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Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films 被引量:7
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作者 王永欣 王立平 薛群基 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第6期1372-1380,共9页
Ti-doped graphite-like carbon (Ti-GLC) films were synthesized successfully by magnetron sputtering technique. The compositions, microstructures and properties of the Ti-doped GLC films dependent on the parameter of ... Ti-doped graphite-like carbon (Ti-GLC) films were synthesized successfully by magnetron sputtering technique. The compositions, microstructures and properties of the Ti-doped GLC films dependent on the parameter of Ti target current were systemically investigated by Raman spectra, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation and ball-on-disk tribometer. With the increase of the Ti target current, the ratio of sp2 bond and the content of Ti as well as the film hardness and compressive internal stress increase, but the high content of the Ti would result in the loose film due to the formation of the squamose structure. Less incorporated Ti reduces the friction of the GLC film in dry-sliding condition, while pure GLC film exhibits the lowest friction coefficient in water-lubricated condition. Ti-GLC film deposited with low Ti target current shows high wear resistance in both dry-sliding and water-lubricated conditions. 展开更多
关键词 Ti-doped graphite-like carbon film MICROSTRUCTURE tribological performance target current
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Superior tribological properties of an amorphous carbon film with a graphite-like structure 被引量:1
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作者 Wang Yong-Jun Li Hong-Xuan +4 位作者 Ji Li Liu Xiao-Hong Wu Yan-Xia Zhou Hui-Di Chen Jian-Min 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第1期320-328,共9页
Amorphous carbon films with high sp2 concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes (FESEMs), high resolut... Amorphous carbon films with high sp2 concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes (FESEMs), high resolution transmission electron microscopes (HRTEMs), atomic force microscopes (AFMs), the Raman spectrometers, nano- indentation, and tribometers are subsequently used to characterize the microstructures and the properties of the resulting films. It is found that the present films are dominated by the sp2 sites. However, the films demonstrate a moderate hardness together with a low internal stress. The high hardness of the deposited film originates from the crosslinking of the sp2 clusters by the sp3 sites. The presence of the graphite-like clusters in the film structure may be responsible for the low internal stress. What is more important is that the resulting films show excellent tribological properties with high load capacity and excellent wear resistance in humid atmospheres. The relationship between the microstructure determined by the deposition condition and the film characteristic is discussed in detail. 展开更多
关键词 magnetron sputtering graphite-like carbon film MICROSTRUCTURE performance
