Circular thin-plate electrostatic sensors are promising in gas path monitoring due to their advantages of non-intrusiveness and easy installation. The spatial sensitivity and filtering effect are two important perform...Circular thin-plate electrostatic sensors are promising in gas path monitoring due to their advantages of non-intrusiveness and easy installation. The spatial sensitivity and filtering effect are two important performance parameters. In this paper, an analytically mathematical model of induced charge on a circular thin-plate electrode is first derived. Then the spatial sensitivity and filtering effect of the circular electrostatic sensor are investigated by numerical calculations. Finally,experimental studies are performed to testify the theoretical results. Both theoretical and experimental results demonstrate that circular thin-plate electrostatic sensors act as a low-pass filter in the spatial frequency domain, and both the spatial filtering effect and the temporal frequency response characteristics depend strongly on the spatial position and velocity of the charged particle. These conclusions can provide guidelines for the optimal design of circular thin-plate electrostatic sensors.展开更多
Vigorous particle collisions and mechanical processes occurring during high-velocity pneumatic con- veying often lead to particle degradation. The resulting particle size reduction and particle number increase will im...Vigorous particle collisions and mechanical processes occurring during high-velocity pneumatic con- veying often lead to particle degradation. The resulting particle size reduction and particle number increase will impact on the flow characteristics, and subsequently affect the electrostatic type of flow measurements. This study investigates this phenomenon using both experimental and numerical meth- ods. Particle degradation was induced experimentally by recursively conveying the fillite material within a pneumatic pipeline. The associated particle size reduction was monitored. Three electrostatic sensors were embedded along the pipeline to monitor the flow. The results indicated a decreasing trend in the electrostatic sensor outputs with decreasing particle size, which suggested the attenuation of the flow velocity fluctuation. This trend was more apparent at higher conveying velocities, which suggested that more severe particle degradation occurred under these conditions. Coupled computational fluid dynamics and discrete element methods (CFD-DEM) analysis was used to qualitatively validate these experimental results. The numerical results suggested that smaller particles exhibited lower flow velocity fluctua- tions, which was consistent with the observed experimental results. These findings provide important information for the accurate aoolication of electrostatic measurement devices in oneumatic conveyors.展开更多
In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe se...In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe sensor structure design,harsh environmental adaptation problems such as low temperature,high humidity,low air pressure,waterfall are solved.The sensor has a high resolution of 14 V/m,a wide measurement range of±100 kV/m,and is proved to have superior stability and performance in sounding electric field experiments than traditional sensors under different kinds of weather.展开更多
The flow dynamics of binary particle mixtures in the fluidized bed needs to be monitored in order to optimize the related industrial processes.In this paper,electrostatic sensing and high-speed imaging are applied to ...The flow dynamics of binary particle mixtures in the fluidized bed needs to be monitored in order to optimize the related industrial processes.In this paper,electrostatic sensing and high-speed imaging are applied to measure the velocities of polyethylene and sand particles in the binary particle mixtures in fluidization.Experimental studies were conducted on a lab-scale cold circulating fluidized bed.Correlation function between electrostatic signals from upstream and downstream electrodes placed along the riser shows two peaks that represent transit times for the two types of particles.To verify the above results,high-speed imaging was adopted to capture the flow images of particle mixtures.Particle Image Velocimetry and Particle Tracking Velocimetry algorithms were utilized to process the resulted images in order to measure the velocities of polyethylene and sand particles.The reasons for two-peak correlation functions are illustrated based on the frequency spectrums of the mono-solid-phase electrostatic signals and the velocity difference between polyethylene and sand particles.Finally,comparisons on the velocities obtained from electrostatic sensing and high-speed imaging demonstrate the electrostatic sensor can roughly estimate the particle velocity of binary particle mixtures in the near wall region of the circulating fluidized bed.展开更多
A novel low temperature solid state electric field sensor is demonstrated as a promising sensor. The sensor is a type of constant voltage Wheatstone bridge whose resistors are four direct gate SOl MOSFET devices. It i...A novel low temperature solid state electric field sensor is demonstrated as a promising sensor. The sensor is a type of constant voltage Wheatstone bridge whose resistors are four direct gate SOl MOSFET devices. It is demonstrated in theory that the output voltage signal is proportional to the electric field E, the temperature drift is about zero when the temperature is in the range from 200 to 400 K, and the doping concentration is in the range from 1 × 10^14 to 1 × 10^16 cm^-3. The experiment results indicate that the resolution of the sensor is about 3.27 mV for a 1000 V/m electric field at 300 K, and the voltage drift by an amount is about 47 V/m field signal when the degree temperature is in the range from 300 to 370 K, which is much smaller than the current drift of a single MOSFET which is about 10000 V/m field signal.展开更多
This paper presents a new fabrication process for the SOI-based novel miniature electric field sensor. This new process uses polyimide film to release the SiO_2 layer.Compared with the CO_2 critical point release meth...This paper presents a new fabrication process for the SOI-based novel miniature electric field sensor. This new process uses polyimide film to release the SiO_2 layer.Compared with the CO_2 critical point release method,it significantly improves the device surface cleanliness and shortens the process flow.The impurity on the base layer is analyzed.The problem of peak and butterfly-type contamination occurring on the base layer of the SOI wafer during the DRIE process is discussed and solved by thickening the photoresist layer and coating with polyimide film twice.This new process could fabricate MEMS sensors and actuators such as SOI-based electric field sensors,gyroscopes,and micro mirrors and can be an alternative fabrication process compared to commercial SOIMUMPS fabrication processes.展开更多
基金supported by the National Natural Science Foundation of China(Nos.51275520,50805142)
文摘Circular thin-plate electrostatic sensors are promising in gas path monitoring due to their advantages of non-intrusiveness and easy installation. The spatial sensitivity and filtering effect are two important performance parameters. In this paper, an analytically mathematical model of induced charge on a circular thin-plate electrode is first derived. Then the spatial sensitivity and filtering effect of the circular electrostatic sensor are investigated by numerical calculations. Finally,experimental studies are performed to testify the theoretical results. Both theoretical and experimental results demonstrate that circular thin-plate electrostatic sensors act as a low-pass filter in the spatial frequency domain, and both the spatial filtering effect and the temporal frequency response characteristics depend strongly on the spatial position and velocity of the charged particle. These conclusions can provide guidelines for the optimal design of circular thin-plate electrostatic sensors.
