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Influence of lateral size on dielectric properties of ferroelectric thin films with structure transition zones
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作者 周静 吕天全 +1 位作者 谢文广 曹文武 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第7期3054-3060,共7页
By taking into account structural transition zones near the lateral and thickness direction edges,this paper uses a modified transverse Ising model to study dielectric properties of a finite size ferroelectric thin fi... By taking into account structural transition zones near the lateral and thickness direction edges,this paper uses a modified transverse Ising model to study dielectric properties of a finite size ferroelectric thin film in the framework of the mean-field approximation.The results indicate that the influence of the lateral size on the dielectric susceptibility cannot be neglected and lateral structural transition zones could be a crucial factor that improves the mean susceptibility of the fixed size film. 展开更多
关键词 ferroelectric thin film transverse Ising model dielectric properties
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Effect of Annealing Temperature on the Ferroelectric Properties of BiFeO_3 Thin Films Prepared by Sol-gel Process
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作者 王秀章 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2010年第3期384-387,共4页
Sol-gel process was adopted to prepare BiFeO3 films.BiFeO3 films were deposited on LaNiO3 coated Si(100) substrates annealed at 500 and 550 ℃,respectively.The X-ray diffraction results reveal that BiFeO3 film has a... Sol-gel process was adopted to prepare BiFeO3 films.BiFeO3 films were deposited on LaNiO3 coated Si(100) substrates annealed at 500 and 550 ℃,respectively.The X-ray diffraction results reveal that BiFeO3 film has a rhombohedrally distorted perovskite structure with space group R3c.The film annealed at 500 ℃ has larger remnant polarization(Pr) of 35.3 μC/cm2.For the film annealed at 550 ℃,smaller remnant polarization of Pr=4.8 μC/cm^2 is observed for its low breakdown electric field.Lower leakage conduction is observed in the film annealed at 500 ℃ at low applied field. 展开更多
关键词 MULTIFERROICS BiFeO3 thin film sol-gel method ferroelectricITY dielectric property
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MEASUREMENT OF THE DIELECTRIC PROPERTIES OF BIOLOGICAL TISSUE
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作者 顾本立 黄雷 《Journal of Southeast University(English Edition)》 EI CAS 1989年第1期88-94,共7页
