Chalcogenide glasses have shown promise in fabricating mid infrared（MIR） photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glass...Chalcogenide glasses have shown promise in fabricating mid infrared（MIR） photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.61377061)the Public Project of Zhejiang Province,China(Grant No.2014C31146)sponsored by K.C.Wong Magna Fund in Ningbo University,China
文摘Chalcogenide glasses have shown promise in fabricating mid infrared（MIR） photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.
