The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is...The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beam solutions of the loads with di?erent distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation o?ers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length o?ers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The e?ects of dielectric layer thickness and electrostatic voltage on the cantilever beam stiction are studied. The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.展开更多
Charged photovoltaic glass produces an electrostatic field.The electrostatic field exerts an electrostatic force on dust particles,thus making more dust particles deposited on the glass.In this paper,the contact elect...Charged photovoltaic glass produces an electrostatic field.The electrostatic field exerts an electrostatic force on dust particles,thus making more dust particles deposited on the glass.In this paper,the contact electrification between the deposited dust particles and the photovoltaic glass is studied.Meanwhile,the surface charge density model of the photovoltaic glass and the electrostatic force of charged particles are analyzed.The results show that with the increasing of the particle impact speed and the inclination angle of the photovoltaic panel,the charges on particles increase to different degrees.Under a given condition,the electrostatic forces acting on the charged particles at different positions above the glass plate form a bell-shaped distribution at a macro level,and present a maximum value in the center of the plate.As the distance between the particle and the charged glass decreases,the electrostatic force exerted on the particle increases significantly and fluctuates greatly.However,its mean value is still higher than the force caused by gravity and the adhesion force,reported by some studies.Therefore,we suggest that photovoltaic glass panels used in the severe wind-sand environment should be made of an anti-static transparent material,which can lessen the dust particles accumulated on the panels.展开更多
In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the...In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror's pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method (HPM). It is observed that a sixth order perturbation approx- imation can precisely model the mirror's behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.展开更多
The nonlinear resonance response of an electrostatically actuated nanobeam is studied over the near-half natural frequency with an axial capacitor controller. A graphene sensor deformed by the vibrations of the nanobe...The nonlinear resonance response of an electrostatically actuated nanobeam is studied over the near-half natural frequency with an axial capacitor controller. A graphene sensor deformed by the vibrations of the nanobeam is used to produce the voltage signal. The voltage of the vibration graphene sensor is used as a control signal input to a closed- loop circuit to mitigate the nonlinear vibration of the nanobeam. An axial control force produced by the axial capacitor controller can transform the frequency-amplitude curves from nonlinear to linear. The necessary and sufficient conditions for guaranteeing the system stability and a saddle-node bifurcation are studied. The numerical simulations are conducted for uniform nanobeams. The nonlinear terms of the vibration system can be transformed into linear ones by applying the critical control voltage to the system. The nonlinear vibration phenomena can be avoided, and the vibration amplitude is mitigated evidently with the axial capacitor controller.展开更多
In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the st...In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the stability of the closed-loop high-order system. A low noise capacitance detection circuit is described with a correlated-double-sampling( CDS) technique to decrease 1 /f noise and offset of the operational amplifier. This paper also proposes a self-test technique for the interface circuit to test the harmonic distortion. An electrostatic force feedback linearization circuit is presented to reduce the harmonic distortion resulting in larger dynamic range( DR). The layout of the IC is implemented in a standard 0. 6 μm CMOS technology and operates at a sampling frequency of 250 kHz. The interface consumes 20 mW from a 5 V supply. The post-simulation results indicate that the noise floor of the digital accelerometer is about- 140 dBV /Hz1 /2at low frequency. The sensitivity is 2. 5 V /g and the nonlinearity is 0. 11%. The self-test function is achieved with 98. 2 dB thirdorder harmonic distortion detection based on the electrostatic force feedback linearization.展开更多
Today, the sun is a very useful source of energy because it continuously radiates energy. An electron is radiating energy continuously, too. A new electrostatic generating method using this electric field energy from ...Today, the sun is a very useful source of energy because it continuously radiates energy. An electron is radiating energy continuously, too. A new electrostatic generating method using this electric field energy from electrons as a driving force of charge carriers was invented, and its success was presented on ESA 2017 and ESA 2019. This new electrostatic generator was realized by asymmetric electrostatic force, which is a new phenomenon. Unfortunately, its experimental success rate was rare. Therefore, the cause was searched by many experiments. Finally, it became apparent that the acceleration force of the charge carrier was not stronger than the deceleration force of the charge carrier with this experimental equipment. Therefore, the electrode arrangement of this equipment was improved. As a result, the acceleration force was increased, and the deceleration force was decreased. Then, the experimental success rate became 100%.展开更多
