heating (ECRH) system of the HL-2A tokamak are presented. The calculation is based on an integral method developed in the vector theory of diffraction gratings, and the polarization characteristics obtained with a low-power test are in good agreement with the numerical calculated results. With the polarizer assembled in a miter bend in the ECRH transmission line, pure ordinary mode (O-mode) and extraordinary mode (X-mode) polarized waves are also expected in the high-power experiment, depending on the polarizer rotation angle and the toroidal injection angle of the electron cyclotron (EC) wave beam. Second-harmonic X-mode experiments were successfully explored in HL-2A. Experimental result revealed that the electron temperature increased from 0.8 keV (Ohmic heating phase) to 1.5 keV (second X-mode heating phase).展开更多
To study the heating mechanism of electron cyclotron resonance thruster(ECRT)immersed in a non-uniform magnetic field,experiments and simulations are performed based on an electron cyclotron resonance plasma source at...To study the heating mechanism of electron cyclotron resonance thruster(ECRT)immersed in a non-uniform magnetic field,experiments and simulations are performed based on an electron cyclotron resonance plasma source at ASIPP.It is found that the first harmonic of electron cyclotron resonance is essential for plasma ignition at high magnetic field(0.0875 T),while the plasma can sustain without the first and second harmonics of electron cyclotron resonance at low magnetic field(till 0.0170 T).Evidence of radial hollow density profile indicates that upper hybrid resonance,which has strong edge heating effect,is the heating mechanism of low-field ECRT.The heating mode transition from electron cyclotron resonance to upper hybrid resonance is also revealed.Interestingly,the evolutions of electron temperature and electron density with input power experience a‘delayed’jump,which may be correlated with the different power levels required for cyclotron and ionization.Moreover,when the field strength decreased,the variation of electron density behaves in an opposite trend with that of electron temperature,implying a possible competition of power deposition between them.The present work is of great interest for understanding the plasma discharge in ECRT especially immersed in a non-uniform magnetic field,and designing efficient ECRT using low magnetic field for economic space applications.展开更多
The deposition of hydrogenated amorphous silicon carbide (a-SiC.H) films from a mixture of silane, acetylene and hydrogen gas using the electron cyclotron resonance chemical vapour deposition (ECR-CVD) process is repo...The deposition of hydrogenated amorphous silicon carbide (a-SiC.H) films from a mixture of silane, acetylene and hydrogen gas using the electron cyclotron resonance chemical vapour deposition (ECR-CVD) process is reported. The variation of the deposition and film characteristics such as the deposition rate- optical bandgap, photoluminescence and the infra-red (IR) absorption as a function of the hydrogen dilution is investigated. The deposition rate increases to a maximum value of ~25 nm/min at a moderate hydrogen diIution ratio of ~20 [hydrogenflow (sccm)/acetylene+silane flow (sccm)], and decreases in response to a further increase in the hydrogen dilution. There is no strong dependence of the optical bandgap on the hydrogen dilution within the dilution range investigated (10 to 60), and the optical bandgap calculated from the E04 method varied marginally from ~2.85 eV to ~3.17 eV. The room temperaturephotoluminescence (PL) peak energy and intensity shows a prominent shift to a maximum value of ~2.17 eV corresponding to maximum PL intensity at a moderate hydrogen diIution of ~30.The PL intensity shows a strong dependence on the hydrogen dilution variation. IR absorption results show that films deposited at higher hydrogen dilution have more Si-C bonding.展开更多
a-C:F films are deposited by microwave electron cyclotron resonance (ECR)plasma chemical vapor deposition (CVD) using trifluoromethane (CHF3) and benzene (C6H6) as source gases at different microwave powers. The radic...a-C:F films are deposited by microwave electron cyclotron resonance (ECR)plasma chemical vapor deposition (CVD) using trifluoromethane (CHF3) and benzene (C6H6) as source gases at different microwave powers. The radicals in plasma originating from source gases dissociation are analyzed by relative irradiance measurement. The bonding configurations and binding state of a-C:F films are measured with Fourier-transformed infrared spectrometer (FTIR) and x-ray photoelectron spectroscopy (XPS). The results show that a-C:F films are mainly composed of CF radical at lower powers but of CF2 radical at higher powers. The deposition of films is related to the radicals generated in plasma and the main bonding configurations are dependent on the ratio of CF to CF2 radicals in films.展开更多
