Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications.In this work,we develop a fabrication process for the transmon multiqubit device with a nio...Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications.In this work,we develop a fabrication process for the transmon multiqubit device with a niobium base layer,shadow-evaporated Josephson junctions,and airbridges across the qubit control lines to suppress crosstalk.Our results show that these multiqubit devices have well-characterized readout resonators,and that the energy relaxation and Ramsey(spin-echo)dephasing times are up to∼40µs and 14(47)µs,respectively.We perform single-qubit gate operations that demonstrate a maximum gate fidelity of 99.97%.In addition,two-qubit vacuum Rabi oscillations are measured to evaluate the coupling strength between qubits,and the crosstalk among qubits is found to be less than 1%with the fabricated airbridges.Further improvements in qubit coherence performance using this fabrication process are also discussed.展开更多
AlGaN/GaN high electron mobility transistors (HEMTs) grown on Fe-modulation-doped (MD) and unintentionally doped (UID) GaN buffer layers are investigated and compared. Highly resistive GaN buffers (10^9Ω·...AlGaN/GaN high electron mobility transistors (HEMTs) grown on Fe-modulation-doped (MD) and unintentionally doped (UID) GaN buffer layers are investigated and compared. Highly resistive GaN buffers (10^9Ω·cm) are induced by individual mechanisms for the electron traps' formation: the Fe MD buffer (sample A) and the UID buffer with high density of edge-type dislocations (7.24×10^9cm^-2, sample B). The 300K Hall test indicates that the mobility of sample A with Fe doping (2503cm^2V^-1s^-1) is much higher than sample B (1926cm^2V^-1s^-1) due to the decreased scattering effect on the two-dimensional electron gas. HEMT devices are fabricated on the two samples and pulsed I–V measurements are conducted. Device A shows better gate pinch-off characteristics and a higher threshold voltage (-2.63V) compared with device B (-3.71V). Lower gate leakage current |IGS| of device A (3.32×10^-7A) is present compared with that of device B (8.29×10^-7A). When the off-state quiescent points Q_2 (V GQ2=-8V, V DQ2=0V) are on, V th hardly shifts for device A while device B shows +0.21V positive threshold voltage shift, resulting from the existence of electron traps associated with the dislocations in the UID-GaN buffer layer under the gate. Under pulsed I–V and transconductance G m–V GS measurement, the device with the Fe MD-doped buffer shows more potential in improving reliability upon off-state stress.展开更多
The development of various artificial electronics and machines would explosively increase the amount of information and data,which need to be processed via in-situ remediation.Bioinspired synapse devices can store and...The development of various artificial electronics and machines would explosively increase the amount of information and data,which need to be processed via in-situ remediation.Bioinspired synapse devices can store and process signals in a parallel way,thus improving fault tolerance and decreasing the power consumption of artificial systems.The organic field effect transistor(OFET)is a promising component for bioinspired neuromorphic systems because it is suitable for large-scale integrated circuits and flexible devices.In this review,the organic semiconductor materials,structures and fabrication,and different artificial sensory perception systems functions based on neuromorphic OFET devices are summarized.Subsequently,a summary and challenges of neuromorphic OFET devices are provided.This review presents a detailed introduction to the recent progress of neuromorphic OFET devices from semiconductor materials to perception systems,which would serve as a reference for the development of neuromorphic systems in future bioinspired electronics.展开更多
The femtosecond laser has emerged as a powerful tool for micro-and nanoscale device fabrication. Through nonlinear ionization processes, nanometer-sized material modifications can be inscribed in transparent materials...The femtosecond laser has emerged as a powerful tool for micro-and nanoscale device fabrication. Through nonlinear ionization processes, nanometer-sized material modifications can be inscribed in transparent materials for device fabrication. This paper describes femtosecond precision inscription of nanograting in silica fiber cores to form both distributed and point fiber sensors for sensing applications in extreme environmental conditions. Through the use of scanning electron microscope imaging and laser processing optimization,high-temperature stable, Type II femtosecond laser modifications were continuously inscribed,point by point, with only an insertion loss at 1 d B m~(-1) or 0.001 d B per point sensor device.High-temperature performance of fiber sensors was tested at 1000℃, which showed a temperature fluctuation of ±5.5℃ over 5 days. The low laser-induced insertion loss in optical fibers enabled the fabrication of a 1.4 m, radiation-resilient distributed fiber sensor. The in-pile testing of the distributed fiber sensor further showed that fiber sensors can execute stable and distributed temperature measurements in extreme radiation environments. Overall, this paper demonstrates that femtosecond-laser-fabricated fiber sensors are suitable measurement devices for applications in extreme environments.展开更多
