The capacitively coupled radio frequency（CCRF）plasma has been widely used in various fields.In some cases,it requires us to estimate the range of key plasma parameters simpler and quicker in order to understand the ...The capacitively coupled radio frequency（CCRF）plasma has been widely used in various fields.In some cases,it requires us to estimate the range of key plasma parameters simpler and quicker in order to understand the behavior in plasma.In this paper,a glass vacuum chamber and a pair of plate electrodes were designed and fabricated,using 13.56 MHz radio frequency（RF）discharge technology to ionize the working gas of Ar.This discharge was mathematically described with equivalent circuit model.The discharge voltage and current of the plasma were measured atdifferent pressures and different powers.Based on the capacitively coupled homogeneous discharge model,the equivalent circuit and the analytical formula were established.The plasma density and temperature were calculated by using the equivalent impedance principle and energy balance equation.The experimental results show that when RF discharge power is 50–300 W and pressure is 25–250 Pa,the average electron temperature is about 1.7–2.1 e V and the average electron density is about 0.5？×10^17–3.6？×10^17m^-3.Agreement was found when the results were compared to those given by optical emission spectroscopy and COMSOL simulation.展开更多
Point Sources and Gaussian beams are used frequently as fundamental building blocks for developing ultrasonic beam models. Both these models have different weaknesses that limit their effectiveness. Here, we will show...Point Sources and Gaussian beams are used frequently as fundamental building blocks for developing ultrasonic beam models. Both these models have different weaknesses that limit their effectiveness. Here, we will show that one can develop a Gaussian Beam Equivalent Point Source （GBEPS） model that removes those weaknesses and combines the accuracy and versatility of the point source models with much of the speed and well-behaved nature of Gaussian beam models. We will demonstrate the efficiency and versatility of this new GBEPS model in simulating the beams generated from ultrasonic phased arrays, using as few as one Gaussian beam per element of the array. A single element GBEPS model will be shown to be as accurate as a point source model even when substantial beam focusing or steering is present in the array or where the array beam is transmitted through an interface. At the same time the GBEPS model will be shown to be several orders of magnitude faster than the point source model.展开更多
基金supported by National Natural Science Foundation of China(Grant No.61378037)the Fundamental Research Funds for the Central Universities(Nos.2013B33614,2017B15214)+1 种基金the Research Funds of Innovation and Entrepreneurship Education Reform for Chinese Universities(No.16CCJG01Z004)the Changzhou Science and Technology Program(No.CJ20160027)
文摘The capacitively coupled radio frequency（CCRF）plasma has been widely used in various fields.In some cases,it requires us to estimate the range of key plasma parameters simpler and quicker in order to understand the behavior in plasma.In this paper,a glass vacuum chamber and a pair of plate electrodes were designed and fabricated,using 13.56 MHz radio frequency（RF）discharge technology to ionize the working gas of Ar.This discharge was mathematically described with equivalent circuit model.The discharge voltage and current of the plasma were measured atdifferent pressures and different powers.Based on the capacitively coupled homogeneous discharge model,the equivalent circuit and the analytical formula were established.The plasma density and temperature were calculated by using the equivalent impedance principle and energy balance equation.The experimental results show that when RF discharge power is 50–300 W and pressure is 25–250 Pa,the average electron temperature is about 1.7–2.1 e V and the average electron density is about 0.5？×10^17–3.6？×10^17m^-3.Agreement was found when the results were compared to those given by optical emission spectroscopy and COMSOL simulation.
基金supported by the National Science Foundation Industry/University Cooperative Research Center program at Iowa State Universitythe Natural Sciences and Engineering Research Council of Canadaby the National Natural Science Foundation of China(NSFC)
文摘Point Sources and Gaussian beams are used frequently as fundamental building blocks for developing ultrasonic beam models. Both these models have different weaknesses that limit their effectiveness. Here, we will show that one can develop a Gaussian Beam Equivalent Point Source （GBEPS） model that removes those weaknesses and combines the accuracy and versatility of the point source models with much of the speed and well-behaved nature of Gaussian beam models. We will demonstrate the efficiency and versatility of this new GBEPS model in simulating the beams generated from ultrasonic phased arrays, using as few as one Gaussian beam per element of the array. A single element GBEPS model will be shown to be as accurate as a point source model even when substantial beam focusing or steering is present in the array or where the array beam is transmitted through an interface. At the same time the GBEPS model will be shown to be several orders of magnitude faster than the point source model.
