Electrowetting-on-dielectric (EWOD) is to directly control the wettability of liquids on the solid surface by applying the electric potential to the microelectrode array under the dielectric layer. The prototype of th...Electrowetting-on-dielectric (EWOD) is to directly control the wettability of liquids on the solid surface by applying the electric potential to the microelectrode array under the dielectric layer. The prototype of the EWOD droplet creator with the sandwiched structure is used: the droplet is sandwiched between the top and bottom plates; the bot- tom plate consists of silicon used as the substrate of the microelectrode array, nitride sili- con film deposited by low pressure chemical vapor deposition as the dielectric layer and the fluorocarbon polymer film deposited by inductively coupled plasma chemical vapor deposition as the hydrophobic layer; and the top plate is the transparent electrode covered with the hydrophobic layer. To obtain the required minimum voltage, the process and the criterion of creating droplets are analyzed. At the voltage of 35 V the deionized water droplet surrounded in silicone oil is successfully created.展开更多
基金This work was supported by the National Natural Science Foundation of China (Grant Nos. 10472055 and 60411009), the Fundamental Research Foundation of Tsinghua University (Grant Nos. JC2003060 and JC2003061).
文摘Electrowetting-on-dielectric (EWOD) is to directly control the wettability of liquids on the solid surface by applying the electric potential to the microelectrode array under the dielectric layer. The prototype of the EWOD droplet creator with the sandwiched structure is used: the droplet is sandwiched between the top and bottom plates; the bot- tom plate consists of silicon used as the substrate of the microelectrode array, nitride sili- con film deposited by low pressure chemical vapor deposition as the dielectric layer and the fluorocarbon polymer film deposited by inductively coupled plasma chemical vapor deposition as the hydrophobic layer; and the top plate is the transparent electrode covered with the hydrophobic layer. To obtain the required minimum voltage, the process and the criterion of creating droplets are analyzed. At the voltage of 35 V the deionized water droplet surrounded in silicone oil is successfully created.
