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Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique
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作者 胡居广 李启文 +4 位作者 林晓东 刘毅 龙井华 王刘杨 汤华斌 《Chinese Optics Letters》 SCIE EI CAS CSCD 2014年第7期53-56,共4页
In conventional pulsed laser deposition (PLD) technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition di... In conventional pulsed laser deposition (PLD) technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition distribution for a multicomponent film and eventually leading to low device quality and low rate of final products. We present a novel method based on PLD for depositing large CIGS films with uni- form thickness and stoichiometry. By oscillating a mirror placed coaxially with the incident laser beam, the laser's focus is scanned across the rotating target surface. This arrangement maintains a constant re- flectance and optical distance, ensuring that a consistent energy density is delivered to the target surface by each laser pulse. Scanning the laser spot across the target suppresses the formation of micro-columns, and thus the plume deflection effect that reduces film uniformity in conventional PLD technique is eliminated. This coaxial scanning PLD method is used to deposit a CIGS film, 500 nm thick, with thickness uniformity exceeding ±3% within a 5 cm diameter, and exhibiting a highly homogeneous elemental distribution. 展开更多
关键词 Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique
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Quantification,morphology and source of humic acid,kerogen and black carbon in offshore marine sediments from Xiamen Gulf,China 被引量:2
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作者 Yanting Chen Jinping Zhao +2 位作者 Liqian Yin Jinsheng Chen Dongxing Yuan 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2013年第2期287-294,共8页
Three types of macromolecular organic matters (MOMs), i.e. humic acid (HA), kerogen+black carbon (KB), and black carbon (BC) were extracted from marine sediments of Xiamen Gulf, southeast of China. The chemic... Three types of macromolecular organic matters (MOMs), i.e. humic acid (HA), kerogen+black carbon (KB), and black carbon (BC) were extracted from marine sediments of Xiamen Gulf, southeast of China. The chemical composition, morphological property and source of the three extractions were characterized by elemental analyzer/isotope ratio mass spectrometry (EA/IRMS) and scanning electron microscope (SEM). The results showed that KB was the predominant fraction in MOMs, which accounted for 61.79%-89.15% of the total organic content (TOC), while HA consisted less than 5%. The relative high contents of kerogen and BC, and low contents of HA in the samples indicated that anthropogenic input might be the major source of organic matter in marine sediments near the industrial regions. The characterization of SEM, not only revealed morphological properties of the three fractions, but also allowed a better understanding of the source of MOMs. The δ 13 C values of the three fractions suggested that materials from terrestrial C 3 plants were predominant. Furthermore, the anthropogenic activities, such as the discharge of sewage, coal and biomass combustion from industry nearby and agricultural practices within drainage basin of the Jiulong River, were remarkably contributed to the variations in δ 13 C values of MOMs in the offshore marine sediments. 展开更多
关键词 macromolecular organic matters elemental analyzer/isotope ratio mass spectrometry scanning electron microscope offshore marine sediment Xiamen
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