Effect of a negative DC bias on a capacitively coupled Ar plasma operated at different radiofrequency voltages and gas pressures

The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.

多场耦合下RF组件的焊点信号完整性

随着集成电路和5G技术的迅猛发展,射频(RF)组件作为关键设备被广泛使用。RF组件需要在复杂多变的工作环境下服役,而焊点作为RF组件封装中相对脆弱的部分,其稳定性和可靠性尤为重要。介绍了焊点在多场耦合下的性能表现。RF组件焊点需要有效传输高频信号,从电气性能和信号完整性两方面对其进行概述,对多场耦合下的焊点信号完整性进行了总结,探讨了在高频条件下对焊点的机械性能和信号完整性进行综合研究和优化的必要性。

Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure

A one-dimensional（1D） fluid model on capacitively coupled radio frequency（RF） argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages： the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts： the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage（at 18 μs）, the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to ＂cool＂ the electrons; the effect of the electron ohmic heating on the electrons is always to ＂heat＂ the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to ＂heat＂ the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to ＂cool＂ the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared.

Surface modification of silicone rubber by CF4 radio frequency capacitively coupled plasma for improvement of flashover

The flashover performance of insulating materials plays an important role in the development of high-voltage insulation systems.In this paper,silicone rubber(SIR)is modified by CF4 radio frequency capacitively coupled plasma(CCP)for the improvement of surface insulation performance.The discharge mode and active particles of CCP are diagnosed by the digital single-lens reflex and the spectrometer.Scanning electron microscopy and x-ray photoelectron spectroscopy are used for the surface physicochemical properties of samples,while the surface charge dissipation,charge accumulation measurement,and flashover test are applied for the surface electrical characteristics.Experimental results show that the fluorocarbon groups can be grafted and the surface roughness increases after plasma treatment.Besides,the surface charge dissipation is decelerated and the positive charge accumulation is inhibited obviously for the treated samples.Furthermore,the surface flashover voltage can be increased by 26.67%after 10 min of treatment.It is considered that strong electron affinity of C–F and increased surface roughness can contribute to deepening surface traps,which not only inhibits the development of secondary electron emission avalanche but also alleviates the surface charge accumulation and finally improves the surface flashover voltage of SIR.

Research on modeling and self-excited vibration mechanism in magnetic levitation-collision interface coupling system

The modeling and self-excited vibration mechanism in the magnetic levitation-collision interface coupling system are investigated.The effects of the control and interface parameters on the system's stability are analyzed.The frequency range of self-excited vibrations is investigated from the energy point of view.The phenomenon of self-excited vibrations is elaborated with the phase trajectory.The corresponding control strategies are briefly analyzed with respect to the vibration mechanism.The results show that when the levitation objects collide with the mechanical interface,the system's vibration frequency becomes larger with the decrease in the collision gap;when the vibration frequency exceeds the critical frequency,the electromagnetic system continues to provide energy to the system,and the collision interface continuously dissipates energy so that the system enters the self-excited vibration state.

Ab initio potential energy surface and anharmonic vibration spectrum of NF_(3)^(+)

Potential energy surfaces(PESs), vibrational frequencies, and infrared spectra are calculated for NF_(3)^(+) using ab initio calculations, based on UCCSD(T)/cc-p VTZ combined with vibrational configuration interaction(VCI). Based on an iterative algorithm, the surfaces(SURF) program adds automatic points to the lattice representation of the potential function, the one-dimensional and two-dimensional PESs are calculated after reaching a convergence threshold, finally the smooth image of the potential energy surface is fitted. The PESs accurately account for the interaction between the different modes, with the mode q_(6) symmetrical stretching vibrations having the greatest effect on the potential energy change of the whole system throughout the potential energy surface shift. The anharmonic frequencies are obtained when the VCI matrix is diagonalized. Fundamental frequencies, overtones, and combination bands of NF_(3)^(+) are calculated, which generate the degenerate phenomenon between their frequencies. Finally, the calculated anharmonic frequency is used to plot the infrared spectra.Modal antisymmetric stretching ν_(5) and symmetric stretching ν_(6) exhibit a phenomenon of large-intensity borrowing. This study can provide data to support the characterization in the laboratory.

