Diamond films with very smooth surface and good optical quality have been deposited onto silicon substrate using microwave plasma chemical vapor deposition (MPCVD) from a gas mixture of ethanol and hydrogen at a low s...Diamond films with very smooth surface and good optical quality have been deposited onto silicon substrate using microwave plasma chemical vapor deposition (MPCVD) from a gas mixture of ethanol and hydrogen at a low substrate temperature of 450 ℃. The effects of the substrate temperature on the diamond nucleation and the morphology of the diamond film have been investigated and observed with scanning electron microscopy (SEM). The microstructure and the phase of the film have been characterized using Raman spectroscopy and X-ray diffraction (XRD). The diamond nucleation density significantly decreases with the increasing of the substrate temperature. There are only sparse nuclei when the substrate temperature is higher than 800 ℃ although the ethanol concentration in hydrogen is very high. That the characteristic diamond peak in the Raman spectrum of a diamond film prepared at a low substrate temperature of 450 ℃ extends into broadband indicates that the film is of nanophase. No graphite peak appeare展开更多
Isobaric vapor–liquid equilibrium(VLE) data for the binary system ethyl propionate(2) + para-xylene(3) and ternary system ethanol(1) + ethyl propionate(2) + para-xylene(2) at atmospheric pressure(101.3 k Pa)were obta...Isobaric vapor–liquid equilibrium(VLE) data for the binary system ethyl propionate(2) + para-xylene(3) and ternary system ethanol(1) + ethyl propionate(2) + para-xylene(2) at atmospheric pressure(101.3 k Pa)were obtained by a VLE modified othmer still. All the experimental data passed a point to point consistency test of Van Ness method, which verified the data reliability. The Wilson and UNIQUAC activity coefficient models were employed to correlate the binary VLE data to obtain binary interaction parameters. Based on binary interaction parameters, ternary VLE data of ethanol(1) + ethyl propionate(2) + para-xylene(3) were predicted by Wilson and UNIQUAC models, which proved that predicted values are consistent with the experimental data.Furthermore, azeotropic phenomenon between ethanol and ethyl propionate disappears when the mole ratio of para-xylene and binary system of ethanol and ethyl propionate is 1:1. Therefore, this paper convinced that para-xylene is a proper extractive additive that could be used in extractive distillation to separate the binary azeotropic system of ethanol and ethyl propionate.展开更多
Vapor-liquid equilibrium(VLE) data were measured for ternary system water + ethanol + 1-butyl-3methylimidazolium acetate([bmim][OAc]),in a relatively wide range of ionic liquid(IL) mass fractions up to 0.8.Six sets of...Vapor-liquid equilibrium(VLE) data were measured for ternary system water + ethanol + 1-butyl-3methylimidazolium acetate([bmim][OAc]),in a relatively wide range of ionic liquid(IL) mass fractions up to 0.8.Six sets of complete T-x-y data were obtained,in which the mole fraction of ethanol on IL-free basis was fixed separately at 0.1,0.2,0.4,0.6,0.8,and approximate 0.98.The non-random-two-liquid(NRTL) and electrolyte non-random-two-liquid(eNRTL) equations were used for correlation,showing similar deviations.The ternary VLE was also modeled with the correlation from two data sets,with the mole fractions of ethanol on IL-free basis being 0.1 and approximate 0.98.The VLE data were also reproduced satisfactorily.With the eNRTL model,the root-mean-square deviation for temperature is 0.79 K and that for vapor-phase mole fraction is 0.0094.The calculations are in good agreement with experimental data.The effect of the IL on the VLE behavior of the volatile components is also illustrated.展开更多
Nano-crystalline diamond (NCD) films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition (MPCVD) reactor in C2H5OH/H2 and CH4/H2/O2 systems, respectively, with a constant ...Nano-crystalline diamond (NCD) films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition (MPCVD) reactor in C2H5OH/H2 and CH4/H2/O2 systems, respectively, with a constant ratio of carbon/hydrogen/oxygen. By means of atomic force microscopy (AFM) and X-ray diffraction (XRD), it was shown that the NCD films deposited in the C2H5OH/H2 system possesses more uniform surface than that deposited in the CH4/H2/O2 system. Results from micro-Raman spectroscopy revealed that the quality of the NCD films was different even though the plasmas in the two systems contain exactly the same proportion of elements. In order to explain this phenomenon, the bond energy of forming OH groups, energy distraction in plasma and the deposition process of NCD films were studied. The experimental results and discussion indicate that for a same ratio of carbon/hydrogen/oxygen, the C2H5OH/H2 plasma was beneficial to deposit high quality NCD films with smaller average grain size and lower surface roughness.展开更多
