This study presents a strategy which integrates extra polishing path （EPP） and error map extension to weaken the edge effect in the ultraprecise optical surfacing process. Different data extension algorithms were pr...This study presents a strategy which integrates extra polishing path （EPP） and error map extension to weaken the edge effect in the ultraprecise optical surfacing process. Different data extension algorithms were pre- sented and analyzed. The neighbor-hood average can be selected as the frequently-used method, as it has not bad precision and time-saving performance for most surface forms through the simulation results and practical experi- ment. The final error map was obtained, its peak-to-valley （PV） was 0.2732 and root mean square （RMS） was 0.0282 （2 = 632.8nm）. The edge effect was weakened and suppressed well through the experiment.展开更多
文摘This study presents a strategy which integrates extra polishing path （EPP） and error map extension to weaken the edge effect in the ultraprecise optical surfacing process. Different data extension algorithms were pre- sented and analyzed. The neighbor-hood average can be selected as the frequently-used method, as it has not bad precision and time-saving performance for most surface forms through the simulation results and practical experi- ment. The final error map was obtained, its peak-to-valley （PV） was 0.2732 and root mean square （RMS） was 0.0282 （2 = 632.8nm）. The edge effect was weakened and suppressed well through the experiment.