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主动磁悬浮轴承系统保护轴承热特性研究及减摩设计
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作者 李迎春 聂傲男 +3 位作者 杨明宣 朱定康 邱明 杨更生 《中国机械工程》 EI CAS CSCD 北大核心 2024年第4期646-655,共10页
针对主动磁悬浮轴承系统(AMBs)转子跌落过程中转子与保护轴承碰摩产生巨大冲击、振动和大量摩擦热,易使保护轴承失效的问题,对立式转子跌落到保护轴承过程中的热特性进行了研究,分析了转子跌落对保护轴承造成破坏的主要影响因素,进而提... 针对主动磁悬浮轴承系统(AMBs)转子跌落过程中转子与保护轴承碰摩产生巨大冲击、振动和大量摩擦热,易使保护轴承失效的问题,对立式转子跌落到保护轴承过程中的热特性进行了研究,分析了转子跌落对保护轴承造成破坏的主要影响因素,进而提出了一种采用磁控溅射技术在保护轴承关键表面沉积固体润滑薄膜(类石墨碳基薄膜,GLC)的减摩方法,并对镀膜、未镀膜的保护轴承进行了转子跌落试验。研究结果表明:跌落转速为20000 r/min时,保护轴承的最高温度为210.60℃,出现在转子与轴承内圈端面高速碰摩阶段,该温度超过了轴承钢160℃的回火温度,导致轴承烧伤而失效。在跌落试验中,镀有GLC薄膜的自润滑保护轴承试验后的沟道和端面外观明显优于未镀膜保护轴承,由碰摩发热导致的内圈端面硬度下降也较轻,质心轨迹和轴向位移更加平稳,温升更低,GLC薄膜起到了关键的自润滑和减摩功能,提高了保护轴承的使用寿命和服役可靠性,为解决主动磁悬浮轴承系统中保护轴承易失效而发生重大事故的问题提供了一种思路和方法。 展开更多
关键词 主动磁悬浮轴承系统 保护轴承 类石墨碳基薄膜 减摩
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调制周期对磁控溅射Cr/类石墨碳多层膜腐蚀-磨损性能的影响
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作者 李迎春 杨更生 +2 位作者 杨明宣 邱明 范恒华 《材料导报》 EI CAS CSCD 北大核心 2024年第21期212-218,共7页
海洋环境用关键运动部件在使用时承受腐蚀与磨损的交互作用,在其表面涂覆耐腐蚀-磨损防护涂层是提高其服役寿命的有效手段之一。本工作采用直流磁控溅射沉积技术在15-5PH不锈钢试样上制备调制周期为940 nm、375 nm和234 nm的Cr/GLC多层... 海洋环境用关键运动部件在使用时承受腐蚀与磨损的交互作用,在其表面涂覆耐腐蚀-磨损防护涂层是提高其服役寿命的有效手段之一。本工作采用直流磁控溅射沉积技术在15-5PH不锈钢试样上制备调制周期为940 nm、375 nm和234 nm的Cr/GLC多层膜(分别标记为S1、S2和S3),并通过微观形貌分析、电化学试验、腐蚀-磨损试验分析了调制周期对Cr/GLC多层膜的结构、电化学性能及耐腐蚀-磨损性能的影响。研究结果表明:随着调制周期的缩短,薄膜柱状生长趋势逐渐减弱,膜层更加致密,同时sp^(2)键相对含量逐渐增大,石墨化程度加剧,力学性能更优。在人工海水介质中,随着调制周期的缩短,薄膜层间界面增多,抑制了裂纹的扩展和腐蚀通道的形成,阻碍了腐蚀介质的渗透,多层膜S3的耐腐蚀性能最优。在腐蚀-磨损过程中,由于载荷和腐蚀介质的共同作用,具有致密结构、适宜调制周期的S2薄膜的磨损率仅为2.50×10^(-16)m^(3)/(N·m),表现出最优的耐腐蚀-磨损性能。因此,设计合适的调制周期是提高Cr/GLC多层膜耐腐蚀-磨损性能的关键。 展开更多
关键词 磁控溅射 Cr/类石墨碳(glc)多层膜 调制周期 腐蚀-磨损
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乏油环境下不同掺杂GLC膜的摩擦学行为 被引量:1
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作者 李迎春 邹春生 +2 位作者 邱明 庞晓旭 程蓓 《中国机械工程》 EI CAS CSCD 北大核心 2019年第20期2431-2438,共8页
利用磁控溅射技术制备了类石墨碳膜(GLC)、掺杂金属Cr的类石墨碳膜(GLC/Cr)及掺杂WC的类石墨碳膜(GLC/WC),考察了不同掺杂物对薄膜结构及其在乏油环境下摩擦学性能的影响。结果表明:掺杂Cr、WC使GLC薄膜中sp^2键结构含量增加,促进了GLC... 利用磁控溅射技术制备了类石墨碳膜(GLC)、掺杂金属Cr的类石墨碳膜(GLC/Cr)及掺杂WC的类石墨碳膜(GLC/WC),考察了不同掺杂物对薄膜结构及其在乏油环境下摩擦学性能的影响。结果表明:掺杂Cr、WC使GLC薄膜中sp^2键结构含量增加,促进了GLC膜的石墨化,降低了GLC薄膜的硬度及弹性模量;在乏油环境下,3种薄膜的摩擦因数相差不大,但表现出不同的抗磨损能力,其磨损寿命由高到低依次是GLC/Cr、GLC、GLC/WC。研究结果为提高航空发动机主轴轴承在超常工况下的寿命和可靠性提供了理论和试验依据。 展开更多
关键词 磁控溅射 类石墨碳膜 乏油 摩擦学性能
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深冷处理对GLC多层薄膜界面结构及结合强度的影响 被引量:2
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作者 龚小玲 聂朝胤 +1 位作者 金秋 周阳 《中国表面工程》 EI CAS CSCD 北大核心 2017年第5期10-16,共7页
为了研究深冷处理后GLC多层薄膜界面结构及结合强度的变化,采用非平衡直流磁控溅射技术,在W9高速钢上沉积了含GLC功能层、Cr/C梯度层及Cr底层的类石墨碳多层薄膜,厚度约为4μm。采用液氮(-197℃)对GLC/高速钢复合体系进行深冷处理,借助... 为了研究深冷处理后GLC多层薄膜界面结构及结合强度的变化,采用非平衡直流磁控溅射技术,在W9高速钢上沉积了含GLC功能层、Cr/C梯度层及Cr底层的类石墨碳多层薄膜,厚度约为4μm。采用液氮(-197℃)对GLC/高速钢复合体系进行深冷处理,借助XPS、SEM及TEM表征了GLC薄膜的表面、断面结构及界面微观组织;采用洛氏硬度仪定性考察了薄膜的膜基结合强度。结果表明:复合体系经深冷处理后除基体的硬度及承载能力得以提高外,多层膜各层及基体中裂纹的萌生及传播受到抑制,界面结合强度明显增强。其作用机理在于深冷处理后,Cr底层的柱状晶结构被"打破",纤维状结构消除,组织更加致密均匀;同时,Cr/C梯度层中Cr晶粒碎化平均尺寸由20 nm减小为5 nm,达到细晶强化效果。因此,膜基及层间界面结构得以改善,界面失配减小,基体及多层膜各层间的变形协调性能增强。 展开更多
关键词 类石墨碳薄膜 深冷处理 界面结构 晶粒碎化 结合强度
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Study on the Tribological Properties of Graphite-like Amorphous Carbon Film under Different Testing Conditions
