Coaxial Twin-shaft Magnetic Fluid Seals Applied in Vacuum Wafer-Handling Robot

Compared with traditional mechanical seals,magnetic fluid seals have unique characters of high airtightness,minimal friction torque requirements,pollution-free and long life-span,widely used in vacuum robots.With the rapid development of Integrate Circuit（IC）,there is a stringent requirement for sealing wafer-handling robots when working in a vacuum environment.The parameters of magnetic fluid seals structure is very important in the vacuum robot design.This paper gives a magnetic fluid seal device for the robot.Firstly,the seal differential pressure formulas of magnetic fluid seal are deduced according to the theory of ferrohydrodynamics,which indicate that the magnetic field gradient in the sealing gap determines the seal capacity of magnetic fluid seal.Secondly,the magnetic analysis model of twin-shaft magnetic fluid seals structure is established.By analyzing the magnetic field distribution of dual magnetic fluid seal,the optimal value ranges of important parameters,including parameters of the permanent magnetic ring,the magnetic pole tooth,the outer shaft,the outer shaft sleeve and the axial relative position of two permanent magnetic rings,which affect the seal differential pressure,are obtained.A wafer-handling robot equipped with coaxial twin-shaft magnetic fluid rotary seals and bellows seal is devised and an optimized twin-shaft magnetic fluid seals experimental platform is built.Test result shows that when the speed of the two rotational shafts ranges from 0-500 r/min,the maximum burst pressure is about 0.24 MPa.Magnetic fluid rotary seals can provide satisfactory performance in the application of wafer-handling robot.The proposed coaxial twin-shaft magnetic fluid rotary seal provides the instruction to design high-speed vacuum robot.

Characteristics of a magnetic fluid seal and its motion in an axial variable seal gap

With suitable assumptions a hydrodynamic model for the magnetic fluid motion in an axial variable gap seal was con- structed, and the solution to the equations of the model was deduced. The characteristics of a magnetic fluid seal and its motion, including the speed and pressure distribution, and the seal capacity of a magnetic fluid rotating seal were systematically described. The factors affecting seal capacity and ways to improve seal capacity based on the hydrodynamic model are discussed. The basic condition for dynamic seal availability is presented. The rotating speed and radius of the shafts should be decreased. The work can provide proof of a seal design or suggest ways to improve the seal capacity of magnetic fluid seals.

Numerical Analysis of Magnetic Fluid Sealing Performance

The sealing performance of magnetic fluid is related to the magnetic fluid itself. Many factors can influence the magnetic field and the seal pressure differences of magnetic fluid seals, such as the sealing gap, the shaft eccentricity, the shaft diameter, the volume of the magnetic fluid and the centrifugal force. These factors are analyzed by numerical computation . When the seal material and structure are the same, the seal pressure difference is directly proportional to the magnetic field intensity and the saturation magnetization of the magnetic fluid. The sealing performance of the magnetic fluid will reduce with the increase of the sealing gap and shaft eccentricity. The sealing performance will in- crease with the volume of the magnetic fluid and decrease with the increase of the shaft diameter taking gravity into account. The increase of the shaft diameter is the same as the reduction of the volume of the magnetic fluid. The mag- netic fluid cross-section can change because of the centrifugal force. Some improvements can reduce the influence of the centrifugal force. The centrifugal force can be utilized to improve the sealing performance.

A New Design of Magnetic Fluid Seal for Liquids

Direct contract between the sealed liquid and the magnetic fluid in a dynamic system under magnetic field may lead to an unstable interface, consequently, break down the seal. Aiming at this problem, a new magnetic fluid seal (MFS) was developed. In this new MFS, a soft iron bushing with high permeability was introduced on the shaft and nonferrous shields were installed beside the bushing and the pole pieces. The parameters of the bushing and the shields were optimized in a seal simulation facility The results show that the bushing with a thickness of 7 mm and shields with a width of 8 mm are best for sealing a shaft 20 mm in diameter. The MFS designed based on the optimum parameters shows good performance and long life span for sealing lubricating oil.

