Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabric...Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabrication processes of such 3D devices are complex,especially in the interconnection of electrodes.In this paper,we present a novel method which combines suspended electrodes and focused ion beam(FIB)technology to greatly simplify the electrodes interconnection in 3D devices.Based on this method,we fabricate 3D vertical core-double shell structure transistors with ZnO channel and Al_(2)O_(3) gate-oxide both grown by atomic layer deposition.Suspended top electrodes of vertical architecture could be directly connected to planar electrodes by FIB deposited Pt nanowires,which avoid cumbersome steps in the traditional 3D structure fabrication technology.Both single pillar and arrays devices show well behaved transfer characteristics with an Ion/Ioff current ratio greater than 106 and a low threshold voltage around 0 V.The ON-current of the 2×2 pillars vertical channel transistor was 1.2μA at the gate voltage of 3 V and drain voltage of 2 V,which can be also improved by increasing the number of pillars.Our method for fabricating vertical architecture transistors can be promising for device applications with high integration density and low power consumption.展开更多
聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚...聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚石亚表层损伤的形成机理和入射离子能量对损伤深度和范围的影响。模拟结果表明:随着入射离子能量的提升,离子束在材料内的渗透深度及引起的非晶层和点缺陷损伤均有所增加;进一步的研究发现损伤形成过程中材料局部温度的上升可能诱发自退火现象,且与离子入射能量成正比,该现象对于理解聚焦离子束加工引起的损伤有着至关重要的意义;而势能的变化与损伤形成之间的显著对应关系揭示了第一邻近原子的势能明显高于第二邻近原子,进而高于Other类型原子,这一发现有助于深入理解损伤形成的微观过程。因此,精确控制入射能量是实现金刚石材料高精度聚焦离子束加工的关键,且对自退火效应和势能变化的研究对损伤监控与控制同样重要。展开更多
通过聚焦离子束(focused ion beam,FIB)轰击处理制备得到一种新的微纳级多孔硅结构,并通过实验实现可控化.在图形化过程中,FIB轰击处的周围区域内多孔硅的电化学腐蚀被抑制,出现了抑制区,称为屏蔽区域.屏蔽区域的形成主要是由FIB轰击过...通过聚焦离子束(focused ion beam,FIB)轰击处理制备得到一种新的微纳级多孔硅结构,并通过实验实现可控化.在图形化过程中,FIB轰击处的周围区域内多孔硅的电化学腐蚀被抑制,出现了抑制区,称为屏蔽区域.屏蔽区域的形成主要是由FIB轰击过程中硅粒子的二次碰撞所引起的.屏蔽区域的宽度在一定范围内与FIB的轰击电压、硅衬底的阻值成正相关.报道了一种圆形多孔硅结构:圆环上多孔硅密集分布,而环内完全没有孔结构,圆外围的屏蔽区域依然存在,使得该圆形结构得以从周围环境中独立出来.这种内部完全屏蔽的圆结构的直径最大可达10μm.展开更多
Titanium dioxide thin films were deposited on (0001) α-quartz substrate by spray pyrolysis method. The method which an aerosol of Titanium Butoxide, generated ultrasonically, was sprayed on the substrate at temperatu...Titanium dioxide thin films were deposited on (0001) α-quartz substrate by spray pyrolysis method. The method which an aerosol of Titanium Butoxide, generated ultrasonically, was sprayed on the substrate at temperature of 400°C, kept at this temperature for periods of 3, 13, 19 and 39 hours. The developed films at a crystal phase correspond to the TiO2 anatase and rutile phases. Their surface roughness increased by annealing the samples at 600, 800 and 1000°C. Deposited film annealed at 1000°C showed preferable orientation in (110) direction. The crystal evolution and crystallographic properties of this material was studied by Lotgering method, X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The study revealed that the deposition process was nearly close to the classical Chemical Vapour Deposition (CVD) technique that is generally employed to produce films with smooth surface and good crystalline properties with a thickness of about 1 μm, as measured by Focused Ion Beam.展开更多
This study shows that submicron/nanoparticles found in bacterial cells (S. aureus) incubated with polyurethane (a material commonly used for prostheses in odontostomatology) are a consequence of biodestruction. The pr...This study shows that submicron/nanoparticles found in bacterial cells (S. aureus) incubated with polyurethane (a material commonly used for prostheses in odontostomatology) are a consequence of biodestruction. The presence of polyurethane nanoparticles into bacterial vesicles suggests that the internalization process occurs through endocytosis. TEM and FIB/SEM are a suitable set of correlated instruments and techniques for this multi facet investigation: polyurethane particles influence the properties of S. aureus from the morpho-functional standpoint that may have undesirable effects on the human body. S. aureus and C. albicans are symbiotic microorganisms;it was observed that C. albicans has a similar interaction with polyurethane and an increment of the biodestruction capacity is expected by its mutual work with S. aureus.展开更多
