A triple frequency capacitively coupled plasma （TF-CCP） has been considered to investigate the behavior of the sheath parameters. A self-consistent time-independent collisionless model has been developed. The sheath...A triple frequency capacitively coupled plasma （TF-CCP） has been considered to investigate the behavior of the sheath parameters. A self-consistent time-independent collisionless model has been developed. The sheath width and potential are calculated using the present model and compared with those calculated using a single-frequency （SF）, a dual-frequency （DF） and a triple-frequency （TF） model for time independent collisionless cases. The sheath motion and sheath potential are found to be larger compared with those of SF and DF CCPs for an inhomogeneous sheath, and that of TF CCP for a homogeneous sheath. The effects of the source parameters, i.e., current magnitudes, frequencies and phase difference, on the sheath parameters are investigated. The sheath parameters show higher values at higher source currents whereas they decrease with the increase of excitation frequencies. It has also been found that, by the proper choice of source frequencies and phase differences, it is possible to adjust the energy of ions when they hit the electrode.展开更多
In this article, some methods are proposed for enhancing the converging velocity of the COA (chaos optimization algorithm) based on using carrier wave two times, which can greatly increase the speed and efficiency of ...In this article, some methods are proposed for enhancing the converging velocity of the COA (chaos optimization algorithm) based on using carrier wave two times, which can greatly increase the speed and efficiency of the first carrier wave’s search for the optimal point in implementing the sophisticated searching during the second carrier wave is faster and more accurate. In addition, the concept of using the carrier wave three times is proposed and put into practice to tackle the multi-variables opti- mization problems, where the searching for the optimal point of the last several variables is frequently worse than the first several ones.展开更多
文摘A triple frequency capacitively coupled plasma （TF-CCP） has been considered to investigate the behavior of the sheath parameters. A self-consistent time-independent collisionless model has been developed. The sheath width and potential are calculated using the present model and compared with those calculated using a single-frequency （SF）, a dual-frequency （DF） and a triple-frequency （TF） model for time independent collisionless cases. The sheath motion and sheath potential are found to be larger compared with those of SF and DF CCPs for an inhomogeneous sheath, and that of TF CCP for a homogeneous sheath. The effects of the source parameters, i.e., current magnitudes, frequencies and phase difference, on the sheath parameters are investigated. The sheath parameters show higher values at higher source currents whereas they decrease with the increase of excitation frequencies. It has also been found that, by the proper choice of source frequencies and phase differences, it is possible to adjust the energy of ions when they hit the electrode.
基金Project supported by the National Natural Science Foundation of China (No. 60474064), and the Natural Science Foundation of Zhejiang Province (No. Y105694), China
文摘In this article, some methods are proposed for enhancing the converging velocity of the COA (chaos optimization algorithm) based on using carrier wave two times, which can greatly increase the speed and efficiency of the first carrier wave’s search for the optimal point in implementing the sophisticated searching during the second carrier wave is faster and more accurate. In addition, the concept of using the carrier wave three times is proposed and put into practice to tackle the multi-variables opti- mization problems, where the searching for the optimal point of the last several variables is frequently worse than the first several ones.