An open-ended coaxial line reflection method especially suitable for meas-uring the dielectric properties of biological tissue in vivo is described.This method offersthe advantage of not requiring any special preparat... An open-ended coaxial line reflection method especially suitable for meas-uring the dielectric properties of biological tissue in vivo is described.This method offersthe advantage of not requiring any special preparation of the samples to be measured but aclose contact with the open end of a coaxial line.It is,therefore,very convenient to acquirea large number of measurement data in broad band rapidly.The method may also be usedto measure the properties of other substances.The measuring system consists of a networkanalyzer controlled by a microcomputer and calibrated by using ANA procedure to elimi-hate the influnce of error network introduced by the adapter,some connectors,etc.In or-der to reach higher accuracy,the iterative method is used to determine the parameters ofthe equivalent circuit.Measurements of permeativities of some living tissues have been per-formed in the frequency band of 0.5-2GHz.Compared with the results known in somepapers,the validity of this method has been confirmed.The difference in dielectric proper-ties between living and dead tissues,and the tissue permeativites(ε)versus frequency andduration of measurement after death have also been measured. 展开更多
关键词 dielectric property/biological TISSUE open-ended COAXIAL line microwave network measurement
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Crystallization and Electrical Properties of (Ba_(0.4)Pb_(0.3))Sr_(0.3)TiO_3 Thin Film by Pulsed Laser Deposition
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作者 杨卫明 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2007年第4期634-637,共4页
(Ba0.4Pb0.3)Sr0.3TiO3 thin films were fabricated via pulsed laser deposition (PLD) technique on Pt/TiO2/SiO2/Si substrate. The crystallization of the films was characterized by XRD and FSEM, and the experimental r... (Ba0.4Pb0.3)Sr0.3TiO3 thin films were fabricated via pulsed laser deposition (PLD) technique on Pt/TiO2/SiO2/Si substrate. The crystallization of the films was characterized by XRD and FSEM, and the experimental results suggested deposition parameters, especially the deposition temperature was the key factor in forming the perovskite structure. The dielectric properties of the film deposited with optimized parameters were studied by an Agilent 4294A impedance analyzer at 1 MHz. The dielectric constant was 772, and the loss tangent was 0.006. In addition, the well-shaped hysteresis loop also showed that the film had a well performance in ferroelectric. The saturated polarization P, remnant polarization Pr and coercive field E were about 4.6 μC/cm2, 2.5 μC/cm2 and 23 kV/cm (the coercive voltage is 0.7 V), respectively. It is suggested the film should be a promising candidate for microwave applications and nonvolatile ferroelectric random access memories (NvFeRAMs). 展开更多
关键词 (Ba0.4Pb0.3)Sr0.3TiO3 thin film PLD dielectric properties ferroelectric properties
