In this paper, the effect of van der Waals （vdW） force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the...In this paper, the effect of van der Waals （vdW） force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror＇s pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method （HPM）. It is observed that a sixth order perturbation approx- imation can precisely model the mirror＇s behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.展开更多
文摘In this paper, the effect of van der Waals （vdW） force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror＇s pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method （HPM）. It is observed that a sixth order perturbation approx- imation can precisely model the mirror＇s behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.
