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Effects of air damping on quality factors of different probes in tapping mode atomic force microscopy
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作者 Yu Zeng Guo-Lin Liu +1 位作者 Jin-Hao Liu Zheng Wei 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第9期506-519,共14页
The AFM probe in tapping mode is a continuous process of energy dissipation,from moving away from to intermittent contact with the sample surfaces.At present,studies regarding the energy dissipation mechanism of this ... The AFM probe in tapping mode is a continuous process of energy dissipation,from moving away from to intermittent contact with the sample surfaces.At present,studies regarding the energy dissipation mechanism of this continuous process have only been reported sporadically,and there are no systematic explanations or experimental verifications of the energy dissipation mechanism in each stage of the continuous process.The quality factors can be used to characterize the energy dissipation in TM-AFM systems.In this study,the vibration model of the microcantilever beam was established,coupling the vibration and damping effects of the microcantilever beam.The quality factor of the vibrating microcantilever beam under damping was derived,and the air viscous damping when the probe is away from the sample and the air squeeze film damping when the probe is close to the sample were calculated.In addition,the mechanism of the damping effects of different shapes of probes at different tip–sample distances was analyzed.The accuracy of the theoretical simplified model was verified using both experimental and simulation methods.A clearer understanding of the kinetic characteristics and damping mechanism of the TM-AFM was achieved by examining the air damping dissipation mechanism of AFM probes in the tapping mode,which was very important for improving both the quality factor and the imaging quality of the TM-AFM system.This study’s research findings also provided theoretical references and experimental methods for the future study of the energy dissipation mechanism of micro-nano-electromechanical systems. 展开更多
关键词 TM-AFM quality factors air viscous damping air squeeze film damping
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A mechanically coupled MEMS filter with high-Q width extensional mode resonators
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作者 Wei Wang Wenli Liu +5 位作者 Junyuan Zhao Bo Niu Zeyu Wu Yinfang Zhu Jinling Yang Fuhua Yang 《Journal of Semiconductors》 EI CAS CSCD 2024年第8期41-48,共8页
This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate lead... This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends. 展开更多
关键词 MEMS narrowband filter mechanically coupling quality factor width extensional mode
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Investigation on photonic crystal nanobeam cavity based on mixed diamond–circular holes
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作者 Jingtong Bin Kerui Feng +4 位作者 Shang Ma Ke Liu Yong Cheng Jing Chen Qifa Liu 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2024年第1期63-70,共8页
A photonic crystal nanobeam cavity(M-PCNC)with a structure incorporating a mixture of diamond-shaped and circular air holes is pro-posed.The performance of the cavity is simulated and studied theoretically.Using thefin... A photonic crystal nanobeam cavity(M-PCNC)with a structure incorporating a mixture of diamond-shaped and circular air holes is pro-posed.The performance of the cavity is simulated and studied theoretically.Using thefinite-difference time-domain method,the parameters of the M-PCNC,including cavity thickness and width,lattice constant,and radii and numbers of holes,are optimized,with the quality factor Q and mode volume Vm as performance indicators.Mutual modulation of the lattice constant and hole radius enable the proposed M-PCNC to realize outstanding performance.The optimized cavity possesses a high quality factor Q 1.45105 and an ultra-small mode=×volume Vm 0.01(λ/n)[Zeng et al.,Opt Lett 2023:48;3981–3984]in the telecommunications wavelength range.Light can be progres-=sively squeezed in both the propagation direction and the perpendicular in-plane direction by a series of interlocked anti-slots and slots in the diamond-shaped hole structure.Thereby,the energy can be confined within a small mode volume to achieve an ultra-high Q/Vm ratio. 展开更多
关键词 Photonic crystal nanobeam cavity Mixed diamond–circular holes Slots and anti-slots FDTD simulation Quality factor Mode volume
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Comparison of Mode Quality Factors for Equilateral Triangular, Square and Rhombus Optical Micro-Resonators
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作者 黄永箴 国伟华 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第2期117-120,共4页