Power transfer efficiency in an air-breathing radio frequency ion thruster

Due to a series of challenges such as low-orbit maintenance of satellites, the air-breathing electric propulsion has got widespread attention. Commonly, the radio frequency ion thruster is favored by low-orbit missions due to its high specific impulse and efficiency. In this paper, the power transfer efficiency of the radio frequency ion thruster with different gas compositions is studied experimentally, which is obtained by measuring the radio frequency power and current of the antenna coil with and without discharge operation. The results show that increasing the turns of antenna coils can effectively improve the radio frequency power transfer efficiency, which is due to the improvement of Q factor. In pure N_2 discharge,with the increase of radio frequency power, the radio frequency power transfer efficiency first rises rapidly and then exhibits a less steep increasing trend. The radio frequency power transfer efficiency increases with the increase of gas pressure at relatively high power, while declines rapidly at relatively low power. In N_(2)/O_(2) discharge, increasing the N_(2) content at high power can improve the radio frequency power transfer efficiency, but the opposite was observed at low power. In order to give a better understanding of these trends, an analytic solution in limit cases is utilized, and a Langmuir probe was employed to measure the electron density. It is found that the evolution of radio frequency power transfer efficiency can be well explained by the variation of plasma resistance, which is related to the electron density and the effective electron collision frequency.

Plasma density enhancement in radio-frequency hollow electrode discharge

The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.

An mmWave Dual-Band Integrated Substrate Gap Waveguide Single Cavity Filter with Frequency Selectivity

A novel dual-band ISGW cavity filter with enhanced frequency selectivity is proposed in this paper by utilizing a multi-mode coupling topology.Its cavity is designed to control the number of modes,and then the ports are determined by analyzing the coupling relationship between these selected modes.By synthesizing the coupling matrix of the filter,a nonresonating node(NRN)structure is introduced to flexibly tune the frequency of modes,which gets a dualband and quad-band filtering response from a tri-band filter no the NRN.Furthermore,a frequency selective surface(FSS)has been newly designed as the upper surface of the cavity,which significantly improves the bad out-of-band suppression and frequency selectivity that often exists in most traditional cavity filter designs and measurements.The results show that its two center frequencies are f01=27.50 GHz and f02=32.92GHz,respectively.Compared with the dual-band filter that there is no the FSS metasurface,the out-of-band suppression level is improved from measured 5 dB to18 dB,and its finite transmission zero(FTZ)numbers is increased from measured 1 to 4 between the two designed bands.Compared with the tri-band and quadband filter,its passband bandwidth is expanded from measured 1.17%,1.14%,and 1.13% or 1.31%,1.50%,0.56%,and 0.57% to 1.71% and 1.87%.In addition,the filter has compact,small,and lightweight characteristics.

Improvement of surface hydrophobicity on silicone rubber modified by CF_4 radio frequency capacitively coupled plasma

In order to improve the surface hydrophobicity, silicone rubber （SIR） samples were exposed to CF4 radio frequency （RF） capacitively coupled plasma （CCP）. Attenuated total reflection Fourier transform infrared （ATR-FTIR） spectrum and X-ray photoelectron spectroscopy （XPS） were used to observe the variation of the functional groups of the modified SIR. Static contact angle （SCA） was employed to estimate the change of hydrophobicity of the modified SIR. The surface energy of SIR is reduced largely from 27.37 mJ/m^2 of original SIR sample to 2.94 mJ/m^2 of SIR sample treated by CF4 CCP modification at RF power of 200 W for a treatment time of 5 rnin. According to the XPS, ATR-FTIR and surface energy analysis, it is suggested that the improvement of hydrophobicity on the modified SIR surface is mainly ascribed to the decrease of surface energy, which is caused by the cooperation of the fluosilicic structure of Si--F or Si--F2 and the fluoric groups of C--CFn induced by the methyl replacement reaction and residual methyl groups of SIR surface.

