In this paper, a method of light intensity mode ellipsometry for optical constant measurement on anisotropic films and crystals is studied. Softwares for this method have also been developed Based on the theories and ...In this paper, a method of light intensity mode ellipsometry for optical constant measurement on anisotropic films and crystals is studied. Softwares for this method have also been developed Based on the theories and correspond softwares, experiments are carried out carefully for anisotropic film and bulk samples with optical axis parallel to their surface as well as optical axis perpendicular to the surface. Moreover, the discrepancy between measured data and calculated results are also analyzed. The measurement system developed in this paper is powerful to measure optical parameter of anisotropic film and bulk samples.展开更多
文摘In this paper, a method of light intensity mode ellipsometry for optical constant measurement on anisotropic films and crystals is studied. Softwares for this method have also been developed Based on the theories and correspond softwares, experiments are carried out carefully for anisotropic film and bulk samples with optical axis parallel to their surface as well as optical axis perpendicular to the surface. Moreover, the discrepancy between measured data and calculated results are also analyzed. The measurement system developed in this paper is powerful to measure optical parameter of anisotropic film and bulk samples.