Methods to remove dust deposits by high-speed airflow have significant potential applications,with optimal design of flow velocity being the core technology.In this paper,we discuss the wind speed required for particl...Methods to remove dust deposits by high-speed airflow have significant potential applications,with optimal design of flow velocity being the core technology.In this paper,we discuss the wind speed required for particle removal from photovoltaic(PV)panels by compressed air by analyzing the force exerted on the dust deposited on inclined photovoltaic panels,which also included different electrification mechanisms of dust while it is in contact with the PV panel.The results show that the effect of the particle charging mechanism in the electric field generated by the PV panel is greatly smaller than the effect of the Van der Waals force and gravity,but the effect of the particle charged by the contact electrification mechanism in the electrostatic field is very pronounced.The wind speed required for dust removal from the PV panel increases linearly with the PV panel electric field,so we suggest that the nighttime,when the PV electric field is relatively small,would be more appropriate time for dust removal.The above results are of great scientific importance for accurately grasping the dust distribution law and for achieving scientific removal of dust on PV panels.展开更多
We believe that the universe is of two types: visible and invisible. Nothing is at rest between the invisible and visible universes. All microscopic bodies as well as all macroscopic bodies are in motion along curved ...We believe that the universe is of two types: visible and invisible. Nothing is at rest between the invisible and visible universes. All microscopic bodies as well as all macroscopic bodies are in motion along curved paths (i.e. in circles). The universe inside an atom is as vast as the visible universe. An atom consists of millions of particles or particle galaxies which contain central energy pools or central energy cores. Energy pools present in the centre of the invisible universe inside atomic or subatomic particles from which particles and energy are continuously interconverting. In a dense central energy pool, two opposite charges are created due to the swirling motion of microscopic energy droplets. Small microscopic energy droplets may swirl either clockwise or anti-clockwise to produce microscopic tornadoes which are non-superimposable mirror images of each other and gain the property of positive and negative charges. Hence, the electrostatic force is originated between these two opposite charges, which are then changed into a pair of particles, i.e. catitron, which carries a positive charge, and anitron which carries a negative charge. All the other millions of subatomic particles or particle galaxies are produced in the same way. So, the electrostatic force is the basic force, and all other forces originate from this basic electrostatic force of attraction. When charged particles move, they produce an oscillating electric field, and the spinning of these particles produces oscillating magnetic fields. These oscillating electric and magnetic fields are perpendicular to each other and, by their interaction, an oscillating gravitational field is produced which is also perpendicular to both the oscillating electric field and the oscillating magnetic field. The Earth’s axial tilt, which causes the Earth’s precessional motion, is caused by the parallel alignment of the Earth’s magnetic field with the magnetic field of the Sun. Gravity is not a cause of space-time curvature, but gravity causes space-time curvature. Space-time curvature is nothing but a curved path around a heavy object. The Universal Theory of Visible and Invisible Universe—The Whole Theory of This Universe—A Step Forward to Einstein, opens new windows in the challenging fields of science and research, i.e. visible and invisible universe, universe inside an atom, what is the stuff of the entire universe? What will happen at the end of this whole universe?展开更多
As a new method to protect the spark gap from metal particle contamination, the effect of the metal inserted insulator on the controlling behavior of metal particles was investigated in a quasi-uniform electric field....As a new method to protect the spark gap from metal particle contamination, the effect of the metal inserted insulator on the controlling behavior of metal particles was investigated in a quasi-uniform electric field. Considering that the inserted metal electrodes can decrease the electric field around the insulator and divert the electrostatic force away from the insulator, the method can be used to prevent the particles from moving toward the insulator so as to reduce the possibility of a breakdown. The inserted metal electrodes can reverse the direction of the particles' horizontal motion. A study on the insulator shape indicates that the inserted metal electrodes can repulse the particle and improve the particle lifting voltage significantly near the vertical surface of the insulator or ribbed insulator. For the insulator with a tilting surface the inserted metal electrodes have little influence on the particle motion. In addition, the size of the inserted electrodes shows a significant effect on the control of particle motion.展开更多
In electromagnetics, Coulomb’s law is a very classic formula. Almost all textbooks give this formula, but none of them give a detailed corresponding theoretical derivation. In order for beginners of physics to better...In electromagnetics, Coulomb’s law is a very classic formula. Almost all textbooks give this formula, but none of them give a detailed corresponding theoretical derivation. In order for beginners of physics to better understand the physical meaning of this formula, we explored the source, the physical model and mechanism of this formula. Based on the principle that the interaction between two different fields can generate energy density, which is equal to the pressure, we analyzed the distribution of the electric field energy density as well as the corresponding pressure on the charged surface. Through the rigorous mathematical derivation, we give the theoretical derivation of this formula.展开更多
Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accu...Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accurately measure the clamping force. To reduce the negative factors influencing measurement precision and repeatability, this article presents a novel method to measure the clamping force and we elaborate both the principle and the key procedure. A micro-force probe component is introduced to monitor, adjust, and eliminate the gap between the wafer and the electrostatic chuck. The contact force between the ruby probe and the wafer is selected as an important parameter to characterize de-chucking, and we have found that the moment of de-chucking can be exactly judged. Moreover, this article derives the formula calibrating equivalent action area of backside gas pressure under real working conditions, which can effectively connect the backside gas pressure at the moment of de-chucking and the clamping force. The experiments were then performed on a self-designed measuring platform.The de-chucking mechanism is discussed in light of our analysis of the experimental data. Determination criteria for de-chucking point are summed up. It is found that the relationship between de-chucking pressure and applied voltage conforms well to quadratic equation. Meanwhile, the result reveals that actual de-chucking behavior is much more complicated than the description given in the classical empirical formula.展开更多
Efficiency and accuracy are two major concerns in numerical solutions of the Poisson-Boltzmann equation for applications in chemistry and biophysics.Recent developments in boundary element methods,interface methods,ad...Efficiency and accuracy are two major concerns in numerical solutions of the Poisson-Boltzmann equation for applications in chemistry and biophysics.Recent developments in boundary element methods,interface methods,adaptive methods,finite element methods,and other approaches for the Poisson-Boltzmann equation as well as related mesh generation techniques are reviewed.We also discussed the challenging problems and possible future work,in particular,for the aim of biophysical applications.展开更多
The properties of nanoparticles are often different from those of larger grains of the same solid material because of their very large specific surface area. This enables many novel applications, but properties such a...The properties of nanoparticles are often different from those of larger grains of the same solid material because of their very large specific surface area. This enables many novel applications, but properties such as agglomeration can also hinder their potential use. By creating nanostructured particles one can take optimum benefit from the desired properties while minimizing the adverse effects. We aim at developing high-precision routes for scalable production of nanostructured particles. Two gas-phase synthesis routes are explored. The first one - covering nanoparticles with a continuous layer - is carried out using atomic layer deposition in a fluidized bed. Through fluidization, the full surface area of the nanoparticles becomes available. With this process, particles can be coated with an ultra-thin film of constant and well-tunable thickness. For the second route - attaching nanoparticles to larger particles - a novel approach using electrostatic forces is demonstrated. The micron-sized particles are charged with one polarity using tribocharging. Using electrospraying, a spray of charged nanoparticles with opposite polarity is generated. Their charge prevents agglomeration, while it enhances efficient deposition at the surface of the host particle. While the proposed processes offer good potential for scale-up, further work is needed to realize large-scale processes.展开更多
The self-attraction of nanowires(NWs)would lead to NWs bunching up together when fabricated in high density and the short circuit of NW-based devices during service.However,the underlying mechanism of the self-attract...The self-attraction of nanowires(NWs)would lead to NWs bunching up together when fabricated in high density and the short circuit of NW-based devices during service.However,the underlying mechanism of the self-attraction of NWs remains debatable due to the lack of in situ characterization of the attraction.In this study,a versatile method of in situ investigating the self-attraction of NWs was developed.The attractive force between two NWs and their distance can be determined quantitatively in the process of attraction under an optical microscope,eliminating the influence of electron beam in electron microscopes.With this approach,the self-attraction of SiC NWs was investigated and a two-stage mechanism for the self-attraction was proposed.The electrostatic force between two individual SiC NWs increased as their distance decreased,and acted as the initial driving force for the attraction of NWs.SiC NWs remained in contact under van der Waals force until they separated when external force exceeded van der Waals force.The charge density and the Hamaker constant of SiC NWs were determined to be 1.9×10^(-4)C·m^(-2)and 1.56×10^(-19)J,which played an important role in the attraction of NWs.The results shed light on the mechanism of selfattraction among NWs and provide new insights into fabricating high-quality NWs and developing high-performance NW-based devices.展开更多
文摘The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beam solutions of the loads with di?erent distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation o?ers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length o?ers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The e?ects of dielectric layer thickness and electrostatic voltage on the cantilever beam stiction are studied. The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.