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Effect of grain size on ferroelectric and dielectric properties of Bi_(3.25)La_(0.75)Ti_(3)O_(12) thin films prepared by rf-magnetron sputtering
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作者 Shuai Ma Wei Li +2 位作者 Jigong Hao Yuying Chen Zhijun Xu 《Journal of Advanced Dielectrics》 2023年第5期55-60,共6页
Bi_(3.25)La_(0.75)Ti_(3)O_(12)(BLT)thin films are promising materials used in non-volatile memories.In this work,BLT films were deposited on Pt(111)/Ti/SiO_(2)/Si substrates by rf-magnetron sputtering method followed ... Bi_(3.25)La_(0.75)Ti_(3)O_(12)(BLT)thin films are promising materials used in non-volatile memories.In this work,BLT films were deposited on Pt(111)/Ti/SiO_(2)/Si substrates by rf-magnetron sputtering method followed by annealing treatments.The microstructures of BLT thin films were investigated via X-ray diffraction(XRD),scanning electron microscopy(SEM)and atomic force microscopy(AFM).With the increase in annealing temperature,the grain size increased significantly and the preferred crystalline orientation changed.A well-saturated hysteresis loop with a superior remnant polarization of 15.4μC/cm^(2) was obtained for BLT thin films annealed at 700°C.The results show that the dielectric constant decreased with the increase in grain sizes. 展开更多
关键词 thin films rf-magnetron sputtering ferroelectric properties dielectric properties
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不同介电层对Hf_(x)Zr_(1-x)O_(2)薄膜铁电性能影响的研究进展
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作者 袁晓博 何慧凯 +2 位作者 唐文涛 刘宗芳 苏铭吉 《半导体技术》 CAS 北大核心 2024年第4期297-309,共13页
近年来,铁电Hf_(x)Zr_(1-x)O_(2)(HZO)薄膜受到越来越多的关注,但是铁电层与电极材料层以及铁电层与半导体衬底层之间的界面问题并没有得到解决,阻碍了HZO薄膜的进一步应用。总结了通过引入不同介电层材料,如Al_(2)O_(3)、ZrO_(2)、HfO_... 近年来,铁电Hf_(x)Zr_(1-x)O_(2)(HZO)薄膜受到越来越多的关注,但是铁电层与电极材料层以及铁电层与半导体衬底层之间的界面问题并没有得到解决,阻碍了HZO薄膜的进一步应用。总结了通过引入不同介电层材料,如Al_(2)O_(3)、ZrO_(2)、HfO_(2)、Ta_(2)O_5等,调节HZO薄膜铁电性能的方法及其机理;详细介绍了各种介电层材料作为封盖层对HZO薄膜铁电性能的影响,如对HZO薄膜提供平面内应力、控制铁电层的晶粒尺寸及作为铁电层形核核心的作用;最后,总结并展望了利用介电层调控HZO薄膜铁电性能的一般规律,为后续相关研究的开展提供了指导。 展开更多
关键词 铁电性能 HZO薄膜 介电层 Al_(2)O_(3) ZrO_(2)
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(Zr,Ti)O_(4)基微波薄膜介质基片制备关键工艺研究
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作者 江俊俊 康建宏 +2 位作者 汪小玲 刘杨琼 赵杨军 《材料导报》 EI CAS CSCD 北大核心 2024年第S01期42-46,共5页
素坯成型工艺对微波陶瓷材料在微波薄膜介质基片产品中的工程化应用具有关键影响。目前关于(Zr,Ti)O_(4)主晶相系统微波介质陶瓷材料的研究主要集中在降低(Zr,Ti)O_(4)陶瓷烧结温度、掺杂改性优化其介电性能、Q×f值(品质因数与频... 素坯成型工艺对微波陶瓷材料在微波薄膜介质基片产品中的工程化应用具有关键影响。目前关于(Zr,Ti)O_(4)主晶相系统微波介质陶瓷材料的研究主要集中在降低(Zr,Ti)O_(4)陶瓷烧结温度、掺杂改性优化其介电性能、Q×f值(品质因数与频率的乘积)等配方优化方面。本文以(Zr,Ti)-O4基微波陶瓷材料为原材料,通过研究中介微波薄膜介质基片关键成型工艺对其物相结构、微观形貌和介电性能的影响,发现不同素坯成型工艺方式对(Zr,Ti)O_(4)基陶瓷的致密度、介质损耗值、Q×f值等影响显著。采用方式四进行薄膜介质基片的制备,获得的(Zr,Ti)O_(4)基薄膜介质基片致密度较高,气孔率低,陶瓷材料的介质损耗低至1.1×10^(-4),15 GHz下Q×f值高达50000。本文通过对不同素坯成型方式的研究,以期为(Zr,Ti)O_(4)基微波陶瓷材料薄膜介质基片的工程化应用提供理论支撑。 展开更多
关键词 (Zr Ti)O_(4) 薄膜介质基片 工程化应用 微波陶瓷材料 成型工艺 介电性能