Some nonlinear behavior in electron cyclotron resonance plasma was investigated using a two-dimension hybrid-mode with self-consistent microwave absorption. The saturation,oscillations of plasma parameters (plasma den...Some nonlinear behavior in electron cyclotron resonance plasma was investigated using a two-dimension hybrid-mode with self-consistent microwave absorption. The saturation,oscillations of plasma parameters (plasma density, potential, electron temperature) versus operating conditions (pressure, power) are discussed. Our simulation results are consistent qualitatively with many experimental measurements.展开更多
Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclo...Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance(ECR) were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I(V) characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I(V)characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I(V) characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ?5%, the etch rate shows a slightly concave shape in contrast to the plasma density.展开更多
In this paper we show that two significant phenomena of magnetospheric chorus emission can be explained by the participation of beam-like electron structures,created by Landau-resonant interaction with growing oblique...In this paper we show that two significant phenomena of magnetospheric chorus emission can be explained by the participation of beam-like electron structures,created by Landau-resonant interaction with growing oblique whistler waves.The first concerns the widely observed spectral gap near half the electron cyclotron frequency Ωe;the second is related to the observation of very obliquely propagating lower-band waves that cannot be directly generated by temperature anisotropy.Concerning the gap,kinetic dispersion theory reveals that interference of the beam-related cyclotron mode ω~Ωe-kVb with the conventional whistler mode leads to mode splitting and the appearance of a ’forbidden’ area in the ω-k space.Thereby the beam velocity appears as an essential parameter.It is directly related to the phase velocity of the most unstable whistler wave mode,which is close to VAe/2 for sufficiently hot electrons(VAe is the electron Alfven velocity).To clarify the second point,we show that Landau-resonant beams with Vb Vb<VAe/2,which arise in cold plasmas from unstable upper-band waves,are able to generate lower-band whistler mode waves at very oblique propagation(θ≥60°).Our studies demonstrate the important role of Landau-resonant electrons in nonlinear whistler wave generation in the magnetosphere.展开更多
Electron cyclotron heating on HL-2A has been simulated by TORAY-GA with a second harmonic extraordinary wave and a fundamental ordinary wave. The results show that the wave absorption of the second harmonic extraordin...Electron cyclotron heating on HL-2A has been simulated by TORAY-GA with a second harmonic extraordinary wave and a fundamental ordinary wave. The results show that the wave absorption of the second harmonic extraordinary wave is better than that of the fundamental ordinary wave. In order to understand the interaction mechanism between electrons and the two different polarization modes, the energy exchange between electrons and the two modes are theoretically analyzed, and it is found that the coupling intensity described by the Bessel function and different polarizations of the two modes are the main reasons leading to the above phenomenon. The theoretical results of this study fit well with the simulated and numerical results.展开更多
为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明:...为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明:以氩气为工质,ECR中和器在体积流量0.8 m L/min时,88.6 V电压可引出103.8 m A的电子电流,工质利用效率和电子损耗分别为1.278 9 W/A和194.573 W/A;以氪气为工质,ECR中和器在体积流量0.6 m L/min时,75 V电压可引出108 m A电子电流,工质利用效率和电子产生损耗分别为1.783 2W/A和176.7 W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。展开更多
文摘Anomalous ion heat transport is analyzed in the T-10 tokamak plasma heated with electron cyclotron resonance heating(ECRH) in second-harmonic extra-ordinary mode. Predictive modeling with empirical scaling for Ohmical heat conductivity shows that in ECRH plasmas the calculated ion temperature could be overestimated, so an increase of anomalous ion heat transport is required. To study this effect two scans are presented: over the EC resonance position and over the ECRH power. The EC resonance position varies from the high-field side to the low-field side by variation of the toroidal magnetic field. The scan over the heating power is presented with on-axis and mixed ECRH regimes. Discharges with high anomalous ion heat transport are obtained in all considered regimes. In these discharges the power balance ion heat conductivity exceeds the neoclassical level by up to 10 times. The high ion heat transport regimes are distinguished by three parameters: the ratio Te/Ti, the normalized electron density gradient R/■, and the ion–ion collisionality νii~*. The combination of high Te/Ti, high νii~*, and R/■=6-10 results in values of normalized anomalous ion heat fluxes up to 10 times higher than in the low transport scenario.
