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Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing
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作者 Ting-Yang Yan Xiang Shen +4 位作者 Rong-Ping Wang Guo-Xiang Wang Shi-Xun Dai Tie-Feng Xu Qiu-Hua Nie 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第2期274-279,共6页
Chalcogenide glasses have shown promise in fabricating mid infrared(MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glass... Chalcogenide glasses have shown promise in fabricating mid infrared(MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions. 展开更多
关键词 chalcogenide glasses hot embossing rib waveguides MIR sensing
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