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Growth of Nano Crystalline Diamond on Silicon Substrate Using Different Etching Gases by HFCVD
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作者 Z.Khalaj M.Ghoranneviss +2 位作者 S.Nasirilaheghi Z.Ghorannevisb R.Hatakeyama 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2010年第6期689-692,746,共5页
We investigate the effects of etching gases on the synthesis of nano crystalline diamonds grown on silicon substrate at the substrate temperature of 550℃ and the reaction pressure of 4 kPa by hot filament chemical va... We investigate the effects of etching gases on the synthesis of nano crystalline diamonds grown on silicon substrate at the substrate temperature of 550℃ and the reaction pressure of 4 kPa by hot filament chemical vapor deposition method, in which CH4 and H2 act as a source and diluting gases, respectively. N2, H2, and NH3 were used as the etching gases, respectively. Results show that the optimum conditions can be obtained only for the case of H2 gas. The crystal morphology and crystallinity of the samples have been examined by scanning electron microscopy and X-ray diffraction, respectively. 展开更多
关键词 Nano crystalline diamond etching gas Hot filament chemical vapor deposition
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Nanoscopic Tip Sensors Fabricated by Gas Phase Etching of Optical Glass Fibers
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作者 Jorg BIERLICH Jens KOBELKE +3 位作者 David BRAND Konstantin KIRSCH Jan DELLITH Hartmut BARTELT 《Photonic Sensors》 SCIE EI CAS 2012年第4期331-339,共9页
Silica-based fiber tips are used in a variety of spectroscopic, micro- or nano-scopic optical sensor applications and photonic micro-devices. The miniaturization of optical sensor systems and the technical implementat... Silica-based fiber tips are used in a variety of spectroscopic, micro- or nano-scopic optical sensor applications and photonic micro-devices. The miniaturization of optical sensor systems and the technical implementation using optical fibers can provide new sensor designs with improved properties and functionality for new applications. The selective-etching of specifically doped silica fibers is a promising method in order to form complex photonic micro structures at the end or within fibers such as tips and cavities in various shapes useful for the all-fiber sensor and imaging applications. In the present study, we investigated the preparation of geometrically predefined, nanoscaled fiber tips by taking advantage of the dopant concentration profiles of highly doped step-index fibers. For this purpose, a gas phase etching process using hydrofluoric acid (HF) vapor was applied. The shaping of the fiber tips was based on very different etching rates as a result of the doping characteristics of specific optical fibers. Technological studies on the influence of the etching gas atmosphere on the temporal tip shaping and the final geometry were performed using undoped and doped silica fibers. The influence of the doping characteristics was investigated in phosphorus-, germanium-, fluorine- and boron-doped glass fibers. Narrow exposed as well as protected internal fiber tips in various shapes and tip radiuses down to less than 15 nm were achieved and characterized geometrically and topologically. For investigations into surface plasmon resonance effects, the fiber tips were coated with nanometer-sized silver layers by means of vapour deposition and finally subjected to an annealing treatment. 展开更多
关键词 Optical fiber tips NANOPROBES gas phase etching doping tip shaping metal coating
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