Fourier hologram method using Gerchberg-Saxton algorithm for parallel femtosecond laser processing

In order to improve femtosecond laser throughput,a parallel processing system consisting of liquid crystal on silicon(LCOS)device as spatial light modulator is put forward.A method is described for displaying Fourier hologram on LCOS,and a high uniformity of several diffraction peaks in the computer reconstruction is achieved.Application of this method to the parallel femtosecond laser processing is also demonstrated,and two intersecting rings and three tangent rings are fabricated respectively by one time in the photoresist.

Femtosecond laser processing of microcavity lasers

In this paper, we reviewed the fabrications of functional microcavity lasers in soft materials such as polymer and protein by femtosecond laser processing. High-quality （Q） microdisks with a laser dye （Rhodamine B, RhB） acting as gain medium were fabricated that produced whispering-gallery-mode （WGM） lasing output. We also obtained unidirectional lasing output with a low lasing threshold in a deformed spiral microcavity at room temperature. Photonic-molecule （PM） microlasers were prepared to investigate the interaction and coupling effects of different cavities, and it was found that the distance between the two disks plays an important role in the lasing behaviors. Single-mode lasing was realized from a stacked PM microlaser through Vernier effect. Furthermore we adopted the biocompatible materials, RhB-doped proteins as a host material and fabricated a three-dimensional （3D） WGM microlaser, which operated well both in air and aqueous environment. The sensing of the protein micro- lasers to Na2SO4 concentration was investigated. Our results of fabricating high-Q microlasers with different materials reveal the potential applications of femtosecond laser processing in the areas of integrated optoelectronic and ultrahigh sensitive bio-sensing devices.

Femtosecond laser processing stainless steel foil and its Fourier spectrum detection

In this paper, we use femtosecond laser pulse to scribe 304 stainless steel foil, detect the Fourier transform infrared spectrum of the sample before and after processing, confirm the "cold processing" and "thermal processing" and their mutual conversion, and determine the "cold processing" parameter window. The ablation threshold and incubation coefficient of 304 stainless steel foil are calculated, and the effects of scanning speed and effective pulse number on the ablation threshold are analyzed. The ANSYS software is used to simulate the radial and axial temperature distributions of the surface on 304 stainless steel foil sample and the heat-affected zone with a femtosecond laser fluence of 10 J/cm2 and an effective number of pulses of 1 200 are obtained. In the aspect of spectral detection, the Fourier transform infrared spectra of the sample before and after processing are measured and two processing mechanisms of "cold processing" and "hot processing" are confirmed, which proves that we can achieve the conversion between "cold processing" and "hot processing" by changing the laser fluence and determine the "cold processing" laser fluence range.

In the Heart of Femtosecond Laser Induced Nanogratings: From Porous Nanoplanes to Form Birefringence

It is demonstrated that the form birefringence related to the so-called nanogratings is quantitatively correlated to the porosity-filling factor of these nanostructures. We reveal that matters surrounding the nanopores exhibit significant refractive index decrease which is likely due to the fictive temperature increase and/or the presence of a significant amount of interstitial O2. The control of the porosity was achieved by adjusting the laser pulse energy and the number of pulses/micron i.e. the overlapping rate. Applications can be numerous in fast material processing by the production of nanoporous matter, and photonics by changing the optical properties.

Upconversion Luminescence of Ce^(3+) Doped BK7 Glass by Femtosecond Laser Irradiation

Near-infrared to visible upconversion luminescence was observed in a multicomponent silicate （BK7） glass containing Ce^3 ＋ ions under focused infrared femtosecond laser irradiation. The emission spectra show that the upconversion luminescence comes from the 4f-5d transition of the Ce^3 ＋ ions. The relationship between the intensity of the Ce^3 ＋ emission and the pump power reveals that a three-photon absorption predominates in the conversion process from the near-infrared into the blue luminescence. The analysis of the upconversion mechanism suggests that the upconversion luminescence may come from a three-photon simultaneous absorption that leads to a population of the 5d level in which the characteristic luminescence occurs.