The fabrication technique of micro/nano-scale speckle patterns with focused ion beam (FIB) system is studied for digital image correlation (DIC) measurement under a scanning electron microscope (SEM).The speckle patte...The fabrication technique of micro/nano-scale speckle patterns with focused ion beam (FIB) system is studied for digital image correlation (DIC) measurement under a scanning electron microscope (SEM).The speckle patterns are fabricated by directly etching the counterpart of the specimen to the black part of a template.Mean intensity gradient is used to evaluate the quality of these SEM images of speckle patterns fabricated based on different templates to select an optimum template.The pattern size depending on the displacement measurement sensitivity is adjusted by altering the magnification of FIB according to the relation curve of the etching size versus magnification.The influencing factors including etching time and ion beam current are discussed.Rigid body translation tests and rotation tests are carried out under SEM to verify the reliability of the fabricated speckle patterns.The calculated values are in good agreement with the imposed ones.展开更多
Although there has been much research of cracks of the cement-based materials using optical and electron microscopy two-dimensional (2D) imaging methods, the real three-dimensional (3D) crack shapes have not previousl...Although there has been much research of cracks of the cement-based materials using optical and electron microscopy two-dimensional (2D) imaging methods, the real three-dimensional (3D) crack shapes have not previously been revealed. Thanks to the focused ion beam (FIB) tomography and the follow-up image processing, two 3D subsurface cracks and a cluster of inner cracks were picked out and discussed in this research. It was found that the subsurface crack (its length is about 15 part, width about 1-5 prn, and opening about 1 ~tm) was much larger than the inner crack (its length and width are about 1-5 pro, opening is from 200 nm to 1 pan), which arose from the sample preparation process. Besides, it was revealed that most of the inner cracks were in the form of clusters.展开更多
基金the National Key Research and Development Program of China(Grant Nos.2016YFA0200400 and 2016YFA0200800)the National Natural Science Foundation of China(Grant Nos.61888102,12074420,and 11674387)+1 种基金Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB33000000)Key Research Program of Frontier Sciences,Chinese Acdemy of Sciences(Grant No.QYZDJ-SSWSLH042).
文摘Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabrication processes of such 3D devices are complex,especially in the interconnection of electrodes.In this paper,we present a novel method which combines suspended electrodes and focused ion beam(FIB)technology to greatly simplify the electrodes interconnection in 3D devices.Based on this method,we fabricate 3D vertical core-double shell structure transistors with ZnO channel and Al_(2)O_(3) gate-oxide both grown by atomic layer deposition.Suspended top electrodes of vertical architecture could be directly connected to planar electrodes by FIB deposited Pt nanowires,which avoid cumbersome steps in the traditional 3D structure fabrication technology.Both single pillar and arrays devices show well behaved transfer characteristics with an Ion/Ioff current ratio greater than 106 and a low threshold voltage around 0 V.The ON-current of the 2×2 pillars vertical channel transistor was 1.2μA at the gate voltage of 3 V and drain voltage of 2 V,which can be also improved by increasing the number of pillars.Our method for fabricating vertical architecture transistors can be promising for device applications with high integration density and low power consumption.