基金supported by the National Natural Science Foundation of China(Grant Nos.12064034 and 11562017)the Leading Talents Program of Science and Technology Innovation in Ningxia Hui Autonomous Region,China(Grant No.2020GKLRLX08)+1 种基金the CAS Light of West China Program(Grant No.XAB2017AW03)the Key Research and Development Program of Ningxia Hui Autonomous Region,China(Grant No.2018BFH03004).
文摘Charged photovoltaic glass produces an electrostatic field.The electrostatic field exerts an electrostatic force on dust particles,thus making more dust particles deposited on the glass.In this paper,the contact electrification between the deposited dust particles and the photovoltaic glass is studied.Meanwhile,the surface charge density model of the photovoltaic glass and the electrostatic force of charged particles are analyzed.The results show that with the increasing of the particle impact speed and the inclination angle of the photovoltaic panel,the charges on particles increase to different degrees.Under a given condition,the electrostatic forces acting on the charged particles at different positions above the glass plate form a bell-shaped distribution at a macro level,and present a maximum value in the center of the plate.As the distance between the particle and the charged glass decreases,the electrostatic force exerted on the particle increases significantly and fluctuates greatly.However,its mean value is still higher than the force caused by gravity and the adhesion force,reported by some studies.Therefore,we suggest that photovoltaic glass panels used in the severe wind-sand environment should be made of an anti-static transparent material,which can lessen the dust particles accumulated on the panels.
文摘In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror's pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method (HPM). It is observed that a sixth order perturbation approx- imation can precisely model the mirror's behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.
基金Project supported by the National Natural Science Foundation of China(Nos.51275280 and51575325)
文摘The nonlinear resonance response of an electrostatically actuated nanobeam is studied over the near-half natural frequency with an axial capacitor controller. A graphene sensor deformed by the vibrations of the nanobeam is used to produce the voltage signal. The voltage of the vibration graphene sensor is used as a control signal input to a closed- loop circuit to mitigate the nonlinear vibration of the nanobeam. An axial control force produced by the axial capacitor controller can transform the frequency-amplitude curves from nonlinear to linear. The necessary and sufficient conditions for guaranteeing the system stability and a saddle-node bifurcation are studied. The numerical simulations are conducted for uniform nanobeams. The nonlinear terms of the vibration system can be transformed into linear ones by applying the critical control voltage to the system. The nonlinear vibration phenomena can be avoided, and the vibration amplitude is mitigated evidently with the axial capacitor controller.
基金Sponsored by the National Natural Science Foundation of China(Grant No.61204121)the National Hi-Tech Research and Development Program of China(Grant No.2013AA041107)
文摘In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the stability of the closed-loop high-order system. A low noise capacitance detection circuit is described with a correlated-double-sampling( CDS) technique to decrease 1 /f noise and offset of the operational amplifier. This paper also proposes a self-test technique for the interface circuit to test the harmonic distortion. An electrostatic force feedback linearization circuit is presented to reduce the harmonic distortion resulting in larger dynamic range( DR). The layout of the IC is implemented in a standard 0. 6 μm CMOS technology and operates at a sampling frequency of 250 kHz. The interface consumes 20 mW from a 5 V supply. The post-simulation results indicate that the noise floor of the digital accelerometer is about- 140 dBV /Hz1 /2at low frequency. The sensitivity is 2. 5 V /g and the nonlinearity is 0. 11%. The self-test function is achieved with 98. 2 dB thirdorder harmonic distortion detection based on the electrostatic force feedback linearization.
文摘Today, the sun is a very useful source of energy because it continuously radiates energy. An electron is radiating energy continuously, too. A new electrostatic generating method using this electric field energy from electrons as a driving force of charge carriers was invented, and its success was presented on ESA 2017 and ESA 2019. This new electrostatic generator was realized by asymmetric electrostatic force, which is a new phenomenon. Unfortunately, its experimental success rate was rare. Therefore, the cause was searched by many experiments. Finally, it became apparent that the acceleration force of the charge carrier was not stronger than the deceleration force of the charge carrier with this experimental equipment. Therefore, the electrode arrangement of this equipment was improved. As a result, the acceleration force was increased, and the deceleration force was decreased. Then, the experimental success rate became 100%.