基金The project supported by the ChenGuang project of the Wuhan government (No. 20025001014)
文摘Diamond films with very smooth surface and good optical quality have been deposited onto silicon substrate using microwave plasma chemical vapor deposition (MPCVD) from a gas mixture of ethanol and hydrogen at a low substrate temperature of 450 ℃. The effects of the substrate temperature on the diamond nucleation and the morphology of the diamond film have been investigated and observed with scanning electron microscopy (SEM). The microstructure and the phase of the film have been characterized using Raman spectroscopy and X-ray diffraction (XRD). The diamond nucleation density significantly decreases with the increasing of the substrate temperature. There are only sparse nuclei when the substrate temperature is higher than 800 ℃ although the ethanol concentration in hydrogen is very high. That the characteristic diamond peak in the Raman spectrum of a diamond film prepared at a low substrate temperature of 450 ℃ extends into broadband indicates that the film is of nanophase. No graphite peak appeare
基金Supported by the National Natural Science Foundation of China(21376166)
文摘Isobaric vapor–liquid equilibrium(VLE) data for the binary system ethyl propionate(2) + para-xylene(3) and ternary system ethanol(1) + ethyl propionate(2) + para-xylene(2) at atmospheric pressure(101.3 k Pa)were obtained by a VLE modified othmer still. All the experimental data passed a point to point consistency test of Van Ness method, which verified the data reliability. The Wilson and UNIQUAC activity coefficient models were employed to correlate the binary VLE data to obtain binary interaction parameters. Based on binary interaction parameters, ternary VLE data of ethanol(1) + ethyl propionate(2) + para-xylene(3) were predicted by Wilson and UNIQUAC models, which proved that predicted values are consistent with the experimental data.Furthermore, azeotropic phenomenon between ethanol and ethyl propionate disappears when the mole ratio of para-xylene and binary system of ethanol and ethyl propionate is 1:1. Therefore, this paper convinced that para-xylene is a proper extractive additive that could be used in extractive distillation to separate the binary azeotropic system of ethanol and ethyl propionate.
基金Supported by the National Natural Science Foundation of China (20776132)
文摘Vapor-liquid equilibrium(VLE) data were measured for ternary system water + ethanol + 1-butyl-3methylimidazolium acetate([bmim][OAc]),in a relatively wide range of ionic liquid(IL) mass fractions up to 0.8.Six sets of complete T-x-y data were obtained,in which the mole fraction of ethanol on IL-free basis was fixed separately at 0.1,0.2,0.4,0.6,0.8,and approximate 0.98.The non-random-two-liquid(NRTL) and electrolyte non-random-two-liquid(eNRTL) equations were used for correlation,showing similar deviations.The ternary VLE was also modeled with the correlation from two data sets,with the mole fractions of ethanol on IL-free basis being 0.1 and approximate 0.98.The VLE data were also reproduced satisfactorily.With the eNRTL model,the root-mean-square deviation for temperature is 0.79 K and that for vapor-phase mole fraction is 0.0094.The calculations are in good agreement with experimental data.The effect of the IL on the VLE behavior of the volatile components is also illustrated.
文摘Nano-crystalline diamond (NCD) films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition (MPCVD) reactor in C2H5OH/H2 and CH4/H2/O2 systems, respectively, with a constant ratio of carbon/hydrogen/oxygen. By means of atomic force microscopy (AFM) and X-ray diffraction (XRD), it was shown that the NCD films deposited in the C2H5OH/H2 system possesses more uniform surface than that deposited in the CH4/H2/O2 system. Results from micro-Raman spectroscopy revealed that the quality of the NCD films was different even though the plasmas in the two systems contain exactly the same proportion of elements. In order to explain this phenomenon, the bond energy of forming OH groups, energy distraction in plasma and the deposition process of NCD films were studied. The experimental results and discussion indicate that for a same ratio of carbon/hydrogen/oxygen, the C2H5OH/H2 plasma was beneficial to deposit high quality NCD films with smaller average grain size and lower surface roughness.