期刊文献+
共找到54篇文章
< 1 2 3 >
每页显示 20 50 100
The First Principle Formula of the Relativistic Heat Conductivity of Coulomb Electronic Plasmas
1
作者 TIANChu-Shun LUQuan-Kang 《Communications in Theoretical Physics》 SCIE CAS CSCD 2001年第5期605-608,共4页
Making use of the relativistic BBGKY technique,the relativistic generalization of Landau collision integral is obtained.Furthermore,we calculate the relativistic hydrodynamic modes up to the second order in the hydrod... Making use of the relativistic BBGKY technique,the relativistic generalization of Landau collision integral is obtained.Furthermore,we calculate the relativistic hydrodynamic modes up to the second order in the hydrodynamic wave number.Combining Résibois' method,we present the first principle formula of the relativistic heat conductivity of Coulomb electronic plasmas for low-order corrections. 展开更多
关键词 relativistic Landau collision integral relativistic correction of heat conductivity Coulomb electronic plasmas
下载PDF
Characterization of a New DC-Glow Discharge Plasma Set-Up to Enhance the Electronic Circuits Performance 被引量:1
2
作者 A. A. Talab Ashraf Yahia +1 位作者 M. A. Saudy M. Elsayed 《Journal of Modern Physics》 2020年第7期1044-1057,共14页
The (DC-GDPAU) is a DC glow discharge plasma experiment that was designed, established, and operated in the Physics Department at Ain Shams University (Egypt). The aim of this experiment is to study and improve some p... The (DC-GDPAU) is a DC glow discharge plasma experiment that was designed, established, and operated in the Physics Department at Ain Shams University (Egypt). The aim of this experiment is to study and improve some properties of a printed circuit board (PCB) by exposing it to the plasma. The device consists of cylindrical discharge chamber with movable parallel circular copper electrodes (cathode and anode) fixed inside it. The distance between them is 12 cm. This plasma experiment works in a low-pressure range (0.15 - 0.70 Torr) for Ar gas with a maximum DC power supply of 200 W. The Paschen curves and electrical plasma parameters (current, volt, power, resistance) characterized to the plasma have been measured and calculated at each cm between the two electrodes. Besides, the electron temperature and ion density are obtained at different radial distances using a double Langmuir probe. The electron temperature (<em>KT<sub>e</sub></em>) was kept stable in range 6.58 to 10.44 eV;whereas the ion density (<em>ni</em>) was in range from 0.91 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">&minus;</span>3</sup> to 1.79 × 10<sup>10</sup> cm<sup><span style="white-space:nowrap;">&minus;</span>3</sup>. A digital optical microscope (800×) was employed to draw a comparison between the pre-and after effect of exposure to plasma on the shaping of the circuit layout. The experimental results show that the electrical conductivity increased after plasma exposure, also an improvement in the adhesion force in the Cu foil surface. A significant increase in the conductivity can be directly related to the position of the sample surfaces as well as to the time of exposure. This shows the importance of the obtained results in developing the PCBs manufacturing that uses in different microelectronics devices like those onboard of space vehicles. 展开更多
关键词 DC Glow Discharge Paschen Curve Cold plasma Characteristics Double Electric Probe Printed Circuit Board (PCB) Properties electronic plasma Application
下载PDF
Explanation of Ball Lightning by Plasma Oscillations
3
作者 Auguste Meessen 《Journal of Modern Physics》 2023年第11期1355-1381,共27页
Ball Lightning (BL) is a “plasma bubble” that has very remarkable properties. Its membrane contains a higher density of charged particles than the ambient medium. They are held together by mutually attracting surfac... Ball Lightning (BL) is a “plasma bubble” that has very remarkable properties. Its membrane contains a higher density of charged particles than the ambient medium. They are held together by mutually attracting surface charges, generated by collective oscillations of all unbound electrons inside the membrane. Energy losses by collisions and emission of radiation, as well as losses of charged particles by recombination, are compensated by extracting other ones from atmospheric air. Since that occurs in a special rhythmic way, this leads to “parametric amplification” of the oscillations of all unbound electrons in the plasma membrane. Moreover, BL is attracted by higher concentrations of charged particles in atmospheric air. Too much of them leads to explosion and too few to extinction of visible BL. Since the electric charge of BL is oscillating, it is also attracted by metals, water and glass. It can then heat, melt and vaporize these materials without stored energy. BL is even able to pass through window panes in 3 different ways, but that can also be explained. 展开更多