A top-illuminated circular mesa uni-traveling-carrier photodetector(UTC-PD) is proposed in this paper. By employing Gaussian graded doping in In Ga As absorption layer and In P depleted layer, the responsivity and h...A top-illuminated circular mesa uni-traveling-carrier photodetector(UTC-PD) is proposed in this paper. By employing Gaussian graded doping in In Ga As absorption layer and In P depleted layer, the responsivity and high speed response characteristics of the device are optimized simultaneously. The responsivity up to 1.071 A/W(the external quantum efficiency of 86%) is obtained at 1550 nm with a 40-μm diameter device under 10-V reverse bias condition. Meanwhile, the dark current of 7.874 n A and the 3-d B bandwidth of 11 GHz are obtained with the same device at a reverse bias voltage of3 V.展开更多
Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable proc...Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.展开更多
In recent years, flexible electronic devices have become a hot topic of scientific research. These flexible devices are the basis of flexible circuits, flexible batteries, flexible displays and electronic skins. Graph...In recent years, flexible electronic devices have become a hot topic of scientific research. These flexible devices are the basis of flexible circuits, flexible batteries, flexible displays and electronic skins. Graphene-based materials are very promising for flexible electronic devices, due to their high mobility, high elasticity, a tunable band gap, quantum electronic transport and high mechanical strength. In this article, we review the recent progress of the fabrication process and the applications of graphene-based electronic devices, including thermal acoustic devices, thermal rectifiers, graphene-based nanogenerators, pressure sensors and graphene-based light-emitting diodes. In summary, although there are still a lot of challenges needing to be solved, graphene-based materials are very promising for various flexible device applications in the future.展开更多
Effect of the device fabrication conditions on photovoltaic performance of the polymer solar cells based on poly(3-hexylthiophene) (P3HT) as donor and indene-C70 bisadduct (IC70BA) as acceptor was studied system...Effect of the device fabrication conditions on photovoltaic performance of the polymer solar cells based on poly(3-hexylthiophene) (P3HT) as donor and indene-C70 bisadduct (IC70BA) as acceptor was studied systematically. The device fabrication conditions we studied include pre-thermal annealing temperature, active layer thickness, and the P3HT : IC70BA weight ratios. For devices with a 188-nm-thick active layer of P3HT : ICToBA (1 : 1, w ' w) blend film and pre-thermal annealing at 150 ℃C for 10 rain, maximum power conversion efficiency (PCE) reached 5.82% with Voc of 0.81 V, Isc of 11.37 mA/cm2, and FF of 64.0% under the illumination of AM1.5G, 100 mW/cm2.展开更多
Organometallic halide perovskite materials have triggered global attention in recent years due to their exciting and optimistic high performance energy conversion properties(high luminescence efficiency and tremendous...Organometallic halide perovskite materials have triggered global attention in recent years due to their exciting and optimistic high performance energy conversion properties(high luminescence efficiency and tremendous optical absorption ability[1,2]).These interesting photovoltaic properties together make them a promising candidate for high performance optoelectronic展开更多
It is a common practice to apply a tack coat usually in the form of bituminous emulsion over an existing bituminous surface before laying another bituminous layer.The boundary between these two consecutive bituminous ...It is a common practice to apply a tack coat usually in the form of bituminous emulsion over an existing bituminous surface before laying another bituminous layer.The boundary between these two consecutive bituminous layers is the layer interface and the pavement stress distribution is highly influenced by the adhesion conditions at this interface.Poor adhesion causes adverse effects on the structural strength of the pavement system.A number of premature failures such as slippage failure and delamination failures result thus defeating the construction objectives.In the absence of a standard method and apparatus to address this field problem,an attempt has been made in this study to develop a simple testing arrangement to be used in a laboratory to determine the interlayer bond strength.Normal Marshall procedure has been used to prepare the specimens consisting of two different types of bituminous materials in lower and upper part of the same specimen.It is observed within the scope of study that Cationic rapid setting(CRS-1)emulsion applied at 0.25 Kg/m^(2) offers the best results of interlayer bond strength.展开更多
