The gas phase process of diamond film deposition from CH4/H2 gas mixture by electron-assisted chemical vapor deposition is simulated by the Monte-Carlo method. The electron velocity distribution under different E/P (t...The gas phase process of diamond film deposition from CH4/H2 gas mixture by electron-assisted chemical vapor deposition is simulated by the Monte-Carlo method. The electron velocity distribution under different E/P (the ratio of the electric field to gas pressure) is obtained, and the velocity profile is asymmetric. The variation of the number density of CH3 and H with different CH4 concentrations and gas pressure is investigated, and the optimal experimental parameters are obtained: the gas pressure is in the range of 2.5 kPa - 15 kPa and the CH4 concentration is in the range of 0.5% - 1%. The energy carried by the fragment CH3 as the function of the experiment parameters is investigated to explain the diamond growth at low temperature. These results will be helpful to the selection of optimum experimental conditions for high quality diamond films deposition in EACVD and the modeling of plasma chemical vapor deposition.展开更多
A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high pu...A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high purity and large grain size, which is larger than 300 μm. Its resistivity is higher than 10^12 W· cm. Interlaced-finger electrodes are imprinted onto the diamond film to develop an x-ray detector. Ohmic contact is confirmed by checking the linearity of its current–voltage curve. The dark current is lower than 0.1 n A under an electric field of 30 k V cm^-1. The time response is 220 ps. The sensitivity is about 125 m A W^-1 under a biasing voltage of 100 V.A good linear radiation dose rate is also confirmed. This diamond detector is used to measure x-ray on a Z-pinch, which has a double-layer 'nested tungsten wire array'. The pronounced peaks in the measured waveform clearly characterize the x-ray bursts, which proves the performance of this diamond detector.展开更多
基金The project supported by the Nature Science Foundation of Hebei Province, China (No 502121)
文摘The gas phase process of diamond film deposition from CH4/H2 gas mixture by electron-assisted chemical vapor deposition is simulated by the Monte-Carlo method. The electron velocity distribution under different E/P (the ratio of the electric field to gas pressure) is obtained, and the velocity profile is asymmetric. The variation of the number density of CH3 and H with different CH4 concentrations and gas pressure is investigated, and the optimal experimental parameters are obtained: the gas pressure is in the range of 2.5 kPa - 15 kPa and the CH4 concentration is in the range of 0.5% - 1%. The energy carried by the fragment CH3 as the function of the experiment parameters is investigated to explain the diamond growth at low temperature. These results will be helpful to the selection of optimum experimental conditions for high quality diamond films deposition in EACVD and the modeling of plasma chemical vapor deposition.
基金supported by the National Key R&D Program of China(Grant No.2017YFE0301300)the Hunan Provincial Innovation Foundation for Postgraduate(Grant No.CX2018B588)。
文摘A diamond film with a size of 6×6×0.5 mm^3 is fabricated by electron-assisted chemical vapor deposition. Raman spectrum analysis, x-ray diffraction and scanning electron microscope images confirm the high purity and large grain size, which is larger than 300 μm. Its resistivity is higher than 10^12 W· cm. Interlaced-finger electrodes are imprinted onto the diamond film to develop an x-ray detector. Ohmic contact is confirmed by checking the linearity of its current–voltage curve. The dark current is lower than 0.1 n A under an electric field of 30 k V cm^-1. The time response is 220 ps. The sensitivity is about 125 m A W^-1 under a biasing voltage of 100 V.A good linear radiation dose rate is also confirmed. This diamond detector is used to measure x-ray on a Z-pinch, which has a double-layer 'nested tungsten wire array'. The pronounced peaks in the measured waveform clearly characterize the x-ray bursts, which proves the performance of this diamond detector.