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Preparation and ferroelectric properties of Bi_(3.4)Ce_(0.6)Ti_3O_(12) thin films grown by sol-gel method 被引量:3
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作者 GUO DongYun1, LI MeiYa1, LIU Jun1, YU BenFang1, PEI Ling1, WANG YunBo2, YU Jun2 & YANG Bin2 1 Department of Physics, Wuhan University, Wuhan 430072, China 2 Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China 《Science China(Technological Sciences)》 SCIE EI CAS 2008年第1期10-15,共6页
We have investigated the preparation and properties of Bi3.4Ce0.6Ti3O12 thin films. The Bi3.4Ce0.6Ti3O12 thin films were fabricated on the Pt/Ti/SiO2/Si substrates using sol-gel method. The structure and morphology of... We have investigated the preparation and properties of Bi3.4Ce0.6Ti3O12 thin films. The Bi3.4Ce0.6Ti3O12 thin films were fabricated on the Pt/Ti/SiO2/Si substrates using sol-gel method. The structure and morphology of the films were characterized us- ing X-ray diffraction and atomic force microscopy. The thin films showed a perovskite phase and dense microstructure. The dielectric constant and the dissi- pation factor of the Bi3.4Ce0.6Ti3O12 thin films were about 172 and 0.031 at 1 kHz, respectively. The 2Pr and 2Ec of the Bi3.4Ce0.6Ti3O12 thin films were 67.1 μC/cm2 and 299.7 kV/cm, respectively, under an applied field of 600 kV/cm. The Bi3.4Ce0.6Ti3O12 film did not show fatigue up to 4.46×109 switching cycles at a frequency of 1 MHz, and showed good insulating behavior according to the test of leakage current. 展开更多
关键词 Bi3.4Ce0.6Ti3O12 thin film SOL-GEL method ferroelectric property dielectric fatigue LEAKAGE current
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Ferroelectric properties of Bi_(3.4)Ho_(0.6)Ti_3O_(12) thin films prepared by sol-gel method
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作者 FU ChengJu1, HUANG ZhiXiong1, LI Jie2 & GUO DongYun3 1 School of Materials Science and Technology, Wuhan University of Technology, Wuhan 430070, China 2 School of Mechanical Engineering, Chongqing University of Science and Technology, Chongqing 400050, China 3 Department of Physics, Wuhan University, Wuhan 430072, China 《Science China(Technological Sciences)》 SCIE EI CAS 2008年第9期1439-1444,共6页
We have prepared the Ho-substituted bismuth titanate (Bi3.4Ho0.6Ti3O12, BHT) thin films on Pt/Ti/SiO2/Si substrates using sol-gel method. The crystal structure and morphology of the films were characterized using X-ra... We have prepared the Ho-substituted bismuth titanate (Bi3.4Ho0.6Ti3O12, BHT) thin films on Pt/Ti/SiO2/Si substrates using sol-gel method. The crystal structure and morphology of the films were characterized using X-ray diffraction and atomic force microscopy. The BHT film shows a single phase of Bi-layered Aurivillius structure and dense microstructure. The 2Pr and 2Ec of the 600-nm-thick BHT film were 38.4 μC/cm2 and 376.1 kV/cm, respectively at applied electric field 500 kV/cm. The dielectric constant and dielectric loss are about 310 and 0.015 at a frequency of 1 MHz, respectively. The Pr value decreased to 93% of its pre-fatigue values after 4.46×109 switching cycles at 1 MHz frenquency, and the BHT film shows good in-sulating behavior according to the test of leakage current. 