This paper describes the development of a monitoring system capable of detecting the concentration of magnesium ions(Mg^(2+)) released during the degradation of magnesium implants. The system consists of a microdialys...This paper describes the development of a monitoring system capable of detecting the concentration of magnesium ions(Mg^(2+)) released during the degradation of magnesium implants. The system consists of a microdialysis probe that samples fluid adjacent to the implant and a catalytic biosensor specific to Mg^(2+)ions. The biosensor was fabricated on a cotton fabric platform, in which a mixture of glycerol kinase and glycerol-3-phosphate oxidase enzymes was immobilized on the fabric device via a simple matrix entrapment technique of the cotton fibers. Pure magnesium was used as the implant material. Subsequently, the concentration of ions released from the degradation of the magnesium specimen in Ringer's solution was evaluated using cyclic voltammetry technique. The device demonstrated a pseudo-linear response from 0.005 to 0.1 mmol L^(-1) with a slope of 67.48 μA mmol^(-1) L. Detectable interfering species were lesser than 1%indicating a high selectivity of the fabric device. Furthermore,the device requires only 3 μL of fluid sample to complete the measurement compared to spectroscopic method(±50 μL),hence providing a higher temporal resolution and reduced sampling time. The system could potentially provide a real time assessment of the degradation behavior, a new studied aspect in biodegradable metals research.展开更多
Recently,the performance and fabrication of thin-ilm thermoeletric materials have been jargely enhanced.Based on this enhancement,the thin-film thermoelectric cooler(TEC)is becoming a research hot topic,due to its hig...Recently,the performance and fabrication of thin-ilm thermoeletric materials have been jargely enhanced.Based on this enhancement,the thin-film thermoelectric cooler(TEC)is becoming a research hot topic,due to its high cooling flux and microchip level size.To fulfill a thin-film TEC,interfacial problems are unavoidable,as they may largely reduce the properties of a thin-film TEC.Moreover,the architecture of a thin-film TEC should also be properly designed.In this review,we introduced the enhancement of thermoelectric properties of(Bi,Sb)2(Te,Se)3 solid solution materials by chemical vapor deposition,physical vapor deposition and electro-deposition.Then,the interfacial problems,including contact resistance,interfacial diffusion and thermal contact resistance,were discussed.Furthermore,the design,fabrication,as well as the performance of thin-film TECs were summarized.展开更多
Photonic devices increasingly require three-dimensional control of refractive index,but existing fabrication methods such as femtosecond micromachining,multilayer lithography and bulk diffusion can only address a sele...Photonic devices increasingly require three-dimensional control of refractive index,but existing fabrication methods such as femtosecond micromachining,multilayer lithography and bulk diffusion can only address a select scale range,are often limited in complexity or thickness and have low throughput.We introduce a new fabrication method and polymeric material that can efficiently create mm^(3) optical devices with programmable,gradient index of refraction with arbitrary feature size.Index contrast of 0.1 is demonstrated,which is 100 times larger than femtosecond micromachining,and 20 times larger than commercial holographic photopolymers.This is achieved by repetitive microfluidic layering of a self-developing photopolymer structured by projection lithography.The process has the unusual property that total fabrication time for a fixed thickness decreases with the number of layers,enabling fabrication 10^(5) faster than femtosecond micromachining.We demonstrate the process by sequentially writing 100 layers to fabricate a mm thick waveguide array.展开更多
基金supported by the National Key R&D Program of China(Grant No.2016YFA0300601)the National Natural Science Foundation of China(Grant Nos.11934018 and 11874063)+1 种基金the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB28000000)the Key-Area Research and Development Program of GuangDong Province,China(Grant No.2018B030326001)。
文摘Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications.In this work,we develop a fabrication process for the transmon multiqubit device with a niobium base layer,shadow-evaporated Josephson junctions,and airbridges across the qubit control lines to suppress crosstalk.Our results show that these multiqubit devices have well-characterized readout resonators,and that the energy relaxation and Ramsey(spin-echo)dephasing times are up to∼40µs and 14(47)µs,respectively.We perform single-qubit gate operations that demonstrate a maximum gate fidelity of 99.97%.In addition,two-qubit vacuum Rabi oscillations are measured to evaluate the coupling strength between qubits,and the crosstalk among qubits is found to be less than 1%with the fabricated airbridges.Further improvements in qubit coherence performance using this fabrication process are also discussed.