关键词 Ball Lightning electronic plasma Oscillations Parametric Amplification Prop-erties of Ball Lightning
下载PDF
Interaction between plasma and electromagnetic field in ion source of 10 cm ECR ion thruster 被引量:2
4
作者 Hao Mou Yi-Zhou Jin +2 位作者 Juan Yang Xu Xia Yu-Liang Fu 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第7期404-412,共9页
Through diagnosing the plasma density and calculating the intensity of microwave electric field,four 10 cm electron cyclotron resonance(ECR)ion sources with different magnetic field structures are studied to reveal th... Through diagnosing the plasma density and calculating the intensity of microwave electric field,four 10 cm electron cyclotron resonance(ECR)ion sources with different magnetic field structures are studied to reveal the inside interaction between the plasma,magnetic field and microwave electric field.From the diagnosing result it can be found that the plasma density distribution is controlled by the plasma generation and electron loss volumes associated with the magnetic field and microwave power level.Based on the cold plasma hypothesis and diagnosing result,the microwave electric field intensity distribution in the plasma is calculated.The result shows that the plasma will significantly change the distribution of the microwave electric field intensity to form a bow shape.From the boundary region of the shape to the center,the electric field intensity varies from higher to lower and the diagnosed density inversely changes.If the bow and its inside lower electric field intensity region are close to the screen grid,the performance of ion beam extracting will be better.The study can provide useful information for the creating of 10 cm ECR ion source and understanding its mechanism. 展开更多
关键词 electron cyclotron resonance plasma plasma diagnosing ion source
下载PDF
Laser-induced plasma electron number density:Stark broadening method versus the Saha-Boltzmann equation 被引量:2
5
作者 Arnab SARKAR Manjeet SINGH 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第2期43-51,共9页
We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd:YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser e... We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd:YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser energy and the effect of different laser wavelengths were compared. The experimentally observed line profiles of neutral aluminum have been used to extract the excitation temperature using the Boltzmann plot method, whereas the electron number density has been determined from the Stark broadened as well as using the Saha-Boltzmann equation (SBE). Each approach was also carried out by using the AI emission line and Mg emission lines. It was observed that the,SBE method generated a little higher electron number density value than the Stark broadening, method, but within the experimental uncertainty range. Comparisons of Ne determined by the two methods show the presence of a linear relation which is independent of laser energy or laser wavelength. These results show the applicability of the SBE method for Are determination, especially when the system does not have any pure emission lines whose electron impact factor is known, Also use of Mg lines gives superior results than Al lines. 展开更多
关键词 plasma parameter laser induced plasma plasma electron density Saha-Boltzmannmethod Stark broadening method
下载PDF
Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer 被引量:4
6
作者 贺建武 马隆飞 +3 位作者 薛森文 章楚 段俐 康琦 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第2期122-127,共6页