Theory analyses and applications of magnetic fluids in sealing

Magnetic fluids are the suspensions composed of magnetic nanoparticles,surfactants,and non-magnetic carrier liquids.Magnetic fluids are widely used in various fields,especially in sealing,because of their excellent features,including rapid magnetic response,flexible flow ability,tunable magneto-viscous effect,and reliable self-repairing capability.Here,we provide an in-depth,comprehensive insight into the theoretical analyses and diverse applications of magnetic fluids in sealing from three categories:static sealing,rotary sealing,and reciprocating sealing.We summarize the magnetic fluid sealing mechanisms and the development of magnetic fluid seals from 1960s to the present,particularly focusing on the recent progress of magnetic fluid seals.Although magnetic fluid sealing technology has been commercialized and industrialized,many difficulties still exist in its applications.At the end of the review,the present challenges and future prospects in the progress of magnetic fluid seals are also outlined.

Process Modeling of Ferrofluids Flow for Magnetic Targeting Drug Delivery

Among the proposed techniques for delivering drugs to specific sites within the human body, magnetic targeting drug delivery surpasses due to its non-invasive character and its high targeting efficiency. Although there have been some analyses theoretically for magnetic drug targeting, very few researchers have addressed the hydrodynamic models of magnetic fluids in the blood vessel of human body. This paper presents a mathematical model to describe the hydrodynamics of ferrofluids as drug carriers flowing in a blood vessel under the applied magnetic field. A 3D flow field of magnetic particles in a blood vessel model is numerically simulated in order to further understand clinical application of magnetic targeting drug delivery. Simulation results show that magnetic nanoparticles can be enriched in a target region depending on the applied magnetic field intensity. Magnetic resonance imaging confirms the enrichment of ferrofluids in a desired body tissue of Sprague-Dawley rats. The simulation results coincide with those animal experiments. Results of the analysis provide the important information and can suggest strategies for improving delivery in favor of the clinical application.

Sealing mechanism of magnetic fluids

Sealing is one of the most successful apphcatious of magnetic fluids. However, the sealing pressure difference is not satisfactory. This paper theoretically analyzes the mechanism of magnetic fluids sealing. Main factors that have significant effects on the sealing ability include viscous stress on the interracial surface, magnetic surface tension, and the shape of the interracial surface. The sealing pressure with magnetic fluids decreases with increase of rotational speed. Experiments were carried out to study the stability of the interface between magnetic fluids and water. It has been shown that stability of the interface will be damaged by washing of water when the relative flow between water and magnetic fluid becomes turbulent.

Experimental study on a magnetofluid sealing liquid for propeller shaft

The selecting and preparing method of the basic material of magnetic fluid was introduced. By using a chemical method, the magnetic micropowder Fe 3O 4 was successfully yielded, and an oil-base as a working carrier and dispers ing agent was determined. The preparation process of the magnetic fluid and prescription of the oil-base magnetic fluid were discussed. The simulation experimental rig of magnetic fluid sealing for propeller shaft was designed. The sealing ability experiment was conducted and results were analyzed. The pressure of sealing is up to 2 MPa.

Numerical and experimental study of magnetic fluid seal with large sealing gap and multiple magnetic sources

To improve the pressure capability of magnetic fluid seal with more than a 0.25 mm single edge gap,a magnetic fluid sealing structure with multiple magnetic sources which has five permanent magnets was designed.Magnetic field distributions under the pole pieces of the magnetic fluid seal with single and multiple magnetic sources were simulated by finite element method and its sealing pressure difference could be calculated according to the theoretical formula of the magnetic fluid seal.The effects of sealing gap height and magnetic source amount on the sealing capability were investigated experimentally.The theoretical and experimental results were compared,analyzed and discussed.The results demonstrated that the magnetic fluid seal with multiple magnetic sources was an effective method to improve the sealing capability for the rotary shaft with large gaps.The theoretical results agreed well with the experimental results when the height of the single edge gap was equal to 0.4 mm.However,it was found that when the height of the single edge gap was larger than 0.4 mm,the difference between the theoretical values and experimental values increased with the gap height because part of magnetic source had less or even no effect on magnetic fluid sealing capability.

Typical dampers and energy harvesters based on characteristics of ferrofluids

Ferrofluids are a type of nanometer-scale functional material with fluidity and superparamagnetism.They are composed of ferromagnetic particles,surfactants,and base liquids.The main characteristics of ferrofluids include magnetization,the magnetoviscous effect,and levitation characteristics.There are many mature commercial ferrofluid damping applications based on these characteristics that are widely used in numerous fields.Furthermore,some ferrofluid damping studies such as those related to vibration energy harvesters and biomedical devices are still in the laboratory stage.This review paper summarizes typical ferrofluid dampers and energy harvesting systems from the 1960s to the present,including ferrofluid viscous dampers,ferrofluid inertia dampers,tuned magnetic fluid dampers(TMFDs),and vibration energy harvesters.In particular,it focuses on TMFDs and vibration energy harvesters because they have been the hottest research topics in the ferrofluid damping field in recent years.This review also proposes a novel magnetic fluid damper that achieves energy conversion and improves the efficiency of vibration attenuation.Finally,we discuss the potential challenges and development of ferrofluid damping in future research.