多脉冲飞秒激光切割加工炸药装药过程的热响应

为分析多脉冲飞秒激光切割加工炸药过程的安全性,建立多脉冲飞秒激光切割加工炸药装药的二维数值计算模型,对飞秒激光切割加工HMX、TATB、RDX和TNT 4种炸药装药的情况进行数值计算,获得不同加工状况下炸药装药的热响应规律。实验结果表明:飞秒激光切割加工炸药装药过程中,当激光光斑的移动速度为80~300 mm/min时,4种炸药均未发生点火,反应光斑移动速度越慢,热累积效应越明显,且HMX相比其他3种炸药,动态分析区内HMX的热累积效应最明显;当激光重复频率和能量分别为0.1~200 kHz和50~200μJ/pulse时,提高飞秒激光的重复频率和能量对切割速率提升效果呈先上升后降低趋势;飞秒激光对炸药装药的切割加工速率和安全性,会受到炸药的性能参数的影响,切割速率与炸药的激光吸收系数呈正相关,切割安全性与炸药的热感度呈负相关。

Efficient concentration of trace analyte with ordered hotspot construction for a robust and sensitive SERS platform

Surface-enhanced Raman scattering(SERS)platform,which enables trace analyte detection,has important application prospects.By structuring/modifying the surface of the SERSsubstrate,analyte in highly diluted solutions can be concentrated into localized active areas for highly sensitive detection.However,subject to the difficulty of the fabrication process,itremains challenging to balance hot-spot construction and the concentration capacity of analyte simultaneously.Therefore,preparing SERS substrates with densely ordered hot spots andefficient concentration capacity is of great significance for highly sensitive detection.Herein,we propose an Ag and fluoroalkyl-modified hierarchical armour substrate(Ag/F-HA),which has a double-layer stacking design to combine analyte concentration with hotspot construction.The microarmour structure is fabricated by femtosecond-laser processing to serve as asuperhydrophobic and low-adhesive surface to concentrate analyte,while the anodic aluminium oxide(AAO)template creates a nanopillar array serving as dense and ordered hot spots.Under the synergistic action of hot spots and analyte concentration,Ag/F-HA achieves a detectionlimit down to 10^(-7)M doxorubicin(DOX)molecules with a RSD of 7.69%.Additionally,Ag/F-HA exhibits excellent robustness to resist external disturbances such as liquid splash or abrasion.Based on our strategy,SERS substrates with directional analyte concentrations are further explored by patterning microcone arrays with defects.This work opens a way to the realistic implementation of SERS in diverse scenarios.

Femtosecond laser direct written fiber Bragg gratings with narrow bandwidth and high sideband suppression

Aiming for suppressing side-mode and spectrum broadening,a slit beam-shaping method and super-Gaussian apodization processing for femtosecond laser point-by-point(PbP)inscription technology of fiber Bragg gratings(FBGs)are reported here.High-quality FBGs,featuring narrow bandwidth of less than 0.3 nm,high reflectivity above 85%,low insertion loss(0.21 dB),and low cladding loss(0.82 dB),were obtained successfully.By a semi-automatic PbP inscription process,an array consisting of six FBGs,exhibiting almost no side-mode peaks with high suppression ability and narrow bandwidth,was fabricated along three independently developed single-mode fibers with an interval of 20 mm.

In-situ real-time monitoring of ultrafast laser processing using wide-field high-resolution snapshot compressive microscopy

Over the last few decades,ultrafast laser processing has become a widely used tool for manufacturing microstructures and nanostructures.The real-time monitoring of laser material processing provides opportunities to inspect processes and provide feedback.To date,in-situ and real-time monitoring of laser material processing has rarely been performed.To this end,we propose dual-path snapshot compressive microscopy(DP-SCM)for high-speed,large field-of-view,and high-resolution imaging for in-situ and real-time ultrafast laser processing.In the evaluation of DP-SCM,the field of view,lateral resolution,and imaging speed were measured to be 2 mm,775 nm,and 500 fps,respectively.In ultrafast laser processing,the laser scanning process is observed using a DP-SCM system when translating the sample stage and scanning the focused femtosecond laser.Finally,we monitored the development of a self-organized nanograting structure to validate the potential of our system for unveiling new material mechanisms.The proposed method serves as an add-up(plug-and-play)module for any imaging setup and has vast potential for opening new avenues for high-throughput imaging in laser material processing.

碳化硅陶瓷飞秒激光加工表面物化特性及去除过程研究

硬脆材料超快激光加工可有效抑制加工损伤,是碳化硅陶瓷精密加工的重要手段。采用飞秒激光,在不同能量密度和脉冲数下对碳化硅陶瓷进行加工,探究激光参数对其表面形貌特征、化学组分和微孔加工的影响,分析表面微观结构的演变规律和材料去除过程。结果表明:单脉冲加工碳化硅陶瓷表面形成沸腾区和熔化区,计算得到形成特征区的阈值能量分别为3.779、0.860 J/cm^(2);碳化硅陶瓷的去除过程是光热作用和光化学作用先后作用的结果,在温度较高的中心区域的作用机制是材料的蒸发作用,其他低温区域则是材料的热分解和氧化;微孔直径和烧蚀深度随着能量密度和脉冲数量的增大而增大。本研究从材料物理化学特性变化角度进一步完善了碳化硅陶瓷飞秒激光加工机理,为碳化硅陶瓷零部件的精密无损伤加工应用提供理论参考。