基金Project supported by the National Natural Science Foundation of China(Grant No.12064034)the Leading Talents Project of Science and Technology Innovation in Ningxia Hui Autonomous Region,China(Grant No.2020GKLRLX08)+1 种基金the Natural Science Foundation of Ningxia Hui Autonomous Region,China(Grant Nos.2022AAC03643 and2022AAC03117)the Major Science and Technology Project of Ningxia Hui Autonomous Region,China(Grant No.2022BDE03006)。
文摘Methods to remove dust deposits by high-speed airflow have significant potential applications,with optimal design of flow velocity being the core technology.In this paper,we discuss the wind speed required for particle removal from photovoltaic(PV)panels by compressed air by analyzing the force exerted on the dust deposited on inclined photovoltaic panels,which also included different electrification mechanisms of dust while it is in contact with the PV panel.The results show that the effect of the particle charging mechanism in the electric field generated by the PV panel is greatly smaller than the effect of the Van der Waals force and gravity,but the effect of the particle charged by the contact electrification mechanism in the electrostatic field is very pronounced.The wind speed required for dust removal from the PV panel increases linearly with the PV panel electric field,so we suggest that the nighttime,when the PV electric field is relatively small,would be more appropriate time for dust removal.The above results are of great scientific importance for accurately grasping the dust distribution law and for achieving scientific removal of dust on PV panels.
文摘We believe that the universe is of two types: visible and invisible. Nothing is at rest between the invisible and visible universes. All microscopic bodies as well as all macroscopic bodies are in motion along curved paths (i.e. in circles). The universe inside an atom is as vast as the visible universe. An atom consists of millions of particles or particle galaxies which contain central energy pools or central energy cores. Energy pools present in the centre of the invisible universe inside atomic or subatomic particles from which particles and energy are continuously interconverting. In a dense central energy pool, two opposite charges are created due to the swirling motion of microscopic energy droplets. Small microscopic energy droplets may swirl either clockwise or anti-clockwise to produce microscopic tornadoes which are non-superimposable mirror images of each other and gain the property of positive and negative charges. Hence, the electrostatic force is originated between these two opposite charges, which are then changed into a pair of particles, i.e. catitron, which carries a positive charge, and anitron which carries a negative charge. All the other millions of subatomic particles or particle galaxies are produced in the same way. So, the electrostatic force is the basic force, and all other forces originate from this basic electrostatic force of attraction. When charged particles move, they produce an oscillating electric field, and the spinning of these particles produces oscillating magnetic fields. These oscillating electric and magnetic fields are perpendicular to each other and, by their interaction, an oscillating gravitational field is produced which is also perpendicular to both the oscillating electric field and the oscillating magnetic field. The Earth’s axial tilt, which causes the Earth’s precessional motion, is caused by the parallel alignment of the Earth’s magnetic field with the magnetic field of the Sun. Gravity is not a cause of space-time curvature, but gravity causes space-time curvature. Space-time curvature is nothing but a curved path around a heavy object. The Universal Theory of Visible and Invisible Universe—The Whole Theory of This Universe—A Step Forward to Einstein, opens new windows in the challenging fields of science and research, i.e. visible and invisible universe, universe inside an atom, what is the stuff of the entire universe? What will happen at the end of this whole universe?
基金National Natural Science Foundation of China(No.50637010)
文摘As a new method to protect the spark gap from metal particle contamination, the effect of the metal inserted insulator on the controlling behavior of metal particles was investigated in a quasi-uniform electric field. Considering that the inserted metal electrodes can decrease the electric field around the insulator and divert the electrostatic force away from the insulator, the method can be used to prevent the particles from moving toward the insulator so as to reduce the possibility of a breakdown. The inserted metal electrodes can reverse the direction of the particles' horizontal motion. A study on the insulator shape indicates that the inserted metal electrodes can repulse the particle and improve the particle lifting voltage significantly near the vertical surface of the insulator or ribbed insulator. For the insulator with a tilting surface the inserted metal electrodes have little influence on the particle motion. In addition, the size of the inserted electrodes shows a significant effect on the control of particle motion.
文摘In electromagnetics, Coulomb’s law is a very classic formula. Almost all textbooks give this formula, but none of them give a detailed corresponding theoretical derivation. In order for beginners of physics to better understand the physical meaning of this formula, we explored the source, the physical model and mechanism of this formula. Based on the principle that the interaction between two different fields can generate energy density, which is equal to the pressure, we analyzed the distribution of the electric field energy density as well as the corresponding pressure on the charged surface. Through the rigorous mathematical derivation, we give the theoretical derivation of this formula.