频率捷变调频引信抗DRFM干扰设计

针对传统调频引信易被数字射频存储(DRFM)干扰,从引信发射波形去周期化角度出发开展了调频引信抗DRFM干扰方法研究,设计了一种m状态序列编码的频率捷变三角波调频引信抗DRFM干扰总体方案,提出一种补零FFT频谱细化提取谐波时序判决的信号处理方法,根据总体设计方案,完成了频率捷变调频引信样机信号处理系统的硬件电路设计与程序开发。实验结果表明,所设计的频率捷变引信抗DRFM干扰方法可以在保证定距精度的同时大幅提高抗DRFM干扰性能。

基于RF芯片的通信技术在分布式网络传感器中的应用

文章旨在探讨基于无线射频(Radio Frequency,RF)芯片的通信技术在分布式网络传感器中的应用。传统的分布式网络传感器系统通常使用有线连接或基于特定通信协议的无线传输技术,但这些方案在部署和维护上存在一定的限制。因此,采用RF收发一体化芯片作为通信技术的载体,实现分布式网络传感器之间的无线数据传输具有重要意义。文章围绕传输终端硬件设计基础,提出一种具体的方案,包括硬件选型、通信协议设计、功耗管理以及安全性考虑等方面,以实现高效稳定的分布式网络传感器无线数据传输。

激光与RF链路融合异质通信网络构建策略

文章探讨了激光与射频(Radio Frequency,RF)链路融合的异质通信网络构建策略。首先,分析异质通信网络中链路异构、资源管理和性能保障等问题。其次,提出激光与RF链路融合网络架构,包括网络层次框架和空间资源映射机制的建设。再次,在资源协同管理方面,引入链路状态信息获取与更新机制,以及基于业务优先级的资源调度技术。最后,采用软切换决策算法和切换过程中的业务保障技术,解决异质网络切换问题。设计的策略可以提升通信网络的整体性能,提高资源利用效率,为未来异质通信网络的发展提供可行的解决方案。通过激光与RF链路的协同,实现更高效的数据传输和稳定的切换,为通信技术的创新提供有力支持。

基于纳米材料的无源RFID温度传感器设计

射频识别(RFID)技术与传感器的一体化设计,具有数据采集便捷和部署方便等优点,在智慧农业和食品溯源监测领域具有潜在应用价值。提出一种基于氧化锌(ZnO)/还原氧化石墨烯(RGO)的无源RFID一体化温度传感器设计,传感器天线和电极主要采用微带贴片天线制作,天线及电极结构通过HFSS软件进行仿真设计及优化,然后利用热转印技术在环氧树脂覆铜板上通过化学刻蚀制备图形化电极;传感器的温敏材料为水热法制备的ZnO/RGO纳米复合材料。ZnO/RGO温敏材料阻抗随环境温度发生变化,从而引起RFID射频谐振中心频点偏移,以射频回波损耗和归一化频移来度量环境温度的变化,在10℃~60℃量程范围内,该传感器的温度灵敏度可达0.86 dB/℃,线性度R2=0.99。

一种X波段三叉H型低电压RF MEMS开关设计

针对射频电路系统所需要的低电压,高隔离度,低插入损耗的应用需求,通过对开关正对面积对驱动电压产生的影响进行探究,设计了一款应用于X波段三叉H型的RF MEMS开关。开关具有六条悬臂梁作为支撑,通过增大上极板面积来降低开关的开启电压。分别使用HFSS和COMSOL对开关的射频性能和机械性能进行仿真,开关最终优化后,在8-12 GHz内,插入损耗为0.26~0.57 dB,隔离度大于31.30 dB。在10.1 GHz达到最优值,插入损耗为0.40 dB,隔离度为50.25 dB。开关电压在11V时就能够实现状态转换,开关的响应时间为18μs。此开关可与射频可重构器件结合,应用于新一代射频微波领域。