展开更多
关键词 Bi3.4Ho0.6Ti3O12 thin film SOL-GEL method ferroelectric property fatigue dielectric CONSTANT
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Microstructure and Ferroelectric Properties of (Bi_(0.9)Ho_(0.1))_(3.999)Ti_(2.997)V_(0.003)O_(12) Thin Films Prepared by Sol-gel Method for Nonvolatile Memory
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作者 Chengju Fu Zhixiong Huang +1 位作者 Jie Li Dongyun Guo 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2010年第8期679-681,共3页
The (Bi0.9Ho0.1)3.999Ti2.997V0.003012 (BHTV) films have been prepared on Pt/Ti/SiO2/Si substrates by solgel method. The microstructure and ferroelectric properties of the BHTV films were investigated. The BHTV fil... The (Bi0.9Ho0.1)3.999Ti2.997V0.003012 (BHTV) films have been prepared on Pt/Ti/SiO2/Si substrates by solgel method. The microstructure and ferroelectric properties of the BHTV films were investigated. The BHTV films show a single phase of Bi-layered Aurivillius structure and dense microstructure. The Ho3+/V5+ cosubstitution can effectively improve the ferroelectric properties. The BHTV film exhibits good ferroelectric properties with 2Pr of 47.6℃/cm2, 2Ec of 265 kV/cm (at applied field of 420 kV/cm), dielectric constant of 305, dielectric loss of 0.031 (at 1 MHz), good insulting behavior, as well as the fatigue-free behavior. 展开更多
关键词 (Bi0.9Ho0.1)3.999Ti2.997V0.003O12 thin films Sol-gel method Co-substitution ferroelectric properties dielectric properties
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微波波段下澳洲坚果的介电特性测量及分析
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作者 钟汝能 姚斌 +1 位作者 李琳 王均委 《云南师范大学学报(自然科学版)》 2023年第2期39-44,共6页
产后初加工(干燥)发展不足成为制约澳洲坚果产业发展的现实难题,微波技术有望成为传统干燥技术的替代者.针对采后澳洲坚果具有特殊的硬壳包裹果仁结构及不同组分的介电特性数据相对缺乏的实际,采用同轴传输线技术,测量并获得了不同微波... 产后初加工(干燥)发展不足成为制约澳洲坚果产业发展的现实难题,微波技术有望成为传统干燥技术的替代者.针对采后澳洲坚果具有特殊的硬壳包裹果仁结构及不同组分的介电特性数据相对缺乏的实际,采用同轴传输线技术,测量并获得了不同微波频率(2~6 GHz)和温度(20~60℃)条件下不同含水率(2.5%~22.0%,wt)澳洲坚果果仁粉末和果壳粉末的介电特性数据,分析了其介电特性与微波频率、温度和含水率的关联. 展开更多
关键词 微波波段 澳洲坚果 介电特性 实验测量及分析
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HIGH EPITAXIAL FERROELECTRIC RELAXOR Mn-DOPED Ba(Zr,Ti)O_(3) THIN FILMS ON MgO SUBSTRATES
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作者 M.LIU J.LIU +11 位作者 G.COLLINS C.R.MA C.L.CHEN A.D.ALEMAYEHU G.SUBRAMANYAM C.DAI Y.LIN J.HE J.C.JIANG E.I.MELETIS A.BHALLA Q.Y.ZHANG 《Journal of Advanced Dielectrics》 CAS 2011年第4期383-387,共5页