Inductively coupled radio-frequency(RF) plasma neutralizer(RPN) is an insert-free device that can be employed as an electron source in electric propulsion applications.Electron-extraction characteristics of the RP... Inductively coupled radio-frequency(RF) plasma neutralizer(RPN) is an insert-free device that can be employed as an electron source in electric propulsion applications.Electron-extraction characteristics of the RPN are related to the bulk plasma parameters and the device's geometry.Therefore,the effects of different electron-extraction apertures and operational parameters upon the electron-extraction characteristics are investigated according to the global nonambipolar flow and sheath model.Moreover,these models can also be used to explain why the electron-extraction characteristics of the RPN strongly depend upon the formation of the anode spot.During the experimental study,two types of anode spots are observed.Each of them has unique characteristics of electron extraction.Moreover,the hysteresis of an anode spot is observed by changing the xenon volume-flow rates or the bias voltages.In addition,the rapid ignited method,gas-utilization factor,electron-extraction cost and other factors that need to be considered in the design of the RPN are also discussed. 展开更多
关键词 electron source plasma cathode RF neutralizer RF plasma anode spot
下载PDF
Plasma Electron Density Measuring and Processing on the J-TEXT Tokamak 被引量:2
7
作者 舒双宝 罗家融 +1 位作者 薛二兵 盛静 《Journal of Donghua University(English Edition)》 EI CAS 2011年第6期576-579,共4页
Plasma electron density is one of the most fundamental parameters in the study of tokamak plasma physics.The method of plasma electron density measuring and processing on the Joint Texas Experimental Tokamak(J-TEXT) w... Plasma electron density is one of the most fundamental parameters in the study of tokamak plasma physics.The method of plasma electron density measuring and processing on the Joint Texas Experimental Tokamak(J-TEXT) was presented in this paper.The principle of the plasma electron density measuring by hydrogen cyanide(HCN) laser interferometer was introduced.Room temperature triglycine sulface(TGS) detector was used to obtain the beat signal of HCN,and phase difference was measured by high-speed acquisition card DAQ2010.Based on the signal characteristics,a specific HCN processing algorithm was designed to eliminate the baseline offset accurately and process overturns of HCN signals effectively.As a result,plasma electron density with high accuracy and low noise has been obtained during the J-TEXT tokamak experiment. 展开更多
关键词 TOKAMAK plasma electron density hydrogen cyanide(HCN) laser triglycine sulface(TGS) detector phase difference measuring
下载PDF
A Fokker-Planck Code for Laser-Produced Plasmas 被引量:1
8
作者 赵斌 郑坚 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第1期22-26,共5页
A Fokker-Planck code is developed based upon Epperlein's scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Thr... A Fokker-Planck code is developed based upon Epperlein's scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations. 展开更多
关键词 FOKKER-PLANCK inverse bremsstrahlung absorption laser-produced plasma electron transport
下载PDF
Langmuir Probe Measurements of an Expanding Argon Plasma 被引量:2
9
作者 曹小岗 夏玉玺 +10 位作者 陈炳周 田树平 王春玲 杨党校 薛晓艳 张卫卫 王建强 苟富均 朱自川 欧巍 陈顺礼 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第1期20-24,共5页
In this work,we studied the effects of the discharge current,gas flow rate and vessel pressure on the electron temperature and density of Ar plasma by Langmuir probe measurement.The argon plasma was created by a one-c... In this work,we studied the effects of the discharge current,gas flow rate and vessel pressure on the electron temperature and density of Ar plasma by Langmuir probe measurement.The argon plasma was created by a one-cathode arc source.The experimental results show that with increasing discharge current and gas flow rate,the electron temperature and density increase.It is found that when the discharge current is 70 A,90 A and HO A at an argon flow rate of2000 seem,the electron densities at about 0.186 m distance from the nozzle are 13.00×10^18 m^-3,14.04×10^18 m^-3 and 15.62×10^18 m^-3,and the electron temperatures are 0.38 eV,0.58 eV and0.71 eV,respectively.The positive I-V characteristic is explained. 展开更多
关键词 PECVD argon plasma electron temperature electron density
下载PDF
Spectroscopic Studies of the Laser Produced Lead Plasma 被引量:1
10
作者 M.HANIF M.SALIK M.A.BAIG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第2期129-134,共6页
Spectroscopic emission of lead plasma, generated by the fundamental (1064 nm) and second harmonics (532 nm) of a Q-switched pulsed Nd: YAG laser, is studied. The spectral lines of neutral atoms and singly ionized... Spectroscopic emission of lead plasma, generated by the fundamental (1064 nm) and second harmonics (532 nm) of a Q-switched pulsed Nd: YAG laser, is studied. The spectral lines of neutral atoms and singly ionized lead ions were shown predominantly. The profiles of neutral lead lines observed were used to extract the excitation temperature using Boltzmann plots, whereas electron number density was determined from the profile of Stark broadened line. The variations of excitation temperature and electron number density as a function of laser energy were studied. 展开更多