The mode frequencies and the quality factors for the equilateral triangular resonator (ETR), the square resonator (SR) and the rhombus resonator (RR) are numerically calculated by the finite difference time domai... The mode frequencies and the quality factors for the equilateral triangular resonator (ETR), the square resonator (SR) and the rhombus resonator (RR) are numerically calculated by the finite difference time domain technique and the Padé approximation. The numerical results show that the resonant modes confined in an equilateral triangular cavity have much higher quality factors than those in the square or the rhombus cavities. The modes in the ETR are totally confined in transverse direction while those in the SR and RR are only partly confined. For the ETR with the side length of 4μm and the refractive index of 3 2, the mode quality factor of about 5 5×10 3 at the wavelength of 1 55μm has been obtained. 展开更多
关键词 MICRORESONATOR quality factor resonant frequency finite difference time domain technique semiconductor laser
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Estimation of quality factors by energy ratio method 被引量:1
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作者 王宗俊 曹思远 +5 位作者 张浩然 曲英铭 袁殿 杨金浩 张德龙 邵冠铭 《Applied Geophysics》 SCIE CSCD 2015年第1期86-92,122,123,共9页
The quality factor Q, which reflects the energy attenuation of seismic waves in subsurface media, is a diagnostic tool for hydrocarbon detection and reservoir characterization. In this paper, we propose a new Q extrac... The quality factor Q, which reflects the energy attenuation of seismic waves in subsurface media, is a diagnostic tool for hydrocarbon detection and reservoir characterization. In this paper, we propose a new Q extraction method based on the energy ratio before and after the wavelet attenuation, named the energy-ratio method(ERM). The proposed method uses multipoint signal data in the time domain to estimate the wavelet energy without invoking the source wavelet spectrum, which is necessary in conventional Q extraction methods, and is applicable to any source wavelet spectrum; however, it requires high-precision seismic data. Forward zero-offset VSP modeling suggests that the ERM can be used for reliable Q inversion after nonintrinsic attenuation(geometric dispersion, refl ection, and transmission loss) compensation. The application to real zero-offset VSP data shows that the Q values extracted by the ERM and spectral ratio methods are identical, which proves the reliability of the new method. 展开更多
关键词 Quality factor Q energy ratio time domain seismic wavelet spectral ratio method
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Relationship between the Water Body Chlorophylla and Water Quality Factors of Wetlands Baiguishan Reservoir 被引量:1
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作者 SHE Qiu-sheng TIAN Xun WANG Guo-zhen JI Xiao-cun LI Jiu-xuan ZHAO Zhen 《Agricultural Science & Technology》 CAS 2011年第4期581-583,591,共4页
[Objective] The aim was to explore the relationship between water body Chlorophyll-a and water quality factors of wetlands Baiguishan reservoir.[Method] Chlorophyll-a and water quality factors of water quality of Wetl... [Objective] The aim was to explore the relationship between water body Chlorophyll-a and water quality factors of wetlands Baiguishan reservoir.[Method] Chlorophyll-a and water quality factors of water quality of Wetlands BaiGuishan Reservoir was studied,the analysis of the relationship on water quality of Wetlands Baiguishan Reservoir was made by use of trophic status indices and SPSS17.0 statistical analysis.[Result] Total phosphorus was an important factor of influence Chlorophyll-a in reservoir,water body had slight eutrophication phenomenon in reservoir of July to October in 2010.[Conclusion] Comprehensive management should be strengthened so as to improve the water quality of Baiguishan wetland. 展开更多
关键词 Wetlands Baiguishan Reservoir CHLOROPHYLL-A Water quality factors RELATIONSHIP
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Changing trends and influencing factors of the quality of life of chemotherapy patients with breast cancer 被引量:1
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作者 Zhong-Ping Ai Xiao-Lan Gao +2 位作者 Jin-Feng Li Jian-Rong Zhou You-Feng Wu 《Chinese Nursing Research》 CAS 2017年第1期18-23,共6页
Objective: To understand the changing trajectory of quality of life(QOL) during the treatment courses of breast cancer patients during chemotherapy and to investigate the factors in each treatment course that affec... Objective: To understand the changing trajectory of quality of life(QOL) during the treatment courses of breast cancer patients during chemotherapy and to investigate the factors in each treatment course that affect QOL.Methods: The M.D. Anderson Symptom Inventory Scale, the Hospital Anxiety and Depression Scale(HADS), and the Functional Assessment of Cancer Therapy-Breast(FACT-B) scale were used to perform a survey on 174 breast cancer patients who received the TAC(docetaxel, Adriamycin, and cyclophosphamide) chemotherapy regimen before postoperative chemotherapy and 5-7 days after each chemotherapy course.Results: The QOL scores of the breast cancer patients were the lowest before the postoperative chemotherapy(81.2 ± 19.6) and the highest after the second chemotherapy course(94.5 ± 14.4). After the fourth and fifth chemotherapy courses, the scores were much lower again, with values of 82.7 ± 13.9and 82.6 ± 13.1, respectively. The scores improved again after the sixth chemotherapy course(93.9 ± 18.7). Furthermore, each treatment course had different related symptoms that affected the QOL of the patients.Conclusions: More attention should be paid to the changing trajectory of QOL of patients in all treatment courses and to the influence of treatment-related symptoms on the QOL of patients; moreover, interventions should be adopted by medical care personnel to increase QOL in cancer patients. 