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作者 Wang Yongjun Li Hongxuan +5 位作者 Ji Li Zhao Fei Liu Xiaohong Wu Yanxia Zhou Huidi Chen Jianmin 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2012年第S1期359-365,共7页
Graphite-like amorphous carbon film was fabricated by unbalanced magnetron sputtering technique.Raman spectroscopy,atomic force microscopy(AFM)and tribometer were subsequently used to investigate the microstructure an... Graphite-like amorphous carbon film was fabricated by unbalanced magnetron sputtering technique.Raman spectroscopy,atomic force microscopy(AFM)and tribometer were subsequently used to investigate the microstructure and tribological properties of the resultant film.It is found that the deposited carbon film is dominated by sp 2 sites,and the intensity ratio of the D and G peaks is as high as 4.0,which is one order of magnitude larger than that of diamond-like carbon films with high sp 3 content,indicating a more graphite-like structure.However,the as-deposited carbon film exhibits moderately high hardness(13.7 GPa),low internal stress(0.38 GPa)and superior tribological properties with high load bearing capacity(Hertz contact stress about 3.2 GPa)and low wear rate(2.73×10-10 cm3/N.m)in ambient atmosphere.Although it displays a poor wear resistance in water lubricated condition,a superior wear resistance is achieved in oil lubricated condition.Its inherent physical property,the formation of transfer layer and the friction induced chemical reactions may be commonly responsible for its tribological properties. 展开更多
关键词 MAGNETRON SPUTTERING graphite-like carbon film microstructure TRIBOLOGICAL properties load BEARING capacity
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In Vitro Biocompatibility of MC3T3-E1 Osteoblast-like Cells on Arg-Gly-Asp Acid Peptides Immobilized Graphite-like Carbon Coating on Carbon/Carbon Composites
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作者 Sheng Cao He-Jun Li +2 位作者 Ke-Zhi Li Jin-Hua Lu Lei-Lei Zhang 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2017年第6期558-566,共9页
Carbon/carbon (C/C) composites were deposited with graphite-like carbon (GLC) coating, and then, Arg-Gly- Asp acid (RGD) peptides were successfully immobilized onto the functionalized GLC coating. GLC coating wa... Carbon/carbon (C/C) composites were deposited with graphite-like carbon (GLC) coating, and then, Arg-Gly- Asp acid (RGD) peptides were successfully immobilized onto the functionalized GLC coating. GLC coating was utilized to prevent carbon particles releasing and create a uniform surface condition for C/C composites. RGD peptides were utilized to improve biocompatibility of GLC coating. Surface chemical characterizations of functionalized GLC coating were detected by contact angle measurement, X-ray photoelectron spectroscopy and Raman spectra. Optical morphology of GLC coatings was observed by confocal laser scanning microscopy. In vitro biological performance was determined using samples seeded with MC3T3-E1 osteoblast-like cells and cultured for 1 week. Surface characterizations and morphological analysis indicated that C/C composites were covered by a dense and uniform GLC coating. Contact angle of GLC coating was reduced to 27.2° when it was functionalized by H202 oxidation at 40 ℃ for 1 h. In vitro cytological test showed that the RGD peptides immobilized GLC coating had a significant improvement in biocompatibility. It was suggested that RGD peptides provided GLC coating with a bioactive surface to improve cell adhesion and proliferation on C/C composites. 展开更多
