A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance l...A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.展开更多
Non-spherical of rotor was described with solution method. Electrostatically suspended gyroscope＇s hollow spherical rotor＇s structure was presented. The simulative analysis of static deformation, dynamic deformation...Non-spherical of rotor was described with solution method. Electrostatically suspended gyroscope＇s hollow spherical rotor＇s structure was presented. The simulative analysis of static deformation, dynamic deformation and synthesize deformation of rotor under different working conditions using the finite element software were carried out. Its deformation law and volume were obtained. The structural parameters of the rotor were optimized. The value of pressure required when the rotor was machined was calculated. The analysis has important theoretical reference value to the design for hollow spherical rotor in electrostatically suspended gyroscope.展开更多
基金Sponsored by the Pre-weapons Research Fund(Grant No.9140A09020706JW0314)New Teacher Research Fund for the Doctoral Program of HigherEducation of China(Grant No.200802481026)
文摘A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.
基金supported by the Shandong Province Scientific Research Fund Project of Binzhou University under Grant No. BZXYLG200704
文摘Non-spherical of rotor was described with solution method. Electrostatically suspended gyroscope＇s hollow spherical rotor＇s structure was presented. The simulative analysis of static deformation, dynamic deformation and synthesize deformation of rotor under different working conditions using the finite element software were carried out. Its deformation law and volume were obtained. The structural parameters of the rotor were optimized. The value of pressure required when the rotor was machined was calculated. The analysis has important theoretical reference value to the design for hollow spherical rotor in electrostatically suspended gyroscope.
