Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma the...Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.展开更多
In this paper,a CO_(2) laser induced discharge plasma extreme ultraviolet(EUV)source experimental device was established.The optical emission spectroscopy was used to diagnose the characteristics of the plasma,and the...In this paper,a CO_(2) laser induced discharge plasma extreme ultraviolet(EUV)source experimental device was established.The optical emission spectroscopy was used to diagnose the characteristics of the plasma,and the evolution of electron temperature and electron density with time was obtained.The influence of discharge voltage on plasma parameters was analyzed and discussed.The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer.The EUV radiation intensity and conversion efficiency were discussed.展开更多
基金Project supported by the Basic and Applied Basic Research Major Program of Guangdong Province,China(Grant No.2019B030302003).
文摘Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.
基金This work was supported by the Fundamental Research Funds for the Central Universities(HUST:2016YXMS028).
文摘In this paper,a CO_(2) laser induced discharge plasma extreme ultraviolet(EUV)source experimental device was established.The optical emission spectroscopy was used to diagnose the characteristics of the plasma,and the evolution of electron temperature and electron density with time was obtained.The influence of discharge voltage on plasma parameters was analyzed and discussed.The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer.The EUV radiation intensity and conversion efficiency were discussed.