文摘Vigorous particle collisions and mechanical processes occurring during high-velocity pneumatic con- veying often lead to particle degradation. The resulting particle size reduction and particle number increase will impact on the flow characteristics, and subsequently affect the electrostatic type of flow measurements. This study investigates this phenomenon using both experimental and numerical meth- ods. Particle degradation was induced experimentally by recursively conveying the fillite material within a pneumatic pipeline. The associated particle size reduction was monitored. Three electrostatic sensors were embedded along the pipeline to monitor the flow. The results indicated a decreasing trend in the electrostatic sensor outputs with decreasing particle size, which suggested the attenuation of the flow velocity fluctuation. This trend was more apparent at higher conveying velocities, which suggested that more severe particle degradation occurred under these conditions. Coupled computational fluid dynamics and discrete element methods (CFD-DEM) analysis was used to qualitatively validate these experimental results. The numerical results suggested that smaller particles exhibited lower flow velocity fluctua- tions, which was consistent with the observed experimental results. These findings provide important information for the accurate aoolication of electrostatic measurement devices in oneumatic conveyors.
基金Supported by the National High Technology Research and Development Program of China(863 Program,2011AA040405)the National Natural Science Foundation of China(No.61201078,No.61302032,No.61327810).
文摘In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe sensor structure design,harsh environmental adaptation problems such as low temperature,high humidity,low air pressure,waterfall are solved.The sensor has a high resolution of 14 V/m,a wide measurement range of±100 kV/m,and is proved to have superior stability and performance in sounding electric field experiments than traditional sensors under different kinds of weather.
基金financial supports from the National Natural Science Foundation of China (No.61403138)Beijing Natural Science Foundation (No.3202028)+1 种基金funded by the National Research Foundation (NRF), Prime Minister’s Offce, Singapore under its Campus for Research Excellence and Technological Enterprise (CREATE) programmeGrant Number R-706-001-102–281, National University of Singapore。
文摘The flow dynamics of binary particle mixtures in the fluidized bed needs to be monitored in order to optimize the related industrial processes.In this paper,electrostatic sensing and high-speed imaging are applied to measure the velocities of polyethylene and sand particles in the binary particle mixtures in fluidization.Experimental studies were conducted on a lab-scale cold circulating fluidized bed.Correlation function between electrostatic signals from upstream and downstream electrodes placed along the riser shows two peaks that represent transit times for the two types of particles.To verify the above results,high-speed imaging was adopted to capture the flow images of particle mixtures.Particle Image Velocimetry and Particle Tracking Velocimetry algorithms were utilized to process the resulted images in order to measure the velocities of polyethylene and sand particles.The reasons for two-peak correlation functions are illustrated based on the frequency spectrums of the mono-solid-phase electrostatic signals and the velocity difference between polyethylene and sand particles.Finally,comparisons on the velocities obtained from electrostatic sensing and high-speed imaging demonstrate the electrostatic sensor can roughly estimate the particle velocity of binary particle mixtures in the near wall region of the circulating fluidized bed.
文摘A novel low temperature solid state electric field sensor is demonstrated as a promising sensor. The sensor is a type of constant voltage Wheatstone bridge whose resistors are four direct gate SOl MOSFET devices. It is demonstrated in theory that the output voltage signal is proportional to the electric field E, the temperature drift is about zero when the temperature is in the range from 200 to 400 K, and the doping concentration is in the range from 1 × 10^14 to 1 × 10^16 cm^-3. The experiment results indicate that the resolution of the sensor is about 3.27 mV for a 1000 V/m electric field at 300 K, and the voltage drift by an amount is about 47 V/m field signal when the degree temperature is in the range from 300 to 370 K, which is much smaller than the current drift of a single MOSFET which is about 10000 V/m field signal.
基金supported by the National High Technology Research and Development Program of China(No.2011AA040405)the National Natural Science Foundation of China(Nos.61101049,61201078)
文摘This paper presents a new fabrication process for the SOI-based novel miniature electric field sensor. This new process uses polyimide film to release the SiO_2 layer.Compared with the CO_2 critical point release method,it significantly improves the device surface cleanliness and shortens the process flow.The impurity on the base layer is analyzed.The problem of peak and butterfly-type contamination occurring on the base layer of the SOI wafer during the DRIE process is discussed and solved by thickening the photoresist layer and coating with polyimide film twice.This new process could fabricate MEMS sensors and actuators such as SOI-based electric field sensors,gyroscopes,and micro mirrors and can be an alternative fabrication process compared to commercial SOIMUMPS fabrication processes.