基金Supported by the National Natural Science Foundation of China under Grant Nos 61204017 and 61334002the National Basic Research Program of Chinathe National Science and Technology Major Project of China
文摘AlGaN/GaN high electron mobility transistors (HEMTs) grown on Fe-modulation-doped (MD) and unintentionally doped (UID) GaN buffer layers are investigated and compared. Highly resistive GaN buffers (10^9Ω·cm) are induced by individual mechanisms for the electron traps' formation: the Fe MD buffer (sample A) and the UID buffer with high density of edge-type dislocations (7.24×10^9cm^-2, sample B). The 300K Hall test indicates that the mobility of sample A with Fe doping (2503cm^2V^-1s^-1) is much higher than sample B (1926cm^2V^-1s^-1) due to the decreased scattering effect on the two-dimensional electron gas. HEMT devices are fabricated on the two samples and pulsed I–V measurements are conducted. Device A shows better gate pinch-off characteristics and a higher threshold voltage (-2.63V) compared with device B (-3.71V). Lower gate leakage current |IGS| of device A (3.32×10^-7A) is present compared with that of device B (8.29×10^-7A). When the off-state quiescent points Q_2 (V GQ2=-8V, V DQ2=0V) are on, V th hardly shifts for device A while device B shows +0.21V positive threshold voltage shift, resulting from the existence of electron traps associated with the dislocations in the UID-GaN buffer layer under the gate. Under pulsed I–V and transconductance G m–V GS measurement, the device with the Fe MD-doped buffer shows more potential in improving reliability upon off-state stress.
基金the National Natural Science Foundation of China(U21A20497)Singapore National Research Foundation Investigatorship(Grant No.NRF-NRFI08-2022-0009)。
文摘The development of various artificial electronics and machines would explosively increase the amount of information and data,which need to be processed via in-situ remediation.Bioinspired synapse devices can store and process signals in a parallel way,thus improving fault tolerance and decreasing the power consumption of artificial systems.The organic field effect transistor(OFET)is a promising component for bioinspired neuromorphic systems because it is suitable for large-scale integrated circuits and flexible devices.In this review,the organic semiconductor materials,structures and fabrication,and different artificial sensory perception systems functions based on neuromorphic OFET devices are summarized.Subsequently,a summary and challenges of neuromorphic OFET devices are provided.This review presents a detailed introduction to the recent progress of neuromorphic OFET devices from semiconductor materials to perception systems,which would serve as a reference for the development of neuromorphic systems in future bioinspired electronics.
基金supported in part through Department of Energy Grants DE-NE0008686 and DE-FE00028992the NEET ASI program under DOE Idaho Operations Office Contract DE-AC07-05ID14517。
文摘The femtosecond laser has emerged as a powerful tool for micro-and nanoscale device fabrication. Through nonlinear ionization processes, nanometer-sized material modifications can be inscribed in transparent materials for device fabrication. This paper describes femtosecond precision inscription of nanograting in silica fiber cores to form both distributed and point fiber sensors for sensing applications in extreme environmental conditions. Through the use of scanning electron microscope imaging and laser processing optimization,high-temperature stable, Type II femtosecond laser modifications were continuously inscribed,point by point, with only an insertion loss at 1 d B m~(-1) or 0.001 d B per point sensor device.High-temperature performance of fiber sensors was tested at 1000℃, which showed a temperature fluctuation of ±5.5℃ over 5 days. The low laser-induced insertion loss in optical fibers enabled the fabrication of a 1.4 m, radiation-resilient distributed fiber sensor. The in-pile testing of the distributed fiber sensor further showed that fiber sensors can execute stable and distributed temperature measurements in extreme radiation environments. Overall, this paper demonstrates that femtosecond-laser-fabricated fiber sensors are suitable measurement devices for applications in extreme environments.