基金Project supported by No.02 National Science and Technology Major Project of China(No.2011ZX02403-004)
文摘Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accurately measure the clamping force. To reduce the negative factors influencing measurement precision and repeatability, this article presents a novel method to measure the clamping force and we elaborate both the principle and the key procedure. A micro-force probe component is introduced to monitor, adjust, and eliminate the gap between the wafer and the electrostatic chuck. The contact force between the ruby probe and the wafer is selected as an important parameter to characterize de-chucking, and we have found that the moment of de-chucking can be exactly judged. Moreover, this article derives the formula calibrating equivalent action area of backside gas pressure under real working conditions, which can effectively connect the backside gas pressure at the moment of de-chucking and the clamping force. The experiments were then performed on a self-designed measuring platform.The de-chucking mechanism is discussed in light of our analysis of the experimental data. Determination criteria for de-chucking point are summed up. It is found that the relationship between de-chucking pressure and applied voltage conforms well to quadratic equation. Meanwhile, the result reveals that actual de-chucking behavior is much more complicated than the description given in the classical empirical formula.
基金the NIH,NSF,the Howard Hughes Medical Institute,National Biomedical Computing Resource,the NSF Center for Theoretical Biological Physics,SDSC,the W.M.Keck Foundation,and Accelrys,Inc.Michael Holst was supported in part by NSF Awards 0411723,0511766,and 0225630,and DOE Awards DEFG02-05ER25707 and DE-FG02-04ER25620.
文摘Efficiency and accuracy are two major concerns in numerical solutions of the Poisson-Boltzmann equation for applications in chemistry and biophysics.Recent developments in boundary element methods,interface methods,adaptive methods,finite element methods,and other approaches for the Poisson-Boltzmann equation as well as related mesh generation techniques are reviewed.We also discussed the challenging problems and possible future work,in particular,for the aim of biophysical applications.
文摘The properties of nanoparticles are often different from those of larger grains of the same solid material because of their very large specific surface area. This enables many novel applications, but properties such as agglomeration can also hinder their potential use. By creating nanostructured particles one can take optimum benefit from the desired properties while minimizing the adverse effects. We aim at developing high-precision routes for scalable production of nanostructured particles. Two gas-phase synthesis routes are explored. The first one - covering nanoparticles with a continuous layer - is carried out using atomic layer deposition in a fluidized bed. Through fluidization, the full surface area of the nanoparticles becomes available. With this process, particles can be coated with an ultra-thin film of constant and well-tunable thickness. For the second route - attaching nanoparticles to larger particles - a novel approach using electrostatic forces is demonstrated. The micron-sized particles are charged with one polarity using tribocharging. Using electrospraying, a spray of charged nanoparticles with opposite polarity is generated. Their charge prevents agglomeration, while it enhances efficient deposition at the surface of the host particle. While the proposed processes offer good potential for scale-up, further work is needed to realize large-scale processes.
基金The authors acknowledge the financial supports from the Youth Innovation Promotion Association CAS(No.2019295)the Science and Technology Major Project of Ningbo(No.2018B10046)+2 种基金the National Key R&D Program of China(No.2018YFA0703400)the National Natural Science Foundation of China(Nos.51573201 and 52142501)Changjiang Scholars Program of Chinese Ministry of Education,the Xinghai Science Funds for Distinguished Young Scholars at Dalian University of Technology,and the Collaborative Innovation Center of Major Machine Manufacturing in Liaoning。
文摘The self-attraction of nanowires(NWs)would lead to NWs bunching up together when fabricated in high density and the short circuit of NW-based devices during service.However,the underlying mechanism of the self-attraction of NWs remains debatable due to the lack of in situ characterization of the attraction.In this study,a versatile method of in situ investigating the self-attraction of NWs was developed.The attractive force between two NWs and their distance can be determined quantitatively in the process of attraction under an optical microscope,eliminating the influence of electron beam in electron microscopes.With this approach,the self-attraction of SiC NWs was investigated and a two-stage mechanism for the self-attraction was proposed.The electrostatic force between two individual SiC NWs increased as their distance decreased,and acted as the initial driving force for the attraction of NWs.SiC NWs remained in contact under van der Waals force until they separated when external force exceeded van der Waals force.The charge density and the Hamaker constant of SiC NWs were determined to be 1.9×10^(-4)C·m^(-2)and 1.56×10^(-19)J,which played an important role in the attraction of NWs.The results shed light on the mechanism of selfattraction among NWs and provide new insights into fabricating high-quality NWs and developing high-performance NW-based devices.