飞秒激光烧蚀齿面表层构态分析及其控制研究

为了分析飞秒激光烧蚀面齿轮齿面表层构成及其形态影响,本文针对面齿轮材料18Cr2Ni4WA,通过建立双温传热模型,模型采用向后有限差分法进行飞秒激光烧蚀数值模拟,研究飞秒激光烧蚀齿面的加工过程,分析能量密度对重铸层和热影响层的影响规律。结果显示:能量密度由1.73 J/cm^(2)增加至4.33 J/cm^(2),重铸层厚度从0.68μm增加到1.02μm,热影响层厚度从0.96μm增加到1.35μm。针对重铸层的控制,本文实施了对面齿轮齿面的二次加工,实验结果表明:采用能量密度1.73 J/cm^(2)对齿面进行二次加工,加工后的齿面几乎没有重铸物残留,齿面平均粗糙度由0.365μm降到了0.185μm,有效地改善了面齿轮的加工质量,为提高飞秒激光精微烧蚀面齿轮精度提供了有益参考。

高重频飞秒激光加工碳纤维复合材料的热影响研究

碳纤维增强复合材料(Carbon Fiber Reinforced Plastics,CFRP)的激光定量去除是航空航天工业中结构修复的关键技术。然而,CFRP中碳纤维和环氧树脂性能的巨大差异使得激光加工非常具有挑战性,热损伤一直是CFRP激光加工广泛应用的主要障碍。为了研究高重频飞秒激光加工对CFRP复合材料的热影响,采用单因素实验方法进行了理论分析和实验验证,分析了激光能量密度、扫描速度和扫描方向对材料烧蚀速率与热影响区的影响规律,并研究了飞秒激光在CFRP上的高精度选区定量去除工艺。结果表明:当工艺参数选择θ=90°,脉宽为290 fs,功率为7 W,频率为100 kHz,扫描速度为300 mm/s,扫描间距为60~80μm时,整体烧蚀表面质量较优,精度(粗糙度)可以达到10μm,去除区域表面热影响区约为33.9μm。

飞秒激光刻蚀柱面编码光栅研究

柱面编码光栅的测量精度由光栅刻线精度直接决定,为获得高精度微米级光栅刻线,研究采用飞秒激光刻蚀柱面光栅。通过优化激光功率、扫描次数、重复频率等参数,实现了线宽为6μm的刻线加工;进一步分析了不同刻线深度在旁轴光源成像系统中的成像效果,最终获得条纹完整且明暗条纹对比度明显的光栅刻线。

镍基高温合金喷油孔的飞秒激光精密加工

飞秒激光平面螺旋钻孔策略在灵活性、精度和工艺效率方面具有许多优势,可满足某型号航天发动机供油喷嘴直通孔的加工精度需求。因此,本研究采用飞秒激光平面螺旋钻孔方式,系统研究了激光功率、单层进给量、单层扫描时间、离焦量以及脉冲重复率之间的作用关系及对钻孔质量的影响。结果表明,离焦量对入口孔径的影响最为明显;对出口孔径和锥度影响较大的参数为功率以及进给量;对加工效率影响最大的参数为功率。根据上述影响规律进行调整,本实验成功在厚度为1.5 mm的GH3044板材上制备出孔径为390μm的通孔,出口入口孔径误差小于0.6μm、锥度小于0.5°。通过统计不同参数下微孔内壁粗糙度变化规律并以此对参数进行调整,有效地将孔壁粗糙度降低至Sa 0.6μm,满足工艺要求。孔壁形貌分析表明钻孔质量优良,随激光脉冲重复频率增加,孔壁附近组织逐渐粗化,但均无明显重铸层或热影响区,能够实现高精度微孔的相对“冷加工”。本研究为后续追求高雾化效果的异形孔的制备提供了理论依据。

飞秒激光制备不锈钢微纳结构工艺研究

开展了飞秒激光加工不锈钢的具体试验。通过设置不同工艺参数,研究单因素试验中不同变量对表面微结构各项指标的影响规律,并分析总结其形成机理;进一步设计正交试验,通过改变工艺参数获得形貌不同的矩阵阵列微结构,并对多因素下表面综合加工情况进行了研究,归纳各因素对微结构深度、宽度及粗糙度的影响规律;对结果进行极差分析,确定影响最大加工因素,得出设定参数内最优加工水平工艺。

