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微模具重复利用的高深宽比铜微结构微电铸复制技术
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作者 苏少雄 孙云娜 +3 位作者 宋嘉诚 吴永进 姚锦元 丁桂甫 《微纳电子技术》 CAS 2024年第4期162-169,共8页
针对紫外线光刻、电铸成型和注塑(UV-LIGA)工艺的去胶难题,提出了一种以脱模代替去胶的改良工艺,用于批量制造高深宽比铜微结构。该工艺以可重复利用的硅橡胶软模具代替传统的SU-8光刻微模具,采用硅通孔(TSV)镀铜技术进行微电铸填充,然... 针对紫外线光刻、电铸成型和注塑(UV-LIGA)工艺的去胶难题,提出了一种以脱模代替去胶的改良工艺,用于批量制造高深宽比铜微结构。该工艺以可重复利用的硅橡胶软模具代替传统的SU-8光刻微模具,采用硅通孔(TSV)镀铜技术进行微电铸填充,然后通过直接脱模实现金属微结构的完全释放,既解决了去胶难题,又能够解决高深宽比微模具电铸因侧壁金属化导致的空洞包夹问题,同时可以大幅降低成套工艺成本。仿真和实验结果显示,热处理可以改善脱模效果,显著降低脱模损伤,支持微模具重复利用。采用初步优化的改良工艺已成功实现深宽比约3∶1的铜微结构的高精度复制。 展开更多
关键词 紫外线光刻、电铸成型和注塑(UV-LIGA)工艺 硅橡胶模具 硅通孔(TSV)镀铜 脱模 模具重复利用
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Continuous Extruding Extending Forming of Semi-solid A2017 Alloy
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作者 王顺成 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2006年第1期76-79,共4页
Continuous extruding/ extending formiug process for A2017 alloy in semi-solid state was proposed through installing extending die at the outlet of shearing- cooling- rolling (SCR) machine. A series of experiments to... Continuous extruding/ extending formiug process for A2017 alloy in semi-solid state was proposed through installing extending die at the outlet of shearing- cooling- rolling (SCR) machine. A series of experiments to produce fiat bar of A2017 alloy were carried oat. The forming process, metal flow behavior in die and microstructure and mechanical property of prodacts were investigated. It is shown that if the pouring temperature of melt was higher, the die was filled with semi-solid slurry with low solid fraction and periodical cracks would occur on the product surface ; If its pouring temperature was lower or the preheating temperature of die was lower, semisolid slurry would solidify rapidly and block the die after entering the cavity. The analysis of mass flow trace shows that the semi-solid slurry move forward layer by layer and fills the die extending cavity in radiation manner and the velocity of mass flow in the central area of extending cavity and exit of mould is the maximum, and then decreases gradually from the center to both sides of die wall. By inereasiug the die extending angle, the velocity of mass flow becomes more homogeneous. Under rational process control and die design, the A2017 fiat bar with transverse section of 10 × 50 mm and with good surface and fine equiaxed grains can be obtained by continuous extruding/extending forming process. The product's tensile strength and elongation are 420.5 MPa and 14.2% , respectively. 展开更多
关键词 semi-solid metal extruding/ extending formung metal flow behavior A2017 alloy MICROSTRUCTURE PROPERTY
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