A New Pre-alignment Approach Based on Four-Quadrant-Photo-Detector for IC Mask

In this paper, a new pre-alignment approach based on Four-Quadrant-Photo-Detector （FQPD） for IC mask is presented. The voltage outputs from FQPDs are the functions of alignment mark＇s position offsets with respect to FQPDs. The functions are obtained with least squares error （LSE）-based polynomial fitting after the normalization of experimental data. As the acquired functions are not monotonic about their variables, the alignment mark＇s position offset cannot be given by direct inverse operation on the obtained functions. However, the piecewise polynomial fitting gives the inverse function, with which the alignment mark＇s position offset can be predicted according to the voltage outputs of FQPDs. On the basis of prediction, a pre-alignment control strategy is proposed. The feasibility and robustness of the pre-alignment approach is shown by experiments. Furthermore, the results demonstrate that the maximum error of mask＇s position offset in the X- and Y- directions is less than 15μm after coarse pre-alignment. Keywords： Four-Quadrant-Photo-Detector （FQPD）, pre-alignment, IC mask, polynomial fitting

Four-quadrant Force Control with Minimal Ripple for Linear Switched Reluctance Machines

Linear switch reluctance machine(LSRM)has been tried to act as an alternative generator for direct drive linear wave energy converter(WEC).Many researchers have proposed new topologies of LSRM to improve the power density,efficiency and reliability.However,the control methods for LSRM applied in direct drive WEC have been paid little attention,especially control methods considering the wave energy generator operating characteristics.In this paper,according to the generator control requirements of the direct drive WEC,force control algorithm for LSRM operating in four quadrants without a speed closed loop is put forward.The force ripple of LSRM is suppressed using force sharing function method.The four-quadrant control is easy to realize requiring only phase currents information.Simulation results validate the proposed method and indicate that LSRM is able to be used as the generator for direct drive WEC.

Evaluating students' learning situations using “Four-quadrant law”

Evaluation is widely acknowledged as a powerful means of improving the quality of education and it is a very important component of the education system. However, the current mainstream evaluation method is based on the examination as the common way, which has very limited help to instructors' teaching. In this paper, based on an online learning platform named "educoder", we design an evaluation method by using "Four-quadrant law", which divides students' learning situations into four types. In addition, we provide some suggestions for instructors about how to give targeted teaching to different students in each type. We verify that our method is useful by setting up experiments. The experiment results show that our method can effectively improve the quality of instructors' teaching.

Mid/far-infrared photo-detectors based on graphene asymmetric quantum wells

We conducted a theoretical study on the electronic properties of a single-layer graphene asymmetric quantum well.Quantification of energy levels is limited by electron–hole conversion at the barrier interfaces and free-electron continuum.Electron–hole conversion at the barrier interfaces can be controlled by introducing an asymmetry between barriers and taking into account the effect of the interactions of the graphene sheet with the substrate.The interaction with the substrate induces an effective mass to carriers,allowing observation of Fabry–P′erot resonances under normal incidence and extinction of Klein tunneling.The asymmetry,between barriers creates a transmission gap between confined states and free-electron continuum,allowing the large graphene asymmetric quantum well to be exploited as a photo-detector operating at mid-and far-infrared frequency regimes.

一种新型的太阳自动跟踪系统研究

为了最大限度的利用太阳能,采用自动跟踪太阳的方式以获得更多的能量。简要介绍了现有的几种主要跟踪方式,光电探测器跟踪方式容易受天气条件干扰,时钟跟踪方式有累积误差或者因数据库庞大导致反应变慢等缺点。提出了一种时钟跟踪与光电探测器跟踪相结合的双轴跟踪方式,方位角采用时钟跟踪,俯仰角采用四象限光电探测器跟踪,控制核心选用ATmega16单片机。该跟踪方式结合这两种跟踪方式的优点,很好地克服了两者的缺点。实验表明,本系统转动精度高,工作稳定性好,太阳能接收损失小。

一种基于四象限光电探测器的对准新方法

在分析四象限光电探测器工作原理的基础上,提出了一种利用2个四象限光电探测器实现掩模板对准的新方法。激光器与四象限探测器位置固定,掩模板处于激光器与四象限探测器之间。透过掩模板上的2个透光米字形标记,激光光束照射到四象限探测器的光敏面。根据2个四象限探测器的输出,计算出掩模板的位置和姿态偏差,通过运动平台调整掩模板的位置和姿态,实现对准。

基于四象限光电探测器的对准与测量系统优化设计--系统优化

在构建四象限光电探测器的测量/对准系统数学模型的基础上,提出了一种搜寻算法,以优化系统,使得对准模型具有线性化的输入输出关系,且具有非常高的选择性。系统仿真结果表明,在四象限光电探测器光电转换系数为常数情况下,所提出的模型优化方法正确可行。掩模板位置偏移量与光电探测器的输出具有线性关系,不论是在横向方向还是纵向方向,而且消除了x、y两个方向偏移量的交叉敏感,这使得消除四象限光电探测器安装位置偏差带来的影响成为可能,提高了探测器的应用效率和测量/对准的准确度。模型的实测结果表明,经优化后的系统微位移检测误差与对准误差均小于2μm。

