The material design is used to direct the magnetron cosputtering process. At first, according to the particularity of functionally gradient coat (FGC) the thermal elastic stress analysis for FGC was carried out based ...The material design is used to direct the magnetron cosputtering process. At first, according to the particularity of functionally gradient coat (FGC) the thermal elastic stress analysis for FGC was carried out based on the plane stress hypothesis. It is obtained that the peak value of plane thermal stress within FGC is only determined by the physical properties of materials of FGC and substrate, the composition distribution coefficient only influences the distribution and trend of plane thermal stress. And the plane thermal stress criterion for design of FGC was presented. Then the plane thermal stress of diamond like carbon/titanium alloy FGC was calculated.展开更多
文摘The material design is used to direct the magnetron cosputtering process. At first, according to the particularity of functionally gradient coat (FGC) the thermal elastic stress analysis for FGC was carried out based on the plane stress hypothesis. It is obtained that the peak value of plane thermal stress within FGC is only determined by the physical properties of materials of FGC and substrate, the composition distribution coefficient only influences the distribution and trend of plane thermal stress. And the plane thermal stress criterion for design of FGC was presented. Then the plane thermal stress of diamond like carbon/titanium alloy FGC was calculated.