基金Project supported partially by the National Natural Science Foundation of China(Grant Nos.61274044 and 61077049)the National Basic Research Program of China(Grant No.2010CB327600)+3 种基金the Program of Key International Science and Technology Cooperation Projects,China(Grant No.2011RR000100)the 111 Project of China(Grant No.B07005)the Specialized Research Fund for the Doctoral Program of China(Grant No.20130005130001)the Natural Science Foundation of Beijing,China(Grant No.4132069)
文摘A top-illuminated circular mesa uni-traveling-carrier photodetector(UTC-PD) is proposed in this paper. By employing Gaussian graded doping in In Ga As absorption layer and In P depleted layer, the responsivity and high speed response characteristics of the device are optimized simultaneously. The responsivity up to 1.071 A/W(the external quantum efficiency of 86%) is obtained at 1550 nm with a 40-μm diameter device under 10-V reverse bias condition. Meanwhile, the dark current of 7.874 n A and the 3-d B bandwidth of 11 GHz are obtained with the same device at a reverse bias voltage of3 V.
基金supported by the National Natural Science Foundation of China(No.52075289)the Tsinghua-Jiangyin Innovation Special Fund(TJISF,No.2023JYTH0104).
文摘Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.
基金Project supported by the National Natural Science Foundation of China(Nos.60936002,61025021,61434001,61574083)the State Key Development Program for Basic Research of China(No.2015CB352100)+3 种基金the National Key Project of Science and Technology(No.2011ZX02403-002)the Special Fund for Agroscientific Research in the Public Interest of China(No.201303107)supported by the Postdoctoral Fellowship(PDF)Program of the Natural Sciences and Engineering Research Council(NSERC)of CanadaChina’s Postdoctoral Science Foundation(CPSF)
文摘In recent years, flexible electronic devices have become a hot topic of scientific research. These flexible devices are the basis of flexible circuits, flexible batteries, flexible displays and electronic skins. Graphene-based materials are very promising for flexible electronic devices, due to their high mobility, high elasticity, a tunable band gap, quantum electronic transport and high mechanical strength. In this article, we review the recent progress of the fabrication process and the applications of graphene-based electronic devices, including thermal acoustic devices, thermal rectifiers, graphene-based nanogenerators, pressure sensors and graphene-based light-emitting diodes. In summary, although there are still a lot of challenges needing to be solved, graphene-based materials are very promising for various flexible device applications in the future.
基金This work was supported by the National Natural Science Foundation of China (Nos. 20821120293 and 50933003) and Chinese Academy of Sciences.
文摘Effect of the device fabrication conditions on photovoltaic performance of the polymer solar cells based on poly(3-hexylthiophene) (P3HT) as donor and indene-C70 bisadduct (IC70BA) as acceptor was studied systematically. The device fabrication conditions we studied include pre-thermal annealing temperature, active layer thickness, and the P3HT : IC70BA weight ratios. For devices with a 188-nm-thick active layer of P3HT : ICToBA (1 : 1, w ' w) blend film and pre-thermal annealing at 150 ℃C for 10 rain, maximum power conversion efficiency (PCE) reached 5.82% with Voc of 0.81 V, Isc of 11.37 mA/cm2, and FF of 64.0% under the illumination of AM1.5G, 100 mW/cm2.
文摘Organometallic halide perovskite materials have triggered global attention in recent years due to their exciting and optimistic high performance energy conversion properties(high luminescence efficiency and tremendous optical absorption ability[1,2]).These interesting photovoltaic properties together make them a promising candidate for high performance optoelectronic
基金grateful to Director and Head of the Department of Civil Engineering of National Institute of Technology,Rourkela,Odisha,India,769008 for their constant support in undertaking this work.The authors also acknowledge with thanks the support received from the laboratory staff namely,Shri S.C.Xess and Shri Hari Mohan Garnaik.
文摘It is a common practice to apply a tack coat usually in the form of bituminous emulsion over an existing bituminous surface before laying another bituminous layer.The boundary between these two consecutive bituminous layers is the layer interface and the pavement stress distribution is highly influenced by the adhesion conditions at this interface.Poor adhesion causes adverse effects on the structural strength of the pavement system.A number of premature failures such as slippage failure and delamination failures result thus defeating the construction objectives.In the absence of a standard method and apparatus to address this field problem,an attempt has been made in this study to develop a simple testing arrangement to be used in a laboratory to determine the interlayer bond strength.Normal Marshall procedure has been used to prepare the specimens consisting of two different types of bituminous materials in lower and upper part of the same specimen.It is observed within the scope of study that Cationic rapid setting(CRS-1)emulsion applied at 0.25 Kg/m^(2) offers the best results of interlayer bond strength.