展开更多
关键词 Breast cancer Chemotherapy Quality of life Changing trajectory Influencing factor
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Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor
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作者 Hongrui Lv Xianglong Shi +6 位作者 Yujie Ai Zhe Liu Defeng Lin Lifang Jia Zhe Cheng Jie Yang Yun Zhang 《Journal of Semiconductors》 EI CAS CSCD 2022年第11期78-83,共6页
Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters inc... Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators. 展开更多
关键词 surface acoustic wave RESONATOR gallium nitride quality factor temperature sensor
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Impact factors and improvement measures of enviroment quality in cleaning operating room
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作者 陈小娣 《外科研究与新技术》 2011年第4期266-266,共1页
Objective To analyze the factors that impact the environment quality of cleaning operating room and to discuss improvement measurement. Methods Environment bacteria testing results and prevalence of surgical incision ... Objective To analyze the factors that impact the environment quality of cleaning operating room and to discuss improvement measurement. Methods Environment bacteria testing results and prevalence of surgical incision infection in cleaning operating room were retro- 展开更多
关键词 Impact factors and improvement measures of enviroment quality in cleaning operating room
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Simulating the strong ground motion of the 2022 MS6.8 Luding,Sichuan,China Earthquake 被引量:2
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作者 Libao Zhang Lei Fu +1 位作者 Aiwen Liu Su Chen 《Earthquake Science》 2023年第4期283-296,共14页
Stochastic finite-fault simulations are effective for simulating ground motions and are widely used in engineering to determine the impacts of ground motion and develop relevant predictive equations.In this study,the ... Stochastic finite-fault simulations are effective for simulating ground motions and are widely used in engineering to determine the impacts of ground motion and develop relevant predictive equations.In this study,the source,path,and site amplification coefficient of western Sichuan Province,China,and stochastic finite-fault simulations were used to simulate the acceleration time series,Fourier amplitude spectra,and 5%damped response spectra of 28 strong-motion stations with rupture distances within 300 km of the 2022 MS6.8 Luding earthquake.The simulation results of 14 stations at rupture distances of 45-185 km match the observation.However,the simulation results of 3 near-and 6 far-field stations at rupture distances of 12-36 km and 222-286 km,respectively,were obviously deviated from the observations.Simulation results of the near-field stations are larger than the observations at high frequencies(>6 Hz).The discrepancy likely comes from the nonlinear site effect of near-field stations,which reduced the site amplification at high frequencies.Simulation result of the far-field stations is smaller than the observation at frequencies above 1 Hz.As these stations are located close to the Longmenshan Fault Zone(LFZ),thus,we obtained a new quality factor(Q)from data of historical events and stations located around LFZ.Using the new Q value,the discrepancies of the high-frequency simulation results of the far-field stations were corrected.This result indicated that the laterally varying Q values can be used to address the impact of strong crustal lateral heterogeneity on simulation. 展开更多
关键词 stochastic finite-fault simulation response spectrum quality factor site nonlinearity Luding MS6.8 earthquake
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Measurement of the cavity-loaded quality factor in superconducting radio-frequency systems with mismatched source impedance
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作者 Jin-Ying Ma Cheng-Ye Xu +12 位作者 An-Dong Wu Guo-Dong Jiang Yue Tao Zong-Heng Xue Long-Bo Shi Tian-Cai Jiang Zheng-Long Zhu Zi-Qin Yang Zheng Gao Lie-Peng Sun Gui-Rong Huang Feng Qiu Yuan He 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2023年第8期12-23,共12页