Magnetic fluid based squeeze film between porous circular disks with sealed boundary

Efforts have been made to study the effect of the magnetic fluid lubricant and the seal-ing of the boundary for the squeeze film between two circular disks when the upper disk having aporous facing with its boundary sealed, approaches the non-porous lower disk normally. The modi-fied Reynolds equations for the fluid region and the governing Laplacian equation for the pressurein porous region are solved with appropriate boundary conditions. Expressions are obtained forpressure, load carrying capacity and the response time. The results are presented graphically. Thecombined effect of the magnetic fluid lubricant and sealing of the boundary increases the load car-rying capacity significantly and hence the performance of the bearing can be enhanced considera-bly by sealing the boundary and taking a magnetic fluid as lubricant.

传统密封与磁流体密封在水轮机主轴上的运用分析

传统密封技术在水轮机主轴上应用广泛,但随着技术的发展和设备性能的提高,传统密封技术的局限性逐渐显现。而磁流体密封技术作为一种新兴的密封技术,具有无接触、无磨损、高密封性能等优点,为水轮机主轴密封技术的发展提供了新的方向。对此,针对传统密封与磁流体密封在水轮机主轴上的运用进行分析,探讨两种技术的优缺点与发展趋势。

面向磁流体增强的骨架结构微成型设计及回弹特性研究

为提高磁流体密封液膜的刚度和抗压力性能,设计一种应用于磁流体密封的翻边Z型增强骨架,该骨架由软磁金属薄板微成型冲压而成。对软磁金属电工纯铁和无取向硅钢进行单向拉伸试验,得到2种材料的应力应变曲线。利用幂硬化准则对Z型骨架成型回弹特性进行理论分析,确定影响回弹的主要因素为材料参数、厚度、弯曲半径、开孔宽度等。利用有限元软件对成型回弹过程进行仿真,应用因素水平分析,以残余应变和最大回弹量为指标,分析板胚厚度、弯曲半径、开孔宽度对回弹的影响。仿真结果表明:在研究的范围内通过增大板胚厚度、减小弯曲半径、减小翅片宽度能有效降低骨架回弹;当厚度为0.3 mm,弯曲半径0.3 mm,翅片尺寸为2 mm×1 mm时骨架成型回弹量最小,运用硅钢材料比纯铁具有更小的回弹量。研究结果对软磁金属的微成型冲压及磁流体密封复合材料设计提供了参考。

空化效应对斜线槽机械密封性能的影响

润滑膜的空化效应对流体动压型机械密封的密封性能影响显著。以煤油基磁流体润滑斜线槽上游泵送机械密封为研究对象,考虑空化热效应以及黏温效应,建立润滑液膜特性的数值分析模型,以液膜中的气相体积分数为指标,研究工况和结构参数对密封性能的影响规律,并与仅考虑黏温效应的模型进行对比。结果表明:因空化热模型考虑液膜介质饱和蒸汽压力随温度变化,考虑空化热效应时的开启力、泄漏率和气相体积分数均小于仅考虑黏温效应下的对应值,但2种条件下各参数的变化趋势基本一致;转速和槽径比增大,空化效应增强,而进口压力、膜厚、径向夹角和槽数的增大会削弱空化效应;转速、槽深、径向夹角、槽径比增加,会导致泄漏率增加,而进口压力和槽数的增加能够提升密封性能。

超低温结晶器磁流体密封设计及仿真优化分析

针对传统密封应用在结晶器时存在泄漏及磨损等难题,以连续冷冻结晶器为研究对象,设计一种带有升温功能的新型磁流体密封装置。通过有限元软件对磁场及温度场进行分析,得到关键参数对密封耐压值的影响;采用正交实验法对参数进行优化,并采用控制变量法分析不同热水质量流率及密封间隙对磁流体温度的影响。结果表明:结构参数对密封性能的影响程度依次为:密封间隙>永磁体高度>永磁体宽度>槽宽>齿宽>齿高;优化后各结构参数为密封间隙0.3mm、极齿宽度1.2mm、槽宽3.6mm、极齿高度3.2mm时,密封耐压值为0.503MPa,高于优化前的0.384MPa;由于工况温度较低,为保障磁流体密封正常工作,需通入质量流率大于0.1kg/s的常温水。