关键词 LEAD laser ablation optical emission spectroscopy plasma temperature and electron density
下载PDF
Time-Resolved Emission Spectroscopic Study of Laser-Induced Steel Plasmas 被引量:1
11
作者 M.L.SHAH A.K.PULHANI +1 位作者 B.M.SURI G.P.GUPTA 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期546-551,共6页
Laser-induced steel plasma is generated by focusing a Q-switched Nd:YAG visible laser(532 nm wavelength) with an irradiance of 1 x 109 W/cm2 on a steel sample in air at atmospheric pressure.An Echelle spectrograph ... Laser-induced steel plasma is generated by focusing a Q-switched Nd:YAG visible laser(532 nm wavelength) with an irradiance of 1 x 109 W/cm2 on a steel sample in air at atmospheric pressure.An Echelle spectrograph coupled with a gateable intensified charge-coupled detector is used to record the plasma emissions.Using time-resolved spectroscopic measurements of the plasma emissions,the temperature and electron number density of the steel plasma are determined for many times of the detector delay.The validity of the assumption by the spectroscopic methods that the laser-induced plasma(LIP) is optically thin and is also in local thermodynamic equilibrium(LTE) has been evaluated for many delay times.From the temporal evolution of the intensity ratio of two Fe I lines and matching it with its theoretical value,the delay times where the plasma is optically thin and is also in LTE are found to be 800 ns,900 ns and 1000 ns. 展开更多
关键词 laser-induced plasma STEEL emission spectroscopy plasma temperature and electron number density
下载PDF
Characterization of high flux magnetized helium plasma in SCU-PSI linear device 被引量:2
12
作者 马小春 曹小岗 +3 位作者 韩磊 张志艳 韦建军 芶富均 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第2期104-109,共6页
A high-flux linear plasma device in Sichuan University plasma-surface interaction(SCU-PSI)based on a cascaded arc source has been established to simulate the interactions between helium and hydrogen plasma with the ... A high-flux linear plasma device in Sichuan University plasma-surface interaction(SCU-PSI)based on a cascaded arc source has been established to simulate the interactions between helium and hydrogen plasma with the plasma-facing components in fusion reactors.In this paper,the helium plasma has been characterized by a double-pin Langmuir probe.The results show that the stable helium plasma beam with a diameter of 26 mm was constrained very well at a magnetic field strength of 0.3 T.The core density and ion flux of helium plasma have a strong dependence on the applied current,magnetic field strength and gas flow rate.It could reach an electron density of1.2×10^19m^-3and helium ion flux of 3.2×10^22m^-2s^-1,with a gas flow rate of 4 standard liter per minute,magnetic field strength of 0.2 T and input power of 11 k W.With the addition of-80 Vapplied to the target to increase the helium ion energy and the exposure time of 2 h,the flat top temperature reached about 530°C.The different sizes of nanostructured fuzz on irradiated tungsten and molybdenum samples surfaces under the bombardment of helium ions were observed by scanning electron microscopy.These results measured in the SCU-PSI linear device provide a reference for International Thermonuclear Experimental Reactor related PSI research. 展开更多
关键词 helium plasma beam diameter electron density ion flux nanostructure fuzz
下载PDF
Development of plasma sources for Dipole Research EXperiment(DREX) 被引量:1
13
作者 肖青梅 王志斌 +6 位作者 鄂鹏 王晓钢 肖池阶 任洋 吉瀚涛 毛傲华 李立毅 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第5期15-20,共6页