The accurate measurement of parameters such as the cavity-loaded quality factor(Q_(L))and half bandwidth(f_(0.5))is essential for monitoring the performance of superconducting radio-frequency cavities.However,the conv... The accurate measurement of parameters such as the cavity-loaded quality factor(Q_(L))and half bandwidth(f_(0.5))is essential for monitoring the performance of superconducting radio-frequency cavities.However,the conventional"field decay method"employed to calibrate these values requires the cavity to satisfy a"zero-input"condition.This can be challenging when the source impedance is mismatched and produce nonzero forward signals(V_(f))that significantly affect the measurement accuracy.To address this limitation,we developed a modified version of the"field decay method"based on the cavity differential equation.The proposed approach enables the precise calibration of f_(0.5) even under mismatch conditions.We tested the proposed approach on the SRF cavities of the Chinese Accelerator-Driven System Front-End Demo Superconducting Linac and compared the results with those obtained from a network analyzer.The two sets of results were consistent,indicating the usefulness of the proposed approach. 展开更多
关键词 Loaded quality factor Field decay method Superconducting cavity MISMATCH Calibration Cavity differential equation Measurement Accelerator-driven system
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Minimizing FWM Impact in DWDM ROF DP-DQPSK System for Optical
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作者 Esra Ehsan Razali Ngah Nurul Ashikin Binti Daud 《Computers, Materials & Continua》 SCIE EI 2023年第4期1033-1050,共18页
The demonstration of a higher data rate transmission system was amajor aspect to be considered by researchers in recent years. The most relevantaspect to be studied and analyzed is the need for a reliable system to ha... The demonstration of a higher data rate transmission system was amajor aspect to be considered by researchers in recent years. The most relevantaspect to be studied and analyzed is the need for a reliable system to handlenonlinear impairments and reduce them. Therefore, this paper examines theinfluence of Four-Wave Mixing (FWM) impairment on the proposed highdata rate Dual polarization–Differential Quadrature phase shift keying (DPDQPSK)system using the Optisystem software. In the beginning, the impactof varied input power on the proposed system’s performance was evaluated interms of QF and BER metrics. More power is used to improve system performance.However, increasing power would raise theFWMeffects. Accordingly,a−10dBminput power and the proposed system are used to reduce the impactof FWM. Additionally, a hybrid amplification method is proposed to enhancesystem performance by utilizing the major amplification methods of erbiumdopedfiber amplifier (EDFA): semiconductor optical amplifier (SOA) andRadio optical amplifier (ROA). The evaluation demonstrates that the OAEDFAoutperformed the other two key amplification techniques of (EDFASOA)and (EDFA-ROA) in improving Quality factor (QF) and Bit error rate(BER) system results for all distances up to 720 km. Consequently, the methodcontributes to minimizing the impact of FWM. In the future, other forms ofnonlinearity will be investigated and studied to quantify their impact on theproposed system. 展开更多
关键词 Direct detection DQPSK bit error rate quality factor Dense wavelength division multiplexing(DWDM)
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A WSN Node Fault Diagnosis Model Based on BRB with Self-Adaptive Quality Factor
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作者 Guo-Wen Sun Gang Xiang +3 位作者 Wei He Kai Tang Zi-Yi Wang Hai-Long Zhu 《Computers, Materials & Continua》 SCIE EI 2023年第4期1157-1177,共21页
Wireless sensor networks (WSNs) operate in complex and harshenvironments;thus, node faults are inevitable. Therefore, fault diagnosis ofthe WSNs node is essential. Affected by the harsh working environment ofWSNs and ... Wireless sensor networks (WSNs) operate in complex and harshenvironments;thus, node faults are inevitable. Therefore, fault diagnosis ofthe WSNs node is essential. Affected by the harsh working environment ofWSNs and wireless data transmission, the data collected by WSNs containnoisy data, leading to unreliable data among the data features extracted duringfault diagnosis. To reduce the influence of unreliable data features on faultdiagnosis accuracy, this paper proposes a belief rule base (BRB) with a selfadaptivequality factor (BRB-SAQF) fault diagnosis model. First, the datafeatures required for WSN node fault diagnosis are extracted. Second, thequality factors of input attributes are introduced and calculated. Third, themodel inference process with an attribute quality factor is designed. Fourth,the projection covariance matrix adaptation evolution strategy (P-CMA-ES)algorithm is used to optimize the model’s initial parameters. Finally, the effectivenessof the proposed model is verified by comparing the commonly usedfault diagnosis methods for WSN nodes with the BRB method consideringstatic attribute reliability (BRB-Sr). The experimental results show that BRBSAQFcan reduce the influence of unreliable data features. The self-adaptivequality factor calculation method is more reasonable and accurate than thestatic attribute reliability method. 展开更多