基金supported by the National Magnetic Confinement Fusion Energy R&D Program of China(No.2019YFE03010004)the Hubei Provincial Natural Science Foundation of China(No.2022CFA072)National Natural Science Foundation of China(No.51821005)。
文摘Stabilization of tearing modes and neoclassical tearing modes is of great importance for tokamak operation.Electron cyclotron waves(ECWs)have been extensively used to stabilize the tearing modes with the virtue of highly localized power deposition.Complete suppression of the m/n=2/1 tearing mode(TM)by electron cyclotron resonance heating(ECRH)has been achieved successfully on the J-TEXT tokamak.The effects of ECW deposition location and power amplitude on the 2/1 TM suppression have been investigated.It is found that the suppression is more effective when the ECW power is deposited closer to the rational surface.As the ECW power increases to approximately 230 k W,the 2/1 TM can be completely suppressed.The island rotation frequency is increased when the island width is reduced.The experimental results show that the local heating inside the magnetic island and the resulting temperature perturbation increase at the O-point of the island play dominant roles in TM suppression.As the ECW power increases,the 2/1 island is suppressed to smaller island width,and the flow shear also plays a stabilizing effect on small magnetic islands.With the stabilizing contribution of heating and flow shear,the 2/1 TM can be completely suppressed.
文摘This paper describes the experimental analysis and preliminary investigation of the predictability of pitch angle scattering(PAS) events through the electron cyclotron emission(ECE)radiometer signals at the ADITYA-Upgrade(ADITYA-U) tokamak. For low-density discharges at ADITYA-U, a sudden abnormal rise is observed in the ECE signature while other plasma parameters are unchanged. Investigations are done to understand this abrupt rise that is expected to occur due to PAS. The rise time is as fast as 100 μs with a single step and/or multiple step rise in ECE radiometer measurements. This event is known to limit the on-axis energy of runaway electrons. Being a repetitive event, the conditions of its repetitive occurrence can be investigated, thereby exploring the possibility of it being triggered and surveyed as an alternate runaway electron mitigation plan. Functional parameterization of such events with other discharge parameters is obtained and the possibility to trigger these events is discussed.PREDICT code is used to investigate the possible interpretations for the PAS occurrence through modeling and supporting the ECE observations. The trigger values so obtained experimentally are set as input criteria for PAS occurrence. Preliminary modeling investigations provide reliable consistency with the findings.
基金Project supported by the National Natural Science Foundation of China (Grant Nos 10675124,10775041 and 10775045)
文摘During the current flat-top phase of electron cyclotron resonance heating discharges in the HL-2A Tokamak, the behaviour of runaway electrons has been studied by means of hard x-ray detectors and neutron diagnostics. During electron cyclotron resonance heating, it can be found that both hard x-ray radiation intensity and neutron emission flux fall rapidly to a very low level, which suggests that runaway electrons have been suppressed by electron cyclotron resonance heating. From the set of discharges studied in the present experiments, it has also been observed that the efficiency of runaway suppression by electron cyclotron resonance heating was apparently affected by two factors: electroh cyclotron resonance heating power and duration. These results have been analysed by using a test particle model. The decrease of the toroidal electric field due to electron cyclotron resonance heating results in a rapid fall in the runaway electron energy that may lead to a suppression of runaway electrons. During electron cyclotron resonance heating with different powers and durations, the runaway electrons will experience different slowing down processes. These different decay processes are the major cause for influencing the efficiency of runaway suppression. This result is related to the safe operation of the Tokamak and may bring an effective control of runaway electrons.