中心带雪崩光电二极管的InGaAs PIN四象限探测器

介绍了研制的中心带雪崩管的PIN四象限InGaAs光电探测器。这种光电探测器PD芯片具有一个平面结构的InGaAs PIN四象限光电二极管,其中心位置带有一个雪崩光电二极管,位于同一晶片上。探测器的5个PD芯片被安装在各自厚膜集成的前置放大器上,同时封装在一个带光窗的金属壳体中。中心雪崩探测器和四象限探测器的电压响应度、响应时间、等效噪声功率分别为:2.5×105 V/W(1 550 nm)和0.95×104 V/W(1 550 nm);7 ns和20 ns;0.15×10-12 W/Hz1/2和4×10-12 W/Hz1/2,象限间串扰小于3%,象限内不均匀性小于5%。这种探测器可同时用于人眼安全激光测距、激光定位和跟踪。

InGaAs四象限探测器

采用InP/InGaAs/InP双异质结结构研制了对人眼安全的1.54～1.57μmInGaAs四象限探测器。对器件结构设计和材料选择进行了讨论。在对响应时间、象限串扰、暗电流和响应度等参数进行计算与分析的基础上,优化了器件结构参数。实验结果表明,器件响应度达到0.90A/W,响应时间为2ns,暗电流低于5nA,象限串扰达到1%(象限间隔20μm),象限均匀性为4%。

基于两级定位跟踪的自然光导光照明装置设计

为了使人们在地下室等一些特殊环境下享受健康、绿色的自然光照明,更好地利用太阳能资源,提出一种基于两级定位跟踪的自然光导光照明装置设计方案。通过采用粗级跟踪和精确跟踪两级定位跟踪模式和在系统的机械传动机构中采用谐波传动方式等措施,由此来提高系统的跟踪稳定性和跟踪精度;同时,对聚光单元进行改进设计,以及在照明灯具处增设智能调光功能,以此进一步提高系统的光利用率和光强稳定性。实验测试表明,系统能获得较好的照明品质,具有一定的应用价值。

多管火箭炮炮管平行性测量系统

针对多管火箭炮炮管平行性测量要求,设计一套基于光电检测技术和图像处理技术的测量系统。其采用定心装置和激光准直系统建立炮管轴线,再由图像采集系统对光斑图像进行采集,经计算机处理后输出被测炮管和基准炮管的偏离角度信息,实现多管火箭炮炮管平行性测量。该装置具有高精度和高自动化程度的优点,实际应用效果良好。

Design and Implementation of an Optoelectronic Integrated Receiver in Standard CMOS Process

A wideband monolithic optoelectronic integrated receiver with a high-speed photo-detector,completely compatible with standard CMOS processes,is designed and implemented in 0.6μm standard CMOS technology.The experimental results demonstrate that its performance approaches applicable requirements,where the photo-detector achieves a -3dB frequency of 1.11GHz,and the receiver achieves a 3dB bandwidth of 733MHz and a sensitivity of -9dBm for λ=850nm at BER=10-12.

一种新型的掩膜管理控制系统的研制

研制了一种与掩膜光刻机相配套的新型掩膜管理控制系统。系统硬件由1个4自由度机械手、2个版库、粗预对准机构、精细预对准机构、PIE控制器和伺服驱动器等构成；系统软件由基于VC的上层管理程序以及基于梯形图的底层流程控制程序构成，其中上掩膜版和卸掩膜版是流程控制的主要组成部分。介绍了四象限光电探测器的对准工作原理和掩膜版的粗、精细预对准方法，实验测试了上、卸掩膜版的节拍，粗、精细预对准时间和掩膜版经过精细预对准后的重复定位精度，讨论了激光器和四象限光电探测器相对位姿的标定方法，并指出了该系统的特点。实验结果表明，该系统性能稳定，主要指标能够满足掩膜光刻机的实际生产要求。

基于多传感器信息融合的激光定位与跟踪

为了更精确实现远距离激光定位与跟踪,将十二个PIN硅光电二极管阵列探测器和一个带有光学系统的精密四象限探测器立体组合成独特的多传感器排列结构,并将空间测角基本理论与基于Bayesian决策原理的多传感器信息融合算法有机结合,实现自由空间中作用距离可达十千米的激光的粗精定位,利用激光的定位信息控制三维高精度转台的旋转实现精密跟踪。实践证明,在粗定位跟踪的基础上,精定位跟踪精度小于三个毫弧度。

Research of Frequency Discriminator on Frequency Lock Loops

Frequency lock loops （FLL） discriminating algorithms for direct-sequence spread-spectrum are discussed. The existing algorithms can＇t solve the problem of data bit reversal during one pre-detection integral period. And when the initial frequency offset is large, the frequency discriminator can＇ t work normally. To solve these problems, a new FLL discriminating algorithm is introduced. The least-squares discriminator is used in this new algorithm. As the least-squares discriminator has a short process unit period, the correspond- ing frequency discriminating range is large. And the data bit reversal just influence one process unit period, so the least-squares discriminated result will not be affected. Compared with traditional frequency discriminator, the least-squares algorithm can effectively solve the problem of data bit reversal and can endure larger initial frequency offset.