Dipole Research EXperiment(DREX) is a new terrella device as part of the Space Plasma Environment Research Facility(SPERF) for laboratory studies of space physics relevant to the inner magnetospheric plasmas. Adeq... Dipole Research EXperiment(DREX) is a new terrella device as part of the Space Plasma Environment Research Facility(SPERF) for laboratory studies of space physics relevant to the inner magnetospheric plasmas. Adequate plasma sources are very important for DREX to achieve its scientific goals. According to different research requirements, there are two density regimes for DREX. The low density regime will be achieved by an electron cyclotron resonance(ECR) system for the ‘whistler/chorus' wave investigation, while the high density regime will be achieved by biased cold cathode discharge for the desired ‘Alfvén' wave study. The parameters of ‘whistler/chorus' waves and ‘Alfvén' waves are determined by the scaling law between space and laboratory plasmas in the current device. In this paper, the initial design of these two plasma sources for DREX is described. Focus is placed on the chosen frequency and operation mode of the ECR system which will produce relatively low density ‘artificial radiation belt' plasmas and the seed electrons, followed by the design of biased cold cathode discharge to generate plasma with high density. 展开更多
关键词 Dipole Research EXperiment(DREX) plasma sources electron cyclotron resonance(ECR) bias cold cathode discharge wave particle interaction
下载PDF
Investigation of stimulated Raman scattering in longitudinal magnetized plasma by theory and kinetic simulation
14
作者 Hongyu ZHOU Yan YIN +6 位作者 Kaiqiang PAN Chengzhuo XIAO Jinlong JIAO Duan XIE Tongpu YU Fuqiu SHAO Hongbin ZHUO 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第11期26-34,共9页
Stimulated Raman scattering(SRS)in a longitudinal magnetized plasma is studied by theoretical analysis and kinetic simulation.The linear growth rate derived via one-dimensional fluid theory shows the dependence on the... Stimulated Raman scattering(SRS)in a longitudinal magnetized plasma is studied by theoretical analysis and kinetic simulation.The linear growth rate derived via one-dimensional fluid theory shows the dependence on the plasma density,electron temperature,and magnetic field intensity.One-dimensional particle-in-cell simulations are carried out to examine the kinetic evolution of SRS under low magnetic intensity of w_c/w_0<0.01.There are two density regions distinguished in which the absolute growth of enveloped electrostatic waves and spectrum present quite different characteristics.In a relatively low-density plasma(ne~0.20 nc),the plasma wave presents typical absolute growth and the magnetic field alleviates linear SRS.While in the plasma whose density is near the cut-off point(ne~0.23 nc),the magnetic field induces a spectral splitting of the backscattering and forward-scattering waves.It has been observed in simulations and verified by theoretical analysis.Due to this effect,the onset of reflectivity delays,and the plasma waves form high-frequency oscillation and periodic envelope structure.The split wavenumber Dk/k0 is proportional to the magnetic field intensity and plasma density.These studies provide novel insight into the kinetic behavior of SRS in magnetized plasmas. 展开更多
关键词 laser plasma interaction stimulated Raman scattering longitudinal magnetized plasma spectrum analysis electron plasma wave
下载PDF
Self-modulation and anomalous collective scattering of laser produced intense ion beam in plasmas
15
作者 K.Mima J.Fuchs +5 位作者 T.Taguchi J.Alvarez J.R.Marques S.N.Chen T.Tajima J.M.Perlado 《Matter and Radiation at Extremes》 SCIE EI CAS 2018年第3期127-134,共8页
The collective interaction between intense ion beams and plasmas is studied by simulations and experiments,where an intense proton beam produced by a short pulse laser is injected into a pre-ionized gas.It is found th... The collective interaction between intense ion beams and plasmas is studied by simulations and experiments,where an intense proton beam produced by a short pulse laser is injected into a pre-ionized gas.It is found that,depending on its current density,collective effects can significantly alter the propagated ion beam and the stopping power.The quantitative agreement that is found between theories and experiments constitutes the first validation of the collective interaction theory.The effects in the interaction between intense ion beams and background gas plasmas are of importance for the design of laser fusion reactors as well as for beam physics. 展开更多
关键词 Two stream instabilities Ultra intense short pulse laser Proton beam Wake field Electron plasma wave Laser plasma interaction
下载PDF
Gray Envelope Solitons in Quantum Electron Plasmas
16
作者 王善进 《Communications in Theoretical Physics》 SCIE CAS CSCD 2010年第3期584-586,共3页
By using the traditional perturbation method, we obtain the nonlinear Sehrodinger equation for one-dimensional Schrodinger-Poisson system. Some of its solutions can explain previous results.