基金Supported by the National Natural Science Foundation of China under Grant No 11302225the China Postdoctoral Science Foundation under Grant Nos 2014M560820 and 2015T81071
文摘A fully superconducting electron cyclotron resonance (ECR) ion source (SECRAL ID is currently being built in the Institute of Modern Physics, Chinese Academy of Sciences. Its key components are three superconducting solenoids (Nb-Ti/Cu) and six superconducting sextupoles (Nb-Ti/Cu). Different from the conventional supercon- ducting ECR magnetic structure, the SEC17AL Ⅱ includes three superconducting solenoid coils' that are located inside the superconducting sextupoles. The SECRAL Ⅱ can significantly reduce the interaction forces between the sextupole and the solenoids, and the magnets can also be more compact in size. For this multi-component SECRAL Ⅱ generating its self field of -8 T and being often exposed to the high self field, the mechanical analysis has become the main issue to keep their stress at 〈200 MPa on coils. The analytical and experimental results in mechanics are presented in the SECRAL Ⅱ structure. To improve the accuracy and efficiency of analysis, according to the composite rule of micromechanics, the equivalent uniform windings are used to simulate the epoxy-impregnated Nb-Ti/Cu coils. In addition, using low temperature strain gauges and a wireless fast strain acquisition system, a fundamental experiment on the based on our analysis, the stresses and deformations optimized. strains developments of a sextupole is reported. Finally, for its assembly of each SECRAL Ⅱ coil will be further
文摘Theoretical calculation and experimental results for a polarizer with sinusoidal grooves used in the electron cyclotron resonance heating (ECRH) system of the HL-2A tokamak are presented. The calculation is based on an integral method developed in the vector theory of diffraction gratings, and the polarization characteristics obtained with a low-power test are in good agreement with the numerical calculated results. With the polarizer assembled in a miter bend in the ECRH transmission line, pure ordinary mode (O-mode) and extraordinary mode (X-mode) polarized waves are also expected in the high-power experiment, depending on the polarizer rotation angle and the toroidal injection angle of the electron cyclotron (EC) wave beam. Second-harmonic X-mode experiments were successfully explored in HL-2A. Experimental result revealed that the electron temperature increased from 0.8 keV (Ohmic heating phase) to 1.5 keV (second X-mode heating phase).
基金Chinese Academy of Sciences‘100 Talent’Program(B),Pre-research of Key Laboratory Fund for Equipment(No.61422070306)Shanghai Engineering Research Center of Space Engine(No.17DZ2280800)+1 种基金National Postdoctoral Program for Innovative Talents(No.BX201700248)China Postdoctoral Science Foundation(No.2017M622035)。
文摘To study the heating mechanism of electron cyclotron resonance thruster(ECRT)immersed in a non-uniform magnetic field,experiments and simulations are performed based on an electron cyclotron resonance plasma source at ASIPP.It is found that the first harmonic of electron cyclotron resonance is essential for plasma ignition at high magnetic field(0.0875 T),while the plasma can sustain without the first and second harmonics of electron cyclotron resonance at low magnetic field(till 0.0170 T).Evidence of radial hollow density profile indicates that upper hybrid resonance,which has strong edge heating effect,is the heating mechanism of low-field ECRT.The heating mode transition from electron cyclotron resonance to upper hybrid resonance is also revealed.Interestingly,the evolutions of electron temperature and electron density with input power experience a‘delayed’jump,which may be correlated with the different power levels required for cyclotron and ionization.Moreover,when the field strength decreased,the variation of electron density behaves in an opposite trend with that of electron temperature,implying a possible competition of power deposition between them.The present work is of great interest for understanding the plasma discharge in ECRT especially immersed in a non-uniform magnetic field,and designing efficient ECRT using low magnetic field for economic space applications.