磁性液体性能及运行工况对密封耐压值的影响

为研究不同种类磁性液体及密封工况对密封效果的影响,以Fe_(3)O_(4)为磁性颗粒,以链状氟醚油为基液,制备一系列不同颗粒含量、基液分子量的磁性液体,对磁性颗粒及磁性液体的结构、性能进行表征,在搭建的密封试验台上测试磁性液体种类及运行工况对密封耐压效果的影响。结果表明:制备的磁性颗粒粒径为纳米级,呈近球形形貌,具有较高的饱和磁化强度,磁性液体具有较好的分散稳定性;随颗粒含量增加、基液分子量增大,密封耐压值先增大后减小;在颗粒质量分数为30%、基液分子量为4600 g/mol时,密封耐压值最高;随主轴转速增大,密封耐压值逐渐减小;随密封时间延长,密封耐压值先减小后趋于稳定。

磁流体动压润滑非接触式机械密封中的磁场分析

为研究磁流体润滑非接触式机械密封的磁场特性,运用Ansoft Maxwell数值模拟磁流体膜和密封环组成的密封系统的磁场强度和磁感应强度,分析磁流体膜厚和电流强度对磁场强度和磁感应强度的影响,用最小二乘法拟合磁流体膜的磁感应强度和电流强度的关系式。结果表明:磁感线在密封系统中形成了完整的“O”形回路,磁流体膜中的磁场强度最大,磁感线在磁流体膜中分布均匀,且垂直穿过磁流体膜;当电流强度恒定时,磁流体膜中的磁感应强度和磁场强度沿厚度方向可视为常数;随着电流强度的增加,磁流体膜的磁感应强度和磁场强度均增加。

磁流体润滑螺旋槽机械密封中的热流固耦合分析

为了研究磁流体润滑螺旋槽机械密封中的热流固耦合效应,利用ANSYS Workbench软件计算了磁流体膜的压力分布、温度分布和动环的变形量,分析了电流强度、转速和磁性颗粒体积分数对磁流体膜压力、温度和动环变形的影响。结果表明:随着电流强度、转速和磁性颗粒体积分数的升高,磁流体膜的动压、温度和密封环的热变形都增大;内径处的磁流体温度最高但压力最低,磁流体基液易汽化;动环的压力变形远小于热变形;磁流体膜的压力、磁流体膜温度的数值解大于试验值和解析值,其主要原因在于数值解考虑了密封堰和离心力对磁流体膜的影响。

The Studies of Some Key Technologies in Magnetic Disk Drives

This paper introduces some final results of some key technologies in magnetic disk drives. We dicuss the design and experiment of thin film head, magnetic fluid exclusion seal system, head disk interface and the engineering appilcations of these technologies in magnetic disk drives.

离心压缩机磁流体密封设计及优化分析

针对现有密封方式难以解决离心压缩机旋转主轴线速度高所引发的密封困难问题,设计一种带有降温和降压功能的新型磁流体密封装置,基于磁流体运动方程建立考虑离心力影响的磁流体旋转动密封耐压计算公式,利用有限元数值分析方法研究该密封装置密封间隙内磁感应强度分布规律,分析各结构参数对密封性能的影响,运用正交试验和响应曲面优化方法对关键结构参数进行优化设计。结果表明:当转轴线速度较高时,离心力对密封性能有显著影响;密封压力值随着永磁铁厚度和永磁铁宽度的增加,先增加后趋于平稳,随着密封间隙的增加而降低,随着齿宽、齿高和槽宽增加,先增加后减小,各参数对密封性能的影响程度由大到小依次为密封间隙、齿宽、槽宽、永磁铁宽度、齿高、永磁铁厚度;优化后磁流体密封的结构参数为密封间隙0.1 mm、极齿宽度1.274 mm、齿高1.8 mm、槽宽2.236 mm、永磁铁厚度7 mm、永磁铁宽度20 mm;优化后密封压力值为0.721 MPa,远高于工况要求密封压力值。