Endoscopic identification of endoluminal esophageal landmarks for radial and longitudinal orientation and lesion location

AIM To characterize esophageal endoluminal landmarks to permit radial and longitudinal esophageal orientation and accurate lesion location.METHODS Distance from the incisors and radial orientation were estimated for the main left bronchus and the left atrium landmarks in 207 consecutive patients using white light examination. A sub-study was also performed using white light followed by endoscopic ultrasound(EUS) in 25 consecutive patients to confirm the findings.The scope orientation throughout the exam was maintained at the natural axis,where the left esophageal quadrant corresponds to the area between 6 and 9 o'clock. When an anatomical landmark was identified, it was recorded with a photograph and its quadrant orientation and distance from the incisors were determined. The reference points to obtain the distances and radial orientation were as follows: the midpoint of the left main bronchus and the most intense pulsatile zone of the left atrium. With the video processor system set to moderate insufflation, measurements were obtained at the end of the patients' air expiration.RESULTS The left main bronchus and left atrium esophageal landmarks were identified using white light in 99% and 100% of subjects at a mean distance of 25.8 cm(SD2.3), and 31.4 cm(SD 2.4) from the incisors, respectively. The left main bronchus landmark was found to be a tubular, concave, non-pulsatile, esophageal external compression, occupying approximately 1/4 of the circumference. The left atrium landmark was identified as a round, convex, pulsatile, esophageal external compression, occupying approximately 1/4 of the circumference. Both landmarks were identified using white light on the anterior esophageal quadrant. In the substudy, the left main bronchus was identified in 24(92%) patients at 25.4 cm(SD2.1) and 26.7 cm(SD 1.9) from the incisors, by white light and EUS, respectively.The left atrium was recognized in all patients at 30.5 cm(SD 1.9), and 31.6 cm(SD2.3) from the incisors, by both white light and EUS, respectively. EUS confirmed that the landmarks corresponded to these two structures, respectively, and that they were located on the anterior esophageal wall. The Bland-Altman plot demonstrated high agreement between the white light and EUS measurements.CONCLUSION This study provides an endoscopic characterization of esophageal landmarks corresponding to the left main bronchus and left atrium, to permit radial and longitudinal orientation and accurate lesion location.

A method to measure the in situ magnetic field in a Hall thruster based on the Faraday rotation effect

This paper presents a method to measure the in situ magnetic field in a Hall thruster by optical non-invasive means, based on the optical Faraday rotation effect.This method does not affect the discharge of the thruster.Furthermore, its time resolution depends on the speed of the photodetector, and measurement at a MHz scale can be achieved.

New Current Control Method of DC Power Supply for Magnetic Perturbation Coils on J-TEXT

In order to advance the research on suppressing tearing modes and driving plasma rotation, a DC power supply （PS） system has been developed for dynamic resonant magnetic perturbation （DRMP） coils and applied in the J-TEXT experiment. To enrich experimental phe- nomena in the J-TEXT tokamak, applying the circulating current four-quadrant operation mode in the DRMP DC PS system is proposed. By using the circulating current four-quadrant oper- ation, DRMP coils can be smoothly controlled without the dead-time when the current polarity reverses. Essential circuit analysis, control optimization and simulation of desired scenarios have been performed for normal current. Relevant simulation and test results are also presented.

Four-quadrant demodulation fiber sensor for wavelength monitoring of a wavelength phase-shifting interferometer

Real-time monitoring of wavelength is important for high-speed wavelength phase-shifting interferometry.In this paper,a wavelength sensor based on a polarization-maintaining fiber interferometer with four-quadrant demodulation was proposed.We built the wavelength sensing system with resolution better than 0.005 pm and 0.1 ms sampling interval and measured the response time of the tuned wavelength at 35 ms in the phase-shifting process of a commercial wavelength phase-shifting free-space interferometer,as well as the wavelength drift velocity of 0.01 pm per second in the hysteresis process.The optical fiber wavelength sensor with four-quadrant demodulation provides a real-time wavelength sensing scheme for high-speed wavelength phase-shifting interferometers.

A Novel Method to Simultaneously Measure the Straightness

A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.