关键词 Self-adaptive quality factor belief rule base wireless sensor networks fault diagnosis
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Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space 被引量:2
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作者 王勇 石艳玲 +5 位作者 刘斌贝 丁艳芳 唐深群 朱骏 陈寿面 赵宇航 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第9期1716-1721,共6页
To decrease the metal losses of RF spiral inductor,a novel layout structure with gradually reduced metal line width and space from outside to inside is presented. This gradual changed inductor has less eddy-current ef... To decrease the metal losses of RF spiral inductor,a novel layout structure with gradually reduced metal line width and space from outside to inside is presented. This gradual changed inductor has less eddy-current effect than the conventional inductor of fixed metal width and space. So the series resistance can be reduced and the quality (Q) factor of the inductor relating to metal losses is increased. The obtained experimental results corroborate the validity of the proposed method. For a 6nH inductor on high-resistivity silicon at 2.46GHz,Q factor of 14.25 is 11.3% higher than the conventional inductor with the same layout size. This inductor can be integrated with radio frequency integrated circuits to gain better performance in RF front end of a wireless communication system. 展开更多
关键词 RF spiral inductor quality factor eddy-current effect metal losses
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Novel Substrate pn Junction Isolation for RF Integrated Inductors on Silicon 被引量:5
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作者 刘畅 陈学良 严金龙 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第12期1486-1489,共4页
A new method for reducing the substrate rated losses of integrated spiral inductors is presented.The method is to block the eddy currents induced by spiral inductors by directly forming pn junction isolation in the S... A new method for reducing the substrate rated losses of integrated spiral inductors is presented.The method is to block the eddy currents induced by spiral inductors by directly forming pn junction isolation in the Si substrate. The substrate pn junction can be realized by using the standard silicon technologies without any additional processing steps.Integrated inductors on silicon are designed and fabricated. S parameters of the inductor based equivalent circuit are investigated and the inductor parameters are calculated.The impacts of the substrate pn junction isolation on the inductor quality factor are studied.The experimental results show that substrate pn junction isolation in certain depth has achieved a significant improvement.At 3GHz,the substrate pn junction isolation increases the inductor quality factor by 40%. 展开更多
关键词 Si integrated inductor quality factor eddy current pn junction isolation
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A Novel Lateral Solenoidal On-Chip Integrated Inductor Implemented in Conventional Si Process 被引量:1
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作者 刘畅 陈学良 +1 位作者 严金龙 顾伟东 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第4期352-365,共14页
A new structure of the on- chip integrated inductors im plem ented in conventional Si process is presented as a lateral solenoid.The fabrication process utilizes a conventional Si technology with standard double- lay... A new structure of the on- chip integrated inductors im plem ented in conventional Si process is presented as a lateral solenoid.The fabrication process utilizes a conventional Si technology with standard double- layer m etal- lization.S param eters of the inductors based equivalent circuit are investigated and the inductor parameters are cal- culated from the m easured data.Experimental results are presented on an integrated inductors fabricated in a lateral solenoid type utilizing double m etal layers rather than a single metal layer as used in conventional planar spiral de- vices.Inductors with peak Q of 1.3and inductance value of 2 .2 n H are presented,which are com parable to conven- tional planar spiral inductors. 展开更多
关键词 integrated inductor solenoidal inductor spiral inductor quality factor
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Fracture prediction using prestack Q calculation and attenuation anisotropy 被引量:1
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作者 安勇 《Applied Geophysics》 SCIE CSCD 2015年第3期432-440,469,共10页