关键词 gray envelope solitons quantum electron plasmas
下载PDF
Mega-Electron-Volt Electron Scattering and Radiography of Plasma
17
作者 吴雪娟 王晓方 陈晓虎 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第6期57-61,共5页
A Monte Carlo code is developed to study mega-electron-volt (MeV) electron scattering and transport in plasma based on multiple scattering. A scaling law relating the angular width of a scattered beam to the inciden... A Monte Carlo code is developed to study mega-electron-volt (MeV) electron scattering and transport in plasma based on multiple scattering. A scaling law relating the angular width of a scattered beam to the incident electron energy and the areal density of plasma is found, which may provide a method of MeV electron radiography for diagnosing the area/density of high-temperature, dense plasma under fusion conditions. The study on the MeV electron beam radiography also shows that plasma density interfaces could be discriminated by electron scattering. 展开更多
关键词 in is on of been Mega-Electron-Volt Electron Scattering and Radiography of plasma
下载PDF
Set-up of a Pure Electron Plasma Device
18
作者 赵凯 刘万东 +4 位作者 张寿标 韦潇 徐亮 谢锦林 于治 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第6期1541-1544,共4页
An electron Penning-Malmberg trap, which can confine an electron column and provide a good platform to investigate the cross-field transportation of a strongly magnetized electron plasma, has been set up. With the dev... An electron Penning-Malmberg trap, which can confine an electron column and provide a good platform to investigate the cross-field transportation of a strongly magnetized electron plasma, has been set up. With the device, an electron plasma with a density of 107 cm-3 can be confined for a relatively long time. The structure of the trap, electron source, as well as the way how to measure electron plasma density profile and velocity distribution are introduced in detail. 展开更多
关键词 electron plasma Pennmg-Malmberg device
下载PDF
Nonlinear Dynamics in a Nonextensive Complex Plasma with Viscous Electron Fluids
19
作者 M.R. Hossen S.A. Ema A.A. Mamun 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第6期67-70,共4页
Cylindrical and spherical dust-electron-acoustic (DEA) shock waves and double layers in an unmagnetized, col- lisionless, complex or dusty plasma system are carried out. The plasma system is assumed to be composed o... Cylindrical and spherical dust-electron-acoustic (DEA) shock waves and double layers in an unmagnetized, col- lisionless, complex or dusty plasma system are carried out. The plasma system is assumed to be composed of inertial and viscous cold electron fluids, nonextensive distributed hot electrons, Maxwellian ions, and negatively charged stationary dust grains. The standard reductive perturbation technique is used to derive the nonlinear dynamical equations, that is, the nonplanar Burgers equation and the nonplanar further Burgers equation. They are also numerically analyzed to investigate the basic features of shock waves and double layers (DLs). It is observed that the roles of the viscous cold electron fluids, nonextensivity of hot electrons, and other plasma parameters in this investigation have significantly modified the basic features (such as, polarity, amplitude and width) of the nonplanar DEA shock waves and DLs. It is also observed that the strength of the shock is maximal for the spherical geometry, intermediate for cylindrical geometry, while it is minimal for the planar geometry. The findings of our results obtained from this theoretical investigation may be useful in understanding the nonlinear phenomena associated with the nonplanar DEA waves in both space and laboratory plasmas. 展开更多
关键词 in on IS AS IT of Nonlinear Dynamics in a Nonextensive Complex plasma with Viscous Electron Fluids with
下载PDF
Study of SiO_2 Films Prepared by Electron CyclotronResonant Microwave Plasma
20
作者 张劲松 任兆杏 +2 位作者 梁荣庆 隋毅峰 刘卫 《Plasma Science and Technology》 SCIE EI CAS CSCD 2000年第2期199-205,共7页
Microwave electron cyclotron resonance plasma enhanced chemical vapor depositionwas used to grow silicon dioxide films on crystalline silicon substrate for planar optical waveguides.The relationship between plasma par... Microwave electron cyclotron resonance plasma enhanced chemical vapor depositionwas used to grow silicon dioxide films on crystalline silicon substrate for planar optical waveguides.The relationship between plasma parameters and deposition rates was investigated, and the influ-ence of radio frequency substrate bias on properties of SiO2 films was also preliminarily studied.X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, scanning electron mi-croscopy, atomic force microscopy and elllipsometry were used to characterize the deposited films,showing that SiO2 films with good structural and optical properties prepared at low temperaturehave been achieved. They can basically meet the requirements of integrated optical waveguides. 展开更多
关键词 OA OO Study of SiO2 Films Prepared by Electron CyclotronResonant Microwave plasma
下载PDF
上一页 1 2 3 下一页 到第
使用帮助 返回顶部