关键词 MC3T3-E1 osteoblast-like cells carbon/carbon composites graphite-like carbon (glc coating Arg-Gly-Asp acid (RGD) peptides Surface modification
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碳靶电流对掺铬类石墨镀层结构和性能的影响研究 被引量:1
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作者 施文彦 陆斌斌 +2 位作者 陈妍 叶平 蒋百灵 《表面技术》 EI CAS CSCD 北大核心 2017年第8期109-114,共6页
目的采用物理气相沉积磁控溅射方法,通过控制碳靶电流改变掺铬类石墨镀层的碳含量,在高速钢基体上制备不同厚度的掺铬类石墨镀层,以探究碳含量对掺铬类石墨镀层结构和性能的影响。方法采用压痕法和划痕法对镀层的膜基结合强度进行评价... 目的采用物理气相沉积磁控溅射方法,通过控制碳靶电流改变掺铬类石墨镀层的碳含量,在高速钢基体上制备不同厚度的掺铬类石墨镀层,以探究碳含量对掺铬类石墨镀层结构和性能的影响。方法采用压痕法和划痕法对镀层的膜基结合强度进行评价。采用维氏显微硬度计对镀层的硬度进行分析。采用ST-2258A四探针测试仪测量镀层的电导率。使用扫描电子显微镜对镀层的微观结构进行分析。使用摩擦磨损仪对镀层的摩擦学性能进行探究。结果随着碳靶电流的增加,掺铬类石墨镀层的截面柱状化现象越来越明显,表面团簇颗粒直径越来越大。碳靶电流为1 A时,镀层的截面形貌为细晶团簇结构;碳靶电流为3 A时,镀层截面产生柱状结构。镀层的复合硬度随着镀层碳靶电流的增加逐渐增大,在碳靶电流为3 A时,镀层的维氏硬度最大,为436HV。随着碳靶电流增加,镀层电导率逐渐上升。结论随着碳靶电流的增大,镀层致密度逐渐下降,镀层的电导率逐渐增加,镀层的摩擦系数逐渐减小,适当的碳靶电流能使类石墨镀层在功能化与力学性能上达到最佳效果。 展开更多
关键词 磁控溅射 类石墨镀层 碳靶电流 结构分析 性能
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Effect of temperature and mating pair on tribological properties of DLC and GLC coatings under high pressure lubricated by MoDTC and ZDDP 被引量:7
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作者 Kang LIU Jia-jie KANG +2 位作者 Guang-an ZHANG Zhi-bin LU Wen YUE 《Friction》 SCIE EI CAS CSCD 2021年第6期1390-1405,共16页
Diamond-like carbon(DLC)and graphite-like carbon(GLC)coatings have good prospects for improving the surface properties of engine parts.However,further understanding is needed on the effect of working conditions on tri... Diamond-like carbon(DLC)and graphite-like carbon(GLC)coatings have good prospects for improving the surface properties of engine parts.However,further understanding is needed on the effect of working conditions on tribological behaviors.In this study,GLC and two types of DLC coatings were deposited on GCr15 substrate for investigation.The friction and wear properties of self-mated and steel-mated pairs were evaluated.Two temperatures(25 and 90℃),three lubrication conditions(base oil,molybdenum dithiocarbamate(MoDTC)-containing oil,MoDTC+zinc dialkyldithiophosphate(ZDDP)-containing oil),and high Hertz contact stress(2.41 GPa)were applied in the experiments.The results showed that high temperature promoted the effect of ZDDP on steel-mated pairs,but increased wear under base oil lubrication.The increased wear for steel-mated pairs lubricated by MoDTC-containing oil was due to abrasive wear probably caused by MoO_(3) andβ-FeMoO_(4).It was also found that in most cases,the tribological properties of self-mated pairs were better than those of steel-mated pairs. 展开更多
关键词 diamond-like carbon(DLC) graphite-like carbon(glc) mating pair temperature oil additives
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