The analysis of fractured reservoirs is very important to hydrocarbon exploration. The quality factor Q is a parameter used to characterize the attenuation of seismic waves in subsurface media. Q not only reflects the... The analysis of fractured reservoirs is very important to hydrocarbon exploration. The quality factor Q is a parameter used to characterize the attenuation of seismic waves in subsurface media. Q not only reflects the inherent properties of the medium but also is used to make predictions regarding reservoir fractures. Compared with poststack seismic data, prestack seismic data contain detailed stratigraphic information of seismic attributes and data inversion in reservoirs. The extraction of absorption parameters from prestack data improves the accuracy of attenuation estimates. In this study, I present a new method for calculating Q based on the modified S transform (MST) using common midpoint (CMP) preprocessed gathers. First, I use the MST with adjustable time-frequency resolution to carry out a high-precision time-frequency analysis of prestack CMP gathers and derive the calculation formula for the improved S transform-based frequency spectrum ratio method. Then, I use the energy density ratio to calculate the slope of the frequency spectrum ratio instead of the conventional amplitude ratio. Thus, I establish the relation between the slope of the spectrum ratio and offset as well as eliminate the offset effect by multichannel linear fitting, obtaining accurate Q values from seismic prestack data. Finally, I use the proposed prestack Q extraction method to study the fractured reservoir in Qianjin burried hill and P-wave absorption and attenuation anisotropy with good results in the fracture characterization. 展开更多
关键词 FRACTURE ATTENUATION quality factor MST CMP gather
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A Novel Local-Dielectric-Thickening Technique for Performance Improvements of Spiral Inductors on Si Substrates
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作者 杨荣 李俊峰 +3 位作者 赵玉印 柴淑敏 韩郑生 钱鹤 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第5期857-861,共5页
A novel local-dielectric-thickening technique i s presented for performance improvements of Si-based spiral inductors.This technique employs the processes of deposition,photolithography,and wet-etching,to locally thic... A novel local-dielectric-thickening technique i s presented for performance improvements of Si-based spiral inductors.This technique employs the processes of deposition,photolithography,and wet-etching,to locally thicken the oxide layer under the inductor,which can decrease the substrate loss and improve the inductor performance.Both the structures and processes are compact,economical,and compatible with CMOS processing.Several square spiral inductors with different inductances are fabricated,and the quality factors and the self-resonant frequencies both increase clearly with this proposed technique:for the 10nH,5nH,and 2nH inductors,the peak quality factors are effectively improved by 46.7%,49.7%,and 68.6%,respectively;however,the improvement percents of the self-resonant frequencies are more significant,which are 92.1%,91.0%,and no less than 68.1% respectively. 展开更多
关键词 SILICON INDUCTOR structure process quality factor self-resonant frequency
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A Solenoid-Type Inductor Fabricated by MEMS Technique
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作者 高孝裕 周勇 +3 位作者 王西宁 雷冲 陈吉安 赵小林 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第6期1083-1086,共4页
A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q-factor,UV-LIGA,dry etching technique,fine... A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q-factor,UV-LIGA,dry etching technique,fine polishing and electroplating technique are adopted.The dimensions of the inductor are 1500μm×900μm×70μm,having 41 turns with a coil width of 20μm separated by 20μm spaces and a high aspect ratio of 3.5∶1.The maximum measured inductance of the inductor is 6.17nH with a Q-factor of about 6. 展开更多
关键词 inductance value microelectromechanical systems quality factor
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Analysis and Optimum Design of Differential Inductors Using Distributed Capacitance Model
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作者 菅洪彦 唐长文 +1 位作者 何捷 闵昊 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第6期1077-1082,共6页
A distributed capacitance model for monolithic inductors is developed to predict the equivalently parasitical capacitances of the inductor.The ratio of the self-resonant frequency (f SR) of the differential-driven sym... A distributed capacitance model for monolithic inductors is developed to predict the equivalently parasitical capacitances of the inductor.The ratio of the self-resonant frequency (f SR) of the differential-driven symmetric inductor to the f SR of the single-ended driven inductor is firstly predicted and explained.Compared with a single-ended configuration,experimental data demonstrate that the differential inductor offers a 127% greater maximum quality factor and a broader range of operating frequencies.Two differential inductors with low parasitical capacitance are developed and validated. 展开更多
关键词 distributed capacitance model self-resonant frequency ratio quality factor differential inductor optimum design
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