Environment friendly ferroelectric relaxor Ba(Zr_(0.2)Ti_(0.8))O_(3)thin fims with the addition of 2%Mn dopant were grown on(001)MgO substrates by pulsed laser deposition.Microstructure studies with X-ray di®ract... Environment friendly ferroelectric relaxor Ba(Zr_(0.2)Ti_(0.8))O_(3)thin fims with the addition of 2%Mn dopant were grown on(001)MgO substrates by pulsed laser deposition.Microstructure studies with X-ray di®raction and transmission electron microscopy reveal that the as-grown Ba(Zr_(0.2)Ti_(0.8))O_(3) thin films are c-axis oriented with an atomic sharp interface.The films have good single crystallinity and good epitaxial quality.The interface relationship was determined to be[100]Mn.BZT//[100]MgO and(001)Mn.BZT//(001)MgO.Nanoscale order/disorder relaxor structures were found with nano-columnar structures.The microwave dielectric measurements(15-18GHz)indicate that the¯lms have excellent dielectric properties with large dielectric constant value,high tunability,and low dielectric loss,promising the development of room temperature tunable microwave elements. 展开更多
关键词 ferroelectric relaxor thin films Ba(Zr_(0.2)Ti_(0.8))O_(3) dielectric microwave
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晶粒尺寸对Ba_(0.80)Sr_(0.20)TiO_3陶瓷介电铁电特性的影响 被引量:22
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作者 杨文 常爱民 杨邦朝 《硅酸盐学报》 EI CAS CSCD 北大核心 2002年第3期390-392,397,共4页
利用微波烧结技术和传统烧结技术制备了晶粒尺寸在 0 .8~ 15 μm的Ba0 .80 Sr0 .2 0 TiO3陶瓷 ,并对样品的介电特性和铁电特性进行了测试 ,分析了晶粒尺寸对材料介电和铁电性能的影响 .实验结果表明 :微波烧结技术可以有效地控制Ba0 .8... 利用微波烧结技术和传统烧结技术制备了晶粒尺寸在 0 .8~ 15 μm的Ba0 .80 Sr0 .2 0 TiO3陶瓷 ,并对样品的介电特性和铁电特性进行了测试 ,分析了晶粒尺寸对材料介电和铁电性能的影响 .实验结果表明 :微波烧结技术可以有效地控制Ba0 .80 Sr0 .2 0 TiO3陶瓷的晶粒尺寸 .晶粒尺寸降低 ,材料的介电常数大幅度提高 ,弥散指数降低 .在外电场作用下 ,材料介电常数呈现明显的非线性效应 ,晶粒尺寸的大小对非线性效应产生影响 .随晶粒尺寸的降低 ,材料的矫顽电压。 展开更多
关键词 钛酸锶钡陶瓷 微波烧结 晶粒尺寸 介电特性 铁电特性 铁电陶瓷
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新型Sol-Gel技术PZT铁电厚膜的制备及电学性能研究 被引量:6
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作者 夏冬林 刘梅冬 +3 位作者 曾亦可 李军 黄焱球 刘少波 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2001年第6期1156-1160,共5页
采用新型sol-gel技术在 Pt/Ti/SiO2/Si基片上制备出了厚度为 2~60μm的PZT铁 电厚膜材料;研究了PZT厚膜的结构及其介电、铁电性能.XRD谱分析显示,PZT厚膜 呈现出纯钙钛矿相结构,无焦绿石相存在.S... 采用新型sol-gel技术在 Pt/Ti/SiO2/Si基片上制备出了厚度为 2~60μm的PZT铁 电厚膜材料;研究了PZT厚膜的结构及其介电、铁电性能.XRD谱分析显示,PZT厚膜 呈现出纯钙钛矿相结构,无焦绿石相存在.SEM电镜照片显示,PZT膜厚均匀一致,无裂 纹、高致密.厚度为50μm的PZT厚膜的介电常数为860,介电损耗为0.03,剩余极化强度 是25μC/cm2.矫顽场是40kV/cm. 展开更多
关键词 sol-gel技术 介电性能 铁电性能 铁电陶瓷 PZT铁电厚膜 制备 溶胶-凝胶方法
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溶胶-凝胶法制备掺钙钛酸锶铋铁电薄膜 被引量:9
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作者 范素华 徐静 +2 位作者 胡广达 王培吉 张丰庆 《硅酸盐学报》 EI CAS CSCD 北大核心 2008年第2期237-241,共5页