文摘The deposition of hydrogenated amorphous silicon carbide (a-SiC.H) films from a mixture of silane, acetylene and hydrogen gas using the electron cyclotron resonance chemical vapour deposition (ECR-CVD) process is reported. The variation of the deposition and film characteristics such as the deposition rate- optical bandgap, photoluminescence and the infra-red (IR) absorption as a function of the hydrogen dilution is investigated. The deposition rate increases to a maximum value of ~25 nm/min at a moderate hydrogen diIution ratio of ~20 [hydrogenflow (sccm)/acetylene+silane flow (sccm)], and decreases in response to a further increase in the hydrogen dilution. There is no strong dependence of the optical bandgap on the hydrogen dilution within the dilution range investigated (10 to 60), and the optical bandgap calculated from the E04 method varied marginally from ~2.85 eV to ~3.17 eV. The room temperaturephotoluminescence (PL) peak energy and intensity shows a prominent shift to a maximum value of ~2.17 eV corresponding to maximum PL intensity at a moderate hydrogen diIution of ~30.The PL intensity shows a strong dependence on the hydrogen dilution variation. IR absorption results show that films deposited at higher hydrogen dilution have more Si-C bonding.
文摘a-C:F films are deposited by microwave electron cyclotron resonance (ECR)plasma chemical vapor deposition (CVD) using trifluoromethane (CHF3) and benzene (C6H6) as source gases at different microwave powers. The radicals in plasma originating from source gases dissociation are analyzed by relative irradiance measurement. The bonding configurations and binding state of a-C:F films are measured with Fourier-transformed infrared spectrometer (FTIR) and x-ray photoelectron spectroscopy (XPS). The results show that a-C:F films are mainly composed of CF radical at lower powers but of CF2 radical at higher powers. The deposition of films is related to the radicals generated in plasma and the main bonding configurations are dependent on the ratio of CF to CF2 radicals in films.
文摘Some nonlinear behavior in electron cyclotron resonance plasma was investigated using a two-dimension hybrid-mode with self-consistent microwave absorption. The saturation,oscillations of plasma parameters (plasma density, potential, electron temperature) versus operating conditions (pressure, power) are discussed. Our simulation results are consistent qualitatively with many experimental measurements.
基金the support of Deutsche Forschungsgemeinschaft,DFG#FR 1553/6-1
文摘Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance(ECR) were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I(V) characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I(V)characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I(V) characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ?5%, the etch rate shows a slightly concave shape in contrast to the plasma density.
文摘In this paper we show that two significant phenomena of magnetospheric chorus emission can be explained by the participation of beam-like electron structures,created by Landau-resonant interaction with growing oblique whistler waves.The first concerns the widely observed spectral gap near half the electron cyclotron frequency Ωe;the second is related to the observation of very obliquely propagating lower-band waves that cannot be directly generated by temperature anisotropy.Concerning the gap,kinetic dispersion theory reveals that interference of the beam-related cyclotron mode ω~Ωe-kVb with the conventional whistler mode leads to mode splitting and the appearance of a ’forbidden’ area in the ω-k space.Thereby the beam velocity appears as an essential parameter.It is directly related to the phase velocity of the most unstable whistler wave mode,which is close to VAe/2 for sufficiently hot electrons(VAe is the electron Alfven velocity).To clarify the second point,we show that Landau-resonant beams with Vb Vb<VAe/2,which arise in cold plasmas from unstable upper-band waves,are able to generate lower-band whistler mode waves at very oblique propagation(θ≥60°).Our studies demonstrate the important role of Landau-resonant electrons in nonlinear whistler wave generation in the magnetosphere.
基金supported by the National Basic Research Program of China (973 Program) (No. 2010GB107003)
文摘Electron cyclotron heating on HL-2A has been simulated by TORAY-GA with a second harmonic extraordinary wave and a fundamental ordinary wave. The results show that the wave absorption of the second harmonic extraordinary wave is better than that of the fundamental ordinary wave. In order to understand the interaction mechanism between electrons and the two different polarization modes, the energy exchange between electrons and the two modes are theoretically analyzed, and it is found that the coupling intensity described by the Bessel function and different polarizations of the two modes are the main reasons leading to the above phenomenon. The theoretical results of this study fit well with the simulated and numerical results.
文摘为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明:以氩气为工质,ECR中和器在体积流量0.8 m L/min时,88.6 V电压可引出103.8 m A的电子电流,工质利用效率和电子损耗分别为1.278 9 W/A和194.573 W/A;以氪气为工质,ECR中和器在体积流量0.6 m L/min时,75 V电压可引出108 m A电子电流,工质利用效率和电子产生损耗分别为1.783 2W/A和176.7 W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。