基金supported by the Malaysian Ministry of Educationthe Natural Sciences and Engineering Research Council of Canada (NSERC)
文摘This paper describes the development of a monitoring system capable of detecting the concentration of magnesium ions(Mg^(2+)) released during the degradation of magnesium implants. The system consists of a microdialysis probe that samples fluid adjacent to the implant and a catalytic biosensor specific to Mg^(2+)ions. The biosensor was fabricated on a cotton fabric platform, in which a mixture of glycerol kinase and glycerol-3-phosphate oxidase enzymes was immobilized on the fabric device via a simple matrix entrapment technique of the cotton fibers. Pure magnesium was used as the implant material. Subsequently, the concentration of ions released from the degradation of the magnesium specimen in Ringer's solution was evaluated using cyclic voltammetry technique. The device demonstrated a pseudo-linear response from 0.005 to 0.1 mmol L^(-1) with a slope of 67.48 μA mmol^(-1) L. Detectable interfering species were lesser than 1%indicating a high selectivity of the fabric device. Furthermore,the device requires only 3 μL of fluid sample to complete the measurement compared to spectroscopic method(±50 μL),hence providing a higher temporal resolution and reduced sampling time. The system could potentially provide a real time assessment of the degradation behavior, a new studied aspect in biodegradable metals research.
基金supported by the State Key Program of National Natural Science Foundation of China(Grant No.61534001)the Joint Funds of the National Natural Science Foundation of China(Grant No.U1601213)+2 种基金the National Natural Science Foundation of China(Grant Nos.51601005 and 61704006)the Beijing Natural Science Foundation(Grant No.2182032)the Fundamental Research Funds for the Central Universities.
文摘Recently,the performance and fabrication of thin-ilm thermoeletric materials have been jargely enhanced.Based on this enhancement,the thin-film thermoelectric cooler(TEC)is becoming a research hot topic,due to its high cooling flux and microchip level size.To fulfill a thin-film TEC,interfacial problems are unavoidable,as they may largely reduce the properties of a thin-film TEC.Moreover,the architecture of a thin-film TEC should also be properly designed.In this review,we introduced the enhancement of thermoelectric properties of(Bi,Sb)2(Te,Se)3 solid solution materials by chemical vapor deposition,physical vapor deposition and electro-deposition.Then,the interfacial problems,including contact resistance,interfacial diffusion and thermal contact resistance,were discussed.Furthermore,the design,fabrication,as well as the performance of thin-film TECs were summarized.
基金We gratefully acknowledge the support of an NSF STTR(grant no.IIP-0822695)an AF MURI(grant no.FA9550-09-1-0677)+3 种基金an NSF IGERTCOSI Fellowship for this pWe gratefully acknowledge the support of an NSF STTR(grant no.IIP-0822695)an AF MURI(grant no.FA9550-09-1-0677)an NSF IGERTCOSI Fellowship for this projectThis research was supported in part by the NNIN at the Colorado Nanofabrication Laboratory and the National Science Foundation under grant no.ECS-0335765.roject.This research was supported in part by the NNIN at the Colorado Nanofabrication Laboratory and the National Science Foundation under grant no.ECS-0335765.We thank Dr Carol Cogswell for the use of her DIC microscope.We would also like to thank Dr Christopher Bowman for his technical contributions.
文摘Photonic devices increasingly require three-dimensional control of refractive index,but existing fabrication methods such as femtosecond micromachining,multilayer lithography and bulk diffusion can only address a select scale range,are often limited in complexity or thickness and have low throughput.We introduce a new fabrication method and polymeric material that can efficiently create mm^(3) optical devices with programmable,gradient index of refraction with arbitrary feature size.Index contrast of 0.1 is demonstrated,which is 100 times larger than femtosecond micromachining,and 20 times larger than commercial holographic photopolymers.This is achieved by repetitive microfluidic layering of a self-developing photopolymer structured by projection lithography.The process has the unusual property that total fabrication time for a fixed thickness decreases with the number of layers,enabling fabrication 10^(5) faster than femtosecond micromachining.We demonstrate the process by sequentially writing 100 layers to fabricate a mm thick waveguide array.