利用溶胶-凝胶法在Pt/Ti/SiO_2/Si衬底上制备了Ca_xSr_(1-x)Bi_4Ti_4O_(15)(C_xS_(1-x)BT,x=0~1)铁电薄膜。研究了不同Ca^(2+)取代量对薄膜的微观结构、取向生长、铁电性能以及介电性能的影响。结果表明:当Ca^(2+)取代量为x=0.4时,C_(0... 利用溶胶-凝胶法在Pt/Ti/SiO_2/Si衬底上制备了Ca_xSr_(1-x)Bi_4Ti_4O_(15)(C_xS_(1-x)BT,x=0~1)铁电薄膜。研究了不同Ca^(2+)取代量对薄膜的微观结构、取向生长、铁电性能以及介电性能的影响。结果表明:当Ca^(2+)取代量为x=0.4时,C_(0.4)S_(0.6)BT铁电薄膜样品在一定程度上沿α轴择优取向;样品致密性较好,晶粒呈球型,且大小均匀,尺寸约为100nm。C_(0.4)S_(0.6)BT薄膜的剩余极化强度为8.37μC/cm^2,矫顽场强为72kV/cm:在1Hz~1MHz频率范围内,相对介电常数为234~219,介电损耗为0.009~0.073。 展开更多
关键词 掺钙钛酸锶铋 溶胶-凝胶法 薄膜取向 铁电性能 介电性能
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铁电钛酸锶钡薄膜的最新研究进展 被引量:15
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作者 朱小红 朱建国 +1 位作者 郑东宁 李林 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2003年第5期989-997,共9页
铁电钛酸锶钡(BaxSr1-xTiO3)是一种拥有十分优越铁电/介电性能的材料,在可调谐微波器件及动态存储器件方面具有很好的应用前景.本文概括介绍了BaxSr1-xTiO3薄膜的研究意义、基本结构、制备方法、各种性能特征及其表征方法与应用展望;并... 铁电钛酸锶钡(BaxSr1-xTiO3)是一种拥有十分优越铁电/介电性能的材料,在可调谐微波器件及动态存储器件方面具有很好的应用前景.本文概括介绍了BaxSr1-xTiO3薄膜的研究意义、基本结构、制备方法、各种性能特征及其表征方法与应用展望;并对当前BaxSr1-xTiO3薄膜研究中的几个重要前沿问题进行了详细讨论. 展开更多
关键词 铁电/介电薄膜 钛酸锶钡 微波器件 动态随机存储器
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铅基钙钛矿型结构铁电薄膜的介电及热释电性能研究 被引量:6
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作者 刘梅冬 陈实 +5 位作者 曾亦可 饶韫华 李楚容 陈磊 潘晓光 邓传益 《功能材料》 EI CAS CSCD 北大核心 2000年第1期100-101,共2页
用改进的溶胶 -凝胶旋转涂覆技术 ,在Pt/Ti/SiO2 /Si基片上研制出 1~ 2 μm厚 ,具有钙钛矿型结构的PbTiO3、PLT和PZT铅基铁电薄膜。该类铁电薄膜具有良好的结晶特性、优异的介电和热释电性能。
关键词 铁电薄膜 溶胶-凝胶 介电性能 热释电性能
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Sol-Gel法制备BST铁电薄膜及性能研究 被引量:4
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作者 王国强 王安福 王绍明 《武汉理工大学学报》 EI CAS CSCD 北大核心 2007年第5期10-12,52,共4页
采用溶胶-凝胶法在LaNiO3基底上制备了Ba0.5Sr0.5TiO3(BST)铁电薄膜。研究了不同退火温度对薄膜结晶性能的影响,并测试了各种BST薄膜的介电性能、铁电性能。实验结果表明经700℃退火处理的BST铁电薄膜具有比较优越的电性能,在测试频率为... 采用溶胶-凝胶法在LaNiO3基底上制备了Ba0.5Sr0.5TiO3(BST)铁电薄膜。研究了不同退火温度对薄膜结晶性能的影响,并测试了各种BST薄膜的介电性能、铁电性能。实验结果表明经700℃退火处理的BST铁电薄膜具有比较优越的电性能,在测试频率为1 kHz时,700℃退火的BST薄膜的介电常数为384.1,介电损耗为0.018 6,在室温下外加偏压为1 V时,700℃退火的BST薄膜漏电流密度达到6.7×10-8A/cm2,其剩余极化强度和矫顽场分别为4.85μC/cm2和65.2 kV/cm。 展开更多
关键词 钛酸锶钡 铁电薄膜 介电性能 铁电性能 溶胶-凝胶
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非制冷红外焦平面阵列BST铁电薄膜的制备及性能研究 被引量:3
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作者 刘梅冬 刘少波 +1 位作者 曾亦可 李楚容 《红外与激光工程》 EI CSCD 北大核心 2001年第3期222-225,共4页
采用改进的溶胶 凝胶方法 ,在Pt/Ti/SiO2 /Si基片上成功地制备出不同组分 ,具有钙钛矿型结构的BST铁电薄膜。BST5、BST10和BST15铁电薄膜的介电系数εr 分别为 375、4 0 0和4 2 5,介电损耗tgδ分别为 0 .0 4 1、0 .0 2 4和 0 .0 10 ,... 采用改进的溶胶 凝胶方法 ,在Pt/Ti/SiO2 /Si基片上成功地制备出不同组分 ,具有钙钛矿型结构的BST铁电薄膜。BST5、BST10和BST15铁电薄膜的介电系数εr 分别为 375、4 0 0和4 2 5,介电损耗tgδ分别为 0 .0 4 1、0 .0 2 4和 0 .0 10 ,剩余极化强度Pr 分别为 2 μc/cm2 、2 .5μc/cm2 和1.7μc/cm2 ,矫顽场Ec 分别为 4 0kV/cm、50kV/cm和 35kV/cm ,是制备非制冷红外焦平面阵列的优选材料。 展开更多
关键词 BST铁电薄膜 非制冷红外焦平面阵列 介电特性 铁电特性 溶胶-凝胶
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钛酸锶钡(BST)薄膜的组成、结构与性能研究进展 被引量:12
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作者 符春林 杨传仁 陈宏伟 《真空科学与技术》 CSCD 北大核心 2003年第4期255-263,共9页
钛酸锶钡 (BST)薄膜是一种重要的铁电薄膜 ,应用广泛 ,是高新技术研究的前沿和热点之一。简要介绍了BST薄膜的制备方法和应用 ,对此薄膜的基片、电极、晶界、界面、热处理、膜厚及组成、结构、性能等方面作了重点讨论 。
关键词 钛酸锶钡 铁电薄膜 基片 电极 晶界 界面 介电性能
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