Velocity compensation methods for LPRF modulated frequency stepped-frequency(MFSF) radar

In the high speed target environment,there exists serious Doppler effect in the low pulse repetition frequency（LPRF） modulated frequency stepped frequency（MFSF） radar signal.The velocity range of the target is large and the velocity is high ambiguous,so the single method is difficult to satisfy the velocity measurement requirement.For this problem,a novel method is presented,it is a combination of cross-correlation inner frame velocity measurement and range-Doppler coupling velocity measurement.The cross-correlation inner frame method,overcoming the low Doppler tolerance of the cross-correlation between frames,can obtain the coarse velocity of the high speed target,and then the precision velocity can be obtained with the range-Doppler coupling method.The simulation results confirm the method is effective,and also it is well real-time and easy to the project application.

Multi-frequency point supported LLRF front-end for CiADS wide-bandwidth application

The China initiative Accelerator Driven System,CiADS,physics design adopts 162.5 MHz,325 MHz,and 650 MHz cavities,which are driven by the corresponding radio frequency(RF)power system,requiring frequency translation front-end for the RF station.For that application,a general-purpose design front-end prototype has been developed to evaluate the multi-frequency point supported design feasibility.The difficult parts to achieve the requirements of the general-purpose design are reasonable device selection and balanced design.With a carefully selected low-noise wide-band RF mixer and amplifier to balance the performance of multi-frequency supported down-conversion,specially designed LO distribution net to increase isolation between adjacent channels,and external band-pass filter to realize expected up-conversion frequencies,high maintenance and modular front-end generalpurpose design has been implemented.Results of standard parameters show an R2 value of at least 99.991%in the range of-60-10 dBm for linearity,up to 18 dBm for P1dB,and up to 89 dBc for cross talk between adjacent channels.The phase noise spectrum is lower than 80 dBc in the range of 0-1 MHz;cumulative phase noise is 0.006°;and amplitude and phase stability are 0.022%and 0.034°,respectively.

Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges: One-Dimensional Fluid Simulation

A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.

Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source

The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency at 13.56/2 MHz, and pressures of 0.4-1.2 Pa. In 13.56 MHz discharge, higher electron density(n_e) and higher electron temperature(T_e) are observed in comparison with 2 MHz discharge at 0.6-1.2 Pa. However, slightly higher n_e and T_e are observed in 2 MHz discharge at 0.4 Pa. This observation is explained by enhanced electron heating efficiency due to the resonance between the oscillation of 2 MHz electromagnetic field and electron-neutral collision process at 0.4 Pa. It is also found that the variation of T_edistribution is different in 13.56 and 2 MHz discharge.For ICP at 13.56 MHz, T_eshows an edge-high profile at 0.4-1.2 Pa. For 2 MHz discharge, T_e remains an edge-high distribution at 0.4-0.8 Pa. However, the distribution pattern involves into a center-high profile at 0.9-1.2 Pa. The spatial profiles of n_e remain a center-high shape in both 13.56 and 2 MHz discharges, which indicates the nonlocal kinetics at low pressures. Better uniformity could be achieved by using 2 MHz discharge. The effects of gas pressure on plasma parameters are also examined. An increase in gas pressure necessitates the rise of n_e in both 13.56 and 2 MHz discharges. Meanwhile, T_e drops when gas pressure increases and shows a flatter distribution at higher pressure.

Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy

Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma （DF-CCP） reactor using an optical probe. The optical probe collects the light emission from a small separate volume in plasma, thus enabling to diagnose the plasma uniformity for different experimental parameters. Both the gas pressure and the low- frequency （LF） power have apparent effects on the radial uniformity of argon plasma. With the increase in either pressure or LF power, the emission profiles changed from a bell-shaped to a double-peak distribution. The influence of a fused-silica ring around the electrodes on the plasma uniformity was also studied using the optical probe. Possible reasons that result in nonuniform plasmas in our experiments are discussed.