A novel room-temperature microbolometer array chip consisting of an Nb5N6 thin film microbridge and a dipole planar antenna, which is used as a terahertz （THz） detector, is described in this paper. Due to the high-t...A novel room-temperature microbolometer array chip consisting of an Nb5N6 thin film microbridge and a dipole planar antenna, which is used as a terahertz （THz） detector, is described in this paper. Due to the high-temperature coefficient of the resistance of the Nb5N6 thin film, which is as high as –0.7% K-1 , such an antenna-coupled microbolometer is ideal for detecting signals in a frequency range from 0.22THz to 0.33THz. The dc responsivity, calculated from the measured I–V curve of the Nb5N6 microbolometer, is about –760 V/W at a bias current of 0.19mA. A typical noise voltage as low as 10 nV/Hz 1/2 yields a low noise equivalent power （NEP） of 1.3×10-11W/Hz 1/2 at a modulation frequency above 4kHz, and the best RF responsivity, characterized using an infrared device measuring method, is about 580V/W, with the corresponding NEP being 1.7×10-11W/Hz 1/2 . In order to further test the performance of the Nb5N6 microbolometer, we construct a quasi-optical type receiver by attaching it to a hyperhemispherical silicon lens, and the result is that the best responsivity of the receiver is up to 320V/W. This work could offer another way to develop a large scale focal-plane array in silicon using simple techniques and at low cost.展开更多
In this paper, we study the effect of the drain current on terahertz detection for Si metal-oxide semiconductor fieldeffect transistors（MOSFETs） both theoretically and experimentally. The analytical model, which is ...In this paper, we study the effect of the drain current on terahertz detection for Si metal-oxide semiconductor fieldeffect transistors（MOSFETs） both theoretically and experimentally. The analytical model, which is based on the smallsignal equivalent circuit of MOSFETs, predicts the significant improvement of the voltage responsivity Rv with the bias current. The experiment on antennas integrated with MOSFETs agrees with the analytical model, but the Rv improvement is accompanied first by a decrease, then an increase of the low-noise equivalent power（NEP） with the applied current. We determine the tradeoff between the low-NEP and high-Rv for the current-biased detectors. As the best-case scenario, we obtained an improvement of about six times in Rv without the cost of a higher NEP. We conclude that the current supply scheme can provide high-quality signal amplification in practical CMOS terahertz detection.展开更多
基金Project supported by the National Basic Research Program of China (Grant No. 2011CBA00107)the National High-Technology Research Development Program of China (Grant No. 2011AA010204)
文摘A novel room-temperature microbolometer array chip consisting of an Nb5N6 thin film microbridge and a dipole planar antenna, which is used as a terahertz （THz） detector, is described in this paper. Due to the high-temperature coefficient of the resistance of the Nb5N6 thin film, which is as high as –0.7% K-1 , such an antenna-coupled microbolometer is ideal for detecting signals in a frequency range from 0.22THz to 0.33THz. The dc responsivity, calculated from the measured I–V curve of the Nb5N6 microbolometer, is about –760 V/W at a bias current of 0.19mA. A typical noise voltage as low as 10 nV/Hz 1/2 yields a low noise equivalent power （NEP） of 1.3×10-11W/Hz 1/2 at a modulation frequency above 4kHz, and the best RF responsivity, characterized using an infrared device measuring method, is about 580V/W, with the corresponding NEP being 1.7×10-11W/Hz 1/2 . In order to further test the performance of the Nb5N6 microbolometer, we construct a quasi-optical type receiver by attaching it to a hyperhemispherical silicon lens, and the result is that the best responsivity of the receiver is up to 320V/W. This work could offer another way to develop a large scale focal-plane array in silicon using simple techniques and at low cost.
基金Project supported by the National Key R&D Program of China(Grant No.2016YFB-0402403)the Natural Science Foundation of Jiangsu Province,China(Grant No.BK20141321)+1 种基金CAST Project,China(Grant No.08201601)the National Science Foundation for Young Scholars of China(Grant No.61404072)
文摘In this paper, we study the effect of the drain current on terahertz detection for Si metal-oxide semiconductor fieldeffect transistors（MOSFETs） both theoretically and experimentally. The analytical model, which is based on the smallsignal equivalent circuit of MOSFETs, predicts the significant improvement of the voltage responsivity Rv with the bias current. The experiment on antennas integrated with MOSFETs agrees with the analytical model, but the Rv improvement is accompanied first by a decrease, then an increase of the low-noise equivalent power（NEP） with the applied current. We determine the tradeoff between the low-NEP and high-Rv for the current-biased detectors. As the best-case scenario, we obtained an improvement of about six times in Rv without the cost of a higher NEP. We conclude that the current supply scheme can provide high-quality signal amplification in practical CMOS terahertz detection.