融石英表面高质量亚波长光栅结构的飞秒激光加工

采用钛蓝宝石飞秒激光加工系统在融石英表面诱导表面周期性微纳结构,研究了激光诱导表面周期结构的形成过程以及激光能量密度、脉冲数、光斑大小和脉冲的空间间隔对融石英表面激光诱导表面周期结构的形貌的影响。实验结果表明,飞秒激光在融石英表面可以诱导出周期性的亚波长结构,主要以垂直于激光偏振方向的光栅状结构为主,其周期在百纳米量级且具有更好的可复现性。在激光光斑控制在1μm附近时,所得到的形貌具有较高的规则性。根据实验结果设计了聚焦高斯光斑低通量的加工方式。所制备的光栅结构具有200~300 nm的周期,平均深度约为300 nm。

Nonlinear Ionization of Molecules by Intense Transform-Limited Gaussian Laser Pulses

We present in this paper an investigation of the nonlinear process of above-threshold ionization. The process arises when an atomic or molecular system, exposed to an intense laser pulse, continues to absorb more photons than that needed for the ionization to occur. We trigger this nonlinear process in a simple molecular system by exposing it to an intense transform-limited Gaussian laser pulse of 267-nm wavelength which is the third harmonic of an 800-nm wavelength Tisapphire laser. We explore the characteristics of the process by analyzing the kinetic-energy spectra of the electrons ejected from the molecular system under different laser peak intensities.

In-process monitoring in laser grooving with line-shaped femtosecond pulses using optical coherence tomography

A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using swept-source optical coherence tomography(SS-OCT)was demonstrated.In the evaluation of the SS-OCT system,the depth resolution,measurement accuracy,and axial measurable range were 15.8μm,±2.5μm and 5.3 mm,respectively.In laser grooving,the structural shape and the distribution of deposited debris were successfully monitored.The measured depth agreed well with the depth obtained using a laser confocal microscope.The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.

多元等离子体共振纳米结构的飞秒激光加工与拉曼检测应用

以多元金属纳米薄膜(金、银)为基底,利用飞秒激光加工技术制备得到多元等离子体纳米结构,并研究了其局域表面等离子体共振效应(Local Surface Plasmon Resonance,LSPR)和表面增强拉曼散射(Surface Enhanced Raman Scattering,SERS)性能。利用时域有限差分(Finite Difference Time Domain,FDTD)软件模拟了不同情况下(单层金膜、金银双层金属薄膜的平面以及阵列结构)的电场分布情况。根据仿真结果,相较于平面金属膜来说,飞秒激光制备的微纳结构阵列附近区域产生电磁场增强,集中在结构边缘处,且其强度变化与预期结果基本保持一致。此外,使用浓度为10-4 M和10-6 M的罗丹明(R6G)溶液进行SERS性能测试。测试的结果表明,单层平面金膜基本没有SERS峰值信号出现,而单层金膜上制备的等离子体纳米结构附近出现峰值信号,双层金属薄膜上制备的等离子体纳米结构展现出更高的SERS峰值信号。多元金属等离子体纳米结构展示出更强的局域表面等离子体共振效应,从而在表面增强拉曼散射、光催化、生物传感等领域具有广泛的应用。

基于计算全息的高质量贝塞尔光束阵列产生方法

针对传统计算全息法生成的贝塞尔光束阵列均匀性差,能量利用率低的问题,提出了两种计算全息法,分别可以生成高质量的平行、发散贝塞尔光束阵列。提出多轴锥透镜相位并行拼接法,通过提高窗口的“口径利用率”,有效降低了光场的背景噪声,提高了能量利用率,仿真结果表明,所产生的3×3平行贝塞尔光束阵列均匀性为98.94%,衍射效率为78.12%;提出多透镜和轴锥透镜相位叠加法,通过多个透镜和轴锥透镜相位叠加来调控贝塞尔光束的数量和位置,透镜相位对贝塞尔光束起到聚焦的作用,可以在透镜后焦面附近得到中心光斑直径缩小的贝塞尔光束阵列,仿真结果表明,所产生的3×3发散贝塞尔光束阵列均匀性为97.95%,衍射效率为79.23%。实验采集了贝塞尔光束阵列沿传输方向120 mm,130 mm,140 mm位置处的图像,与仿真结果高度一致。相比于传统方法,本文所提方法产生的平行、发散贝塞尔光束阵列均匀性分别提高了2.97%和4.70%,衍射效率分别提高了48.22%和54.75%。