We have successfully demonstrated that high quality and high dielectric constant layers can be fabricated by low temperature photo-induced or -assisted processing. Ta_2O_5 and ZrO_2 have been deposited at t<400 ℃ ...We have successfully demonstrated that high quality and high dielectric constant layers can be fabricated by low temperature photo-induced or -assisted processing. Ta_2O_5 and ZrO_2 have been deposited at t<400 ℃ by means of a UV photo-CVD technique and HfO_2 by photo-assisted sol-gel processing with the aid of excimer lamps. The UV annealing of as-grown layers was found to significantly improve their electrical properties. Low leakage current densities on the order of 10 -8 A/cm 2 at 1 MV/cm for deposited ultrathin Ta_2O_5 films and ca.10 -6 A/cm 2 for the photo-CVD ZrO_2 layers and photo-irradiated sol-gel HfO_2 layers have been readily achieved. The improvement in the leakage properties of these layers is attributed to the UV-generated active oxygen species O( 1D) which strongly oxidize any suboxides to form more stoichiometric oxides on removing certain defects, oxygen vacancies and impurities present in the as-prepared layers. The photo-CVD Ta_2O_5 films deposited across 10.16-cm Si wafers exhibit a high thickness uniformity with a variation of less than \{±2.0%\} being obtained for ultrathin ca.10 nm thick films. The lamp technology can in principle be extended to larger area wafers, providing a promising low temperature route to the fabrication of a range of high quality thin films for future ULSI technology.展开更多
Objective:Combination therapy of a 308-nm monochromatic excimer lamp and topical tacrolimus is widely used in the treatment of localized vitiligo;however,there are no published studies investigating this combination t...Objective:Combination therapy of a 308-nm monochromatic excimer lamp and topical tacrolimus is widely used in the treatment of localized vitiligo;however,there are no published studies investigating this combination therapy in Vietnamese patients with vitiligo.This study was performed to evaluate the efficacy of combined excimer lamp and topical tacrolimus therapy for patients with localized vitiligo in Vietnam.Methods:We performed a pre-post clinical trial of 30 patients diagnosed with localized vitiligo in Vietnam.The patients were treated with an excimer lamp twice weekly and with topical tacrolimus twice daily.Effectiveness was evaluated based on the reduction rate of the vitiligo area scoring index (VASI).Data were analyzed using descriptive statistics,Fisher’s exact test,Kruskal-WallisH test,and Spearman correlation coefficient test.Results:After 12 weeks of treatment,response was excellent or good in 16 patients (53.3%),moderate in 8 patients (26.7%),and poor in 6 patients (20.0%).The excellent or good responses increased over time from 3 patients (10.0%) at 6 weeks to 16 patients (53.3%) at 12 weeks (P = 0.001).Earlier initiation of repigmentation was associated with a better response to treatment (r = -0.71;P = 0.020).Patients with a perifollicular repigmentation pattern responded better to treatment than those with combined or marginal repigmentation patterns (P = 0.003).Side effects occurred in 13 patients (43.3%),including burning (43.3%),pruritus (10.0%),and mild blistering (6.7%),and none of these interrupted the treatment.Conclusion:Combination therapy with excimer lamp and topical tacrolimus appears to be effective and safe in treating patients with localized vitiligo in Vietnam.展开更多
文摘We have successfully demonstrated that high quality and high dielectric constant layers can be fabricated by low temperature photo-induced or -assisted processing. Ta_2O_5 and ZrO_2 have been deposited at t<400 ℃ by means of a UV photo-CVD technique and HfO_2 by photo-assisted sol-gel processing with the aid of excimer lamps. The UV annealing of as-grown layers was found to significantly improve their electrical properties. Low leakage current densities on the order of 10 -8 A/cm 2 at 1 MV/cm for deposited ultrathin Ta_2O_5 films and ca.10 -6 A/cm 2 for the photo-CVD ZrO_2 layers and photo-irradiated sol-gel HfO_2 layers have been readily achieved. The improvement in the leakage properties of these layers is attributed to the UV-generated active oxygen species O( 1D) which strongly oxidize any suboxides to form more stoichiometric oxides on removing certain defects, oxygen vacancies and impurities present in the as-prepared layers. The photo-CVD Ta_2O_5 films deposited across 10.16-cm Si wafers exhibit a high thickness uniformity with a variation of less than \{±2.0%\} being obtained for ultrathin ca.10 nm thick films. The lamp technology can in principle be extended to larger area wafers, providing a promising low temperature route to the fabrication of a range of high quality thin films for future ULSI technology.
文摘Objective:Combination therapy of a 308-nm monochromatic excimer lamp and topical tacrolimus is widely used in the treatment of localized vitiligo;however,there are no published studies investigating this combination therapy in Vietnamese patients with vitiligo.This study was performed to evaluate the efficacy of combined excimer lamp and topical tacrolimus therapy for patients with localized vitiligo in Vietnam.Methods:We performed a pre-post clinical trial of 30 patients diagnosed with localized vitiligo in Vietnam.The patients were treated with an excimer lamp twice weekly and with topical tacrolimus twice daily.Effectiveness was evaluated based on the reduction rate of the vitiligo area scoring index (VASI).Data were analyzed using descriptive statistics,Fisher’s exact test,Kruskal-WallisH test,and Spearman correlation coefficient test.Results:After 12 weeks of treatment,response was excellent or good in 16 patients (53.3%),moderate in 8 patients (26.7%),and poor in 6 patients (20.0%).The excellent or good responses increased over time from 3 patients (10.0%) at 6 weeks to 16 patients (53.3%) at 12 weeks (P = 0.001).Earlier initiation of repigmentation was associated with a better response to treatment (r = -0.71;P = 0.020).Patients with a perifollicular repigmentation pattern responded better to treatment than those with combined or marginal repigmentation patterns (P = 0.003).Side effects occurred in 13 patients (43.3%),including burning (43.3%),pruritus (10.0%),and mild blistering (6.7%),and none of these interrupted the treatment.Conclusion:Combination therapy with excimer lamp and topical tacrolimus appears to be effective and safe in treating patients with localized vitiligo in Vietnam.