文摘聚焦离子束(focused Ion beam,FIB)作为一种用于金刚石微铣刀的特种加工方式,其引发的损伤程度直接关联到刀具的加工性能和寿命。课题组采用LAMMPS软件进行分子动力学(Molecular Dynamics,MD)模拟,结合SRIM软件的分析结果,探究单晶金刚石亚表层损伤的形成机理和入射离子能量对损伤深度和范围的影响。模拟结果表明:随着入射离子能量的提升,离子束在材料内的渗透深度及引起的非晶层和点缺陷损伤均有所增加;进一步的研究发现损伤形成过程中材料局部温度的上升可能诱发自退火现象,且与离子入射能量成正比,该现象对于理解聚焦离子束加工引起的损伤有着至关重要的意义;而势能的变化与损伤形成之间的显著对应关系揭示了第一邻近原子的势能明显高于第二邻近原子,进而高于Other类型原子,这一发现有助于深入理解损伤形成的微观过程。因此,精确控制入射能量是实现金刚石材料高精度聚焦离子束加工的关键,且对自退火效应和势能变化的研究对损伤监控与控制同样重要。
文摘通过聚焦离子束(focused ion beam,FIB)轰击处理制备得到一种新的微纳级多孔硅结构,并通过实验实现可控化.在图形化过程中,FIB轰击处的周围区域内多孔硅的电化学腐蚀被抑制,出现了抑制区,称为屏蔽区域.屏蔽区域的形成主要是由FIB轰击过程中硅粒子的二次碰撞所引起的.屏蔽区域的宽度在一定范围内与FIB的轰击电压、硅衬底的阻值成正相关.报道了一种圆形多孔硅结构:圆环上多孔硅密集分布,而环内完全没有孔结构,圆外围的屏蔽区域依然存在,使得该圆形结构得以从周围环境中独立出来.这种内部完全屏蔽的圆结构的直径最大可达10μm.
文摘Titanium dioxide thin films were deposited on (0001) α-quartz substrate by spray pyrolysis method. The method which an aerosol of Titanium Butoxide, generated ultrasonically, was sprayed on the substrate at temperature of 400°C, kept at this temperature for periods of 3, 13, 19 and 39 hours. The developed films at a crystal phase correspond to the TiO2 anatase and rutile phases. Their surface roughness increased by annealing the samples at 600, 800 and 1000°C. Deposited film annealed at 1000°C showed preferable orientation in (110) direction. The crystal evolution and crystallographic properties of this material was studied by Lotgering method, X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The study revealed that the deposition process was nearly close to the classical Chemical Vapour Deposition (CVD) technique that is generally employed to produce films with smooth surface and good crystalline properties with a thickness of about 1 μm, as measured by Focused Ion Beam.
文摘This study shows that submicron/nanoparticles found in bacterial cells (S. aureus) incubated with polyurethane (a material commonly used for prostheses in odontostomatology) are a consequence of biodestruction. The presence of polyurethane nanoparticles into bacterial vesicles suggests that the internalization process occurs through endocytosis. TEM and FIB/SEM are a suitable set of correlated instruments and techniques for this multi facet investigation: polyurethane particles influence the properties of S. aureus from the morpho-functional standpoint that may have undesirable effects on the human body. S. aureus and C. albicans are symbiotic microorganisms;it was observed that C. albicans has a similar interaction with polyurethane and an increment of the biodestruction capacity is expected by its mutual work with S. aureus.
基金supported by the National Basic Research Program of China (Grant Nos.2010CB631005 and 2011CB606105)the National Natural Science Foundation of China (Grant Nos.90916010 and 11172151)the Specialized Research Fund for the Doctoral Program of Higher Education (Grant No. 20090002110048)
文摘The fabrication technique of micro/nano-scale speckle patterns with focused ion beam (FIB) system is studied for digital image correlation (DIC) measurement under a scanning electron microscope (SEM).The speckle patterns are fabricated by directly etching the counterpart of the specimen to the black part of a template.Mean intensity gradient is used to evaluate the quality of these SEM images of speckle patterns fabricated based on different templates to select an optimum template.The pattern size depending on the displacement measurement sensitivity is adjusted by altering the magnification of FIB according to the relation curve of the etching size versus magnification.The influencing factors including etching time and ion beam current are discussed.Rigid body translation tests and rotation tests are carried out under SEM to verify the reliability of the fabricated speckle patterns.The calculated values are in good agreement with the imposed ones.
基金sponsored jointly by the foundation of National Basic Research Program of China ("973" Program) (Grant No. 2009CB623203)National Natural Science Foundation of China (Grant No. 51008072)+1 种基金Doctoral Program of Higher Education of China (Grant No.200802861029)SRF for ROCS,SEM
文摘Although there has been much research of cracks of the cement-based materials using optical and electron microscopy two-dimensional (2D) imaging methods, the real three-dimensional (3D) crack shapes have not previously been revealed. Thanks to the focused ion beam (FIB) tomography and the follow-up image processing, two 3D subsurface cracks and a cluster of inner cracks were picked out and discussed in this research. It was found that the subsurface crack (its length is about 15 part, width about 1-5 prn, and opening about 1 ~tm) was much larger than the inner crack (its length and width are about 1-5 pro, opening is from 200 nm to 1 pan), which arose from the sample preparation process. Besides, it was revealed that most of the inner cracks were in the form of clusters.
